TW200735722A - Static eliminator with fine electrode ion generating element - Google Patents

Static eliminator with fine electrode ion generating element

Info

Publication number
TW200735722A
TW200735722A TW095108784A TW95108784A TW200735722A TW 200735722 A TW200735722 A TW 200735722A TW 095108784 A TW095108784 A TW 095108784A TW 95108784 A TW95108784 A TW 95108784A TW 200735722 A TW200735722 A TW 200735722A
Authority
TW
Taiwan
Prior art keywords
ion generating
static eliminator
electrode
generating element
discharge electrode
Prior art date
Application number
TW095108784A
Other languages
Chinese (zh)
Inventor
Takafumi Seto
Makoto Hirasawa
Masaaki Tsuji
Akira Okuyama
Susumu Saito
Original Assignee
Nat Inst Of Advanced Ind Scien
Fisa Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nat Inst Of Advanced Ind Scien, Fisa Corp filed Critical Nat Inst Of Advanced Ind Scien
Publication of TW200735722A publication Critical patent/TW200735722A/en

Links

Landscapes

  • Elimination Of Static Electricity (AREA)

Abstract

To provide a static eliminator using an ion generating element adopting new highly efficient discharging method which enables generation of high density ion at low ozone density. The fine electrode ion generating element comprises: a discharge electrode which is formed toward a direction on a plane and has fine projections; an induction electrode; and a dielectric thin film between them. The static eliminator comprises at least one pair of the fine electrode ion generating elements for positive ions and for negative ions so that the plane including the discharge electrode is directed parallel to the direction of air current, and the arranging direction of the discharge electrode is perpendicular to the direction of air current. Ion balance of positive and negative ions at a position of downstream of the air current is controlled by adjusting voltage applied to the discharge electrode of the ion generating elements.
TW095108784A 2005-01-13 2006-03-15 Static eliminator with fine electrode ion generating element TW200735722A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2005006115A JP4691691B2 (en) 2005-01-13 2005-01-13 Static eliminator having a fine electrode ion generating element

Publications (1)

Publication Number Publication Date
TW200735722A true TW200735722A (en) 2007-09-16

Family

ID=36802196

Family Applications (1)

Application Number Title Priority Date Filing Date
TW095108784A TW200735722A (en) 2005-01-13 2006-03-15 Static eliminator with fine electrode ion generating element

Country Status (2)

Country Link
JP (1) JP4691691B2 (en)
TW (1) TW200735722A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110719680A (en) * 2018-07-11 2020-01-21 株式会社基恩士 Static eliminator

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4547506B2 (en) * 2005-11-24 2010-09-22 株式会社司測研 Aerosol charge neutralizer
JP5156993B2 (en) * 2007-02-09 2013-03-06 独立行政法人産業技術総合研究所 Ion generator and static eliminator
JP5098079B2 (en) * 2008-06-27 2012-12-12 国立大学法人山梨大学 Ionization analysis method and apparatus
JP5932592B2 (en) * 2011-12-05 2016-06-08 東京エレクトロン株式会社 Static elimination jig, substrate processing apparatus using the same, and static elimination method for substrate processing apparatus
CN104505713A (en) * 2014-10-28 2015-04-08 张义卿 Electrode material of mesh shaped titanium oxide film, manufacturing method thereof, and application thereof
JP6778624B2 (en) * 2017-01-31 2020-11-04 株式会社Ｓｃｒｅｅｎホールディングス Board processing equipment, board processing system and board processing method

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2794117B2 (en) * 1989-04-25 1998-09-03 増田 佳子 Static eliminator
JP2003249327A (en) * 2002-02-26 2003-09-05 Okabe Mica Co Ltd Ion generator
JP2004105517A (en) * 2002-09-19 2004-04-08 Sharp Corp Ion generating element, method for producing the same, ion generator, and electric appliance with the generator
JP4063784B2 (en) * 2003-05-15 2008-03-19 シャープ株式会社 Ion generator, ion generator

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110719680A (en) * 2018-07-11 2020-01-21 株式会社基恩士 Static eliminator
CN110719680B (en) * 2018-07-11 2024-04-23 株式会社基恩士 Electricity removing device

Also Published As

Publication number Publication date
JP2006196291A (en) 2006-07-27
JP4691691B2 (en) 2011-06-01

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