JP2006196291A5 - - Google Patents

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Publication number
JP2006196291A5
JP2006196291A5 JP2005006115A JP2005006115A JP2006196291A5 JP 2006196291 A5 JP2006196291 A5 JP 2006196291A5 JP 2005006115 A JP2005006115 A JP 2005006115A JP 2005006115 A JP2005006115 A JP 2005006115A JP 2006196291 A5 JP2006196291 A5 JP 2006196291A5
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JP
Japan
Prior art keywords
ion generating
generating element
electrode
positive
discharge
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Application number
JP2005006115A
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Japanese (ja)
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JP2006196291A (en
JP4691691B2 (en
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Priority to JP2005006115A priority Critical patent/JP4691691B2/en
Priority claimed from JP2005006115A external-priority patent/JP4691691B2/en
Priority to TW095108784A priority patent/TW200735722A/en
Publication of JP2006196291A publication Critical patent/JP2006196291A/en
Publication of JP2006196291A5 publication Critical patent/JP2006196291A5/ja
Application granted granted Critical
Publication of JP4691691B2 publication Critical patent/JP4691691B2/en
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Claims (2)

イオン発生素子から気体の放電によって発生した正イオンと負イオンを空気、窒素などの気流により搬送して、当該イオン発生素子から離れた位置に置かれた物体表面の静電気の除去を行う除電装置において、
当該イオン発生素子が、平面上に一方向に向けて配設されると共に微細な突起を有する放電電極と誘導電極とそれらに挟まれた薄い誘電体膜とを有している微細電極イオン発生素子であって、放電電極に印加する電圧が正のパルス状波形である正イオン発生用微細電極イオン発生素子と、放電電極に印加する電圧が負のパルス状波形である負イオン発生用微細電極イオン発生素子とを１組として構成されており、
当該正イオン発生用微細電極イオン発生素子と、負イオン発生用微細電極イオン発生素子とを１組とするイオン発生素子が、前記各放電電極を含む平面が気流の方向と平行であり、且つ該放電電極の配設方向が気流の方向と垂直になるように少なくとも１組以上配置されており、
当該イオン発生素子の放電電極に印加する電圧を調整する事で気流の下流側の位置における正負イオンのバランス制御が可能な構成であることを特徴とする除電装置。 In a static eliminator that transports positive ions and negative ions generated by gas discharge from an ion generating element by air current such as air or nitrogen, and removes static electricity from the surface of the object placed at a position away from the ion generating element. ,
A microelectrode ion generating element in which the ion generating element is disposed in one direction on a plane and has a discharge electrode having a fine protrusion, an induction electrode, and a thin dielectric film sandwiched between them A fine electrode ion generating element for generating positive ions whose voltage applied to the discharge electrode has a positive pulse waveform, and a fine electrode ion for generating negative ions whose voltage applied to the discharge electrode is a negative pulse waveform The generator element is configured as one set,
The ion generating element including the positive electrode generating fine electrode ion generating element and the negative ion generating fine electrode ion generating element as a set has a plane including the discharge electrodes parallel to the direction of the air flow, and At least one set is arranged so that the direction of arrangement of the discharge electrodes is perpendicular to the direction of the airflow,
A static eliminator having a configuration capable of controlling the balance between positive and negative ions at a position downstream of an air flow by adjusting a voltage applied to a discharge electrode of the ion generating element. 放電電極に印加する電圧が正のパルス状波形である正イオン発生用微細電極イオン発生素子と、放電電極に印加する電圧が負のパルス状波形である負イオン発生用微細電極イオン発生素子とを１組として構成されている２線タイプのイオン発生素子が、２組又はそれ以上の複数組配置されていることを特徴とする請求項１に記載の除電装置。 A fine electrode ion generating element for generating positive ions in which the voltage applied to the discharge electrode has a positive pulse waveform, and a fine electrode ion generating element for generating negative ions in which the voltage applied to the discharge electrode has a negative pulse waveform 2. The static eliminator according to claim 1, wherein two or more sets of two-wire type ion generating elements configured as one set are arranged .
JP2005006115A 2005-01-13 2005-01-13 Static eliminator having a fine electrode ion generating element Active JP4691691B2 (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2005006115A JP4691691B2 (en) 2005-01-13 2005-01-13 Static eliminator having a fine electrode ion generating element
TW095108784A TW200735722A (en) 2005-01-13 2006-03-15 Static eliminator with fine electrode ion generating element

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2005006115A JP4691691B2 (en) 2005-01-13 2005-01-13 Static eliminator having a fine electrode ion generating element

Publications (3)

Publication Number Publication Date
JP2006196291A JP2006196291A (en) 2006-07-27
JP2006196291A5 true JP2006196291A5 (en) 2006-09-07
JP4691691B2 JP4691691B2 (en) 2011-06-01

Family

ID=36802196

Family Applications (1)

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JP2005006115A Active JP4691691B2 (en) 2005-01-13 2005-01-13 Static eliminator having a fine electrode ion generating element

Country Status (2)

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JP (1) JP4691691B2 (en)
TW (1) TW200735722A (en)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4547506B2 (en) 2005-11-24 2010-09-22 株式会社司測研 Aerosol charge neutralizer
JP5156993B2 (en) * 2007-02-09 2013-03-06 独立行政法人産業技術総合研究所 Ion generator and static eliminator
WO2009157312A1 (en) * 2008-06-27 2009-12-30 国立大学法人山梨大学 Ionization analysis method and device
JP5932592B2 (en) * 2011-12-05 2016-06-08 東京エレクトロン株式会社 Static elimination jig, substrate processing apparatus using the same, and static elimination method for substrate processing apparatus
CN104505713A (en) * 2014-10-28 2015-04-08 张义卿 Electrode material of mesh shaped titanium oxide film, manufacturing method thereof, and application thereof
JP6778624B2 (en) * 2017-01-31 2020-11-04 株式会社Ｓｃｒｅｅｎホールディングス Board processing equipment, board processing system and board processing method
JP7161327B2 (en) * 2018-07-11 2022-10-26 株式会社キーエンス static eliminator

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2794117B2 (en) * 1989-04-25 1998-09-03 増田 佳子 Static eliminator
JP2003249327A (en) * 2002-02-26 2003-09-05 Okabe Mica Co Ltd Ion generator
JP2004105517A (en) * 2002-09-19 2004-04-08 Sharp Corp Ion generating element, method for producing the same, ion generator, and electric appliance with the generator
JP4063784B2 (en) * 2003-05-15 2008-03-19 シャープ株式会社 Ion generator, ion generator

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