JP4673714B2 - 光導波路型バイオケミカルセンサチップおよびその製造方法 - Google Patents

光導波路型バイオケミカルセンサチップおよびその製造方法 Download PDF

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Publication number
JP4673714B2
JP4673714B2 JP2005285586A JP2005285586A JP4673714B2 JP 4673714 B2 JP4673714 B2 JP 4673714B2 JP 2005285586 A JP2005285586 A JP 2005285586A JP 2005285586 A JP2005285586 A JP 2005285586A JP 4673714 B2 JP4673714 B2 JP 4673714B2
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optical waveguide
substrate
waveguide layer
sensor chip
light
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JP2005285586A
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Japanese (ja)
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JP2006208359A5 (enExample
JP2006208359A (ja
Inventor
一郎 東野
可容子 大宮
智裕 高瀬
育生 植松
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Toshiba Corp
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Toshiba Corp
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Priority to JP2005285586A priority Critical patent/JP4673714B2/ja
Priority to CN2006100549283A priority patent/CN1940529B/zh
Priority to CN2009102531080A priority patent/CN101726462B/zh
Priority to US11/393,771 priority patent/US7269308B2/en
Publication of JP2006208359A publication Critical patent/JP2006208359A/ja
Publication of JP2006208359A5 publication Critical patent/JP2006208359A5/ja
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JP2005285586A 2004-12-27 2005-09-29 光導波路型バイオケミカルセンサチップおよびその製造方法 Expired - Fee Related JP4673714B2 (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP2005285586A JP4673714B2 (ja) 2004-12-27 2005-09-29 光導波路型バイオケミカルセンサチップおよびその製造方法
CN2006100549283A CN1940529B (zh) 2005-09-29 2006-02-20 光波导型生物化学传感器芯片及其制造方法
CN2009102531080A CN101726462B (zh) 2005-09-29 2006-02-20 光波导型生物化学传感器芯片及其制造方法
US11/393,771 US7269308B2 (en) 2005-09-29 2006-03-31 Optical waveguide type biochemical sensor chip and method of manufacturing the same

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2004377006 2004-12-27
JP2005285586A JP4673714B2 (ja) 2004-12-27 2005-09-29 光導波路型バイオケミカルセンサチップおよびその製造方法

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JP2009087629A Division JP4823330B2 (ja) 2004-12-27 2009-03-31 光導波路型バイオケミカルセンサチップ及びその測定対象物の測定方法

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JP2006208359A JP2006208359A (ja) 2006-08-10
JP2006208359A5 JP2006208359A5 (enExample) 2009-06-04
JP4673714B2 true JP4673714B2 (ja) 2011-04-20

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Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5424610B2 (ja) * 2007-11-07 2014-02-26 株式会社東芝 光導波路型センサチップ、光導波路型センサチップの製造方法、物質の測定方法、物質測定用キットおよび光導波路型センサ
US20090124024A1 (en) 2007-11-07 2009-05-14 Shingo Kasai Optical-waveguide sensor chip, method of manufacturing the same, method of measuring substance, substance-measuring kit and optical-waveguide sensor
ES2939310T3 (es) * 2008-10-27 2023-04-20 Genalyte Inc Biosensores basados en sondeo y detección ópticos
JP5777277B2 (ja) * 2009-11-27 2015-09-09 株式会社東芝 光導波路型バイオケミカルセンサチップ
JP5268981B2 (ja) * 2010-03-24 2013-08-21 株式会社東芝 光学式センサ
JP5482360B2 (ja) * 2010-03-26 2014-05-07 沖電気工業株式会社 光学素子の製造方法
JP2012021936A (ja) 2010-07-16 2012-02-02 Toshiba Corp 光導波路型センサチップおよび光導波路型センサ
JP2017022200A (ja) 2015-07-08 2017-01-26 ソニーセミコンダクタソリューションズ株式会社 イメージセンサ、および電子機器
CN105823759A (zh) * 2016-06-15 2016-08-03 中国工程物理研究院材料研究所 一种基于绝缘体上硅光波导的表面等离子体共振传感器
EP3370058A1 (en) * 2017-03-01 2018-09-05 Danmarks Tekniske Universitet Planar waveguide device with nano-sized filter
US10929667B2 (en) * 2017-10-13 2021-02-23 Corning Incorporated Waveguide-based optical systems and methods for augmented reality systems
CN111135886A (zh) * 2020-01-17 2020-05-12 上海新微技术研发中心有限公司 光波导微流体芯片

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2924707B2 (ja) * 1995-04-13 1999-07-26 日本電気株式会社 光導波路型蛍光免疫センサとその製造方法
JPH08313430A (ja) * 1995-05-18 1996-11-29 Nippon Telegr & Teleph Corp <Ntt> ガスセンサ
JP3236199B2 (ja) * 1995-08-25 2001-12-10 日本電気株式会社 平面光導波路型バイオケミカルセンサ
JP3041408B2 (ja) * 1996-03-27 2000-05-15 工業技術院長 光学顕微鏡試料載置用基板、光学顕微鏡及びそれを用いた試料照明による観察方法
JPH10247751A (ja) * 1997-03-04 1998-09-14 Technova:Kk 加熱報知装置
JP3836394B2 (ja) * 2002-05-14 2006-10-25 株式会社東芝 光導波路型免疫センサ及び光導波路型免疫測定方法
JP3968425B2 (ja) * 2002-11-13 2007-08-29 独立行政法人産業技術総合研究所 光導波路への光導入方法及びそれを用いた光導波路分光測定装置
JP2004212188A (ja) * 2002-12-27 2004-07-29 Toshiba Corp 光導波路型グルコースセンサ及び発色試薬膜固定化方法
JP4076902B2 (ja) * 2003-05-06 2008-04-16 株式会社東芝 光学式バイオセンサ
JP2004361256A (ja) * 2003-06-05 2004-12-24 Aisin Seiki Co Ltd 表面プラズモン共鳴センサー及び表面プラズモン共鳴測定装置

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