JP4658453B2 - 流動性チップ、それを製造する方法及び使用する方法並びにその方法の実施に用いる装置 - Google Patents

流動性チップ、それを製造する方法及び使用する方法並びにその方法の実施に用いる装置 Download PDF

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JP4658453B2
JP4658453B2 JP2003035535A JP2003035535A JP4658453B2 JP 4658453 B2 JP4658453 B2 JP 4658453B2 JP 2003035535 A JP2003035535 A JP 2003035535A JP 2003035535 A JP2003035535 A JP 2003035535A JP 4658453 B2 JP4658453 B2 JP 4658453B2
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polycrystalline silicon
flowable
crucible
silicon
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JP2004161595A5 (enrdf_load_stackoverflow
JP2004161595A (ja
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アーヴィド・ニール・アーヴィドソン
テレンス・リー・ホーストマン
マイケル・ジョン・モルナー
クリス・ティム・シュミット
ロジャー・デイル・スペンサー・ジュニア
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Hemlock Semiconductor Operations LLC
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Hemlock Semiconductor Corp
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JP2003035535A 2002-11-14 2003-02-13 流動性チップ、それを製造する方法及び使用する方法並びにその方法の実施に用いる装置 Expired - Lifetime JP4658453B2 (ja)

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US10/298,129 US8021483B2 (en) 2002-02-20 2002-11-14 Flowable chips and methods for the preparation and use of same, and apparatus for use in the methods

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JP2009128250A Division JP2009184922A (ja) 2002-11-14 2009-05-27 流動性チップ及びそれを使用する方法

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JP2004161595A JP2004161595A (ja) 2004-06-10
JP2004161595A5 JP2004161595A5 (enrdf_load_stackoverflow) 2006-03-30
JP4658453B2 true JP4658453B2 (ja) 2011-03-23

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JP2009128250A Pending JP2009184922A (ja) 2002-11-14 2009-05-27 流動性チップ及びそれを使用する方法
JP2013247827A Pending JP2014058447A (ja) 2002-11-14 2013-11-29 流動性チップ及びそれを使用する方法

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JP6420640B2 (ja) * 2014-11-27 2018-11-07 株式会社トクヤマ 多結晶シリコン塊破砕装置、多結晶シリコン破砕物の製造方法及び多結晶シリコン破砕物
JP6058610B2 (ja) * 2014-10-14 2017-01-11 株式会社トクヤマ 多結晶シリコン破砕物、多結晶シリコン破砕物の製造方法および多結晶シリコン塊破砕装置
CN106794992B (zh) * 2014-10-14 2018-07-06 株式会社德山 多晶硅破碎物、其制造方法及多晶硅块破碎装置
JP2016147781A (ja) * 2015-02-12 2016-08-18 信越半導体株式会社 シリコン単結晶の製造方法
EP4538429A1 (en) * 2015-08-20 2025-04-16 GlobalWafers Co., Ltd. Systems for selectively feeding chunk polysilicon or granular polysilicon in a crystal growth chamber
JP6569485B2 (ja) * 2015-11-09 2019-09-04 株式会社Sumco 原料のリチャージ又は単結晶引上げに用いられる蓋付容器
JP6376249B1 (ja) * 2017-06-06 2018-08-22 株式会社Sumco 選別装置、選別装置の製造方法およびシリコン単結晶インゴットの製造方法
CN109945654B (zh) * 2017-12-21 2024-05-31 有研工程技术研究院有限公司 电子束熔炼炉拖锭装置
KR102752583B1 (ko) * 2020-03-13 2025-01-10 에스케이실트론 주식회사 단결정 성장용 원료공급장치
CN117695973B (zh) * 2024-02-06 2024-04-30 通威微电子有限公司 碳化硅粉料合成装置

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JP2009184922A (ja) 2009-08-20
JP2004161595A (ja) 2004-06-10

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