JP4646520B2 - ３次元形状測定方法及び装置 - Google Patents

３次元形状測定方法及び装置 Download PDF

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Publication number
JP4646520B2
JP4646520B2 JP2004004372A JP2004004372A JP4646520B2 JP 4646520 B2 JP4646520 B2 JP 4646520B2 JP 2004004372 A JP2004004372 A JP 2004004372A JP 2004004372 A JP2004004372 A JP 2004004372A JP 4646520 B2 JP4646520 B2 JP 4646520B2
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probe
measurement
measured
stage
measurement data
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Japanese (ja)
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JP2005195545A (ja
JP2005195545A5 (enExample
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直 伊藤
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Olympus Corp
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Olympus Corp
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  • Length Measuring Devices With Unspecified Measuring Means (AREA)
JP2004004372A 2004-01-09 2004-01-09 ３次元形状測定方法及び装置 Expired - Fee Related JP4646520B2 (ja)

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JP2004004372A JP4646520B2 (ja) 2004-01-09 2004-01-09 ３次元形状測定方法及び装置

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JP2004004372A JP4646520B2 (ja) 2004-01-09 2004-01-09 ３次元形状測定方法及び装置

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JP2005195545A JP2005195545A (ja) 2005-07-21
JP2005195545A5 JP2005195545A5 (enExample) 2007-02-22
JP4646520B2 true JP4646520B2 (ja) 2011-03-09

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Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4260180B2 (ja) 2006-11-02 2009-04-30 パナソニック株式会社 三次元形状測定装置及び三次元形状測定装置用プローブ
JP2015040785A (ja) 2013-08-22 2015-03-02 株式会社東芝 走査型プローブ顕微鏡
US9835449B2 (en) 2015-08-26 2017-12-05 Industrial Technology Research Institute Surface measuring device and method thereof
JP2017072583A (ja) * 2015-08-26 2017-04-13 財團法人工業技術研究院Ｉｎｄｕｓｔｒｉａｌ Ｔｅｃｈｎｏｌｏｇｙ Ｒｅｓｅａｒｃｈ Ｉｎｓｔｉｔｕｔｅ 表面測定装置及びその方法
US9970754B2 (en) 2015-08-26 2018-05-15 Industrial Technology Research Institute Surface measurement device and method thereof
CN107322930B (zh) * 2017-08-03 2019-08-23 陕西恒通智能机器有限公司 一种具有检测现有工件功能的3d打印机
JP7068849B2 (ja) * 2018-02-19 2022-05-17 株式会社東京精密 研削装置
CN110006379B (zh) * 2019-01-16 2021-08-06 苏州罗伊艾米精密工业有限公司 一种结构检测系统

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55133551A (en) * 1979-04-06 1980-10-17 Hitachi Ltd Device for driving circular face plate
JPH0581623U (ja) * 1992-04-08 1993-11-05 エヌオーケー株式会社 密封性検査装置
JP2002333311A (ja) * 2001-05-10 2002-11-22 Matsushita Electric Ind Co Ltd 形状測定装置及び方法

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