JP4614503B2 - 感光性ポリイミド前駆体の製造方法 - Google Patents

感光性ポリイミド前駆体の製造方法 Download PDF

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Publication number
JP4614503B2
JP4614503B2 JP2000186051A JP2000186051A JP4614503B2 JP 4614503 B2 JP4614503 B2 JP 4614503B2 JP 2000186051 A JP2000186051 A JP 2000186051A JP 2000186051 A JP2000186051 A JP 2000186051A JP 4614503 B2 JP4614503 B2 JP 4614503B2
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Japan
Prior art keywords
dianhydride
diamine
acid
stage
polyimide precursor
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Expired - Fee Related
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JP2000186051A
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English (en)
Japanese (ja)
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JP2002003602A (ja
JP2002003602A5 (enExample
Inventor
隆一郎 金谷
正志 木村
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Asahi Kasei Corp
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Asahi Kasei E Materials Corp
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Priority to JP2000186051A priority Critical patent/JP4614503B2/ja
Publication of JP2002003602A publication Critical patent/JP2002003602A/ja
Publication of JP2002003602A5 publication Critical patent/JP2002003602A5/ja
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  • Macromonomer-Based Addition Polymer (AREA)
  • Materials For Photolithography (AREA)
  • Polymerisation Methods In General (AREA)
  • Macromolecular Compounds Obtained By Forming Nitrogen-Containing Linkages In General (AREA)
JP2000186051A 2000-06-21 2000-06-21 感光性ポリイミド前駆体の製造方法 Expired - Fee Related JP4614503B2 (ja)

Priority Applications (1)

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JP2000186051A JP4614503B2 (ja) 2000-06-21 2000-06-21 感光性ポリイミド前駆体の製造方法

Applications Claiming Priority (1)

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JP2000186051A JP4614503B2 (ja) 2000-06-21 2000-06-21 感光性ポリイミド前駆体の製造方法

Publications (3)

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JP2002003602A JP2002003602A (ja) 2002-01-09
JP2002003602A5 JP2002003602A5 (enExample) 2007-08-02
JP4614503B2 true JP4614503B2 (ja) 2011-01-19

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ID=18686285

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JP2000186051A Expired - Fee Related JP4614503B2 (ja) 2000-06-21 2000-06-21 感光性ポリイミド前駆体の製造方法

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JP (1) JP4614503B2 (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR102550865B1 (ko) * 2022-11-28 2023-07-04 주식회사 피엔에스테크놀로지 폴리아믹산에스테르와 이의 제조방법 및 상기 폴리아믹산에스테르를 포함하는 감광성 수지 조성물.

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007016182A (ja) * 2005-07-11 2007-01-25 Ube Ind Ltd ポリイミドの製造方法
JP4761989B2 (ja) * 2006-02-02 2011-08-31 旭化成イーマテリアルズ株式会社 ポリアミド酸エステル組成物
JP4789657B2 (ja) * 2006-03-13 2011-10-12 旭化成イーマテリアルズ株式会社 感光性樹脂組成物
TWI382041B (zh) * 2008-12-31 2013-01-11 Eternal Chemical Co Ltd 聚醯亞胺之前驅物組合物及其應用
KR102229738B1 (ko) * 2015-08-21 2021-03-18 아사히 가세이 가부시키가이샤 감광성 수지 조성물, 폴리이미드의 제조 방법 및 반도체 장치
JP6745344B2 (ja) * 2016-08-31 2020-08-26 富士フイルム株式会社 パターン形成方法、積層体の製造方法および電子デバイスの製造方法
JP7131133B2 (ja) * 2018-07-02 2022-09-06 東レ株式会社 樹脂組成物
CN114524938B (zh) * 2021-10-28 2024-02-09 江苏三月科技股份有限公司 一种聚合物、感光树脂组合物及其制备的固化膜与电子元件

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3411660A1 (de) * 1984-03-29 1985-10-03 Siemens AG, 1000 Berlin und 8000 München Verfahren zur herstellung von polyimid- und polyisoindolochinazolindion-vorstufen
JPH0495962A (ja) * 1990-08-08 1992-03-27 Sumitomo Bakelite Co Ltd 感光性樹脂組成物
JPH0680776A (ja) * 1992-09-02 1994-03-22 Asahi Chem Ind Co Ltd ポリイミド前駆体及び組成物
JPH112898A (ja) * 1997-06-11 1999-01-06 Mitsui Chem Inc 感光性樹脂組成物

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR102550865B1 (ko) * 2022-11-28 2023-07-04 주식회사 피엔에스테크놀로지 폴리아믹산에스테르와 이의 제조방법 및 상기 폴리아믹산에스테르를 포함하는 감광성 수지 조성물.

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JP2002003602A (ja) 2002-01-09

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