JP4605736B2 - マイクロメカニズムの回転レートセンサー - Google Patents

マイクロメカニズムの回転レートセンサー Download PDF

Info

Publication number
JP4605736B2
JP4605736B2 JP2001527175A JP2001527175A JP4605736B2 JP 4605736 B2 JP4605736 B2 JP 4605736B2 JP 2001527175 A JP2001527175 A JP 2001527175A JP 2001527175 A JP2001527175 A JP 2001527175A JP 4605736 B2 JP4605736 B2 JP 4605736B2
Authority
JP
Japan
Prior art keywords
substrate
rate sensor
bridge
rotation rate
shaped
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP2001527175A
Other languages
English (en)
Japanese (ja)
Other versions
JP2003510591A5 (enExample
JP2003510591A (ja
Inventor
ハウアー イェルク
フェーレンバッハ ミヒャエル
フンク カールステン
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Robert Bosch GmbH
Original Assignee
Robert Bosch GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Robert Bosch GmbH filed Critical Robert Bosch GmbH
Publication of JP2003510591A publication Critical patent/JP2003510591A/ja
Publication of JP2003510591A5 publication Critical patent/JP2003510591A5/ja
Application granted granted Critical
Publication of JP4605736B2 publication Critical patent/JP4605736B2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Images

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5705—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using masses driven in reciprocating rotary motion about an axis
    • G01C19/5712—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using masses driven in reciprocating rotary motion about an axis the devices involving a micromechanical structure

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Gyroscopes (AREA)
  • Micromachines (AREA)
JP2001527175A 1999-09-24 2000-08-26 マイクロメカニズムの回転レートセンサー Expired - Lifetime JP4605736B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE19945859A DE19945859A1 (de) 1999-09-24 1999-09-24 Mikromechanischer Drehratensensor
DE19945859.6 1999-09-24
PCT/DE2000/002931 WO2001023837A1 (de) 1999-09-24 2000-08-26 Mikromechanischer drehratensensor

Publications (3)

Publication Number Publication Date
JP2003510591A JP2003510591A (ja) 2003-03-18
JP2003510591A5 JP2003510591A5 (enExample) 2007-07-26
JP4605736B2 true JP4605736B2 (ja) 2011-01-05

Family

ID=7923206

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2001527175A Expired - Lifetime JP4605736B2 (ja) 1999-09-24 2000-08-26 マイクロメカニズムの回転レートセンサー

Country Status (5)

Country Link
US (1) US6776041B1 (enExample)
EP (1) EP1218693B1 (enExample)
JP (1) JP4605736B2 (enExample)
DE (2) DE19945859A1 (enExample)
WO (1) WO2001023837A1 (enExample)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6715352B2 (en) * 2001-06-26 2004-04-06 Microsensors, Inc. Method of designing a flexure system for tuning the modal response of a decoupled micromachined gyroscope and a gyroscoped designed according to the method
DE10238893A1 (de) * 2002-08-24 2004-03-04 Robert Bosch Gmbh Drehratensensor
DE102005032863A1 (de) * 2005-07-11 2007-01-18 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Mikroaktuator
WO2007125961A1 (ja) 2006-04-28 2007-11-08 Panasonic Electric Works Co., Ltd. 静電容量式センサ
JP4600344B2 (ja) * 2006-04-28 2010-12-15 パナソニック電工株式会社 静電容量式センサ
DE102007035806B4 (de) * 2007-07-31 2011-03-17 Sensordynamics Ag Mikromechanischer Drehratensensor
DE102007057044B4 (de) 2007-09-10 2021-08-05 Continental Teves Ag & Co. Ohg Mikromechanische Feder
WO2012004825A1 (ja) * 2010-07-05 2012-01-12 パイオニア株式会社 回転振動型ジャイロ
US9932852B2 (en) 2011-08-08 2018-04-03 General Electric Company Sensor assembly for rotating devices and methods for fabricating
JP2021067624A (ja) * 2019-10-28 2021-04-30 セイコーエプソン株式会社 慣性計測装置、電子機器及び移動体

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5650568A (en) * 1993-02-10 1997-07-22 The Charles Stark Draper Laboratory, Inc. Gimballed vibrating wheel gyroscope having strain relief features
DE19523895A1 (de) * 1995-06-30 1997-01-02 Bosch Gmbh Robert Beschleunigungssensor
GB2318184B (en) * 1996-10-08 2000-07-05 British Aerospace A rate sensor
US5955668A (en) * 1997-01-28 1999-09-21 Irvine Sensors Corporation Multi-element micro gyro
DE19746127C1 (de) * 1997-10-18 1999-05-12 Bodenseewerk Geraetetech Sensor zur Messung von Drehraten und Verfahren zu seiner Herstellung

Also Published As

Publication number Publication date
US6776041B1 (en) 2004-08-17
WO2001023837A1 (de) 2001-04-05
DE50008537D1 (de) 2004-12-09
EP1218693B1 (de) 2004-11-03
JP2003510591A (ja) 2003-03-18
EP1218693A1 (de) 2002-07-03
DE19945859A1 (de) 2001-03-29

Similar Documents

Publication Publication Date Title
Weinberg et al. Error sources in in-plane silicon tuning-fork MEMS gyroscopes
US6513380B2 (en) MEMS sensor with single central anchor and motion-limiting connection geometry
KR101105059B1 (ko) 수직으로 집적화된 일렉트로닉스 및 웨이퍼 스케일 밀봉패키징을 갖는 ｘ―ｙ축 듀얼 매스 튜닝 포크자이로스코프를 제조 방법
JP5261371B2 (ja) 容量式バルク超音波ディスク・ジャイロスコープ
JP4620364B2 (ja) 駆動および感知プレートを有する分離された共振子ジャイロスコープ
US7210347B2 (en) Micromachined inertial sensor for measuring rotational movements
US6487907B1 (en) Microgyroscope with integrated vibratory element
JP6514790B2 (ja) ジャイロスコープ
JP2006053152A (ja) 振動数検出を用いたマイクロジャイロメーター
JPS62185118A (ja) 振動型デイジタル積分加速度計
GB2249174A (en) Rate of rotation sensor
JPH10177033A (ja) 加速度測定装置
JP4605736B2 (ja) マイクロメカニズムの回転レートセンサー
WO2001001153A1 (en) Z-axis vibratory gyroscope
WO2005029000A2 (en) Isolated resonator gyroscope with compact flexures
JP4698221B2 (ja) 内部径方向検知およびアクチュエーションを備える分離型平面ジャイロスコープ
US6955084B2 (en) Isolated resonator gyroscope with compact flexures
JPH0783667A (ja) 角速度センサ
JP3553418B2 (ja) 振動型ジャイロスコープ、振動型ジャイロスコープの形成方法および調整方法
CN113196009B (zh) 感测设备
JP2004506883A (ja) マイクロメカニカル回転速度センサおよびその製造方法
JP3257203B2 (ja) 角速度検出素子の振動数調整方法と角速度検出素子
JP3767943B2 (ja) ２軸振動構造物の固有振動数の調整方法
US20240053147A1 (en) Vibrating gyrometer with planar structure
JP2023008854A (ja) ２つのシーソーを有する加速度計

Legal Events

Date Code Title Description
A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20070605

A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20070605

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20100610

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20100809

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20100903

A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20101004

R150 Certificate of patent or registration of utility model

Ref document number: 4605736

Country of ref document: JP

Free format text: JAPANESE INTERMEDIATE CODE: R150

Free format text: JAPANESE INTERMEDIATE CODE: R150

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20131015

Year of fee payment: 3

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

EXPY Cancellation because of completion of term