DE19945859A1 - Mikromechanischer Drehratensensor - Google Patents
Mikromechanischer DrehratensensorInfo
- Publication number
- DE19945859A1 DE19945859A1 DE19945859A DE19945859A DE19945859A1 DE 19945859 A1 DE19945859 A1 DE 19945859A1 DE 19945859 A DE19945859 A DE 19945859A DE 19945859 A DE19945859 A DE 19945859A DE 19945859 A1 DE19945859 A1 DE 19945859A1
- Authority
- DE
- Germany
- Prior art keywords
- bridge
- rate sensor
- substrate
- rotation rate
- shaped
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
- 239000000758 substrate Substances 0.000 claims abstract description 26
- 238000004873 anchoring Methods 0.000 claims abstract description 15
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 5
- 229910052710 silicon Inorganic materials 0.000 claims description 4
- 239000010703 silicon Substances 0.000 claims description 4
- 238000005516 engineering process Methods 0.000 claims description 2
- 238000005452 bending Methods 0.000 abstract description 9
- 238000011161 development Methods 0.000 description 9
- 230000018109 developmental process Effects 0.000 description 9
- 238000004519 manufacturing process Methods 0.000 description 4
- 230000035945 sensitivity Effects 0.000 description 4
- 101100346656 Drosophila melanogaster strat gene Proteins 0.000 description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 229910052814 silicon oxide Inorganic materials 0.000 description 3
- 230000000295 complement effect Effects 0.000 description 2
- 230000036039 immunity Effects 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- 238000005459 micromachining Methods 0.000 description 2
- 235000010678 Paulownia tomentosa Nutrition 0.000 description 1
- 240000002834 Paulownia tomentosa Species 0.000 description 1
- 230000001133 acceleration Effects 0.000 description 1
- 238000013459 approach Methods 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 238000007667 floating Methods 0.000 description 1
- 238000010327 methods by industry Methods 0.000 description 1
- 238000004806 packaging method and process Methods 0.000 description 1
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 1
- 229920005591 polysilicon Polymers 0.000 description 1
- 108090000623 proteins and genes Proteins 0.000 description 1
- 241000894007 species Species 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
- G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
- G01C19/5705—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using masses driven in reciprocating rotary motion about an axis
- G01C19/5712—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using masses driven in reciprocating rotary motion about an axis the devices involving a micromechanical structure
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- General Physics & Mathematics (AREA)
- Radar, Positioning & Navigation (AREA)
- Remote Sensing (AREA)
- Gyroscopes (AREA)
- Micromachines (AREA)
Priority Applications (6)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE19945859A DE19945859A1 (de) | 1999-09-24 | 1999-09-24 | Mikromechanischer Drehratensensor |
| PCT/DE2000/002931 WO2001023837A1 (de) | 1999-09-24 | 2000-08-26 | Mikromechanischer drehratensensor |
| DE50008537T DE50008537D1 (de) | 1999-09-24 | 2000-08-26 | Mikromechanischer drehratensensor |
| EP00971236A EP1218693B1 (de) | 1999-09-24 | 2000-08-26 | Mikromechanischer drehratensensor |
| JP2001527175A JP4605736B2 (ja) | 1999-09-24 | 2000-08-26 | マイクロメカニズムの回転レートセンサー |
| US10/089,018 US6776041B1 (en) | 1999-09-24 | 2000-08-26 | Micromechanical rotation rate sensor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE19945859A DE19945859A1 (de) | 1999-09-24 | 1999-09-24 | Mikromechanischer Drehratensensor |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| DE19945859A1 true DE19945859A1 (de) | 2001-03-29 |
Family
ID=7923206
Family Applications (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE19945859A Withdrawn DE19945859A1 (de) | 1999-09-24 | 1999-09-24 | Mikromechanischer Drehratensensor |
| DE50008537T Expired - Lifetime DE50008537D1 (de) | 1999-09-24 | 2000-08-26 | Mikromechanischer drehratensensor |
Family Applications After (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE50008537T Expired - Lifetime DE50008537D1 (de) | 1999-09-24 | 2000-08-26 | Mikromechanischer drehratensensor |
Country Status (5)
| Country | Link |
|---|---|
| US (1) | US6776041B1 (enExample) |
| EP (1) | EP1218693B1 (enExample) |
| JP (1) | JP4605736B2 (enExample) |
| DE (2) | DE19945859A1 (enExample) |
| WO (1) | WO2001023837A1 (enExample) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2004020947A1 (de) * | 2002-08-24 | 2004-03-11 | Robert Bosch Gmbh | Drehratensensor |
| DE102005032863A1 (de) * | 2005-07-11 | 2007-01-18 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Mikroaktuator |
| DE102007057044A1 (de) * | 2007-09-10 | 2009-03-12 | Continental Teves Ag & Co. Ohg | Mikromechanische Feder |
| EP1407279A4 (en) * | 2001-06-26 | 2009-11-11 | Aprolase Dev Co Llc | METHOD FOR THE DESIGN OF A BENDING SYSTEM FOR ACHIEVING THE MODES OF CONTINUATION OF A DECOUPLED MICROWORKED CIRCLE AND A CIRCLE DESIGNED IN ACCORDANCE WITH THE METHOD |
Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2007125961A1 (ja) | 2006-04-28 | 2007-11-08 | Panasonic Electric Works Co., Ltd. | 静電容量式センサ |
| JP4600344B2 (ja) * | 2006-04-28 | 2010-12-15 | パナソニック電工株式会社 | 静電容量式センサ |
| DE102007035806B4 (de) * | 2007-07-31 | 2011-03-17 | Sensordynamics Ag | Mikromechanischer Drehratensensor |
| WO2012004825A1 (ja) * | 2010-07-05 | 2012-01-12 | パイオニア株式会社 | 回転振動型ジャイロ |
| US9932852B2 (en) | 2011-08-08 | 2018-04-03 | General Electric Company | Sensor assembly for rotating devices and methods for fabricating |
| JP2021067624A (ja) * | 2019-10-28 | 2021-04-30 | セイコーエプソン株式会社 | 慣性計測装置、電子機器及び移動体 |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5650568A (en) * | 1993-02-10 | 1997-07-22 | The Charles Stark Draper Laboratory, Inc. | Gimballed vibrating wheel gyroscope having strain relief features |
| DE19523895A1 (de) * | 1995-06-30 | 1997-01-02 | Bosch Gmbh Robert | Beschleunigungssensor |
| GB2318184B (en) * | 1996-10-08 | 2000-07-05 | British Aerospace | A rate sensor |
| US5955668A (en) * | 1997-01-28 | 1999-09-21 | Irvine Sensors Corporation | Multi-element micro gyro |
| DE19746127C1 (de) * | 1997-10-18 | 1999-05-12 | Bodenseewerk Geraetetech | Sensor zur Messung von Drehraten und Verfahren zu seiner Herstellung |
-
1999
- 1999-09-24 DE DE19945859A patent/DE19945859A1/de not_active Withdrawn
-
2000
- 2000-08-26 WO PCT/DE2000/002931 patent/WO2001023837A1/de not_active Ceased
- 2000-08-26 EP EP00971236A patent/EP1218693B1/de not_active Expired - Lifetime
- 2000-08-26 DE DE50008537T patent/DE50008537D1/de not_active Expired - Lifetime
- 2000-08-26 US US10/089,018 patent/US6776041B1/en not_active Expired - Lifetime
- 2000-08-26 JP JP2001527175A patent/JP4605736B2/ja not_active Expired - Lifetime
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP1407279A4 (en) * | 2001-06-26 | 2009-11-11 | Aprolase Dev Co Llc | METHOD FOR THE DESIGN OF A BENDING SYSTEM FOR ACHIEVING THE MODES OF CONTINUATION OF A DECOUPLED MICROWORKED CIRCLE AND A CIRCLE DESIGNED IN ACCORDANCE WITH THE METHOD |
| WO2004020947A1 (de) * | 2002-08-24 | 2004-03-11 | Robert Bosch Gmbh | Drehratensensor |
| DE102005032863A1 (de) * | 2005-07-11 | 2007-01-18 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Mikroaktuator |
| DE102007057044A1 (de) * | 2007-09-10 | 2009-03-12 | Continental Teves Ag & Co. Ohg | Mikromechanische Feder |
| US9920808B2 (en) | 2007-09-10 | 2018-03-20 | Continental Teves Ag & Co. Ohg | Micromechanical spring |
| DE102007057044B4 (de) | 2007-09-10 | 2021-08-05 | Continental Teves Ag & Co. Ohg | Mikromechanische Feder |
Also Published As
| Publication number | Publication date |
|---|---|
| US6776041B1 (en) | 2004-08-17 |
| JP4605736B2 (ja) | 2011-01-05 |
| WO2001023837A1 (de) | 2001-04-05 |
| DE50008537D1 (de) | 2004-12-09 |
| EP1218693B1 (de) | 2004-11-03 |
| JP2003510591A (ja) | 2003-03-18 |
| EP1218693A1 (de) | 2002-07-03 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| 8141 | Disposal/no request for examination |