JP4599503B2 - 光起電力モジュールの大量製造装置および方法 - Google Patents
光起電力モジュールの大量製造装置および方法 Download PDFInfo
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- JP4599503B2 JP4599503B2 JP2001160953A JP2001160953A JP4599503B2 JP 4599503 B2 JP4599503 B2 JP 4599503B2 JP 2001160953 A JP2001160953 A JP 2001160953A JP 2001160953 A JP2001160953 A JP 2001160953A JP 4599503 B2 JP4599503 B2 JP 4599503B2
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
- H10F71/00—Manufacture or treatment of devices covered by this subclass
- H10F71/125—The active layers comprising only Group II-VI materials, e.g. CdS, ZnS or CdTe
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy
- Y02E10/543—Solar cells from Group II-VI materials
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- Photovoltaic Devices (AREA)
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
- Physical Vapour Deposition (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US09/583,381 | 2000-05-30 | ||
| US09/583,381 US6423565B1 (en) | 2000-05-30 | 2000-05-30 | Apparatus and processes for the massproduction of photovotaic modules |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2010010341A Division JP2010141343A (ja) | 2000-05-30 | 2010-01-20 | 光起電力モジュールの大量製造装置および方法 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2002064215A JP2002064215A (ja) | 2002-02-28 |
| JP2002064215A5 JP2002064215A5 (enExample) | 2006-04-27 |
| JP4599503B2 true JP4599503B2 (ja) | 2010-12-15 |
Family
ID=24332883
Family Applications (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2001160953A Expired - Fee Related JP4599503B2 (ja) | 2000-05-30 | 2001-05-29 | 光起電力モジュールの大量製造装置および方法 |
| JP2010010341A Pending JP2010141343A (ja) | 2000-05-30 | 2010-01-20 | 光起電力モジュールの大量製造装置および方法 |
Family Applications After (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2010010341A Pending JP2010141343A (ja) | 2000-05-30 | 2010-01-20 | 光起電力モジュールの大量製造装置および方法 |
Country Status (3)
| Country | Link |
|---|---|
| US (3) | US6423565B1 (enExample) |
| EP (1) | EP1160880B1 (enExample) |
| JP (2) | JP4599503B2 (enExample) |
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- 2001-05-30 EP EP01304749A patent/EP1160880B1/en not_active Expired - Lifetime
-
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- 2002-07-22 US US10/200,265 patent/US20030129810A1/en not_active Abandoned
-
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-
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Also Published As
| Publication number | Publication date |
|---|---|
| EP1160880B1 (en) | 2012-07-11 |
| US20050158891A1 (en) | 2005-07-21 |
| EP1160880A3 (en) | 2005-12-07 |
| US6423565B1 (en) | 2002-07-23 |
| US20030129810A1 (en) | 2003-07-10 |
| JP2010141343A (ja) | 2010-06-24 |
| JP2002064215A (ja) | 2002-02-28 |
| EP1160880A2 (en) | 2001-12-05 |
| US7220321B2 (en) | 2007-05-22 |
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