JP4576058B2 - 変位検出機能を備えた可変形状鏡 - Google Patents

変位検出機能を備えた可変形状鏡 Download PDF

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Publication number
JP4576058B2
JP4576058B2 JP2001023187A JP2001023187A JP4576058B2 JP 4576058 B2 JP4576058 B2 JP 4576058B2 JP 2001023187 A JP2001023187 A JP 2001023187A JP 2001023187 A JP2001023187 A JP 2001023187A JP 4576058 B2 JP4576058 B2 JP 4576058B2
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JP
Japan
Prior art keywords
electrode
liquid crystal
voltage
deformable mirror
lens
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP2001023187A
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English (en)
Japanese (ja)
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JP2002228813A (ja
JP2002228813A5 (enExample
Inventor
隆之 井出
新二 金子
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Olympus Corp
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Olympus Corp
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Publication date
Application filed by Olympus Corp filed Critical Olympus Corp
Priority to JP2001023187A priority Critical patent/JP4576058B2/ja
Priority to US09/961,409 priority patent/US7190500B2/en
Publication of JP2002228813A publication Critical patent/JP2002228813A/ja
Publication of JP2002228813A5 publication Critical patent/JP2002228813A5/ja
Application granted granted Critical
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Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
    • G02B7/28—Systems for automatic generation of focusing signals
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
    • G01B7/28—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring contours or curvatures
    • G01B7/287—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring contours or curvatures using a plurality of fixed, simultaneously operating transducers
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/0841—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting element being moved or deformed by electrostatic means
    • G—PHYSICS
    • G02—OPTICS
    • G02C—SPECTACLES; SUNGLASSES OR GOGGLES INSOFAR AS THEY HAVE THE SAME FEATURES AS SPECTACLES; CONTACT LENSES
    • G02C7/00—Optical parts
    • G02C7/02—Lenses; Lens systems ; Methods of designing lenses
    • G02C7/08—Auxiliary lenses; Arrangements for varying focal length
    • G02C7/081—Ophthalmic lenses with variable focal length
    • G02C7/083—Electrooptic lenses
    • G—PHYSICS
    • G02—OPTICS
    • G02C—SPECTACLES; SUNGLASSES OR GOGGLES INSOFAR AS THEY HAVE THE SAME FEATURES AS SPECTACLES; CONTACT LENSES
    • G02C7/00—Optical parts
    • G02C7/10—Filters, e.g. for facilitating adaptation of the eyes to the dark; Sunglasses
    • G02C7/101—Filters, e.g. for facilitating adaptation of the eyes to the dark; Sunglasses having an electro-optical light valve

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Health & Medical Sciences (AREA)
  • Ophthalmology & Optometry (AREA)
  • General Health & Medical Sciences (AREA)
  • Optical Elements Other Than Lenses (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
JP2001023187A 2001-01-31 2001-01-31 変位検出機能を備えた可変形状鏡 Expired - Fee Related JP4576058B2 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2001023187A JP4576058B2 (ja) 2001-01-31 2001-01-31 変位検出機能を備えた可変形状鏡
US09/961,409 US7190500B2 (en) 2001-01-31 2001-09-25 Deformable mirror having displacement detecting function

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2001023187A JP4576058B2 (ja) 2001-01-31 2001-01-31 変位検出機能を備えた可変形状鏡

Publications (3)

Publication Number Publication Date
JP2002228813A JP2002228813A (ja) 2002-08-14
JP2002228813A5 JP2002228813A5 (enExample) 2008-03-06
JP4576058B2 true JP4576058B2 (ja) 2010-11-04

Family

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Family Applications (1)

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JP2001023187A Expired - Fee Related JP4576058B2 (ja) 2001-01-31 2001-01-31 変位検出機能を備えた可変形状鏡

Country Status (2)

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US (1) US7190500B2 (enExample)
JP (1) JP4576058B2 (enExample)

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US6618209B2 (en) * 2000-08-08 2003-09-09 Olympus Optical Co., Ltd. Optical apparatus
JP2003151328A (ja) * 2001-11-15 2003-05-23 Du Pont Toray Co Ltd 照明用反射装置
JP2004247947A (ja) * 2003-02-13 2004-09-02 Olympus Corp 光学装置
WO2005024809A2 (en) * 2003-09-04 2005-03-17 Matsushita Electric Industrial Co., Ltd. Optical pick-up aberration correcting mirror, aberration correcting method and optical pick-up
US7109642B2 (en) * 2003-11-29 2006-09-19 Walter Guy Scott Composite piezoelectric apparatus and method
US7131740B2 (en) * 2004-03-17 2006-11-07 Olympus Corporation Optical system and optical apparatus provided with the same
US20050230605A1 (en) * 2004-04-20 2005-10-20 Hamid Pishdadian Method of measuring using a binary optical sensor
US20090054255A1 (en) * 2004-07-01 2009-02-26 The Regents Of The University Of California Microfluidic devices and methods
KR100657002B1 (ko) * 2005-04-08 2006-12-20 엘지전자 주식회사 전자력 구동 가변 초점 미러 및 그 제조방법과 구동 방법
JPWO2007023940A1 (ja) * 2005-08-26 2009-03-26 パナソニック株式会社 アクチュエータ、光ヘッド装置および光情報装置
JP2007103657A (ja) * 2005-10-04 2007-04-19 Canon Inc 光学素子保持装置、露光装置およびデバイス製造方法
JP4756642B2 (ja) * 2006-03-16 2011-08-24 オリンパス株式会社 可変形状鏡
JP2008261951A (ja) * 2007-04-10 2008-10-30 Olympus Corp 可変形状鏡
US8054531B2 (en) * 2007-06-26 2011-11-08 Hewlett-Packard Development Company, L.P. Micro-electro-mechanical systems and photonic interconnects employing the same
JP2009205004A (ja) * 2008-02-28 2009-09-10 Olympus Corp 可変形状鏡システム及び可変形状鏡駆動装置
US20110038028A1 (en) * 2008-04-23 2011-02-17 Saman Dharmatilleke Optical Imaging Lens systems and components
FR2933782B1 (fr) * 2008-07-11 2010-08-13 Thales Sa Dispositif de correction des defauts optiques d'un miroir de telescope
CN101922909B (zh) * 2010-03-09 2012-06-06 中国科学院国家天文台南京天文光学技术研究所 非接触直接检测镜面高低差的高精度电容式位移传感器
IT1401746B1 (it) * 2010-07-30 2013-08-02 St Microelectronics Srl Attuatore elettromagnetico integrato, in particolare micro-pompa elettromagnetica per un dispositivo microfluidico basato su tecnologia mems, e relativo procedimento di fabbricazione
WO2012116995A1 (en) * 2011-02-28 2012-09-07 Micronic Mydata AB Adaptive optics device and method
FR2985320B1 (fr) * 2011-12-29 2014-02-14 Alpao Systeme a etalonnage commun et procede correspondant
CN104380173A (zh) * 2012-06-15 2015-02-25 松下知识产权经营株式会社 致动器、光学反射元件及利用该光学反射元件的成像装置
DE102012218219A1 (de) * 2012-10-05 2014-04-10 Carl Zeiss Smt Gmbh Verfahren zur Regelung der Verkippung eines Spiegelelements
US9060674B2 (en) 2012-10-11 2015-06-23 Karl Storz Imaging, Inc. Auto zoom for video camera
JP6612439B2 (ja) 2015-09-23 2019-11-27 カール・ツァイス・エスエムティー・ゲーエムベーハー 圧電装置を備える光学結像装置
TWI593943B (zh) 2015-10-19 2017-08-01 國立清華大學 可調變的感測元件
US10302585B2 (en) * 2016-01-07 2019-05-28 Apple Inc. Capacitive DOE integrity monitor
JP6887715B2 (ja) * 2017-05-26 2021-06-16 パラマウントベッド株式会社 電動ベッドの手元スイッチ及び電動ベッド
CN108803011A (zh) * 2018-03-15 2018-11-13 成都理想境界科技有限公司 一种图像矫正方法及光纤扫描成像设备
CN111552066B (zh) 2019-02-11 2021-08-13 华为技术有限公司 变焦组件、镜头模组及电子设备
US20220042875A1 (en) * 2020-08-04 2022-02-10 Palo Alto Research Center Incorporated Methods and systems for damage evaluation of structural assets
DE102021202769A1 (de) * 2021-03-22 2022-09-22 Carl Zeiss Smt Gmbh Optische Baugruppe sowie Verfahren zu deren Herstellung, Verfahren zur Deformation eines optischen Elements und Projektionsbelichtungsanlage

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JPH02101402A (ja) 1988-10-11 1990-04-13 Omron Tateisi Electron Co 反射鏡装置
US5307082A (en) * 1992-10-28 1994-04-26 North Carolina State University Electrostatically shaped membranes
US5526172A (en) * 1993-07-27 1996-06-11 Texas Instruments Incorporated Microminiature, monolithic, variable electrical signal processor and apparatus including same
US6293680B1 (en) * 1997-09-10 2001-09-25 Thermotrex Corporation Electromagnetically controlled deformable mirror
US5955659A (en) * 1998-01-13 1999-09-21 Massachusetts Institute Of Technology Electrostatically-actuated structures for fluid property measurements and related methods
US6206290B1 (en) * 1998-03-06 2001-03-27 Symbol Technologies, Inc. Control system for oscillating optical element in scanners
US6275326B1 (en) * 1999-09-21 2001-08-14 Lucent Technologies Inc. Control arrangement for microelectromechanical devices and systems
US6625341B1 (en) * 2000-06-12 2003-09-23 Vlad J. Novotny Optical cross connect switching array system with electrical and optical position sensitive detection
JP3411014B2 (ja) * 2000-11-02 2003-05-26 株式会社東芝 誘導電荷ミラー
US6480645B1 (en) * 2001-01-30 2002-11-12 Tellium, Inc. Sidewall electrodes for electrostatic actuation and capacitive sensing
US6633693B1 (en) * 2001-03-27 2003-10-14 Tellium, Inc. Temperature control of micro-mirrors of an optical switch substrate
US6747806B2 (en) * 2001-04-19 2004-06-08 Creo Srl Method for controlling light beam using adaptive micro-lens
US6771851B1 (en) * 2001-06-19 2004-08-03 Nayna Networks Fast switching method for a micro-mirror device for optical switching applications
US6538802B2 (en) * 2001-07-31 2003-03-25 Axsun Technologies, Inc System and method for tilt mirror calibration due to capacitive sensor drift

Also Published As

Publication number Publication date
US7190500B2 (en) 2007-03-13
JP2002228813A (ja) 2002-08-14
US20020101646A1 (en) 2002-08-01

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