JP2002228813A5 - - Google Patents
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- JP2002228813A5 JP2002228813A5 JP2001023187A JP2001023187A JP2002228813A5 JP 2002228813 A5 JP2002228813 A5 JP 2002228813A5 JP 2001023187 A JP2001023187 A JP 2001023187A JP 2001023187 A JP2001023187 A JP 2001023187A JP 2002228813 A5 JP2002228813 A5 JP 2002228813A5
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- JP
- Japan
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Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2001023187A JP4576058B2 (ja) | 2001-01-31 | 2001-01-31 | 変位検出機能を備えた可変形状鏡 |
| US09/961,409 US7190500B2 (en) | 2001-01-31 | 2001-09-25 | Deformable mirror having displacement detecting function |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2001023187A JP4576058B2 (ja) | 2001-01-31 | 2001-01-31 | 変位検出機能を備えた可変形状鏡 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2002228813A JP2002228813A (ja) | 2002-08-14 |
| JP2002228813A5 true JP2002228813A5 (enExample) | 2008-03-06 |
| JP4576058B2 JP4576058B2 (ja) | 2010-11-04 |
Family
ID=18888501
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2001023187A Expired - Fee Related JP4576058B2 (ja) | 2001-01-31 | 2001-01-31 | 変位検出機能を備えた可変形状鏡 |
Country Status (2)
| Country | Link |
|---|---|
| US (1) | US7190500B2 (enExample) |
| JP (1) | JP4576058B2 (enExample) |
Families Citing this family (33)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7369327B1 (en) * | 1998-06-09 | 2008-05-06 | Olympus Corporation | Variable optical-property element and optical apparatus including the same |
| US6618209B2 (en) * | 2000-08-08 | 2003-09-09 | Olympus Optical Co., Ltd. | Optical apparatus |
| JP2003151328A (ja) * | 2001-11-15 | 2003-05-23 | Du Pont Toray Co Ltd | 照明用反射装置 |
| JP2004247947A (ja) * | 2003-02-13 | 2004-09-02 | Olympus Corp | 光学装置 |
| WO2005024809A2 (en) * | 2003-09-04 | 2005-03-17 | Matsushita Electric Industrial Co., Ltd. | Optical pick-up aberration correcting mirror, aberration correcting method and optical pick-up |
| US7109642B2 (en) * | 2003-11-29 | 2006-09-19 | Walter Guy Scott | Composite piezoelectric apparatus and method |
| US7131740B2 (en) * | 2004-03-17 | 2006-11-07 | Olympus Corporation | Optical system and optical apparatus provided with the same |
| US20050230605A1 (en) * | 2004-04-20 | 2005-10-20 | Hamid Pishdadian | Method of measuring using a binary optical sensor |
| US20090054255A1 (en) * | 2004-07-01 | 2009-02-26 | The Regents Of The University Of California | Microfluidic devices and methods |
| KR100657002B1 (ko) * | 2005-04-08 | 2006-12-20 | 엘지전자 주식회사 | 전자력 구동 가변 초점 미러 및 그 제조방법과 구동 방법 |
| JPWO2007023940A1 (ja) * | 2005-08-26 | 2009-03-26 | パナソニック株式会社 | アクチュエータ、光ヘッド装置および光情報装置 |
| JP2007103657A (ja) * | 2005-10-04 | 2007-04-19 | Canon Inc | 光学素子保持装置、露光装置およびデバイス製造方法 |
| JP4756642B2 (ja) * | 2006-03-16 | 2011-08-24 | オリンパス株式会社 | 可変形状鏡 |
| JP2008261951A (ja) * | 2007-04-10 | 2008-10-30 | Olympus Corp | 可変形状鏡 |
| US8054531B2 (en) * | 2007-06-26 | 2011-11-08 | Hewlett-Packard Development Company, L.P. | Micro-electro-mechanical systems and photonic interconnects employing the same |
| JP2009205004A (ja) * | 2008-02-28 | 2009-09-10 | Olympus Corp | 可変形状鏡システム及び可変形状鏡駆動装置 |
| US20110038028A1 (en) * | 2008-04-23 | 2011-02-17 | Saman Dharmatilleke | Optical Imaging Lens systems and components |
| FR2933782B1 (fr) * | 2008-07-11 | 2010-08-13 | Thales Sa | Dispositif de correction des defauts optiques d'un miroir de telescope |
| CN101922909B (zh) * | 2010-03-09 | 2012-06-06 | 中国科学院国家天文台南京天文光学技术研究所 | 非接触直接检测镜面高低差的高精度电容式位移传感器 |
| IT1401746B1 (it) * | 2010-07-30 | 2013-08-02 | St Microelectronics Srl | Attuatore elettromagnetico integrato, in particolare micro-pompa elettromagnetica per un dispositivo microfluidico basato su tecnologia mems, e relativo procedimento di fabbricazione |
| WO2012116995A1 (en) * | 2011-02-28 | 2012-09-07 | Micronic Mydata AB | Adaptive optics device and method |
| FR2985320B1 (fr) * | 2011-12-29 | 2014-02-14 | Alpao | Systeme a etalonnage commun et procede correspondant |
| CN104380173A (zh) * | 2012-06-15 | 2015-02-25 | 松下知识产权经营株式会社 | 致动器、光学反射元件及利用该光学反射元件的成像装置 |
| DE102012218219A1 (de) * | 2012-10-05 | 2014-04-10 | Carl Zeiss Smt Gmbh | Verfahren zur Regelung der Verkippung eines Spiegelelements |
| US9060674B2 (en) | 2012-10-11 | 2015-06-23 | Karl Storz Imaging, Inc. | Auto zoom for video camera |
| JP6612439B2 (ja) | 2015-09-23 | 2019-11-27 | カール・ツァイス・エスエムティー・ゲーエムベーハー | 圧電装置を備える光学結像装置 |
| TWI593943B (zh) | 2015-10-19 | 2017-08-01 | 國立清華大學 | 可調變的感測元件 |
| US10302585B2 (en) * | 2016-01-07 | 2019-05-28 | Apple Inc. | Capacitive DOE integrity monitor |
| JP6887715B2 (ja) * | 2017-05-26 | 2021-06-16 | パラマウントベッド株式会社 | 電動ベッドの手元スイッチ及び電動ベッド |
| CN108803011A (zh) * | 2018-03-15 | 2018-11-13 | 成都理想境界科技有限公司 | 一种图像矫正方法及光纤扫描成像设备 |
| CN111552066B (zh) | 2019-02-11 | 2021-08-13 | 华为技术有限公司 | 变焦组件、镜头模组及电子设备 |
| US20220042875A1 (en) * | 2020-08-04 | 2022-02-10 | Palo Alto Research Center Incorporated | Methods and systems for damage evaluation of structural assets |
| DE102021202769A1 (de) * | 2021-03-22 | 2022-09-22 | Carl Zeiss Smt Gmbh | Optische Baugruppe sowie Verfahren zu deren Herstellung, Verfahren zur Deformation eines optischen Elements und Projektionsbelichtungsanlage |
Family Cites Families (14)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02101402A (ja) | 1988-10-11 | 1990-04-13 | Omron Tateisi Electron Co | 反射鏡装置 |
| US5307082A (en) * | 1992-10-28 | 1994-04-26 | North Carolina State University | Electrostatically shaped membranes |
| US5526172A (en) * | 1993-07-27 | 1996-06-11 | Texas Instruments Incorporated | Microminiature, monolithic, variable electrical signal processor and apparatus including same |
| US6293680B1 (en) * | 1997-09-10 | 2001-09-25 | Thermotrex Corporation | Electromagnetically controlled deformable mirror |
| US5955659A (en) * | 1998-01-13 | 1999-09-21 | Massachusetts Institute Of Technology | Electrostatically-actuated structures for fluid property measurements and related methods |
| US6206290B1 (en) * | 1998-03-06 | 2001-03-27 | Symbol Technologies, Inc. | Control system for oscillating optical element in scanners |
| US6275326B1 (en) * | 1999-09-21 | 2001-08-14 | Lucent Technologies Inc. | Control arrangement for microelectromechanical devices and systems |
| US6625341B1 (en) * | 2000-06-12 | 2003-09-23 | Vlad J. Novotny | Optical cross connect switching array system with electrical and optical position sensitive detection |
| JP3411014B2 (ja) * | 2000-11-02 | 2003-05-26 | 株式会社東芝 | 誘導電荷ミラー |
| US6480645B1 (en) * | 2001-01-30 | 2002-11-12 | Tellium, Inc. | Sidewall electrodes for electrostatic actuation and capacitive sensing |
| US6633693B1 (en) * | 2001-03-27 | 2003-10-14 | Tellium, Inc. | Temperature control of micro-mirrors of an optical switch substrate |
| US6747806B2 (en) * | 2001-04-19 | 2004-06-08 | Creo Srl | Method for controlling light beam using adaptive micro-lens |
| US6771851B1 (en) * | 2001-06-19 | 2004-08-03 | Nayna Networks | Fast switching method for a micro-mirror device for optical switching applications |
| US6538802B2 (en) * | 2001-07-31 | 2003-03-25 | Axsun Technologies, Inc | System and method for tilt mirror calibration due to capacitive sensor drift |
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2001
- 2001-01-31 JP JP2001023187A patent/JP4576058B2/ja not_active Expired - Fee Related
- 2001-09-25 US US09/961,409 patent/US7190500B2/en not_active Expired - Fee Related