JP2002228813A5 - - Google Patents

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Publication number
JP2002228813A5
JP2002228813A5 JP2001023187A JP2001023187A JP2002228813A5 JP 2002228813 A5 JP2002228813 A5 JP 2002228813A5 JP 2001023187 A JP2001023187 A JP 2001023187A JP 2001023187 A JP2001023187 A JP 2001023187A JP 2002228813 A5 JP2002228813 A5 JP 2002228813A5
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JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Application number
JP2001023187A
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Japanese (ja)
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JP2002228813A (ja
JP4576058B2 (ja
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Priority to JP2001023187A priority Critical patent/JP4576058B2/ja
Priority claimed from JP2001023187A external-priority patent/JP4576058B2/ja
Priority to US09/961,409 priority patent/US7190500B2/en
Publication of JP2002228813A publication Critical patent/JP2002228813A/ja
Publication of JP2002228813A5 publication Critical patent/JP2002228813A5/ja
Application granted granted Critical
Publication of JP4576058B2 publication Critical patent/JP4576058B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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JP2001023187A 2001-01-31 2001-01-31 変位検出機能を備えた可変形状鏡 Expired - Fee Related JP4576058B2 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2001023187A JP4576058B2 (ja) 2001-01-31 2001-01-31 変位検出機能を備えた可変形状鏡
US09/961,409 US7190500B2 (en) 2001-01-31 2001-09-25 Deformable mirror having displacement detecting function

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2001023187A JP4576058B2 (ja) 2001-01-31 2001-01-31 変位検出機能を備えた可変形状鏡

Publications (3)

Publication Number Publication Date
JP2002228813A JP2002228813A (ja) 2002-08-14
JP2002228813A5 true JP2002228813A5 (enExample) 2008-03-06
JP4576058B2 JP4576058B2 (ja) 2010-11-04

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Family Applications (1)

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JP2001023187A Expired - Fee Related JP4576058B2 (ja) 2001-01-31 2001-01-31 変位検出機能を備えた可変形状鏡

Country Status (2)

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US (1) US7190500B2 (enExample)
JP (1) JP4576058B2 (enExample)

Families Citing this family (33)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7369327B1 (en) * 1998-06-09 2008-05-06 Olympus Corporation Variable optical-property element and optical apparatus including the same
US6618209B2 (en) * 2000-08-08 2003-09-09 Olympus Optical Co., Ltd. Optical apparatus
JP2003151328A (ja) * 2001-11-15 2003-05-23 Du Pont Toray Co Ltd 照明用反射装置
JP2004247947A (ja) * 2003-02-13 2004-09-02 Olympus Corp 光学装置
WO2005024809A2 (en) * 2003-09-04 2005-03-17 Matsushita Electric Industrial Co., Ltd. Optical pick-up aberration correcting mirror, aberration correcting method and optical pick-up
US7109642B2 (en) * 2003-11-29 2006-09-19 Walter Guy Scott Composite piezoelectric apparatus and method
US7131740B2 (en) * 2004-03-17 2006-11-07 Olympus Corporation Optical system and optical apparatus provided with the same
US20050230605A1 (en) * 2004-04-20 2005-10-20 Hamid Pishdadian Method of measuring using a binary optical sensor
US20090054255A1 (en) * 2004-07-01 2009-02-26 The Regents Of The University Of California Microfluidic devices and methods
KR100657002B1 (ko) * 2005-04-08 2006-12-20 엘지전자 주식회사 전자력 구동 가변 초점 미러 및 그 제조방법과 구동 방법
JPWO2007023940A1 (ja) * 2005-08-26 2009-03-26 パナソニック株式会社 アクチュエータ、光ヘッド装置および光情報装置
JP2007103657A (ja) * 2005-10-04 2007-04-19 Canon Inc 光学素子保持装置、露光装置およびデバイス製造方法
JP4756642B2 (ja) * 2006-03-16 2011-08-24 オリンパス株式会社 可変形状鏡
JP2008261951A (ja) * 2007-04-10 2008-10-30 Olympus Corp 可変形状鏡
US8054531B2 (en) * 2007-06-26 2011-11-08 Hewlett-Packard Development Company, L.P. Micro-electro-mechanical systems and photonic interconnects employing the same
JP2009205004A (ja) * 2008-02-28 2009-09-10 Olympus Corp 可変形状鏡システム及び可変形状鏡駆動装置
US20110038028A1 (en) * 2008-04-23 2011-02-17 Saman Dharmatilleke Optical Imaging Lens systems and components
FR2933782B1 (fr) * 2008-07-11 2010-08-13 Thales Sa Dispositif de correction des defauts optiques d'un miroir de telescope
CN101922909B (zh) * 2010-03-09 2012-06-06 中国科学院国家天文台南京天文光学技术研究所 非接触直接检测镜面高低差的高精度电容式位移传感器
IT1401746B1 (it) * 2010-07-30 2013-08-02 St Microelectronics Srl Attuatore elettromagnetico integrato, in particolare micro-pompa elettromagnetica per un dispositivo microfluidico basato su tecnologia mems, e relativo procedimento di fabbricazione
WO2012116995A1 (en) * 2011-02-28 2012-09-07 Micronic Mydata AB Adaptive optics device and method
FR2985320B1 (fr) * 2011-12-29 2014-02-14 Alpao Systeme a etalonnage commun et procede correspondant
CN104380173A (zh) * 2012-06-15 2015-02-25 松下知识产权经营株式会社 致动器、光学反射元件及利用该光学反射元件的成像装置
DE102012218219A1 (de) * 2012-10-05 2014-04-10 Carl Zeiss Smt Gmbh Verfahren zur Regelung der Verkippung eines Spiegelelements
US9060674B2 (en) 2012-10-11 2015-06-23 Karl Storz Imaging, Inc. Auto zoom for video camera
JP6612439B2 (ja) 2015-09-23 2019-11-27 カール・ツァイス・エスエムティー・ゲーエムベーハー 圧電装置を備える光学結像装置
TWI593943B (zh) 2015-10-19 2017-08-01 國立清華大學 可調變的感測元件
US10302585B2 (en) * 2016-01-07 2019-05-28 Apple Inc. Capacitive DOE integrity monitor
JP6887715B2 (ja) * 2017-05-26 2021-06-16 パラマウントベッド株式会社 電動ベッドの手元スイッチ及び電動ベッド
CN108803011A (zh) * 2018-03-15 2018-11-13 成都理想境界科技有限公司 一种图像矫正方法及光纤扫描成像设备
CN111552066B (zh) 2019-02-11 2021-08-13 华为技术有限公司 变焦组件、镜头模组及电子设备
US20220042875A1 (en) * 2020-08-04 2022-02-10 Palo Alto Research Center Incorporated Methods and systems for damage evaluation of structural assets
DE102021202769A1 (de) * 2021-03-22 2022-09-22 Carl Zeiss Smt Gmbh Optische Baugruppe sowie Verfahren zu deren Herstellung, Verfahren zur Deformation eines optischen Elements und Projektionsbelichtungsanlage

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02101402A (ja) 1988-10-11 1990-04-13 Omron Tateisi Electron Co 反射鏡装置
US5307082A (en) * 1992-10-28 1994-04-26 North Carolina State University Electrostatically shaped membranes
US5526172A (en) * 1993-07-27 1996-06-11 Texas Instruments Incorporated Microminiature, monolithic, variable electrical signal processor and apparatus including same
US6293680B1 (en) * 1997-09-10 2001-09-25 Thermotrex Corporation Electromagnetically controlled deformable mirror
US5955659A (en) * 1998-01-13 1999-09-21 Massachusetts Institute Of Technology Electrostatically-actuated structures for fluid property measurements and related methods
US6206290B1 (en) * 1998-03-06 2001-03-27 Symbol Technologies, Inc. Control system for oscillating optical element in scanners
US6275326B1 (en) * 1999-09-21 2001-08-14 Lucent Technologies Inc. Control arrangement for microelectromechanical devices and systems
US6625341B1 (en) * 2000-06-12 2003-09-23 Vlad J. Novotny Optical cross connect switching array system with electrical and optical position sensitive detection
JP3411014B2 (ja) * 2000-11-02 2003-05-26 株式会社東芝 誘導電荷ミラー
US6480645B1 (en) * 2001-01-30 2002-11-12 Tellium, Inc. Sidewall electrodes for electrostatic actuation and capacitive sensing
US6633693B1 (en) * 2001-03-27 2003-10-14 Tellium, Inc. Temperature control of micro-mirrors of an optical switch substrate
US6747806B2 (en) * 2001-04-19 2004-06-08 Creo Srl Method for controlling light beam using adaptive micro-lens
US6771851B1 (en) * 2001-06-19 2004-08-03 Nayna Networks Fast switching method for a micro-mirror device for optical switching applications
US6538802B2 (en) * 2001-07-31 2003-03-25 Axsun Technologies, Inc System and method for tilt mirror calibration due to capacitive sensor drift

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