JP4567362B2 - （メタ）アクリル酸エステルの製造法 - Google Patents

（メタ）アクリル酸エステルの製造法 Download PDF

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Publication number
JP4567362B2
JP4567362B2 JP2004115747A JP2004115747A JP4567362B2 JP 4567362 B2 JP4567362 B2 JP 4567362B2 JP 2004115747 A JP2004115747 A JP 2004115747A JP 2004115747 A JP2004115747 A JP 2004115747A JP 4567362 B2 JP4567362 B2 JP 4567362B2
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Japan
Prior art keywords
meth
compound
acrylic acid
formula
alkali metal
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JP2004115747A
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Japanese (ja)
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JP2005298393A (ja
JP2005298393A5 (OSRAM
Inventor
敏貴 今康
豊幸 杉浦
哲也 渡辺
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Osaka Organic Chemicals Ind.,Ltd.
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Osaka Organic Chemicals Ind.,Ltd.
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  • Furan Compounds (AREA)
  • Low-Molecular Organic Synthesis Reactions Using Catalysts (AREA)
JP2004115747A 2004-04-09 2004-04-09 （メタ）アクリル酸エステルの製造法 Expired - Lifetime JP4567362B2 (ja)

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JP2004115747A JP4567362B2 (ja) 2004-04-09 2004-04-09 （メタ）アクリル酸エステルの製造法

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JP2004115747A JP4567362B2 (ja) 2004-04-09 2004-04-09 （メタ）アクリル酸エステルの製造法

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JP2010144725A Division JP5249287B2 (ja) 2010-06-25 2010-06-25 （メタ）アクリル酸エステルの製造法

Publications (3)

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JP2005298393A JP2005298393A (ja) 2005-10-27
JP2005298393A5 JP2005298393A5 (OSRAM) 2007-03-08
JP4567362B2 true JP4567362B2 (ja) 2010-10-20

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JP2004115747A Expired - Lifetime JP4567362B2 (ja) 2004-04-09 2004-04-09 （メタ）アクリル酸エステルの製造法

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010265282A (ja) * 2010-06-25 2010-11-25 Osaka Organic Chem Ind Ltd （メタ）アクリル酸エステルの製造法

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2007122691A1 (ja) * 2006-04-14 2007-11-01 Mitsubishi Chemical Corporation 高純度α－（メタ）アクリロイロキシーγ－ブチロラクトン及びその製造方法
JP6020477B2 (ja) * 2014-01-24 2016-11-02 信越化学工業株式会社 ポジ型レジスト材料及びこれを用いたパターン形成方法
JP6442965B2 (ja) * 2014-10-07 2018-12-26 Jsr株式会社 感放射線性樹脂組成物及びレジストパターン形成方法

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
IL89791A0 (en) * 1989-03-29 1989-09-28 Bromine Compounds Ltd Process for the preparation of bromo-substituted aromatic esters of alpha,beta-unsaturated acids
JP2967252B2 (ja) * 1993-06-17 1999-10-25 大阪有機化学工業株式会社 グリシジルメタクリレートの製造法
CA2139379A1 (en) * 1994-01-03 1995-07-04 Rodney M. Harris Anhydride-functional monomers and polymers and reactive compositions prepared from same
JP3546679B2 (ja) * 1997-01-29 2004-07-28 住友化学工業株式会社 化学増幅型ポジ型レジスト組成物
JP3972568B2 (ja) * 2000-05-09 2007-09-05 住友化学株式会社 化学増幅型ポジ型レジスト組成物及びスルホニウム塩

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010265282A (ja) * 2010-06-25 2010-11-25 Osaka Organic Chem Ind Ltd （メタ）アクリル酸エステルの製造法

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