JP4563552B2 - 基板の検査装置 - Google Patents

基板の検査装置 Download PDF

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Publication number
JP4563552B2
JP4563552B2 JP2000156522A JP2000156522A JP4563552B2 JP 4563552 B2 JP4563552 B2 JP 4563552B2 JP 2000156522 A JP2000156522 A JP 2000156522A JP 2000156522 A JP2000156522 A JP 2000156522A JP 4563552 B2 JP4563552 B2 JP 4563552B2
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Japan
Prior art keywords
substrate
inspection
unit
carry
unloading
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Expired - Fee Related
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JP2000156522A
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English (en)
Japanese (ja)
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JP2001339138A5 (https=
JP2001339138A (ja
Inventor
尚夫 中北
喜隆 金田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Denso Ten Ltd
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Denso Ten Ltd
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Priority to JP2000156522A priority Critical patent/JP4563552B2/ja
Publication of JP2001339138A publication Critical patent/JP2001339138A/ja
Publication of JP2001339138A5 publication Critical patent/JP2001339138A5/ja
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Publication of JP4563552B2 publication Critical patent/JP4563552B2/ja
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Expired - Fee Related legal-status Critical Current

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JP2000156522A 2000-05-26 2000-05-26 基板の検査装置 Expired - Fee Related JP4563552B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2000156522A JP4563552B2 (ja) 2000-05-26 2000-05-26 基板の検査装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2000156522A JP4563552B2 (ja) 2000-05-26 2000-05-26 基板の検査装置

Publications (3)

Publication Number Publication Date
JP2001339138A JP2001339138A (ja) 2001-12-07
JP2001339138A5 JP2001339138A5 (https=) 2007-07-12
JP4563552B2 true JP4563552B2 (ja) 2010-10-13

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ID=18661306

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2000156522A Expired - Fee Related JP4563552B2 (ja) 2000-05-26 2000-05-26 基板の検査装置

Country Status (1)

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JP (1) JP4563552B2 (https=)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101236286B1 (ko) 2012-09-24 2013-02-26 (주)대상이엔지 기판의 결함 검사장치

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0620091B2 (ja) * 1985-01-31 1994-03-16 株式会社ニコン 基板の搬送装置
JPS622176A (ja) * 1985-06-28 1987-01-08 Yashima Seisakusho:Kk バ−イン装置
JPH0652754B2 (ja) * 1987-10-23 1994-07-06 東京エレクトロン九州株式会社 基板搬送機構
JPH0682145B2 (ja) * 1989-03-27 1994-10-19 ユアサ商事株式会社 バーイン装置
JPH0582610A (ja) * 1991-09-19 1993-04-02 Toshiba Corp 半導体装置並びにその試験方法及びその試験装置
JPH06274943A (ja) * 1993-03-19 1994-09-30 Hitachi Maxell Ltd 情報記録媒体の自動検査装置
JP3734295B2 (ja) * 1995-09-04 2006-01-11 大日本スクリーン製造株式会社 基板搬送装置
JP3420712B2 (ja) * 1998-11-12 2003-06-30 東京エレクトロン株式会社 処理システム

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Publication number Publication date
JP2001339138A (ja) 2001-12-07

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