JP4519130B2 - Amlcd基板のエッジの加圧搬送研削 - Google Patents
Amlcd基板のエッジの加圧搬送研削 Download PDFInfo
- Publication number
- JP4519130B2 JP4519130B2 JP2006521963A JP2006521963A JP4519130B2 JP 4519130 B2 JP4519130 B2 JP 4519130B2 JP 2006521963 A JP2006521963 A JP 2006521963A JP 2006521963 A JP2006521963 A JP 2006521963A JP 4519130 B2 JP4519130 B2 JP 4519130B2
- Authority
- JP
- Japan
- Prior art keywords
- grinding
- edge
- air bearing
- glass substrate
- coupled
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Images
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B55/00—Safety devices for grinding or polishing machines; Accessories fitted to grinding or polishing machines for keeping tools or parts of the machine in good working condition
- B24B55/06—Dust extraction equipment on grinding or polishing machines
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B41/00—Component parts such as frames, beds, carriages, headstocks
- B24B41/06—Work supports, e.g. adjustable steadies
- B24B41/068—Table-like supports for panels, sheets or the like
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B41/00—Component parts such as frames, beds, carriages, headstocks
- B24B41/04—Headstocks; Working-spindles; Features relating thereto
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B49/00—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation
- B24B49/16—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation taking regard of the load
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B9/00—Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor
- B24B9/02—Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor characterised by a special design with respect to properties of materials specific to articles to be ground
- B24B9/06—Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor characterised by a special design with respect to properties of materials specific to articles to be ground of non-metallic inorganic material, e.g. stone, ceramics, porcelain
- B24B9/08—Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor characterised by a special design with respect to properties of materials specific to articles to be ground of non-metallic inorganic material, e.g. stone, ceramics, porcelain of glass
- B24B9/10—Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor characterised by a special design with respect to properties of materials specific to articles to be ground of non-metallic inorganic material, e.g. stone, ceramics, porcelain of glass of plate glass
- B24B9/102—Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor characterised by a special design with respect to properties of materials specific to articles to be ground of non-metallic inorganic material, e.g. stone, ceramics, porcelain of glass of plate glass for travelling sheets
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B9/00—Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor
- B24B9/02—Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor characterised by a special design with respect to properties of materials specific to articles to be ground
- B24B9/06—Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor characterised by a special design with respect to properties of materials specific to articles to be ground of non-metallic inorganic material, e.g. stone, ceramics, porcelain
- B24B9/08—Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor characterised by a special design with respect to properties of materials specific to articles to be ground of non-metallic inorganic material, e.g. stone, ceramics, porcelain of glass
- B24B9/12—Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor characterised by a special design with respect to properties of materials specific to articles to be ground of non-metallic inorganic material, e.g. stone, ceramics, porcelain of glass of hollow glassware, e.g. drinking glasses, preserve jars, television picture tube viewing panels
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Chemical & Material Sciences (AREA)
- Ceramic Engineering (AREA)
- Inorganic Chemistry (AREA)
- Physics & Mathematics (AREA)
- Nonlinear Science (AREA)
- Crystallography & Structural Chemistry (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Grinding And Polishing Of Tertiary Curved Surfaces And Surfaces With Complex Shapes (AREA)
- Grinding Of Cylindrical And Plane Surfaces (AREA)
Description
20 空気軸受支持構造
22 空気軸受シリンダ
30 研削ユニット
32 支持台
34 研削砥石
38 空気軸受モータ
40 空気圧シリンダ
50 冷却液ノズル
60 真空チャック
Claims (9)
- ガラス基板の少なくとも1つのエッジを研削または研磨するための装置において、
旋回運動に対抗する摩擦抵抗のない状態で回転軸の周りに旋回するように構成された空気軸受支持部材、および
前記空気軸受支持部材に連結された研削ユニットであって、該研削ユニットが、前記少なくとも1つのエッジを追跡しながら、該少なくとも1つのエッジから所定の量の材料を除去するように該少なくとも1つのエッジに垂直な所定の力を加えるように構成されており、前記所定の力が、前記所定の量と正比例し、かつガラス基板を破損させる垂直力より小さいものである研削ユニット、
を備えた装置であって、
前記空気軸受支持部材が、
静止支持ハウジング、
加圧空気の連続流を提供するように構成された加圧空気ユニット、および
前記ハウジング内に配置され、前記研削ユニットおよび前記加圧空気ユニットに連結された空気軸受シリンダであって、前記加圧空気によって支持され、摩擦抵抗なく前記回転軸の周りに自由に旋回するように構成された空気軸受シリンダ、
を備えることを特徴とする装置。 - 前記研削ユニットが、
前記空気軸受支持部材に連結され、該空気軸受支持部材により前記回転軸の周りに旋回するように構成された支持台、および
前記回転軸からずれて前記支持台の一部分に連結され、前記少なくとも1つのエッジを研削または研磨するように構成された研削装置、
を備えることを特徴とする請求項1記載の装置。 - 前記支持台が釣り合い錘を含み、該釣り合い錘と前記研削装置が前記回転軸の周りに対称的であることを特徴とする請求項2記載の装置。
- 前記研削装置が、
前記支持台に連結された空気軸受モータ、および
前記空気軸受モータに連結され、所定の角速度で回転するように該空気軸受モータに駆動される研削砥石、
をさらに備えていることを特徴とする請求項2記載の装置。 - 前記研削砥石が400グリット以上の微細なグリットの研削砥石であることを特徴とする請求項4記載の装置。
- 前記研削装置が、
前記支持台に連結され、前記少なくとも1つのエッジから前記所定の量の材料を除去するために該少なくとも1つのエッジに垂直な前記所定の力を加えるように構成された空気圧シリンダ、
をさらに備えることを特徴とする請求項4記載の装置。 - 前記所定の力が実質的に1N〜6Nの範囲内にあり、前記所定の量が実質的に25マイクロメートル〜150マイクロメートルの範囲内にあることを特徴とする請求項6記載の装置。
- 前記研削ユニットに近接して配置されたコンベヤ・システムであって、前記ガラス基板を支持し、研削および/または研磨プロセスの工程中に前記研削ユニットに対して接線方向に前記ガラス基板を移動させるように構成されたコンベヤ・システムをさらに備えていることを特徴とする請求項1記載の装置。
- 前記コンベヤ・システムが、
前記研削および/または研磨プロセスの工程中に所定の位置に前記ガラス基板を保持するための真空チャック、
前記真空チャックに連結され、前記研削ユニットに対して直線方向に前記真空チャックを所定の速度で移動させるように構成されたコンベヤ、および
前記研削ユニットおよび前記少なくとも1つのエッジの界面に近接して配置された冷却液機構、
を備えたことを特徴とする請求項8記載の装置。
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US10/629,399 US7018272B2 (en) | 2003-07-29 | 2003-07-29 | Pressure feed grinding of AMLCD substrate edges |
PCT/US2004/023950 WO2005012195A2 (en) | 2003-07-29 | 2004-07-23 | Pressure feed grinding of amlcd substrate edges |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2007500605A JP2007500605A (ja) | 2007-01-18 |
JP4519130B2 true JP4519130B2 (ja) | 2010-08-04 |
Family
ID=34103613
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2006521963A Expired - Fee Related JP4519130B2 (ja) | 2003-07-29 | 2004-07-23 | Amlcd基板のエッジの加圧搬送研削 |
Country Status (5)
Country | Link |
---|---|
US (2) | US7018272B2 (ja) |
JP (1) | JP4519130B2 (ja) |
KR (1) | KR20060063921A (ja) |
CN (1) | CN100569443C (ja) |
WO (1) | WO2005012195A2 (ja) |
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US7607647B2 (en) * | 2007-03-20 | 2009-10-27 | Kla-Tencor Technologies Corporation | Stabilizing a substrate using a vacuum preload air bearing chuck |
KR101329633B1 (ko) * | 2007-12-19 | 2013-11-14 | 니폰 덴키 가라스 가부시키가이샤 | 글래스 기판의 제조 방법 |
US8585467B2 (en) * | 2008-10-31 | 2013-11-19 | Corning Incorporated | Linear pressure feed grinding with voice coil |
US9555516B2 (en) * | 2009-07-24 | 2017-01-31 | Corning Incorporated | Method for processing an edge of a glass plate |
US20110081839A1 (en) * | 2009-10-06 | 2011-04-07 | Apple Inc. | Method and apparatus for polishing a curved edge |
US8713968B2 (en) * | 2010-05-03 | 2014-05-06 | Corning Incorporated | Method and apparatus for making a 3D glass article |
CN102049713B (zh) * | 2010-07-13 | 2013-01-16 | 杨福磊 | 一种卧式单边直线玻璃磨边机 |
GB2482342A (en) * | 2010-07-30 | 2012-02-01 | Vestas Wind Sys As | Cooling of fibrous sheet for composite structure during machining |
US8721392B2 (en) | 2011-06-28 | 2014-05-13 | Corning Incorporated | Glass edge finishing method |
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WO2013187400A1 (ja) * | 2012-06-13 | 2013-12-19 | 日本電気硝子株式会社 | 板ガラス加工装置及び板ガラス製造方法 |
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KR101513906B1 (ko) * | 2014-02-12 | 2015-04-21 | (주)미래컴퍼니 | 패널 가공장치 및 가공방법 |
JP6872903B2 (ja) | 2014-02-28 | 2021-05-19 | コーニング インコーポレイテッド | ガラス処理装置およびガラス処理方法 |
CN105269431A (zh) * | 2014-07-14 | 2016-01-27 | 汉菖机械工业有限公司 | 磨边机构 |
KR102406896B1 (ko) * | 2014-09-22 | 2022-06-10 | 코닝 인코포레이티드 | 유리 물품의 에지 처리용 연삭 가공 장치 |
JP6504352B2 (ja) * | 2015-04-22 | 2019-04-24 | 日本電気硝子株式会社 | 板ガラス加工装置 |
CN105690218A (zh) * | 2016-03-11 | 2016-06-22 | 温州智元知识产权管理有限公司 | 轴承座表面研磨设备 |
JP6966843B2 (ja) * | 2017-02-08 | 2021-11-17 | スタンレー電気株式会社 | 垂直共振器型発光素子 |
CN108356636A (zh) * | 2018-01-30 | 2018-08-03 | 河南摩西机械制造有限公司 | 一种铁锅自动圆弧磨边装置 |
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-
2003
- 2003-07-29 US US10/629,399 patent/US7018272B2/en not_active Expired - Fee Related
-
2004
- 2004-07-23 KR KR1020067001946A patent/KR20060063921A/ko not_active Application Discontinuation
- 2004-07-23 JP JP2006521963A patent/JP4519130B2/ja not_active Expired - Fee Related
- 2004-07-23 CN CNB2004800224986A patent/CN100569443C/zh not_active Expired - Fee Related
- 2004-07-23 WO PCT/US2004/023950 patent/WO2005012195A2/en active Application Filing
-
2006
- 2006-01-17 US US11/333,730 patent/US7207866B2/en not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
JP2007500605A (ja) | 2007-01-18 |
US20050026541A1 (en) | 2005-02-03 |
WO2005012195A3 (en) | 2005-04-14 |
KR20060063921A (ko) | 2006-06-12 |
US7018272B2 (en) | 2006-03-28 |
US7207866B2 (en) | 2007-04-24 |
WO2005012195A2 (en) | 2005-02-10 |
US20060121832A1 (en) | 2006-06-08 |
CN100569443C (zh) | 2009-12-16 |
CN1832828A (zh) | 2006-09-13 |
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