JP4505473B2 - マスク、蒸着装置、有機電界発光表示装置 - Google Patents
マスク、蒸着装置、有機電界発光表示装置 Download PDFInfo
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- JP4505473B2 JP4505473B2 JP2007012528A JP2007012528A JP4505473B2 JP 4505473 B2 JP4505473 B2 JP 4505473B2 JP 2007012528 A JP2007012528 A JP 2007012528A JP 2007012528 A JP2007012528 A JP 2007012528A JP 4505473 B2 JP4505473 B2 JP 4505473B2
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- 238000007740 vapor deposition Methods 0.000 title claims description 21
- 238000005401 electroluminescence Methods 0.000 title 1
- 239000000758 substrate Substances 0.000 claims description 79
- 230000008021 deposition Effects 0.000 claims description 23
- 239000000463 material Substances 0.000 claims description 14
- 239000010409 thin film Substances 0.000 description 31
- 238000000151 deposition Methods 0.000 description 23
- 238000000034 method Methods 0.000 description 13
- 239000010408 film Substances 0.000 description 6
- 238000001704 evaporation Methods 0.000 description 4
- 238000002347 injection Methods 0.000 description 4
- 239000007924 injection Substances 0.000 description 4
- 238000000206 photolithography Methods 0.000 description 4
- 150000001875 compounds Chemical class 0.000 description 3
- 239000011368 organic material Substances 0.000 description 3
- 229910052709 silver Inorganic materials 0.000 description 3
- 238000007796 conventional method Methods 0.000 description 2
- 238000005323 electroforming Methods 0.000 description 2
- 238000005868 electrolysis reaction Methods 0.000 description 2
- 238000005530 etching Methods 0.000 description 2
- 230000008020 evaporation Effects 0.000 description 2
- 230000005525 hole transport Effects 0.000 description 2
- 238000003698 laser cutting Methods 0.000 description 2
- 229910052779 Neodymium Inorganic materials 0.000 description 1
- 229910052804 chromium Inorganic materials 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 230000002452 interceptive effect Effects 0.000 description 1
- 229910052741 iridium Inorganic materials 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 229910052763 palladium Inorganic materials 0.000 description 1
- 238000000059 patterning Methods 0.000 description 1
- 229910052697 platinum Inorganic materials 0.000 description 1
- 238000007665 sagging Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000003466 welding Methods 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/04—Coating on selected surface areas, e.g. using masks
- C23C14/042—Coating on selected surface areas, e.g. using masks using masks
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
- H05B33/00—Electroluminescent light sources
- H05B33/10—Apparatus or processes specially adapted to the manufacture of electroluminescent light sources
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
- H10K71/10—Deposition of organic active material
- H10K71/16—Deposition of organic active material using physical vapour deposition [PVD], e.g. vacuum deposition or sputtering
- H10K71/166—Deposition of organic active material using physical vapour deposition [PVD], e.g. vacuum deposition or sputtering using selective deposition, e.g. using a mask
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
- H10K71/40—Thermal treatment, e.g. annealing in the presence of a solvent vapour
- H10K71/441—Thermal treatment, e.g. annealing in the presence of a solvent vapour in the presence of solvent vapors, e.g. solvent vapour annealing
Description
301 薄膜
310 マスク
311 第1開口部
312 第2開口部
320 蒸着源
Claims (8)
- 基板上の中央領域に形成される複数の副画素領域のうちいずれか1つの領域にそれぞれ対応したドット形状の第1開口部が複数個形成された第1領域と、
前記複数の第1開口部が形成された前記第1領域の両側に少なくとも1つずつ配置され、前記複数の副画素領域のうち少なくとも2つの領域にそれぞれ対応したストライプ形状の第2開口部が複数個形成された第2領域と、
を備え、
前記基板に対して全面にわたって位置することを特徴とする、マスク。 - 前記第1開口部は、前記副画素領域と対応する複数個の開口部が平行に配列されることを特徴とする、請求項1に記載のマスク。
- 前記第1領域及び前記第1領域の両側に形成される第2領域の面積比は、前記第2領域:前記第1領域:前記第2領域=3:4:3の割合であることを特徴とする、請求項1又は2に記載のマスク。
- チャンバと、
前記チャンバ内に搬入される複数の副画素領域を有する基板を支持するための基板支持部と、
前記基板に蒸着物質を供給するように配置される少なくとも2つの蒸着源と、
前記基板上の中央領域に形成される複数の副画素領域のうちいずれか1つの領域にそれぞれ対応したドット形状の第1開口部が複数個形成された第1領域と、前記複数の第1開口部が形成された前記第1領域の両側に少なくとも1つずつ配置され、前記複数の副画素領域のうち少なくとも2つの領域にそれぞれ対応したストライプ形状の第2開口部が複数個形成された第2領域とを有するマスクと、
を備えることを特徴とする、蒸着装置。 - 前記第1領域及び前記第1領域の両側に形成された第2領域の面積比は、前記第2領域:前記第1領域:前記第2領域=3:4:3の割合であることを特徴とする、請求項4に記載の蒸着装置。
- 前記第1開口部は、前記副画素領域と対応する複数個の開口部が平行に配列されることを特徴とする、請求項4又は5に記載の蒸着装置。
- 基板上に互いに対向する第1及び第2電極層と、
前記第1及び第2電極層との間に備えられる発光層と、
前記発光層に形成された複数の副画素と、
を備え、
前記発光層は、前記基板上の中央領域に形成された前記複数の副画素のうちいずれか1つの領域上にそれぞれ形成した複数個の第1パターンと、前記第1パターンの両側に少なくとも1つずつ形成され、前記複数の副画素のうち少なくとも2つの領域にそれぞれ連続的に形成した複数個の第2パターンと、を有することを特徴とする、有機電界発光表示装置。 - 前記第1パターンは、前記複数の副画素に平行に配列されることを特徴とする、請求項7に記載の有機電界発光表示装置。
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1020060105109A KR100836471B1 (ko) | 2006-10-27 | 2006-10-27 | 마스크 및 이를 이용한 증착 장치 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2008111183A JP2008111183A (ja) | 2008-05-15 |
JP4505473B2 true JP4505473B2 (ja) | 2010-07-21 |
Family
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Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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JP2007012528A Active JP4505473B2 (ja) | 2006-10-27 | 2007-01-23 | マスク、蒸着装置、有機電界発光表示装置 |
Country Status (6)
Country | Link |
---|---|
US (1) | US20080100204A1 (ja) |
EP (1) | EP1916726B1 (ja) |
JP (1) | JP4505473B2 (ja) |
KR (1) | KR100836471B1 (ja) |
CN (1) | CN101168834B (ja) |
TW (1) | TWI382784B (ja) |
Families Citing this family (37)
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TWI472639B (zh) | 2009-05-22 | 2015-02-11 | Samsung Display Co Ltd | 薄膜沉積設備 |
TWI475124B (zh) | 2009-05-22 | 2015-03-01 | Samsung Display Co Ltd | 薄膜沉積設備 |
JP5328726B2 (ja) | 2009-08-25 | 2013-10-30 | 三星ディスプレイ株式會社 | 薄膜蒸着装置及びこれを利用した有機発光ディスプレイ装置の製造方法 |
JP5677785B2 (ja) | 2009-08-27 | 2015-02-25 | 三星ディスプレイ株式會社Samsung Display Co.,Ltd. | 薄膜蒸着装置及びこれを利用した有機発光表示装置の製造方法 |
US8876975B2 (en) | 2009-10-19 | 2014-11-04 | Samsung Display Co., Ltd. | Thin film deposition apparatus |
KR101084184B1 (ko) | 2010-01-11 | 2011-11-17 | 삼성모바일디스플레이주식회사 | 박막 증착 장치 |
KR101174875B1 (ko) | 2010-01-14 | 2012-08-17 | 삼성디스플레이 주식회사 | 박막 증착 장치, 이를 이용한 유기 발광 디스플레이 장치의 제조방법 및 이에 따라 제조된 유기 발광 디스플레이 장치 |
KR101193186B1 (ko) | 2010-02-01 | 2012-10-19 | 삼성디스플레이 주식회사 | 박막 증착 장치, 이를 이용한 유기 발광 디스플레이 장치의 제조방법 및 이에 따라 제조된 유기 발광 디스플레이 장치 |
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-
2007
- 2007-01-23 JP JP2007012528A patent/JP4505473B2/ja active Active
- 2007-05-02 US US11/743,600 patent/US20080100204A1/en not_active Abandoned
- 2007-06-27 CN CN2007101268120A patent/CN101168834B/zh active Active
- 2007-07-12 TW TW096125410A patent/TWI382784B/zh active
- 2007-10-26 EP EP07119429.4A patent/EP1916726B1/en active Active
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2001284048A (ja) * | 2000-04-04 | 2001-10-12 | Sharp Corp | 有機el素子フルカラーディスプレイパネルおよびその製造方法 |
JP2002299051A (ja) * | 2001-03-30 | 2002-10-11 | Sanyo Electric Co Ltd | 半導体装置及び半導体装置製造用マスク |
JP2003163079A (ja) * | 2001-11-27 | 2003-06-06 | Matsushita Electric Ind Co Ltd | 蒸着装置と薄膜形成方法およびそれらを用いた表示装置 |
JP2005519187A (ja) * | 2002-02-14 | 2005-06-30 | スリーエム イノベイティブ プロパティズ カンパニー | 回路製作用アパーチャマスク |
JP2004185832A (ja) * | 2002-11-29 | 2004-07-02 | Samsung Nec Mobile Display Co Ltd | 蒸着マスク、これを利用した有機el素子の製造方法及び有機el素子 |
Also Published As
Publication number | Publication date |
---|---|
EP1916726B1 (en) | 2016-07-20 |
EP1916726A2 (en) | 2008-04-30 |
JP2008111183A (ja) | 2008-05-15 |
TWI382784B (zh) | 2013-01-11 |
KR20080037875A (ko) | 2008-05-02 |
KR100836471B1 (ko) | 2008-06-09 |
CN101168834B (zh) | 2010-09-01 |
CN101168834A (zh) | 2008-04-30 |
EP1916726A3 (en) | 2008-06-11 |
TW200820821A (en) | 2008-05-01 |
US20080100204A1 (en) | 2008-05-01 |
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