JP4503064B2 - 光導波路デバイスの製法およびそれによって得られる光導波路デバイス、並びにそれに用いられる光導波路接続構造 - Google Patents
光導波路デバイスの製法およびそれによって得られる光導波路デバイス、並びにそれに用いられる光導波路接続構造 Download PDFInfo
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- JP4503064B2 JP4503064B2 JP2007300594A JP2007300594A JP4503064B2 JP 4503064 B2 JP4503064 B2 JP 4503064B2 JP 2007300594 A JP2007300594 A JP 2007300594A JP 2007300594 A JP2007300594 A JP 2007300594A JP 4503064 B2 JP4503064 B2 JP 4503064B2
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Images
Classifications
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- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/42—Coupling light guides with opto-electronic elements
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- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/42—Coupling light guides with opto-electronic elements
- G02B6/4201—Packages, e.g. shape, construction, internal or external details
- G02B6/4204—Packages, e.g. shape, construction, internal or external details the coupling comprising intermediate optical elements, e.g. lenses, holograms
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- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B6/122—Basic optical elements, e.g. light-guiding paths
- G02B6/124—Geodesic lenses or integrated gratings
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- G—PHYSICS
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- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
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- G02B6/42—Coupling light guides with opto-electronic elements
- G02B6/4201—Packages, e.g. shape, construction, internal or external details
- G02B6/4219—Mechanical fixtures for holding or positioning the elements relative to each other in the couplings; Alignment methods for the elements, e.g. measuring or observing methods especially used therefor
- G02B6/4236—Fixing or mounting methods of the aligned elements
- G02B6/424—Mounting of the optical light guide
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- G—PHYSICS
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- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
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- G02B6/4201—Packages, e.g. shape, construction, internal or external details
- G02B6/4219—Mechanical fixtures for holding or positioning the elements relative to each other in the couplings; Alignment methods for the elements, e.g. measuring or observing methods especially used therefor
- G02B6/4236—Fixing or mounting methods of the aligned elements
- G02B6/4245—Mounting of the opto-electronic elements
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- G—PHYSICS
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- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
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- G02B6/4201—Packages, e.g. shape, construction, internal or external details
- G02B6/4256—Details of housings
- G02B6/4257—Details of housings having a supporting carrier or a mounting substrate or a mounting plate
- G02B6/4259—Details of housings having a supporting carrier or a mounting substrate or a mounting plate of the transparent type
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- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
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- G02B6/4201—Packages, e.g. shape, construction, internal or external details
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- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
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- G02B6/4281—Electrical aspects containing printed circuit boards [PCB] the printed circuit boards being flexible
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/44—Structure, shape, material or disposition of the wire connectors prior to the connecting process
- H01L2224/45—Structure, shape, material or disposition of the wire connectors prior to the connecting process of an individual wire connector
- H01L2224/45001—Core members of the connector
- H01L2224/45099—Material
- H01L2224/451—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron (B), silicon (Si), germanium (Ge), arsenic (As), antimony (Sb), tellurium (Te) and polonium (Po), and alloys thereof
- H01L2224/45138—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron (B), silicon (Si), germanium (Ge), arsenic (As), antimony (Sb), tellurium (Te) and polonium (Po), and alloys thereof the principal constituent melting at a temperature of greater than or equal to 950°C and less than 1550°C
- H01L2224/45144—Gold (Au) as principal constituent
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
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- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
- H01L2224/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
- H01L2224/4805—Shape
- H01L2224/4809—Loop shape
- H01L2224/48091—Arched
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/15—Details of package parts other than the semiconductor or other solid state devices to be connected
- H01L2924/181—Encapsulation
- H01L2924/1815—Shape
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Optical Couplings Of Light Guides (AREA)
- Optical Integrated Circuits (AREA)
- Led Device Packages (AREA)
- Light Receiving Elements (AREA)
Description
金型として、光導波路差し込み用凹部の開口幅が1mm、凹部の底部幅が0.15mm、光結合用レンズサイズが直径0.1mmとなるような形状を賦形しうる金型を、ガラスを用いて作製した。なお、金型には、アライメントマークを刻設した。
ビスフェノキシエタノールフルオレンジクリシジルエーテル(成分A):70重量部、1,3,3−トリス{4−〔2−(3−オキセタニル)〕ブトキシフェニル}ブタン:30重量部、4,4−ビス〔ジ(β−ヒドロキシエトキシ)フェニルスルフィニオ〕フェニルスルフィド−ビス−ヘキサフルオロアンチモネートの50%プロピオンカーボネート溶液(光酸発生剤:成分B):0.5重量部を乳酸エチル28重量部に溶解することにより、コア形成材料を調製した。
上記成分A:35重量部、(3’,4’−エポキシシクロヘキサン)メチル−3’,4’−エポキシシクロヘキシル−カルボキシレート:40重量部、脂環式エポキシ樹脂(ダイセル化学社製、セロキサイド2021P):25重量部、成分B:1重量部を混合することにより、封止樹脂材料を調製した。
まず、発光素子である面発光レーザ(Optowell社製、SM85−2N001)を、基材厚み38μmのFPCに搭載し、素子裏側の端子に銀ペーストを用い、素子表側の端子に、直径25μmのAu(金)線を用いて、110℃にてワイヤーボンディングを行い、FPCへの実装を行った。
21 発光素子
25 光導波路差し込み用凹部
27 光結合用レンズ
29 コア層
30 光導波路
31 封止樹脂
Claims (4)
- 基板上面に受発光素子を実装する工程と、上記実装された受発光素子の周囲に金型を配置し、この金型内にコア形成材料を充填し硬化させることによりコア層を形成し、それによって上記受発光素子を封止するとともに、上記受発光素子の受発光面に相対するコア層の部位に、光導波路差し込み用凹部と光結合用レンズとを一体的に形成する工程と、脱型後、上記コア層の光導波路差し込み用凹部内に光導波路の一端を差し込み、樹脂で封止固定する工程とを備えた光導波路デバイスの製法であって、上記金型として、石英ガラスおよびシリコンの少なくとも一方を用いてなる透明金型を用い、上記金型配置時に、金型内を透かして見ることにより、金型によって形成される光結合用レンズと受発光素子の受発光点の調芯を行うようにしたことを特徴とする光導波路デバイスの製法。
- 上記光導波路が、長手方向に延びる可とう性のコア層を、クラッド層である帯状フィルムで両面から挟んで積層一体化したものである請求項1記載の光導波路デバイスの製法。
- 請求項1記載の製法によって得られる光導波路デバイスであって、基板上面に実装された受発光素子と、この受発光素子を封止するコア層とを備え、上記コア層の、受発光素子の受発光面に相対する部位に、光導波路差し込み用凹部と光結合用レンズとが一体的に形成されており、上記コア層の凹部内に光導波路の一端が差し込まれ樹脂で封止固定されて、光導波路とコア層内の受発光素子の受発光点とが光結合されていることを特徴とする光導波路デバイス。
- 請求項3記載の光導波路デバイスに用いられる光導波路接続構造であって、基板上面に実装された受発光素子を封止するコア層の、受発光素子の受発光面に相対する部位に、光導波路差し込み用凹部と光結合用レンズとが一体的に形成されており、上記コア層の凹部内に光導波路の一端を差し込み樹脂で封止固定することにより、光導波路とコア層内の受発光素子とが光結合されるようになっていることを特徴とする光導波路接続構造。
Priority Applications (5)
Application Number | Priority Date | Filing Date | Title |
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JP2007300594A JP4503064B2 (ja) | 2007-11-20 | 2007-11-20 | 光導波路デバイスの製法およびそれによって得られる光導波路デバイス、並びにそれに用いられる光導波路接続構造 |
EP08020117.1A EP2063302B1 (en) | 2007-11-20 | 2008-11-18 | Optical waveguide device production method, optical waveguide device produced by the method, and optical waveguide connection structure to be used for the device |
US12/273,084 US7906355B2 (en) | 2007-11-20 | 2008-11-18 | Optical waveguide device production method, optical waveguide device produced by the method, and optical waveguide connection structure to be used for the device |
KR20080115102A KR101510895B1 (ko) | 2007-11-20 | 2008-11-19 | 광도파로 디바이스의 제조 방법 및 이에 의해 얻어지는 광도파로 디바이스, 및 이에 사용되는 광도파로 접속 구조 |
CN2008101809747A CN101441298B (zh) | 2007-11-20 | 2008-11-20 | 光波导路装置及其制造方法、以及光波导路连接结构 |
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JP2007300594A JP4503064B2 (ja) | 2007-11-20 | 2007-11-20 | 光導波路デバイスの製法およびそれによって得られる光導波路デバイス、並びにそれに用いられる光導波路接続構造 |
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JP2009128430A JP2009128430A (ja) | 2009-06-11 |
JP4503064B2 true JP4503064B2 (ja) | 2010-07-14 |
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Country Status (5)
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US (1) | US7906355B2 (ja) |
EP (1) | EP2063302B1 (ja) |
JP (1) | JP4503064B2 (ja) |
KR (1) | KR101510895B1 (ja) |
CN (1) | CN101441298B (ja) |
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WO2009104438A1 (ja) * | 2008-02-18 | 2009-08-27 | 株式会社 村田製作所 | 弾性波装置及びその製造方法 |
JP5402083B2 (ja) * | 2008-09-29 | 2014-01-29 | ソニー株式会社 | 固体撮像装置とその製造方法、及び電子機器 |
JP5457913B2 (ja) * | 2010-03-31 | 2014-04-02 | ヒロセ電機株式会社 | 光モジュール装置及びその製造方法 |
JP2012064719A (ja) * | 2010-09-15 | 2012-03-29 | Sumitomo Electric Ind Ltd | 光源装置、ディスプレイ装置 |
TWI509300B (zh) * | 2011-12-14 | 2015-11-21 | Hon Hai Prec Ind Co Ltd | 光耦合模組及其製作方法 |
JP5594316B2 (ja) * | 2012-05-11 | 2014-09-24 | 株式会社村田製作所 | 光伝送モジュール |
JP2014197364A (ja) * | 2013-03-07 | 2014-10-16 | 日東電工株式会社 | 情報表示システム |
KR101622469B1 (ko) * | 2013-07-05 | 2016-05-19 | 엘에스엠트론 주식회사 | 수동광정렬을 위한 옵티컬블럭을 구비하는 광모듈 및 그 제조방법 |
JP6255237B2 (ja) * | 2013-12-25 | 2017-12-27 | 株式会社エンプラス | 光レセプタクルおよび光モジュール |
JP6369936B2 (ja) * | 2014-07-31 | 2018-08-08 | 日東電工株式会社 | 光センサ |
KR20160067230A (ko) * | 2014-12-03 | 2016-06-14 | 엘에스엠트론 주식회사 | 광모듈의 광소자와 광전송부재 간의 광축정렬방법 |
US9678289B1 (en) * | 2015-12-02 | 2017-06-13 | International Business Machines Corporation | Thermal management of optical coupling systems |
GB2555398B (en) * | 2016-10-24 | 2020-04-08 | Toshiba Kk | An optoelectronic system and method for its fabrication |
CN109567782B (zh) * | 2017-09-28 | 2022-03-11 | 陈右颖 | 结合有光波导的神经探针及其制造方法 |
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JP2000243980A (ja) * | 1999-02-22 | 2000-09-08 | Infineon Technologies Ag | 電子光学的なモジュールと、該電子光学的なモジュールを製作するための方法及び注型 |
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DE10151113B4 (de) * | 2001-10-15 | 2004-03-25 | Infineon Technologies Ag | Opto-elektronisches Modul und Verfahren zu seiner Herstellung |
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JP2006210297A (ja) | 2005-01-31 | 2006-08-10 | Tdk Corp | Elパネルの製造方法 |
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JPH042179A (ja) * | 1990-04-18 | 1992-01-07 | Honda Motor Co Ltd | 光リンクの製造方法 |
JP2000515687A (ja) * | 1996-08-06 | 2000-11-21 | ノーテル・ネットワークス・コーポレーション | 半導体光検出器パッケージング |
US6312624B1 (en) * | 1997-03-07 | 2001-11-06 | Infineon Technologies Ag | Method for producing an electrooptical module |
JPH10307237A (ja) * | 1997-05-08 | 1998-11-17 | New Japan Radio Co Ltd | 一体型光通信用半導体装置 |
JP2000110176A (ja) * | 1998-10-02 | 2000-04-18 | Fujitsu Ltd | 光モジュール及びその製造方法 |
JP2000243980A (ja) * | 1999-02-22 | 2000-09-08 | Infineon Technologies Ag | 電子光学的なモジュールと、該電子光学的なモジュールを製作するための方法及び注型 |
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US20040061956A1 (en) * | 2002-03-08 | 2004-04-01 | Nikolaus Schunk | Receiving and coupling part for opto-electronic transmission and/or reception element |
US20040085609A1 (en) * | 2002-10-29 | 2004-05-06 | Manfred Fries | Method for producing an optoelectronic component |
JP2005024617A (ja) * | 2003-06-30 | 2005-01-27 | Sharp Corp | 光送信器 |
JP2005055796A (ja) * | 2003-08-07 | 2005-03-03 | Sanyo Electric Co Ltd | 反射防止部材を設けた光コネクタ及びその形成方法 |
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JP2007173562A (ja) * | 2005-12-22 | 2007-07-05 | Sharp Corp | 光半導体装置およびそれを備えた電子機器 |
DE102007044555A1 (de) * | 2007-07-18 | 2009-01-22 | Siemens Ag | Optische Koppelvorrichtung und Verfahren zu deren Herstellung |
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KR20090052286A (ko) | 2009-05-25 |
US20090127577A1 (en) | 2009-05-21 |
US7906355B2 (en) | 2011-03-15 |
EP2063302B1 (en) | 2016-04-06 |
CN101441298B (zh) | 2011-12-21 |
KR101510895B1 (ko) | 2015-04-10 |
CN101441298A (zh) | 2009-05-27 |
EP2063302A1 (en) | 2009-05-27 |
JP2009128430A (ja) | 2009-06-11 |
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