JP4500871B2 - クリーンルームの排気システム及びその施工方法 - Google Patents
クリーンルームの排気システム及びその施工方法 Download PDFInfo
- Publication number
- JP4500871B2 JP4500871B2 JP2008278465A JP2008278465A JP4500871B2 JP 4500871 B2 JP4500871 B2 JP 4500871B2 JP 2008278465 A JP2008278465 A JP 2008278465A JP 2008278465 A JP2008278465 A JP 2008278465A JP 4500871 B2 JP4500871 B2 JP 4500871B2
- Authority
- JP
- Japan
- Prior art keywords
- lid
- clean room
- exhaust system
- rib
- retainer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 238000010276 construction Methods 0.000 title description 10
- 230000003014 reinforcing effect Effects 0.000 claims description 30
- 238000000034 method Methods 0.000 claims description 14
- 230000002093 peripheral effect Effects 0.000 claims description 9
- 239000003566 sealing material Substances 0.000 claims description 7
- 239000000463 material Substances 0.000 claims description 3
- 229910052710 silicon Inorganic materials 0.000 claims description 3
- 239000010703 silicon Substances 0.000 claims description 3
- 239000002344 surface layer Substances 0.000 claims description 3
- 229920003002 synthetic resin Polymers 0.000 claims description 3
- 239000000057 synthetic resin Substances 0.000 claims description 3
- 239000004593 Epoxy Substances 0.000 claims description 2
- 239000003973 paint Substances 0.000 claims description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 9
- 229910052782 aluminium Inorganic materials 0.000 description 9
- 238000004519 manufacturing process Methods 0.000 description 7
- 239000004065 semiconductor Substances 0.000 description 4
- 238000010353 genetic engineering Methods 0.000 description 3
- 238000004512 die casting Methods 0.000 description 2
- 239000010419 fine particle Substances 0.000 description 2
- 238000012423 maintenance Methods 0.000 description 2
- RKTYLMNFRDHKIL-UHFFFAOYSA-N copper;5,10,15,20-tetraphenylporphyrin-22,24-diide Chemical compound [Cu+2].C1=CC(C(=C2C=CC([N-]2)=C(C=2C=CC=CC=2)C=2C=CC(N=2)=C(C=2C=CC=CC=2)C2=CC=C3[N-]2)C=2C=CC=CC=2)=NC1=C3C1=CC=CC=C1 RKTYLMNFRDHKIL-UHFFFAOYSA-N 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 238000005192 partition Methods 0.000 description 1
Images
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F24—HEATING; RANGES; VENTILATING
- F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
- F24F13/00—Details common to, or for air-conditioning, air-humidification, ventilation or use of air currents for screening
- F24F13/02—Ducting arrangements
- F24F13/0227—Ducting arrangements using parts of the building, e.g. air ducts inside the floor, walls or ceiling of a building
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F24—HEATING; RANGES; VENTILATING
- F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
- F24F13/00—Details common to, or for air-conditioning, air-humidification, ventilation or use of air currents for screening
- F24F13/02—Ducting arrangements
- F24F13/0245—Manufacturing or assembly of air ducts; Methods therefor
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F24—HEATING; RANGES; VENTILATING
- F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
- F24F13/00—Details common to, or for air-conditioning, air-humidification, ventilation or use of air currents for screening
- F24F13/02—Ducting arrangements
- F24F13/0254—Ducting arrangements characterised by their mounting means, e.g. supports
Landscapes
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Combustion & Propulsion (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Civil Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Ventilation (AREA)
- Floor Finish (AREA)
- Building Environments (AREA)
- Forms Removed On Construction Sites Or Auxiliary Members Thereof (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1020080076599A KR101004008B1 (ko) | 2008-08-05 | 2008-08-05 | 클린룸 배기 장치 및 그 시공방법 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2010037931A JP2010037931A (ja) | 2010-02-18 |
JP4500871B2 true JP4500871B2 (ja) | 2010-07-14 |
Family
ID=41656464
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2008278465A Active JP4500871B2 (ja) | 2008-08-05 | 2008-10-29 | クリーンルームの排気システム及びその施工方法 |
Country Status (4)
Country | Link |
---|---|
JP (1) | JP4500871B2 (zh) |
KR (1) | KR101004008B1 (zh) |
CN (1) | CN101644476A (zh) |
TW (1) | TW201007098A (zh) |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN105276781B (zh) * | 2014-07-24 | 2017-12-15 | 惠亚科技(苏州)有限公司 | 一种定位用套座 |
CN104314189B (zh) * | 2014-08-26 | 2017-12-29 | 中国直升机设计研究所 | 一种旋翼噪声试验全消声室 |
TWI759777B (zh) * | 2020-06-20 | 2022-04-01 | 惠亞工程股份有限公司 | 潔淨室華夫桶防墜裝置 |
CN113548071B (zh) * | 2021-06-28 | 2024-03-26 | 重庆科筑城市运营服务(集团)有限公司 | 一种轨道交通专用内窗式新风净化换气机安装装置 |
CN117329526B (zh) * | 2023-11-28 | 2024-07-23 | 江苏博泰环保工程有限公司 | 一种固体废弃物环保处理装置 |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2003219535A (ja) * | 2002-01-24 | 2003-07-31 | Tadahiro Omi | クリーンルームの配線収納ピット |
Family Cites Families (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS58123142U (ja) * | 1982-02-16 | 1983-08-22 | 協同機材株式会社 | クリ−ン.ル−ム用グレ−チング |
JPS6284708A (ja) * | 1985-10-11 | 1987-04-18 | 横浜ゴム株式会社 | 帯電防止用マツト |
CN2079090U (zh) * | 1990-11-22 | 1991-06-19 | 青岛市崂山区节能设备厂 | 节能型温控净化汽车喷烤漆烘房 |
JP3365526B2 (ja) * | 1994-03-01 | 2003-01-14 | 新日本製鐵株式会社 | 床吹出し空調システムにおける空調方法,及び床吹出し空調システム |
US5910045A (en) * | 1995-09-07 | 1999-06-08 | Daikin Industries, Ltd. | Air discharge unit for underfloor air conditioning and underfloor air conditioning system using same |
CN1177828A (zh) * | 1996-08-28 | 1998-04-01 | 索尼株式会社 | 生产半导体器件的超净车间 |
CN2486606Y (zh) * | 2001-06-13 | 2002-04-17 | 黄清标 | 一种井盖套座 |
JP2004205080A (ja) | 2002-12-24 | 2004-07-22 | Kanden Industries Inc | 床吹出口装置 |
-
2008
- 2008-08-05 KR KR1020080076599A patent/KR101004008B1/ko active IP Right Grant
- 2008-10-14 TW TW097139303A patent/TW201007098A/zh unknown
- 2008-10-29 JP JP2008278465A patent/JP4500871B2/ja active Active
- 2008-12-01 CN CN200810178830A patent/CN101644476A/zh active Pending
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2003219535A (ja) * | 2002-01-24 | 2003-07-31 | Tadahiro Omi | クリーンルームの配線収納ピット |
Also Published As
Publication number | Publication date |
---|---|
TW201007098A (en) | 2010-02-16 |
CN101644476A (zh) | 2010-02-10 |
KR101004008B1 (ko) | 2010-12-31 |
JP2010037931A (ja) | 2010-02-18 |
KR20100016940A (ko) | 2010-02-16 |
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