JP4459648B2 - フッ素含有化合物を含むガスの処理方法及び装置 - Google Patents

フッ素含有化合物を含むガスの処理方法及び装置 Download PDF

Info

Publication number
JP4459648B2
JP4459648B2 JP2004039818A JP2004039818A JP4459648B2 JP 4459648 B2 JP4459648 B2 JP 4459648B2 JP 2004039818 A JP2004039818 A JP 2004039818A JP 2004039818 A JP2004039818 A JP 2004039818A JP 4459648 B2 JP4459648 B2 JP 4459648B2
Authority
JP
Japan
Prior art keywords
gas
column
reaction section
stage
treated
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP2004039818A
Other languages
English (en)
Japanese (ja)
Other versions
JP2005230609A (ja
Inventor
洋一 森
忠一 西川
雅昭 大里
宏明 小神野
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ebara Corp
Original Assignee
Ebara Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ebara Corp filed Critical Ebara Corp
Priority to JP2004039818A priority Critical patent/JP4459648B2/ja
Priority to PCT/JP2005/002682 priority patent/WO2005077496A1/fr
Priority to TW094104409A priority patent/TWI372074B/zh
Publication of JP2005230609A publication Critical patent/JP2005230609A/ja
Application granted granted Critical
Publication of JP4459648B2 publication Critical patent/JP4459648B2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Images

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/34—Chemical or biological purification of waste gases
    • B01D53/74—General processes for purification of waste gases; Apparatus or devices specially adapted therefor
    • B01D53/86—Catalytic processes
    • B01D53/8659—Removing halogens or halogen compounds
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02C—CAPTURE, STORAGE, SEQUESTRATION OR DISPOSAL OF GREENHOUSE GASES [GHG]
    • Y02C20/00—Capture or disposal of greenhouse gases
    • Y02C20/30—Capture or disposal of greenhouse gases of perfluorocarbons [PFC], hydrofluorocarbons [HFC] or sulfur hexafluoride [SF6]

Landscapes

  • Engineering & Computer Science (AREA)
  • Environmental & Geological Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Biomedical Technology (AREA)
  • Analytical Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Oil, Petroleum & Natural Gas (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Exhaust Gas Treatment By Means Of Catalyst (AREA)
  • Catalysts (AREA)
  • Treating Waste Gases (AREA)
JP2004039818A 2004-02-17 2004-02-17 フッ素含有化合物を含むガスの処理方法及び装置 Expired - Lifetime JP4459648B2 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2004039818A JP4459648B2 (ja) 2004-02-17 2004-02-17 フッ素含有化合物を含むガスの処理方法及び装置
PCT/JP2005/002682 WO2005077496A1 (fr) 2004-02-17 2005-02-15 Procédé et appareil pour traiter un gas contenant des composés contenant du fluor
TW094104409A TWI372074B (en) 2004-02-17 2005-02-16 Method and apparatus for treating gas containing fluorine-containing compounds

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2004039818A JP4459648B2 (ja) 2004-02-17 2004-02-17 フッ素含有化合物を含むガスの処理方法及び装置

Publications (2)

Publication Number Publication Date
JP2005230609A JP2005230609A (ja) 2005-09-02
JP4459648B2 true JP4459648B2 (ja) 2010-04-28

Family

ID=34857858

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2004039818A Expired - Lifetime JP4459648B2 (ja) 2004-02-17 2004-02-17 フッ素含有化合物を含むガスの処理方法及び装置

Country Status (3)

Country Link
JP (1) JP4459648B2 (fr)
TW (1) TWI372074B (fr)
WO (1) WO2005077496A1 (fr)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101977928B1 (ko) * 2017-06-09 2019-05-14 한국에너지기술연구원 촉매반응-산성가스제거반응 일체형 다단 pfc 처리용 장치 및 이를 이용한 pfc 처리 공정
KR102466748B1 (ko) * 2020-05-07 2022-11-14 코아텍주식회사 과불화화합물 가스의 촉매 분해 장치
KR20240020224A (ko) * 2022-08-04 2024-02-14 주식회사 에코프로에이치엔 과불화화합물 분해용 촉매

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06177B2 (ja) * 1990-02-05 1994-01-05 株式会社荏原総合研究所 Ｃ１ｆ▲下３▼を含有する排ガスの処理方法
JP3199224B2 (ja) * 1996-11-05 2001-08-13 セントラル硝子株式会社 フッ化水素ガスの乾式処理方法
JPH10337439A (ja) * 1997-06-09 1998-12-22 Hitachi Ltd 含フッ素有機ハロゲン化合物の排ガス処理装置およびその処理方法
JPH11179201A (ja) * 1997-12-19 1999-07-06 Ube Ind Ltd 含フッ素化合物分解処理用触媒および含フッ素化合物 分解処理方法
JP4065672B2 (ja) * 2001-10-10 2008-03-26 株式会社荏原製作所 フッ素含有化合物を含む排ガスの処理方法及び装置
JP4214717B2 (ja) * 2002-05-31 2009-01-28 株式会社日立製作所 過弗化物処理装置

Also Published As

Publication number Publication date
TWI372074B (en) 2012-09-11
TW200531736A (en) 2005-10-01
WO2005077496A1 (fr) 2005-08-25
WO2005077496A8 (fr) 2005-11-24
JP2005230609A (ja) 2005-09-02

Similar Documents

Publication Publication Date Title
EP1732669B1 (fr) Procede et appareil de traitement de gaz renfermant des composes contenant du fluor
JP3976459B2 (ja) フッ素含有化合物を含む排ガスの処理方法及び装置
JP4237942B2 (ja) フッ素含有化合物を含む排ガスの処理方法及び装置
KR100860835B1 (ko) 육불화황의 처리방법
US6790421B2 (en) Method for treating exhaust gas containing fluorine-containing compound
JP4080336B2 (ja) フッ素含有化合物の分解
JP4459648B2 (ja) フッ素含有化合物を含むガスの処理方法及び装置
JP2004223302A (ja) 排ガスの処理方法および装置
JP4518460B2 (ja) 排ガスからフッ素成分を選択的に回収する方法
KR920007856B1 (ko) 기체상태의 산성 할로겐 화합물의 제거방법
JP2002224535A (ja) フッ素含有化合物及びｃｏを含むガスの処理方法及び装置
JP3548135B2 (ja) Ｐｆｃ混合排ガスの回収前処理方法
JP3650588B2 (ja) パーフルオロコンパウンドのリサイクル利用方法
JP4845812B2 (ja) フッ素含有化合物を含む排ガスの処理装置
JP5471313B2 (ja) 三フッ化塩素の除害方法
JP2000354733A (ja) 排ガスの処理方法およびそれを用いた装置
JP3463873B2 (ja) パーフルオロコンパウンドのリサイクル利用方法
JP5651306B2 (ja) フッ素回収方法およびその装置
JP2009078237A (ja) 半導体，液晶製造装置からの排出ガス処理方法
JP2002284512A (ja) 高純度三弗化窒素の製造方法
JP2005185897A (ja) 六フッ化硫黄ガスの処理方法
JP3565742B2 (ja) フッ素含有化合物ガスの処理方法
JP3570136B2 (ja) 有機ハロゲン化合物含有ガスの処理方法及び有機ハロゲン化合物分解触媒
JPH11276860A (ja) フルオロカーボンの分解処理方法および分解処理装置
JP2008155070A (ja) ハロゲン化合物の分解処理方法及び装置

Legal Events

Date Code Title Description
A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20070207

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20080930

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20081128

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20091028

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20091208

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20100112

A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20100210

R150 Certificate of patent or registration of utility model

Free format text: JAPANESE INTERMEDIATE CODE: R150

Ref document number: 4459648

Country of ref document: JP

Free format text: JAPANESE INTERMEDIATE CODE: R150

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20130219

Year of fee payment: 3

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20140219

Year of fee payment: 4

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

EXPY Cancellation because of completion of term