TWI372074B - Method and apparatus for treating gas containing fluorine-containing compounds - Google Patents

Method and apparatus for treating gas containing fluorine-containing compounds

Info

Publication number
TWI372074B
TWI372074B TW094104409A TW94104409A TWI372074B TW I372074 B TWI372074 B TW I372074B TW 094104409 A TW094104409 A TW 094104409A TW 94104409 A TW94104409 A TW 94104409A TW I372074 B TWI372074 B TW I372074B
Authority
TW
Taiwan
Prior art keywords
treating gas
gas containing
containing compounds
fluorine
containing fluorine
Prior art date
Application number
TW094104409A
Other languages
English (en)
Other versions
TW200531736A (en
Inventor
Yoichi Mori
Tadakazu Nishikawa
Masaaki Osato
Hiroaki Ogamino
Original Assignee
Ebara Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ebara Corp filed Critical Ebara Corp
Publication of TW200531736A publication Critical patent/TW200531736A/zh
Application granted granted Critical
Publication of TWI372074B publication Critical patent/TWI372074B/zh

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/34—Chemical or biological purification of waste gases
    • B01D53/74—General processes for purification of waste gases; Apparatus or devices specially adapted therefor
    • B01D53/86—Catalytic processes
    • B01D53/8659—Removing halogens or halogen compounds
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02C—CAPTURE, STORAGE, SEQUESTRATION OR DISPOSAL OF GREENHOUSE GASES [GHG]
    • Y02C20/00—Capture or disposal of greenhouse gases
    • Y02C20/30—Capture or disposal of greenhouse gases of perfluorocarbons [PFC], hydrofluorocarbons [HFC] or sulfur hexafluoride [SF6]

Landscapes

  • Engineering & Computer Science (AREA)
  • Environmental & Geological Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Biomedical Technology (AREA)
  • Analytical Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Oil, Petroleum & Natural Gas (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Exhaust Gas Treatment By Means Of Catalyst (AREA)
  • Catalysts (AREA)
  • Treating Waste Gases (AREA)
TW094104409A 2004-02-17 2005-02-16 Method and apparatus for treating gas containing fluorine-containing compounds TWI372074B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2004039818A JP4459648B2 (ja) 2004-02-17 2004-02-17 フッ素含有化合物を含むガスの処理方法及び装置

Publications (2)

Publication Number Publication Date
TW200531736A TW200531736A (en) 2005-10-01
TWI372074B true TWI372074B (en) 2012-09-11

Family

ID=34857858

Family Applications (1)

Application Number Title Priority Date Filing Date
TW094104409A TWI372074B (en) 2004-02-17 2005-02-16 Method and apparatus for treating gas containing fluorine-containing compounds

Country Status (3)

Country Link
JP (1) JP4459648B2 (zh)
TW (1) TWI372074B (zh)
WO (1) WO2005077496A1 (zh)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101977928B1 (ko) * 2017-06-09 2019-05-14 한국에너지기술연구원 촉매반응-산성가스제거반응 일체형 다단 pfc 처리용 장치 및 이를 이용한 pfc 처리 공정
KR102466748B1 (ko) * 2020-05-07 2022-11-14 코아텍주식회사 과불화화합물 가스의 촉매 분해 장치
KR20240020224A (ko) * 2022-08-04 2024-02-14 주식회사 에코프로에이치엔 과불화화합물 분해용 촉매

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06177B2 (ja) * 1990-02-05 1994-01-05 株式会社荏原総合研究所 Ｃ１ｆ▲下３▼を含有する排ガスの処理方法
JP3199224B2 (ja) * 1996-11-05 2001-08-13 セントラル硝子株式会社 フッ化水素ガスの乾式処理方法
JPH10337439A (ja) * 1997-06-09 1998-12-22 Hitachi Ltd 含フッ素有機ハロゲン化合物の排ガス処理装置およびその処理方法
JPH11179201A (ja) * 1997-12-19 1999-07-06 Ube Ind Ltd 含フッ素化合物分解処理用触媒および含フッ素化合物 分解処理方法
JP4065672B2 (ja) * 2001-10-10 2008-03-26 株式会社荏原製作所 フッ素含有化合物を含む排ガスの処理方法及び装置
JP4214717B2 (ja) * 2002-05-31 2009-01-28 株式会社日立製作所 過弗化物処理装置

Also Published As

Publication number Publication date
TW200531736A (en) 2005-10-01
WO2005077496A1 (en) 2005-08-25
JP4459648B2 (ja) 2010-04-28
WO2005077496A8 (en) 2005-11-24
JP2005230609A (ja) 2005-09-02

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