JP4414641B2 - 潤滑補助されたエレクトロウェッティングによる調整可能な液体マイクロレンズ - Google Patents
潤滑補助されたエレクトロウェッティングによる調整可能な液体マイクロレンズ Download PDFInfo
- Publication number
- JP4414641B2 JP4414641B2 JP2002267498A JP2002267498A JP4414641B2 JP 4414641 B2 JP4414641 B2 JP 4414641B2 JP 2002267498 A JP2002267498 A JP 2002267498A JP 2002267498 A JP2002267498 A JP 2002267498A JP 4414641 B2 JP4414641 B2 JP 4414641B2
- Authority
- JP
- Japan
- Prior art keywords
- droplet
- insulating layer
- microlens
- electrodes
- liquid
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 239000007788 liquid Substances 0.000 title claims description 96
- 239000000758 substrate Substances 0.000 claims description 39
- 230000001050 lubricating effect Effects 0.000 claims description 33
- 230000003287 optical effect Effects 0.000 claims description 14
- 230000008859 change Effects 0.000 claims description 13
- 238000000034 method Methods 0.000 claims description 5
- 239000000314 lubricant Substances 0.000 claims description 4
- 229920002545 silicone oil Polymers 0.000 claims description 3
- 230000000149 penetrating effect Effects 0.000 claims 1
- 239000010410 layer Substances 0.000 description 98
- 239000000463 material Substances 0.000 description 27
- 238000005461 lubrication Methods 0.000 description 7
- 239000011521 glass Substances 0.000 description 6
- 230000008878 coupling Effects 0.000 description 5
- 238000010168 coupling process Methods 0.000 description 5
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- 239000004642 Polyimide Substances 0.000 description 4
- 239000004809 Teflon Substances 0.000 description 4
- 229920006362 Teflon® Polymers 0.000 description 4
- 229920002313 fluoropolymer Polymers 0.000 description 4
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 4
- 239000010931 gold Substances 0.000 description 4
- 229910052737 gold Inorganic materials 0.000 description 4
- 229930195733 hydrocarbon Natural products 0.000 description 4
- 150000002430 hydrocarbons Chemical class 0.000 description 4
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- AMGQUBHHOARCQH-UHFFFAOYSA-N indium;oxotin Chemical compound [In].[Sn]=O AMGQUBHHOARCQH-UHFFFAOYSA-N 0.000 description 3
- 229920000642 polymer Polymers 0.000 description 3
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- KBPLFHHGFOOTCA-UHFFFAOYSA-N 1-Octanol Chemical compound CCCCCCCCO KBPLFHHGFOOTCA-UHFFFAOYSA-N 0.000 description 2
- AMQJEAYHLZJPGS-UHFFFAOYSA-N N-Pentanol Chemical compound CCCCCO AMQJEAYHLZJPGS-UHFFFAOYSA-N 0.000 description 2
- 239000007864 aqueous solution Substances 0.000 description 2
- 239000000356 contaminant Substances 0.000 description 2
- 239000000382 optic material Substances 0.000 description 2
- 230000005693 optoelectronics Effects 0.000 description 2
- 239000000075 oxide glass Substances 0.000 description 2
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- 239000004793 Polystyrene Substances 0.000 description 1
- 239000000654 additive Substances 0.000 description 1
- 150000001298 alcohols Chemical class 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
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- 239000010409 thin film Substances 0.000 description 1
- 238000009736 wetting Methods 0.000 description 1
Images
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/004—Optical devices or arrangements for the control of light using movable or deformable optical elements based on a displacement or a deformation of a fluid
- G02B26/005—Optical devices or arrangements for the control of light using movable or deformable optical elements based on a displacement or a deformation of a fluid based on electrowetting
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B3/00—Simple or compound lenses
- G02B3/12—Fluid-filled or evacuated lenses
- G02B3/14—Fluid-filled or evacuated lenses of variable focal length
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/42—Coupling light guides with opto-electronic elements
- G02B6/4201—Packages, e.g. shape, construction, internal or external details
- G02B6/4204—Packages, e.g. shape, construction, internal or external details the coupling comprising intermediate optical elements, e.g. lenses, holograms
- G02B6/4214—Packages, e.g. shape, construction, internal or external details the coupling comprising intermediate optical elements, e.g. lenses, holograms the intermediate optical element having redirecting reflective means, e.g. mirrors, prisms for deflecting the radiation from horizontal to down- or upward direction toward a device
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Mechanical Light Control Or Optical Switches (AREA)
- Transforming Light Signals Into Electric Signals (AREA)
- Electrochromic Elements, Electrophoresis, Or Variable Reflection Or Absorption Elements (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US09/951637 | 2001-09-13 | ||
| US09/951,637 US6545815B2 (en) | 2001-09-13 | 2001-09-13 | Tunable liquid microlens with lubrication assisted electrowetting |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2003177219A JP2003177219A (ja) | 2003-06-27 |
| JP2003177219A5 JP2003177219A5 (enExample) | 2005-08-04 |
| JP4414641B2 true JP4414641B2 (ja) | 2010-02-10 |
Family
ID=25491954
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2002267498A Expired - Fee Related JP4414641B2 (ja) | 2001-09-13 | 2002-09-13 | 潤滑補助されたエレクトロウェッティングによる調整可能な液体マイクロレンズ |
Country Status (6)
| Country | Link |
|---|---|
| US (1) | US6545815B2 (enExample) |
| EP (1) | EP1293807B1 (enExample) |
| JP (1) | JP4414641B2 (enExample) |
| CN (1) | CN1265213C (enExample) |
| CA (1) | CA2395766C (enExample) |
| DE (1) | DE60215093T2 (enExample) |
Families Citing this family (141)
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-
2001
- 2001-09-13 US US09/951,637 patent/US6545815B2/en not_active Expired - Lifetime
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2002
- 2002-03-22 DE DE60215093T patent/DE60215093T2/de not_active Expired - Lifetime
- 2002-03-22 EP EP02252089A patent/EP1293807B1/en not_active Expired - Lifetime
- 2002-07-25 CA CA002395766A patent/CA2395766C/en not_active Expired - Fee Related
- 2002-09-10 CN CNB021416753A patent/CN1265213C/zh not_active Expired - Fee Related
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|---|---|
| DE60215093T2 (de) | 2007-03-08 |
| EP1293807A1 (en) | 2003-03-19 |
| CA2395766A1 (en) | 2003-03-13 |
| CN1407353A (zh) | 2003-04-02 |
| CN1265213C (zh) | 2006-07-19 |
| US6545815B2 (en) | 2003-04-08 |
| DE60215093D1 (de) | 2006-11-16 |
| CA2395766C (en) | 2006-01-31 |
| US20030048541A1 (en) | 2003-03-13 |
| JP2003177219A (ja) | 2003-06-27 |
| EP1293807B1 (en) | 2006-10-04 |
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