JP4363432B2 - 移載装置 - Google Patents

移載装置 Download PDF

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Publication number
JP4363432B2
JP4363432B2 JP2006255208A JP2006255208A JP4363432B2 JP 4363432 B2 JP4363432 B2 JP 4363432B2 JP 2006255208 A JP2006255208 A JP 2006255208A JP 2006255208 A JP2006255208 A JP 2006255208A JP 4363432 B2 JP4363432 B2 JP 4363432B2
Authority
JP
Japan
Prior art keywords
transfer
arm
unit
base
slide
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP2006255208A
Other languages
English (en)
Japanese (ja)
Other versions
JP2008074549A (ja
Inventor
和広 石川
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Murata Machinery Ltd
Original Assignee
Murata Machinery Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Murata Machinery Ltd filed Critical Murata Machinery Ltd
Priority to JP2006255208A priority Critical patent/JP4363432B2/ja
Priority to TW096134291A priority patent/TW200819373A/zh
Priority to KR1020070094306A priority patent/KR101112011B1/ko
Priority to CN2007101531277A priority patent/CN101148225B/zh
Publication of JP2008074549A publication Critical patent/JP2008074549A/ja
Application granted granted Critical
Publication of JP4363432B2 publication Critical patent/JP4363432B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67706—Mechanical details, e.g. roller, belt
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Manipulator (AREA)
  • Warehouses Or Storage Devices (AREA)
JP2006255208A 2006-09-21 2006-09-21 移載装置 Expired - Fee Related JP4363432B2 (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP2006255208A JP4363432B2 (ja) 2006-09-21 2006-09-21 移載装置
TW096134291A TW200819373A (en) 2006-09-21 2007-09-13 Transfer equipment
KR1020070094306A KR101112011B1 (ko) 2006-09-21 2007-09-17 이송 장치
CN2007101531277A CN101148225B (zh) 2006-09-21 2007-09-21 移载装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2006255208A JP4363432B2 (ja) 2006-09-21 2006-09-21 移載装置

Publications (2)

Publication Number Publication Date
JP2008074549A JP2008074549A (ja) 2008-04-03
JP4363432B2 true JP4363432B2 (ja) 2009-11-11

Family

ID=39248948

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2006255208A Expired - Fee Related JP4363432B2 (ja) 2006-09-21 2006-09-21 移載装置

Country Status (4)

Country Link
JP (1) JP4363432B2 (ko)
KR (1) KR101112011B1 (ko)
CN (1) CN101148225B (ko)
TW (1) TW200819373A (ko)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5234328B2 (ja) * 2008-04-11 2013-07-10 株式会社ダイフク 物品収納設備
JP5618190B2 (ja) * 2010-08-05 2014-11-05 村田機械株式会社 供給搬出システム
US9701471B2 (en) * 2012-08-31 2017-07-11 Murata Machinery, Ltd. Transfer device
CN102795442A (zh) * 2012-09-06 2012-11-28 深圳市华星光电技术有限公司 一种自动化物料搬运系统
CN104986558B (zh) * 2015-07-10 2017-03-29 东莞市科隆威自动化设备有限公司 双线印刷机中间交叉移载产品的交叉移载装置
JP6192131B2 (ja) * 2015-12-10 2017-09-06 アイダエンジニアリング株式会社 プレス機械のワーク搬送装置
JP2018062407A (ja) * 2016-10-13 2018-04-19 株式会社ダイフク 移載装置

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06156632A (ja) * 1992-11-27 1994-06-03 Murata Mach Ltd クレーンの昇降台
JPH11216691A (ja) 1998-02-03 1999-08-10 Hitachi Ltd フロッグレッグ形ロボット並びに処理装置および処理方法
JP2000042952A (ja) * 1998-07-27 2000-02-15 Hitachi Ltd 搬送装置及び搬送方法
JP2003054705A (ja) 2001-08-07 2003-02-26 Nippon Yusoki Co Ltd 自動倉庫システム
KR100479494B1 (ko) * 2002-09-18 2005-03-30 삼성전자주식회사 기판 반송 로봇

Also Published As

Publication number Publication date
TWI374108B (ko) 2012-10-11
KR101112011B1 (ko) 2012-02-24
CN101148225A (zh) 2008-03-26
CN101148225B (zh) 2012-12-12
KR20080027144A (ko) 2008-03-26
JP2008074549A (ja) 2008-04-03
TW200819373A (en) 2008-05-01

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