CN101148225B - 移载装置 - Google Patents

移载装置 Download PDF

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Publication number
CN101148225B
CN101148225B CN2007101531277A CN200710153127A CN101148225B CN 101148225 B CN101148225 B CN 101148225B CN 2007101531277 A CN2007101531277 A CN 2007101531277A CN 200710153127 A CN200710153127 A CN 200710153127A CN 101148225 B CN101148225 B CN 101148225B
Authority
CN
China
Prior art keywords
transfer
arm
mentioned
shifting apparatus
base station
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CN2007101531277A
Other languages
English (en)
Chinese (zh)
Other versions
CN101148225A (zh
Inventor
石川和广
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Murata Machinery Ltd
Original Assignee
Murata Machinery Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Murata Machinery Ltd filed Critical Murata Machinery Ltd
Publication of CN101148225A publication Critical patent/CN101148225A/zh
Application granted granted Critical
Publication of CN101148225B publication Critical patent/CN101148225B/zh
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67706—Mechanical details, e.g. roller, belt
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Manipulator (AREA)
  • Warehouses Or Storage Devices (AREA)
CN2007101531277A 2006-09-21 2007-09-21 移载装置 Expired - Fee Related CN101148225B (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2006255208A JP4363432B2 (ja) 2006-09-21 2006-09-21 移載装置
JP255208/2006 2006-09-21

Publications (2)

Publication Number Publication Date
CN101148225A CN101148225A (zh) 2008-03-26
CN101148225B true CN101148225B (zh) 2012-12-12

Family

ID=39248948

Family Applications (1)

Application Number Title Priority Date Filing Date
CN2007101531277A Expired - Fee Related CN101148225B (zh) 2006-09-21 2007-09-21 移载装置

Country Status (4)

Country Link
JP (1) JP4363432B2 (ko)
KR (1) KR101112011B1 (ko)
CN (1) CN101148225B (ko)
TW (1) TW200819373A (ko)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5234328B2 (ja) * 2008-04-11 2013-07-10 株式会社ダイフク 物品収納設備
JP5618190B2 (ja) * 2010-08-05 2014-11-05 村田機械株式会社 供給搬出システム
US9701471B2 (en) * 2012-08-31 2017-07-11 Murata Machinery, Ltd. Transfer device
CN102795442A (zh) * 2012-09-06 2012-11-28 深圳市华星光电技术有限公司 一种自动化物料搬运系统
CN104986558B (zh) * 2015-07-10 2017-03-29 东莞市科隆威自动化设备有限公司 双线印刷机中间交叉移载产品的交叉移载装置
JP6192131B2 (ja) * 2015-12-10 2017-09-06 アイダエンジニアリング株式会社 プレス機械のワーク搬送装置
JP2018062407A (ja) * 2016-10-13 2018-04-19 株式会社ダイフク 移載装置

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1483651A (zh) * 2002-09-18 2004-03-24 三星电子株式会社 板状物搬运机器人

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06156632A (ja) * 1992-11-27 1994-06-03 Murata Mach Ltd クレーンの昇降台
JPH11216691A (ja) 1998-02-03 1999-08-10 Hitachi Ltd フロッグレッグ形ロボット並びに処理装置および処理方法
JP2000042952A (ja) * 1998-07-27 2000-02-15 Hitachi Ltd 搬送装置及び搬送方法
JP2003054705A (ja) 2001-08-07 2003-02-26 Nippon Yusoki Co Ltd 自動倉庫システム

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1483651A (zh) * 2002-09-18 2004-03-24 三星电子株式会社 板状物搬运机器人

Also Published As

Publication number Publication date
TW200819373A (en) 2008-05-01
JP2008074549A (ja) 2008-04-03
KR20080027144A (ko) 2008-03-26
KR101112011B1 (ko) 2012-02-24
CN101148225A (zh) 2008-03-26
JP4363432B2 (ja) 2009-11-11
TWI374108B (ko) 2012-10-11

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