CN101955066B - 基片装卸装置 - Google Patents
基片装卸装置 Download PDFInfo
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- CN101955066B CN101955066B CN 201010187910 CN201010187910A CN101955066B CN 101955066 B CN101955066 B CN 101955066B CN 201010187910 CN201010187910 CN 201010187910 CN 201010187910 A CN201010187910 A CN 201010187910A CN 101955066 B CN101955066 B CN 101955066B
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Application Number | Priority Date | Filing Date | Title |
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CN 201010187910 CN101955066B (zh) | 2010-05-25 | 2010-05-25 | 基片装卸装置 |
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CN 201010187910 CN101955066B (zh) | 2010-05-25 | 2010-05-25 | 基片装卸装置 |
Publications (2)
Publication Number | Publication Date |
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CN101955066A CN101955066A (zh) | 2011-01-26 |
CN101955066B true CN101955066B (zh) | 2013-04-10 |
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CN 201010187910 Expired - Fee Related CN101955066B (zh) | 2010-05-25 | 2010-05-25 | 基片装卸装置 |
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Families Citing this family (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102601554B (zh) * | 2012-03-23 | 2014-12-03 | 长城汽车股份有限公司 | 一种物料输送转换架 |
CN103586561A (zh) * | 2013-10-12 | 2014-02-19 | 宁波华索光伏设备有限公司 | 太阳能电池片焊接机的上下料装置 |
CN104390909B (zh) * | 2014-12-03 | 2017-03-22 | 广州大学 | 一种半自动支座试验安装装置 |
CN104500674B (zh) * | 2014-12-16 | 2018-05-11 | 上海子创镀膜技术有限公司 | 一种镀膜线用的玻璃储片架的机械传动系统 |
CN105035983A (zh) * | 2015-07-31 | 2015-11-11 | 河北宁通电子材料有限公司 | 一种单晶提升装置 |
EP3311963A1 (de) * | 2016-10-21 | 2018-04-25 | Bystronic Laser AG | Positionierbare roboterzelle, fertigungseinrichtung mit einer fertigungsvorrichtung und mit positionierbare roboterzelle sowie verfahren zum betrieb einer solchen positionierbaren roboterzelle |
CN109571324B (zh) * | 2018-12-26 | 2021-04-06 | 亚杰科技(江苏)有限公司 | 一种升降式变速箱工装 |
CN213601836U (zh) * | 2021-04-12 | 2021-07-02 | 台湾积体电路制造股份有限公司 | 半导体元件的刻蚀设备 |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5984610A (en) * | 1995-03-07 | 1999-11-16 | Fortrend Engineering Corporation | Pod loader interface |
CN2936875Y (zh) * | 2006-08-24 | 2007-08-22 | 万向钱潮股份有限公司 | 太阳能组件板周转车 |
CN100590015C (zh) * | 2008-03-14 | 2010-02-17 | 南京华显高科有限公司 | Pdp面板周转车 |
CN201694655U (zh) * | 2010-05-25 | 2011-01-05 | 东莞宏威数码机械有限公司 | 基片装卸设备 |
Family Cites Families (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6135698A (en) * | 1999-04-30 | 2000-10-24 | Asyst Technologies, Inc. | Universal tool interface and/or workpiece transfer apparatus for SMIF and open pod applications |
JP2002313870A (ja) * | 2001-04-11 | 2002-10-25 | Canon Inc | ガラス基板移動台車 |
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2010
- 2010-05-25 CN CN 201010187910 patent/CN101955066B/zh not_active Expired - Fee Related
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5984610A (en) * | 1995-03-07 | 1999-11-16 | Fortrend Engineering Corporation | Pod loader interface |
CN2936875Y (zh) * | 2006-08-24 | 2007-08-22 | 万向钱潮股份有限公司 | 太阳能组件板周转车 |
CN100590015C (zh) * | 2008-03-14 | 2010-02-17 | 南京华显高科有限公司 | Pdp面板周转车 |
CN201694655U (zh) * | 2010-05-25 | 2011-01-05 | 东莞宏威数码机械有限公司 | 基片装卸设备 |
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CN101955066A (zh) | 2011-01-26 |
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