JP4321722B2 - バリア性フィルムおよびその製造法 - Google Patents

バリア性フィルムおよびその製造法 Download PDF

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Publication number
JP4321722B2
JP4321722B2 JP2006181505A JP2006181505A JP4321722B2 JP 4321722 B2 JP4321722 B2 JP 4321722B2 JP 2006181505 A JP2006181505 A JP 2006181505A JP 2006181505 A JP2006181505 A JP 2006181505A JP 4321722 B2 JP4321722 B2 JP 4321722B2
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Japan
Prior art keywords
film
silicon oxide
resin
vapor deposition
deposited
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
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JP2006181505A
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English (en)
Japanese (ja)
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JP2006327202A5 (https=
JP2006327202A (ja
Inventor
晃次郎 大川
淳朗 續木
邦聡 芳片
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Dai Nippon Printing Co Ltd
Original Assignee
Dai Nippon Printing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Dai Nippon Printing Co Ltd filed Critical Dai Nippon Printing Co Ltd
Priority to JP2006181505A priority Critical patent/JP4321722B2/ja
Publication of JP2006327202A publication Critical patent/JP2006327202A/ja
Publication of JP2006327202A5 publication Critical patent/JP2006327202A5/ja
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Publication of JP4321722B2 publication Critical patent/JP4321722B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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  • Laminated Bodies (AREA)
  • Chemical Vapour Deposition (AREA)
JP2006181505A 2000-10-13 2006-06-30 バリア性フィルムおよびその製造法 Expired - Fee Related JP4321722B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2006181505A JP4321722B2 (ja) 2000-10-13 2006-06-30 バリア性フィルムおよびその製造法

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2000313003 2000-10-13
JP2006181505A JP4321722B2 (ja) 2000-10-13 2006-06-30 バリア性フィルムおよびその製造法

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
JP2001265308A Division JP2002187231A (ja) 2000-10-13 2001-09-03 バリア性フィルムおよびその製造法

Publications (3)

Publication Number Publication Date
JP2006327202A JP2006327202A (ja) 2006-12-07
JP2006327202A5 JP2006327202A5 (https=) 2007-03-29
JP4321722B2 true JP4321722B2 (ja) 2009-08-26

Family

ID=37549371

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2006181505A Expired - Fee Related JP4321722B2 (ja) 2000-10-13 2006-06-30 バリア性フィルムおよびその製造法

Country Status (1)

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JP (1) JP4321722B2 (https=)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010111900A (ja) * 2008-11-05 2010-05-20 Fuji Electric Holdings Co Ltd プラズマｃｖｄ装置
JP5201074B2 (ja) * 2009-04-28 2013-06-05 大日本印刷株式会社 透明ガスバリア性フィルム
JP5201072B2 (ja) * 2009-04-28 2013-06-05 大日本印刷株式会社 透明ガスバリア性フィルム
JP5201073B2 (ja) * 2009-04-28 2013-06-05 大日本印刷株式会社 透明ガスバリア性フィルム
JP2011148139A (ja) * 2010-01-20 2011-08-04 Toppan Printing Co Ltd ガスバリア積層体
JP6136120B2 (ja) * 2012-05-30 2017-05-31 大日本印刷株式会社 医療用包装材
JP6413539B2 (ja) * 2013-09-20 2018-10-31 凸版印刷株式会社 ガスバリア性積層フィルム及び該ガスバリア性積層フィルムの製造方法
JP2016087814A (ja) * 2014-10-30 2016-05-23 凸版印刷株式会社 ガスバリア積層体およびその製造方法
JP6578765B2 (ja) * 2015-06-30 2019-09-25 凸版印刷株式会社 ガスバリア性積層体およびその製造方法

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Publication number Publication date
JP2006327202A (ja) 2006-12-07

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