JP2006327202A5 - - Google Patents
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- Publication number
- JP2006327202A5 JP2006327202A5 JP2006181505A JP2006181505A JP2006327202A5 JP 2006327202 A5 JP2006327202 A5 JP 2006327202A5 JP 2006181505 A JP2006181505 A JP 2006181505A JP 2006181505 A JP2006181505 A JP 2006181505A JP 2006327202 A5 JP2006327202 A5 JP 2006327202A5
- Authority
- JP
- Japan
- Prior art keywords
- film
- annealing treatment
- range
- barrier film
- silicon oxide
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000004888 barrier function Effects 0.000 claims 28
- 238000000137 annealing Methods 0.000 claims 27
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims 11
- 229910052814 silicon oxide Inorganic materials 0.000 claims 11
- 238000004519 manufacturing process Methods 0.000 claims 8
- 230000035699 permeability Effects 0.000 claims 4
- 229920005989 resin Polymers 0.000 claims 4
- 239000011347 resin Substances 0.000 claims 4
- 239000004925 Acrylic resin Substances 0.000 claims 2
- 229920000178 Acrylic resin Polymers 0.000 claims 2
- 239000004743 Polypropylene Substances 0.000 claims 2
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims 2
- 230000015572 biosynthetic process Effects 0.000 claims 2
- 229910052760 oxygen Inorganic materials 0.000 claims 2
- 239000001301 oxygen Substances 0.000 claims 2
- 229920006122 polyamide resin Polymers 0.000 claims 2
- 229920005668 polycarbonate resin Polymers 0.000 claims 2
- 239000004431 polycarbonate resin Substances 0.000 claims 2
- 229920001225 polyester resin Polymers 0.000 claims 2
- 239000004645 polyester resin Substances 0.000 claims 2
- -1 polypropylene Polymers 0.000 claims 2
- 229920001155 polypropylene Polymers 0.000 claims 2
- 229920005990 polystyrene resin Polymers 0.000 claims 2
- LIVNPJMFVYWSIS-UHFFFAOYSA-N silicon monoxide Chemical compound [Si-]#[O+] LIVNPJMFVYWSIS-UHFFFAOYSA-N 0.000 claims 2
- 239000000758 substrate Substances 0.000 claims 2
- 230000003746 surface roughness Effects 0.000 claims 2
- 239000002335 surface treatment layer Substances 0.000 claims 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims 2
- 238000004383 yellowing Methods 0.000 claims 2
- 238000007740 vapor deposition Methods 0.000 claims 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2006181505A JP4321722B2 (ja) | 2000-10-13 | 2006-06-30 | バリア性フィルムおよびその製造法 |
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2000313003 | 2000-10-13 | ||
| JP2006181505A JP4321722B2 (ja) | 2000-10-13 | 2006-06-30 | バリア性フィルムおよびその製造法 |
Related Parent Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2001265308A Division JP2002187231A (ja) | 2000-10-13 | 2001-09-03 | バリア性フィルムおよびその製造法 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2006327202A JP2006327202A (ja) | 2006-12-07 |
| JP2006327202A5 true JP2006327202A5 (https=) | 2007-03-29 |
| JP4321722B2 JP4321722B2 (ja) | 2009-08-26 |
Family
ID=37549371
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2006181505A Expired - Fee Related JP4321722B2 (ja) | 2000-10-13 | 2006-06-30 | バリア性フィルムおよびその製造法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP4321722B2 (https=) |
Families Citing this family (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2010111900A (ja) * | 2008-11-05 | 2010-05-20 | Fuji Electric Holdings Co Ltd | プラズマｃｖｄ装置 |
| JP5201074B2 (ja) * | 2009-04-28 | 2013-06-05 | 大日本印刷株式会社 | 透明ガスバリア性フィルム |
| JP5201072B2 (ja) * | 2009-04-28 | 2013-06-05 | 大日本印刷株式会社 | 透明ガスバリア性フィルム |
| JP5201073B2 (ja) * | 2009-04-28 | 2013-06-05 | 大日本印刷株式会社 | 透明ガスバリア性フィルム |
| JP2011148139A (ja) * | 2010-01-20 | 2011-08-04 | Toppan Printing Co Ltd | ガスバリア積層体 |
| JP6136120B2 (ja) * | 2012-05-30 | 2017-05-31 | 大日本印刷株式会社 | 医療用包装材 |
| JP6413539B2 (ja) * | 2013-09-20 | 2018-10-31 | 凸版印刷株式会社 | ガスバリア性積層フィルム及び該ガスバリア性積層フィルムの製造方法 |
| JP2016087814A (ja) * | 2014-10-30 | 2016-05-23 | 凸版印刷株式会社 | ガスバリア積層体およびその製造方法 |
| JP6578765B2 (ja) * | 2015-06-30 | 2019-09-25 | 凸版印刷株式会社 | ガスバリア性積層体およびその製造方法 |
-
2006
- 2006-06-30 JP JP2006181505A patent/JP4321722B2/ja not_active Expired - Fee Related
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