TW200740289A - Organic electroluminescent element and its manufacturing method - Google Patents

Organic electroluminescent element and its manufacturing method

Info

Publication number
TW200740289A
TW200740289A TW096101308A TW96101308A TW200740289A TW 200740289 A TW200740289 A TW 200740289A TW 096101308 A TW096101308 A TW 096101308A TW 96101308 A TW96101308 A TW 96101308A TW 200740289 A TW200740289 A TW 200740289A
Authority
TW
Taiwan
Prior art keywords
gas barrier
barrier layer
organic
manufacturing
organic electroluminescent
Prior art date
Application number
TW096101308A
Other languages
Chinese (zh)
Other versions
TWI338534B (en
Inventor
Ryonosuke Tera
Kouji Ino
Kahoru Mori
Taizou Ishida
Original Assignee
Denso Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Denso Corp filed Critical Denso Corp
Publication of TW200740289A publication Critical patent/TW200740289A/en
Application granted granted Critical
Publication of TWI338534B publication Critical patent/TWI338534B/zh

Links

Classifications

    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K50/00Organic light-emitting devices
    • H10K50/80Constructional details
    • H10K50/84Passivation; Containers; Encapsulations
    • H10K50/844Encapsulations
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K59/00Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
    • H10K59/30Devices specially adapted for multicolour light emission
    • H10K59/38Devices specially adapted for multicolour light emission comprising colour filters or colour changing media [CCM]
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K71/00Manufacture or treatment specially adapted for the organic devices covered by this subclass

Abstract

To improve resistance characteristics of a gas barrier layer against an etching liquid and a cleaning liquid in a process after a gas barrier layer film forming in an organic EL element composed of sequentially laminating a color filter layer, the gas barrier layer, and an organic EL structure on a substrate. In the organic EL element 100 composed of sequentially laminating the color filter layer 13, the gas barrier layer 20, and the organic EL structure 30 on the substrate 11, the gas barrier layer 20 is an amorphous thin film composed of AlxTiyOz which is a metal oxide of Al and Ti, and the ratio of the number of atoms of Ti to Al in a composition ratio of this AlxTiyOz is 10 atom% or more.
TW096101308A 2006-01-23 2007-01-12 Organic electroluminescent element and its manufacturing method TW200740289A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2006013576A JP4696926B2 (en) 2006-01-23 2006-01-23 Organic EL device and method for manufacturing the same

Publications (2)

Publication Number Publication Date
TW200740289A true TW200740289A (en) 2007-10-16
TWI338534B TWI338534B (en) 2011-03-01

Family

ID=38449688

Family Applications (1)

Application Number Title Priority Date Filing Date
TW096101308A TW200740289A (en) 2006-01-23 2007-01-12 Organic electroluminescent element and its manufacturing method

Country Status (3)

Country Link
JP (1) JP4696926B2 (en)
KR (1) KR100845683B1 (en)
TW (1) TW200740289A (en)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007234310A (en) * 2006-02-28 2007-09-13 Fuji Electric Holdings Co Ltd Method and device for manufacturing organic el display
JP2009110710A (en) * 2007-10-26 2009-05-21 Denso Corp Organic el display and its manufacturing method
WO2009119591A1 (en) * 2008-03-25 2009-10-01 富士電機ホールディングス株式会社 Organic electroluminescence element
FI20095947A0 (en) * 2009-09-14 2009-09-14 Beneq Oy Multilayer Coating, Process for Manufacturing a Multilayer Coating, and Uses for the Same
KR101084196B1 (en) 2010-02-19 2011-11-17 삼성모바일디스플레이주식회사 Organic light emitting display apparatus
JP6204911B2 (en) * 2011-07-11 2017-09-27 ロータス アプライド テクノロジー エルエルシーLotus Applied Technology, Llc Mixed metal oxide barrier film and atomic layer deposition method for forming mixed metal oxide barrier film
JP6003778B2 (en) * 2013-04-03 2016-10-05 株式会社デンソー Manufacturing method of heat exchanger
JP2015007766A (en) * 2013-05-27 2015-01-15 富士フイルム株式会社 Method for producing color filter, composition for forming base layer, and organic el display device
JP2015122148A (en) 2013-12-20 2015-07-02 株式会社ジャパンディスプレイ Organic electroluminescence display device
JP6281412B2 (en) * 2014-05-27 2018-02-21 株式会社デンソー Metal structure and manufacturing method thereof

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2000072637A1 (en) * 1998-03-09 2000-11-30 Tdk Corporation Organic el color display
JP4019690B2 (en) * 2001-11-02 2007-12-12 セイコーエプソン株式会社 ELECTRO-OPTICAL DEVICE, MANUFACTURING METHOD THEREOF, AND ELECTRONIC DEVICE
US20060012296A1 (en) * 2002-10-16 2006-01-19 Mitsuru Eida Organic Electroluminescent Display And Its Production Method
JP2004158321A (en) * 2002-11-07 2004-06-03 Tohoku Pioneer Corp Organic el display apparatus and manufacturing method
JP3855932B2 (en) 2003-01-09 2006-12-13 富士電機ホールディングス株式会社 ORGANIC LIGHT EMITTING DEVICE AND METHOD FOR PRODUCING ORGANIC LIGHT EMITTING DEVICE
JP4561201B2 (en) * 2003-09-04 2010-10-13 セイコーエプソン株式会社 Electro-optical device, method of manufacturing electro-optical device, and electronic apparatus
DE10342397B4 (en) * 2003-09-13 2008-04-03 Schott Ag Transparent protective layer for a body and its use
JP2005319678A (en) * 2004-05-07 2005-11-17 Nippon Zeon Co Ltd Laminate, light emitting element and its use

Also Published As

Publication number Publication date
KR20070077453A (en) 2007-07-26
JP4696926B2 (en) 2011-06-08
TWI338534B (en) 2011-03-01
JP2007194168A (en) 2007-08-02
KR100845683B1 (en) 2008-07-11

Similar Documents

Publication Publication Date Title
TW200740289A (en) Organic electroluminescent element and its manufacturing method
US9024322B2 (en) Wiring structure and display device
WO2010003066A3 (en) Transparent conducting electrode
JP6054589B2 (en) Organic light emitting device
DE602007011470D1 (en) PROCESS FOR PREPARING CRYSTALLINE SILICON SO
WO2008029060A3 (en) Substrate for an organic light-emitting device, use and process for manufacturing this substrate, and organic light-emitting device
TW201007950A (en) Thin film transistors using multiple active channel layers
WO2008136504A1 (en) Method for manufacturing group iii nitride semiconductor light-emitting device
WO2009017032A1 (en) Substrate having barrier layer, display element and display element manufacturing method
TW201222825A (en) Semiconductor thin film, thin film transistor and production method therefor
WO2010065966A3 (en) High rate deposition of thin films with improved barrier layer properties
DK1994202T4 (en) SILVER PROTECTION COATING
WO2005076918A3 (en) Barrier layer process and arrangement
WO2007115029A3 (en) Method of forming mixed rare earth oxide and mixed rare earth aluminate films by atomic layer deposition
TW200715917A (en) Multilayer structure and method of cleaning the same
WO2006125825A3 (en) Method of forming conducting nanowires
WO2012067439A3 (en) Diazadiene-based metal compound, method for preparing same and method for forming a thin film using same
WO2011028377A3 (en) High concentration water pulses for atomic layer deposition
EP1921681A3 (en) Thin film transistor using an oriented zinc oxide layer
WO2007117998A3 (en) Capacitor electrodes produced with atomic layer deposition for use in implantable medical devices
EP1139453A3 (en) Self-light emitting device and method of manufacturing the same
TW200617197A (en) Deposition of ruthenium and/or ruthenium oxide films
JP2006524439A5 (en)
TW200601414A (en) Semiconductor device and manufacturing method thereof
EA201001020A1 (en) GLASS PRODUCT AND METHOD OF MANUFACTURING A GLASS PRODUCT

Legal Events

Date Code Title Description
MM4A Annulment or lapse of patent due to non-payment of fees