JP2007234310A - Method and device for manufacturing organic el display - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a high-reliability organic EL display that is high in manufacturing yield while maximally reducing moisture in an overcoat layer and preventing dispersion of a residual gas and the moisture, is stably operated even with long-term driving, and has no display failure. <P>SOLUTION: An organic EL display manufacturing method is composed so as to successively arrange color-conversion filter layers (11, 12), the overcoat layer (14), an inorganic passivation layer (16), and organic EL laminated bodies (17, 18, and 19) on a transparent support substrate (13). The method is also composed so that a heating step for removing the moisture under vacuum at 150-200°C is provided after forming the overcoat layer, and the heating step and an inorganic passivation layer forming step are executed under vacuum or under an inactive atmosphere without being exposed in the atmosphere. <P>COPYRIGHT: (C)2007,JPO&INPIT

Description

  The present invention relates to a method and an apparatus for manufacturing an organic EL display using a color conversion filter.

The structure of the overcoat layer of the organic EL display using the conventional color conversion filter will be described with reference to FIG. The organic EL display includes a color conversion filter layer (101R, 101G, 102R, 102G, 102B) having a phosphor layer on a transparent support substrate 103, an overcoat layer 104, an inorganic passivation layer 106, and an organic EL laminate. Are sequentially arranged. FIG. 4 shows a transparent electrode (anode) 107, an organic light emitting layer 108, and an electrode (cathode) 109 as an organic EL laminate.
In an organic EL display using color conversion filters (101R, 101G, 102R, 102G, 102B), a thickness of 10 to 15 μm is necessary because concentration quenching occurs when the concentration of the fluorescent dye used in the color conversion filter layer is increased. . Therefore, an overcoat layer 104 for filling and flattening between the color conversion filter layers of each color is necessary.

As a material example of the conventional overcoat layer 104, a configuration in which a photocurable organic polymer resin or a thermosetting organic polymer resin having an acrylate-based, methacrylate-based, or polyimide-based reactive vinyl group is used is disclosed ( Patent Documents 1-2).
Further, improvements have been made to improve mechanical reliability and heat resistance by using a straight silicone resin or a modified silicone resin for the overcoat layer and using the overcoat layer 24 itself as a hard coat layer (Patent Documents 3 to 4).
On the other hand, when forming the passivation layer, the problem that the adhesion of the passivation layer is lowered due to the occurrence of degassing from the overcoat layer has also been clarified. Patent Document 5 discloses that the inorganic layer (passivation layer) is vacuumed. It is disclosed in Japanese Patent Application Laid-Open No. H10-228707 that the process up to the formation of the protective film (planarization layer) is performed in a vacuum.
JP-A-1-229203 JP-A-8-279394 JP 2000-182780 A JP 2000-91070 A JP 2003-229271 A JP 2000-306666 A

  In the color conversion filter layer, the matrix material to be dispersed and the dye molecules have low heat resistance, and the color conversion characteristics are lowered by heat. Therefore, the baking temperature must be 200 ° C. or lower. For this reason, there is a problem in using a high temperature curable resin such as polyimide which is cured at a high temperature exceeding 200 ° C. In addition, since the acrylic organic polymer resin is originally subjected to a process in which a monomer containing an organic solvent is thinned by a photo process, exposed to light, developed, and baked. Moisture remains. When this residual gas or moisture diffuses into the organic light-emitting layer, crystallization occurs in the amorphous component film, resulting in non-light-emitting portions and causing deterioration and display defects. Conventionally, a passivation layer is formed on the overcoat layer. In addition, the diffusion of residual gas and moisture is blocked.

  Since the passivation layer is formed by thinning silicon oxide or oxynitride by sputtering or low-temperature CVD, it has a high barrier property against residual gas and moisture. However, due to particles and shape defects on the overcoat layer, the gas barrier property of the passivation layer is lowered, and moisture diffusion of the overcoat layer proceeds in the organic light emitting layer formed on the upper layer, resulting in problems such as display defects. There is a problem. In addition, as described above, when forming the passivation layer, the problem of deterioration in adhesion of the passivation layer due to the occurrence of degassing from the overcoat layer has also been clarified. It is disclosed that the passivation layer) is performed in vacuum, and Patent Document 6 discloses that the process up to the formation of the protective film (planarization layer) is performed in vacuum.

  The present invention has been made in view of the above-described problems, and its purpose is to reduce the moisture in the overcoat layer as much as possible, inhibit the diffusion of residual gas and moisture, and have a high production yield. It is an object of the present invention to provide a highly reliable organic EL display that operates stably even when driving with no display defects.

The present invention relates to a method for manufacturing an organic EL display in which a color conversion filter layer, an inorganic passivation layer, and an organic EL laminate are sequentially arranged on a transparent support substrate, and heat drying in vacuum from the overcoat layer. It is possible to effectively inhibit the diffusion of residual gas and moisture by being preferably treated in an inert atmosphere without being exposed to the atmosphere until an inorganic passivation layer is formed, after that, by reducing the moisture by .
Specifically, the present invention is an organic EL display manufacturing method in which a color conversion filter layer, an overcoat layer, an inorganic passivation layer, and an organic EL laminate are sequentially disposed on a transparent support substrate. Then, after the formation of the overcoat layer, a heating process for removing moisture under vacuum at 150 to 200 ° C. is provided, and the heating process and the formation process of the inorganic passivation layer are not exposed to the atmosphere. Provided is a method for manufacturing an organic EL display, which is performed in a vacuum or in an inert atmosphere.

  According to the present invention, an organic polymer layer is used as the overcoat layer (flattening layer) of the color conversion filter layer, and the inert atmosphere or the atmosphere is not exposed to the atmosphere until the inorganic passivation layer is formed from the overcoat layer. By forming an organic EL element on a substrate handled in a vacuum, it is possible to provide a highly reliable organic EL display that has no display defects and can be driven stably for a long time.

The structure of the organic EL display of the present invention will be described with reference to FIG.
The organic EL display includes a color conversion filter layer (11R, 11G, 12R, 12G, 12B) having a phosphor layer on a transparent support substrate 13, an overcoat layer 14, an inorganic passivation layer 16, and an organic EL laminate. Are sequentially arranged. FIG. 1 shows a transparent electrode (anode) 17, an organic light emitting layer 18 and an electrode (cathode) 19 as an organic EL laminate. Hereinafter, each component will be described.

[Component]
(1) The color conversion filter layers (11R, 11G, 12R, 12G, 12B) and the substrate 13 need to be transparent to the light converted by the color conversion filter layer. The substrate 13 should be able to withstand the conditions (solvent, temperature, etc.) used for forming the color conversion filter layer, black mask, overcoat layer, and partition wall layer, and should have excellent dimensional stability. It is difficult for the substrate 13 to have a transmittance of 50% or more with respect to light having a wavelength of 400 to 800 mm.
A preferable material for the substrate 13 includes a resin such as glass, polyethylene terephthalate, or polymethyl methacrylate. Borosilicate glass or blue plate glass is particularly preferred.

  In the present specification, the color conversion filter layer includes a laminate of a color filter layer and a fluorescence conversion layer, a color filter layer alone, and a mode of a fluorescence conversion layer alone. In FIG. 1, the laminated body (12R and 11R, 12G and 11G) of a color filter layer and a fluorescence conversion layer, and the color filter layer alone (12B) are shown. The fluorescence conversion layer absorbs near-ultraviolet to visible light, particularly blue to blue-green light emitted from the organic EL layer 18 and emits visible light having different wavelengths as fluorescence. In order to enable full color display, an independent color conversion filter layer that emits light in at least the blue (B) region, the green (G) region, and the red (R) region is provided. At least an organic fluorescent dye and a matrix resin.

(A) Organic Fluorescent Dye In the present invention, preferably, at least one kind of fluorescent dye that emits fluorescence in the red region is used, and may be combined with one or more kinds of fluorescent dyes that emit fluorescence in the green region. This is because when the organic EL layer 18 that emits light in the blue or blue-green region is used as the light source, if light from the organic EL layer 18 is passed through a simple red filter to obtain light in the red region, This is because the output light becomes extremely dark due to the small amount of light of the wavelength.

Therefore, by converting the light in the blue or blue-green region from the organic EL layer 18 into the light in the red region by the fluorescent dye, the light in the red region having sufficient intensity can be output.
Examples of fluorescent dyes that absorb blue to blue-green light emitted from the luminescent material and emit fluorescence in the red region include rhodamine B, rhodamine 6G, rhodamine 3B, rhodamine 101, rhodamine 110, sulforhodamine, basic violet 11 Pyridine dyes such as rhodamine dyes such as basic red 2, cyanine dyes, 1-ethyl-2- [4- (P-dimethylaminophenyl) -1,3-butadienyl] -pyridinium perchlorate (pyridine 1) Or oxazine dyes. Furthermore, various dyes (direct dyes, acid dyes, basic dyes, disperse dyes, etc.) can be used if they are fluorescent.

  Examples of fluorescent dyes that absorb blue to blue-green light emitted from a light emitter and emit green light include 3- (2′-benzothiazolyl) -7-diethylamino-coumarin (coumarin 6), 3- (2′-Benzimidazolyl) -7-diethylamino-coumarin (coumarin 7), 3- (2′-N-methylbenzimidazolyl) -7-diethylamino-coumarin (coumarin 30), 2,3,5,6-1H, 4H -Coumarin-based dyes such as tetrahydro-8-trifluoromethylquinolidine (9,9a, 1-gh) coumarin (coumarin 153), or basic yellow 51 which is a coumarin dye-based dye, solvent yellow 11, solvent yellow 116 And naphthalimide dyes. Furthermore, various dyes (direct dyes, acid dyes, basic dyes, disperse dyes, etc.) can be used if they are fluorescent.

  Further, regarding the light in the blue region, the light emitted from the organic EL layer 18 can be output through a simple blue filter 12B.

  The organic fluorescent dye used in the present invention is a polymethacrylic acid ester, polyvinyl chloride, vinyl chloride-vinyl acetate copolymer resin, alkyd resin, aromatic sulfonamide resin, urea resin, melamine resin, benzoguanamine resin, and these resins. An organic fluorescent pigment may be obtained by kneading into a mixture or the like to form a pigment. In addition, these organic fluorescent dyes and organic fluorescent pigments (in the present specification, the above two are collectively referred to as organic fluorescent dyes) may be used alone, or two or more of them may be used to adjust the hue of fluorescence. May be used in combination.

The fluorescence conversion layer of the present invention contains 0.01 to 5% by mass, more preferably 0.1 to 2% by mass of an organic fluorescent dye based on the weight of the fluorescence conversion layer. By using the organic fluorescent dye in the content range, sufficient wavelength conversion can be performed without accompanying color conversion efficiency due to curing such as concentration quenching.
Needless to say, the present invention is also applicable to the case where only the color filter layer not including the fluorescence conversion layer is applied.

(B) Matrix resin Next, the matrix resin used in the fluorescence conversion layer of the present invention generates radical species or ion species by light and / or heat treatment of a photocurable or photothermal combination type curable resin (resist). Polymerized or cross-linked, and insoluble and infusible. In order to perform patterning of the fluorescence conversion layer, it is desirable that the photocurable or photothermal combination type curable resin is soluble in an organic solvent or an alkaline solution in an unexposed state.

  Specifically, the matrix resin is obtained by photo- or heat-treating a composition film comprising (1) an acrylic polyfunctional monomer and oligomer having a plurality of acroyl groups and methacryloyl groups, and light or a thermal polymerization initiator, Or a polymer obtained by generating a thermal radical, (2) a composition comprising a polyvinyl cinnamate ester and a sensitizer dimerized by light or heat treatment, and (3) a chain or cyclic olefin A composition film composed of bisazide is irradiated with light or heat to generate nitrene, crosslinked with an olefin, and (4) a composition film composed of a monomer having an epoxy group and an acid generator is subjected to light or heat treatment. Including those polymerized by generating an acid (cation). In particular, a polymer obtained by polymerizing a composition comprising an acrylic polyfunctional monomer and oligomer (1) and light or a thermal polymerization initiator is preferred. This is because the composition can be patterned with high definition and has high reliability such as solvent resistance and heat resistance after polymerization.

  The photopolymerization initiator, sensitizer, and acid generator that can be used in the present invention are preferably those that initiate polymerization by light having a wavelength that is not absorbed by the fluorescent conversion dye contained therein. In the fluorescence conversion layer of the present invention, when the resin itself in the photocurable or photothermal combination type curable resin can be polymerized by light or heat, a photopolymerization initiator and a thermal polymerization initiator are not added. It is also possible.

  A matrix resin (fluorescence conversion layer) is a photocurable or photothermal combination curable resin, a solution or dispersion containing an organic fluorescent dye and an additive is applied on a support substrate to form a resin layer, and It is formed by polymerizing a desired portion of a photocurable or photothermal combination type curable resin by exposure. After patterning is performed by exposing the desired portion to insolubilize the photocurable or photothermal combination type curable resin, the patterning is performed using an organic solvent or an alkali solution that dissolves or disperses the resin in the unexposed portion. Then, it can be carried out by a conventional method such as removing the resin in the unexposed portion.

(C) Configuration and Shape Regarding red, it may be formed only from the fluorescence conversion layer 11R. However, when sufficient color purity cannot be obtained only by conversion with a fluorescent dye, a laminate of a fluorescence conversion layer 11R and a color filter layer 12R may be used as shown in FIG. When the color filter layer 12R is used in combination, the thickness of the color filter layer 12R is preferably 1 to 1.5 μm.
In addition, green may be formed only from the fluorescence conversion layer 11G. However, when sufficient color purity cannot be obtained only by conversion with a fluorescent dye, a laminate of a fluorescence conversion layer 11G and a color filter layer 12G may be used as shown in FIG. When the color filter layer 12G is used in combination, the thickness of the color filter layer 12G is preferably 1 to 1.5 μm. Alternatively, when the light emission of the organic EL layer 18 sufficiently includes light in the green region, only the color filter layer 12G may be used. When only the color filter layer 12G is used, the thickness is preferably 0.5 to 10 μm.
On the other hand, for blue, only the color filter layer 12B can be used as shown in FIG. When only the color filter layer 12B is used, the thickness is preferably 0.5 to 10 μm.
The shape of the color conversion filter layer may be a stripe pattern separated for each color as well known, or may have a structure separated for each sub-pixel of each pixel.

(2) Overcoat layer (also called planarization layer) 14
The overcoat layer is required to have the following functions.
(1) No pattern erosion or functional deactivation of the phosphor layer, (2) Step thickness of the phosphor layer can be filled, and the film thickness is as thin as possible (about several μm) to maintain good viewing angle characteristics (3) Good light transmission, (4) Heat resistance, (5) Smooth surface, (6) Good adhesion to substrate and passivation layer (7) Excellent chemical resistance, (8) Excellent moisture resistance, (9) No degassing of residual monomers and solvents, (10) Mechanical strength And so on.

  The overcoat layer 14 has high transparency in the visible region (transmittance of 50% or more in the range of 400 to 700 nm), Tg of 100 ° C. or more, surface hardness of 2H or more in pencil hardness, and on the color conversion filter. Any film can be used as long as it can form a coating film on the order of μm and does not deteriorate the functions of the color conversion filters 2 to 4. For example, an imide-modified silicone resin (Japanese Patent Laid-Open Nos. 5-134112 and 7-218717, No. 7-306311, etc.), epoxy-modified acrylate resin (Japanese Patent Laid-Open No. 7-48424) as UV curable resin, resin having reactive vinyl group of acrylate monomer / oligomer / polymer, and resist resin (Japanese Patent Laid-Open No. JP-A-6-300910, JP-A-7-128519, JP-A-8-279394, JP-A-9-3. 0793 JP etc.), fluorine-based resin (JP-A 5-36475, JP Patent Laid-Open No. 9-330793 Publication) light curable resin and / or thermosetting resins and the like.

  Although the thickness of an overcoat layer is not specifically limited, Preferably it is 10-30 micrometers, More preferably, it is about 20 micrometers.

The method for forming the overcoat layer 14 is not particularly limited, and for example, by a conventional method such as a dry method (sputtering method, vapor deposition method, CVD method, etc.) and a wet method (spin coating method, roll coating method, cast method, etc.). Can be formed. The planarizing layer 14 may be a single layer or a stacked layer.
However, the planarization layer 14 is not formed in the sealing portion and / or the connection portion, and the angle formed by the planarization layer 14 and the substrate 13 is an acute angle at the end of the planarization layer 14. Because the most convenient and accurate method is to form a film using a photosensitive material on the entire surface of the substrate by a conventional method and then form the required shape by photolithography. ,preferable.

After the photolithographic process of the overcoat layer is completed, preferably in the overcoat layer at 150 to 200 ° C. using a vacuum dryer installed in an inert atmosphere using the manufacturing apparatus according to the present invention as shown in FIG. Remove moisture. In this case, the degree of vacuum may be about 10 ⁻³ to 10 ⁻⁷ pa. The amount of water in the vacuum dryer at this time can be grasped by a quadrupole mass spectrometer (Q-Mass). According to the present invention, it is effective to reduce the moisture content to a moisture partial pressure in the furnace of preferably about 10 ⁻⁵ to 10 ⁻⁷ pa. Through this step, the moisture below the overcoat layer is reduced, and further, the passivation layer is formed on the upper portion, thereby preventing the diffusion of moisture before the overcoat layer even in the atmosphere and in subsequent processes. It becomes possible. The water content of the overcoat layer is preferably 1 ppm or less.
The heating step and the passivation layer forming step are preferably performed under a vacuum containing 1 ppm or less of moisture or in an inert atmosphere. This can reduce moisture diffusion through the passivation layer to the organic light emitting layer. In the conventional creation of an overcoat layer and a passivation layer under vacuum without an aggressive heat removal step of moisture, the water content of the overcoat layer is about 100 ppm, and the effect of the present invention cannot be obtained.

The apparatus of FIG. 2 has a glove box 23 having a vacuum pump 21 and a vacuum dryer 22, and a substrate 24 on which an overcoat layer is formed is introduced into the glove box 23. The substrate heated and dehydrated in the vacuum dryer is introduced into the sputtering chamber 25 via the sputtering apparatus load lock (L / L) chamber 26 in the glove box without being exposed to the atmosphere, and a passivation layer is formed. Is done.
As another aspect, the apparatus of FIG. 3 includes a sputtering chamber 35 that forms a passivation layer, and a sputtering apparatus load lock (L / L) chamber 36 that includes a heater 37. In this apparatus, since the substrate is heated and dehydrated by vacuum heating in the sputtering apparatus L / L chamber, it is not necessary to replace the substrate and install a glove box or the like, and the process is simplified.

(4) Passivation layer 16
A passivation layer 16 is provided so as to cover each layer below the overcoat layer formed as described above. The substrate after vacuum drying is handled in an inert atmosphere until the passivation layer 16 is formed. In this case, when separated in terms of apparatus, it is possible to use a transport container filled with an inert atmosphere. The passivation layer 16 is effective in preventing the permeation of moisture and gas from each layer below the overcoat layer 14 and preventing the functional degradation of the organic EL layer 18 caused by them. The passivation layer 16 is preferably transparent in the light emission wavelength region in order to transmit the light emission of the organic EL layer 18 to the color conversion filter layer.

  In order to satisfy these requirements, the passivation layer 16 has high transparency in the visible region (transmittance of 50% or more in the range of 400 to 800 nm), electrical insulation, and a barrier against moisture, oxygen, and low molecular components. Preferably, it is formed of a material having a film hardness of 2H or more. For example, inorganic oxides and inorganic nitrides such as SiOx, SiNx, SiNxOy, AlOx, TiOx, TaOx, and ZnOx (wherein x represents 0.8 to 4 and y represents 0.1 to 4). Etc. can be used. There is no restriction | limiting in particular as a formation method of this passivation layer, It can form by conventional techniques, such as a sputtering method, CVD method, a vacuum evaporation method, a dip method, a sol-gel method.

  Although the thickness of a passivation layer is not specifically limited, Preferably it is 200-400 nm, More preferably, it is about 300 nm.

(5) Organic EL laminate (including anode 17, organic EL layer 18 and cathode 19)
A material having a large work function is used for the anode 17 in order to efficiently inject holes. In particular, in an ordinary organic EL element, since light is emitted through the anode, the anode is required to be transparent, and a conductive metal oxide such as ITO or IZO is used.
The cathode 19 is a material having a small work function, such as lithium, sodium or other alkali metal, potassium, calcium, magnesium, strontium or other alkaline earth metal, or an electron-injecting metal such as fluoride thereof, Alloys and compounds with metals are used. Similarly to the above, a metal electrode (Al, Ag, Mo, W, etc.) having a high reflectance may be used underneath, and in that case, effective use of light emission of the organic EL layer 18 due to low resistance and reflection. Can be planned.

In the color conversion type organic EL display of the present invention, light in the near ultraviolet to visible region, preferably light in the blue to blue-green region, emitted from the organic EL layer 18 is incident on the color conversion filter layer and desired. Emits visible light with color.
The organic EL layer 18 includes at least an organic EL light emitting layer, and has a structure in which a hole injection layer, a hole transport layer, and / or an electron injection layer are interposed as necessary. Specifically, those having the following layer structure are employed.
(A) Organic EL light emitting layer (b) Hole injection layer / organic EL light emitting layer (c) Organic EL light emitting layer / electron injection layer (d) Hole injection layer / organic EL light emitting layer / electron injection layer (e) positive Hole injection layer / hole transport layer / organic EL light emitting layer / electron injection layer (in the above, the anode is connected to the organic EL light emitting layer or the hole injection layer, and the cathode is connected to the organic EL light emitting layer or the electron injection layer) )

  Known materials are used as the material for each of the above layers. In order to obtain light emission from blue to blue-green, in the organic EL light emitting layer, for example, optical brighteners such as benzothiazole, benzimidazole, and benzoxazole, metal chelated oxonium compounds, styrylbenzene compounds, aromatics Group dimethylidin compounds are preferably used.

  The thickness of each layer of an organic laminated body is not specifically limited, A normal thing can be used, for example, is 10-200 nm.

Example 1
On the glass substrate, red, green and blue color filter layers each having a thickness of 1.5 μm, and red and green fluorescence conversion layers each having a thickness of 10 μm were laminated. Further, in order to flatten the color conversion layer, Optmer NN810 (manufactured by JSR) was applied as a flattening layer 14 by spin coating to a thickness of 4 μm and formed into a size that fits within the external sealing layer by photolithography. Each color filter layer and fluorescence conversion layer had a size of 100 × 300 μm. After the planarization layer was formed, a heating process at 200 ° C. for 1 hour was performed in a vacuum dryer installed in an inert atmosphere as shown in FIG. After that, the substrate after the heating process was stored in a load lock chamber of a sputtering apparatus for forming a passivation layer through an inert atmosphere. A passivation layer 16 was formed by forming 300 nm of SiOx (x represents 0.8 to 2.0) by a magnetron sputtering method.
An anode (IZO) 17 having a thickness of 200 nm is formed on the passivation layer 16 and patterned at a 100 μm pitch by photolithography, and then the substrate on which the anode 17 is formed is mounted in a resistance heating vapor deposition apparatus, A hole transport layer, an organic light emitting layer, and an electron injection layer were sequentially formed without breaking the vacuum. During film formation, the internal pressure of the vacuum chamber was reduced to 1 × 10 ⁻⁴ Pa. As the hole injection layer, 100 ml of steel phthalocyanine (CuPc) was laminated. As the hole transport layer, 4,4′-bis [N- (1-naphthyl) -N-phenylamino] biphenyl (α-NPD) was laminated to 20 nm. The organic light emitting layer was formed by laminating 30 nm of 4,4′-bis (2,2′diphenylvinyl) biphenyl (DPVBi). The electron injection layer was formed by laminating 20 nm of aluminum chelate (Alq).
Thereafter, a Mg / Aq (10: 1 weight ratio) layer having a thickness of 200 nm is used by using a mask capable of obtaining a stripe pattern having a width of 0.30 mm and a gap of 0.03 mm perpendicular to the anode (ITO) 7 line. The cathode 19 made of was formed without breaking the vacuum.
The organic light emitting device thus obtained was sealed with a sealing glass and a UV curable adhesive in a dry nitrogen atmosphere in the glove box.

Comparative Example 1
While forming the passivation layer 16 on the planarizing layer 14 in the configuration of the example, a handling organic EL display was produced in an air atmosphere.

Evaluation When the organic EL displays produced in Example 1 and Comparative Example 1 were continuously driven in an atmosphere of 85 ° C. for 500 h and with a surface luminance of 100 cd / cm ² , the organic EL display of Example 1 had a pinhole in the passivation layer. Although no display defects such as dark spots or dark areas or partial peeling phenomenon were caused due to the organic EL display of Comparative Example 1, several display defects of 1 cm ² appeared.

It is a section schematic diagram showing the structure of the organic EL display of the present invention. The manufacturing apparatus used for manufacture of the organic electroluminescent display of this invention is shown. The manufacturing apparatus used for manufacture of the organic electroluminescent display of this invention is shown. It is the cross-sectional schematic which shows the structure of the conventional organic EL display.

Explanation of symbols

11R color conversion filter layer (fluorescence conversion layer R)
11G color conversion filter layer (fluorescence conversion layer G)
12R Color conversion filter layer (color filter layer R)
12G color conversion filter layer (color filter layer R)
12B Color conversion filter layer (color filter layer B)
DESCRIPTION OF SYMBOLS 13 Substrate 14 Overcoat layer 16 Passivation layer 17 Anode 18 Organic EL layer 19 Cathode 21 Vacuum pump 22 Vacuum dryer 23 Glove box 24 Substrate 25 Sputter chamber 26 Sputter device load lock chamber 34 Substrate 35 Sputter chamber 36 Sputter device load lock chamber 37 Heater 101R Color conversion filter layer (fluorescence conversion layer R)
101G color conversion filter layer (fluorescence conversion layer G)
102R Color conversion filter layer (color filter layer R)
102G color conversion filter layer (color filter layer R)
102B Color conversion filter layer (color filter layer B)
103 substrate 104 planarization layer (overcoat layer)
106 Passivation layer 107 Anode 108 Organic EL layer 109 Cathode

Claims (3)

  A method for manufacturing an organic EL display, in which a color conversion filter layer, an overcoat layer, an inorganic passivation layer, and an organic EL laminate are sequentially disposed on a transparent support substrate, after the formation of the overcoat layer And a heating step for removing moisture under vacuum at 150 to 200 ° C., and the heating step and the inorganic passivation layer forming step are performed in a vacuum or in an inert atmosphere without being exposed to the atmosphere. A method for producing an organic EL display, comprising:   The method for producing an organic EL display according to claim 1, wherein the vacuum or an inert atmosphere is a vacuum or an inert atmosphere containing water of 1 ppm or less.   An organic EL display comprising a transparent support substrate, a color conversion filter layer, an overcoat layer, an inorganic passivation layer, and an organic EL laminate disposed in this order on the support substrate, An organic EL display in which the water content of the overcoat layer is 1 ppm or less.

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