JP2005163090A - Crucible for vapor deposition, and vapor deposition system - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a crucible for vapor deposition produced by using an inexpensive, easily workable material, and with which, even if a vapor deposition material having a relatively high sublimating and evaporating temperature is vapor-deposited, the vapor deposition can be stably performed without generating clogging, and to provide a vapor deposition system. <P>SOLUTION: A cover or an inner cover of a crucible for vapor deposition provided with a through hole is coated with a substance having a high thermal conductivity, thus, the difference in temperature between the cover and a heating part is relaxed, the clogging of the through hole caused by a vapor deposition material is suppressed, and the stabilization of a vapor deposition rate and the enlargement in the volume of the crucible for vapor deposition are realized. Further, by providing the inside of the crucible for vapor deposition with a structure composed of a substance having a high thermal conductivity so as to be contacted with at least the wall face or bottom face of a vapor deposition material-charging part, the heat of the wall face conducts, and, even the vapor deposition material having a low thermal conductivity can be homogeneously heated. In this way, the returning of the sublimed and evaporated vapor deposition material to a solid in the through hole can be prevented, and further, the stable evaporation rate can be obtained. <P>COPYRIGHT: (C)2005,JPO&NCIPI

Description

  The present invention relates to a thin film forming apparatus, and more particularly to a thin film forming apparatus having a mechanism for forming a film by vapor deposition using a material that can be formed by vapor deposition.

  In recent years, thin display devices called FPDs (flat panel displays) have been applied to displays for portable electronic devices such as mobile devices, as well as monitors for televisions and personal computers.

  In particular, displays using electroluminescent elements that emit light when an electric current is passed through a layer containing organic matter have advantageous characteristics such as self-emission, low power consumption, and high-speed response. Recently, a part of it has been put into practical use.

  The layer containing an organic compound that serves as a light emitting layer of an electroluminescent element is roughly divided into a high molecular weight material and a low molecular weight material. The high molecular weight material is a coating method such as a spin coating method or an ink jet method. The low molecular weight material is formed mainly by vapor deposition.

  When depositing a film by depositing a low molecular weight material on a substrate, the conventional vapor deposition apparatus places the substrate on a substrate holder, an evaporation source, a shutter that prevents extra sublimation material from reaching the substrate, and an evaporation source And a heater for heating. Then, the vapor deposition material in the evaporation source heated by the heater is sublimated and formed on the rotating substrate. At this time, in order to form a uniform film on the substrate, the distance between the substrate and the evaporation source depends on the size of the substrate.

  In such a conventional vapor deposition apparatus and vapor deposition method, most of the sublimated vapor deposition material is the inner wall, shutter, or deposition shield (deposition material is prevented from adhering to the inner wall of the film deposition chamber). Protective plate). Therefore, the utilization efficiency of the vapor deposition material for the electroluminescent element, which is very expensive, is extremely low, about 1% or less, and the manufacturing cost of the light emitting device is very expensive.

  In addition, when a large-area substrate is used, the film thickness tends to be non-uniform at the center and periphery of the substrate, and the vapor deposition apparatus has a structure that rotates the substrate. There was a limit.

  In view of these points, the applicant has proposed a vapor deposition apparatus as described in Patent Document 1 and Patent Document 2 as one means for solving the above-described problems.

JP 2001-247959 A JP 2002-60926 A

  In the devices described in these, the evaporation source is detachable from the heating unit, has a movable part that moves while being sublimated by heating, and the evaporation source is replaced every time the material or the material in the evaporation source runs out. Is configured to be used.

  When vapor deposition is performed using an apparatus such as Patent Document 1 or Patent Document 2, it is necessary to exchange the evaporation source every time the internal material is used up. When the exchange is performed, it is necessary to heat the evaporation source again to a temperature at which vapor deposition can be performed, and time is greatly lost. Therefore, it is desirable that the volume of the evaporation crucible used as the evaporation source is as large as possible.

  However, the heating unit 10 having the heater 14 for heating the evaporation source 11 has a shape in which the upper part is opened as shown in FIG. 10 for the convenience of exchanging the crucible for evaporation used as the evaporation source. The reason why the crucible for vapor deposition is divided into a bottomed cylindrical body portion and a lid portion having a through-hole is that it is easy to replace the evaporation source. Since the evaporation port (through hole) 12 through which the vapor deposition material that is sublimated or dissolved and evaporated from the evaporation source 11 comes out is formed at substantially the center part of the lid 13 of the evaporation crucible, the heating unit 10 and the through hole are formed. The position has gone away.

  By the way, the crucible 11 for vapor deposition is often made of metal or ceramic. In particular, titanium is often used because of its ease of processing, stability, and low price. However, because of its low thermal conductivity, if the heater and the through hole opened in the lid are separated as described above, the heater And a lid in the vicinity of the through-hole, there is a case where a large temperature difference is generated, and the evaporated material once evaporated is cooled by the lid having a low temperature and immediately attached to reduce the utilization efficiency of the material.

  However, metals and ceramics having high thermal conductivity have problems in workability and heat resistance, and are very expensive, so that there are problems in applying them to the crucible 11 for vapor deposition.

  In addition, if the thermal conductivity of the vapor deposition material itself is poor, there will be a temperature difference between the vapor deposition material near the inner wall of the evaporation source 11 and the vapor deposition material in the central portion, and the vapor deposition material in the central portion will not be sufficiently warmed, resulting in a sufficient vapor deposition rate. There was also a problem that could not be obtained. In particular, a material that does not evaporate unless a relatively high temperature is applied, as described above, can hardly be deposited.

  In the present invention, in view of these problems, even if a deposition material having a relatively high sublimation temperature or evaporation temperature is deposited using a deposition crucible produced using an inexpensive and easy-to-process material, the through-hole is penetrated. An object of the present invention is to provide a crucible for vapor deposition and a vapor deposition apparatus capable of performing vapor deposition stably without causing clogging in the vicinity of the hole.

  It is another object of the present invention to provide an evaporation crucible and an evaporation apparatus capable of depositing an evaporation material having poor thermal conductivity at a sufficient evaporation rate without significantly changing the evaporation crucible.

  In this specification, the crucible for vapor deposition and the evaporation source are used in the same meaning, but in particular, when referring to the crucible itself, the crucible for vapor deposition, a crucible filled with vapor deposition material and installed in the vapor deposition apparatus is evaporated. It is properly used as a source.

  Therefore, as one of the configurations in the present invention, the temperature difference between the lid and the heater portion is reduced by coating the lid of the evaporation crucible provided with the through hole with a material having high thermal conductivity, and the vicinity of the through hole Suppressing clogging of through holes caused by the vapor deposition material that occurred due to the low lid temperature, and stabilizing the vapor deposition rate and increasing the volume of the crucible It can be realized. As a result, product quality can be kept stable, throughput can be improved, and prices can be reduced.

  Even if the above configuration is applied to an inner lid provided to prevent bumping of the vapor deposition material, the same effect can be obtained. Furthermore, the lid and the inner lid itself may be made of a material having a high thermal conductivity. In addition, these are effective at least if a material having higher thermal conductivity than the original evaporation crucible is used, but more preferably a material having higher thermal conductivity, such as gold, silver, platinum, copper, aluminum, One or more of beryllium, silicon carbide and carbon nitride, boron nitride, silicon carbide, beryllium oxide, and aluminum nitride are preferably used in consideration of the working temperature, reactivity with the deposition material, workability, and the like.

  As another configuration in the present invention, a structure made of a substance having high thermal conductivity is provided in the inside of the vapor deposition crucible so as to be in contact with at least the wall surface or the bottom surface of the vapor deposition material filling portion. At this time, it is desirable that this structure be present uniformly in the bottomed cylindrical body. Thereby, the heat of the wall surface is transmitted to the vapor deposition material from this structure, and the filled material can be heated evenly. As a result, even if it is a vapor deposition material with low thermal conductivity, it can be heated evenly, and the vapor deposition material that has been sublimated and evaporated can be prevented from returning to a solid through the through hole, and a stable vapor deposition rate can be achieved. Be able to get.

  Another configuration of the present invention has a bottomed cylindrical body filled with a vapor deposition material and a lid with a through hole, and the lid is covered with a substance having higher thermal conductivity than the main constituent material of the lid. It is the crucible for vapor deposition characterized by being characterized.

  Another configuration of the present invention has a bottomed cylindrical body portion filled with a vapor deposition material, a lid with an open through hole, and an inner lid, and the inner lid is more thermally conductive than the main constituent material of the inner lid. It is a crucible for vapor deposition characterized by being covered with a substance having a high content.

  Another configuration of the present invention includes a cylindrical body with a bottom filled with a vapor deposition material, a lid with a through-hole, and an inner lid, and the lid and the inner lid are more thermally conductive than their main constituent materials. It is a crucible for vapor deposition characterized by being covered with a highly functional substance.

  Another configuration of the present invention has a bottomed cylindrical body filled with a vapor deposition material and a lid with a through hole, and the lid is formed of a substance having higher thermal conductivity than the main constituent material of the lid. It is a crucible for vapor deposition characterized by being made.

  Another configuration of the present invention has a bottomed cylindrical body portion filled with a vapor deposition material, a lid with an open through hole, and an inner lid, and the inner lid is more thermally conductive than the main constituent material of the inner lid. It is a crucible for vapor deposition characterized by being formed of a material having a high content.

  Another configuration of the present invention includes a bottomed cylindrical body portion filled with a vapor deposition material, a lid with an open through hole, and an inner lid. The lid and the inner lid are more thermally conductive than the main constituent materials. It is a crucible for vapor deposition characterized by being formed of a material having a high content.

  Another configuration of the present invention is formed of a substance having a higher thermal conductivity than the vapor deposition material, in contact with the bottomed cylindrical body filled with the vapor deposition material, and at least the inner wall surface of the bottomed cylindrical body. It is a crucible for vapor deposition characterized by having components.

  Another structure of the present invention is formed of a substance having a higher thermal conductivity than the evaporating material, in contact with the bottomed cylindrical body filled with the vapor deposition material, and at least the bottom surface of the bottomed cylindrical body. It is a crucible for vapor deposition characterized by having components.

  Another configuration of the present invention has a bottomed cylindrical body portion filled with a vapor deposition material and a lid with a through hole, and the lid is covered with a highly heat-conductive substance. It is the crucible for vapor deposition characterized.

  Another configuration of the present invention includes a bottomed cylindrical body portion filled with a vapor deposition material, a lid with an open through hole, and an inner lid, and the inner lid is covered with a material having high thermal conductivity. It is the crucible for vapor deposition characterized by being characterized.

  Another configuration of the present invention includes a bottomed cylindrical body portion filled with a vapor deposition material, a lid having an opening and an inner lid, and the lid and the inner lid are made of a material having high thermal conductivity. A crucible for vapor deposition characterized by being coated.

  Another configuration of the present invention has a bottomed cylindrical body portion filled with a vapor deposition material and a lid with a through hole, and the lid is formed of a material having high thermal conductivity. It is the crucible for vapor deposition characterized.

  Another configuration of the present invention includes a bottomed cylindrical body portion that is filled with a vapor deposition material, a lid with an open through hole, and an inner lid, and the inner lid is formed of a material having high thermal conductivity. It is the crucible for vapor deposition characterized by being characterized.

  Another configuration of the present invention includes a bottomed cylindrical body portion filled with a vapor deposition material, a lid having an opening and an inner lid, and the lid and the inner lid are made of a material having high thermal conductivity. It is a crucible for vapor deposition characterized by being formed.

  In another configuration of the present invention, the evaporation source is formed of a substance having a high thermal conductivity in contact with a bottomed cylindrical body filled with a vapor deposition material and at least an inner wall surface of the bottomed cylindrical body. It is a crucible for vapor deposition characterized by having a structure.

  Another configuration of the present invention has a bottomed cylindrical body filled with a vapor deposition material, and a structure formed of a substance having high thermal conductivity in contact with at least the bottom surface of the bottomed cylindrical body. It is a crucible for vapor deposition characterized by this.

  In another configuration of the present invention, the material having high thermal conductivity is gold, silver, platinum, cylinder, beryllium, silicon carbide and carbon nitride diamond, boron nitride, silicon carbide, beryllium oxide, or aluminum nitride. It is characterized by being one or more of them.

Another structure of the present invention is characterized in that, in the structure described above, the structure is one or more of a wire shape, a spherical shape, or a plate shape.

  Another structure of the present invention is characterized in that, in the structure described above, the form of the structure is a wire shape, a spherical shape, or a plate shape, or one shape or a combination of a plurality of shapes.

  Another configuration of the present invention includes a bottomed cylindrical body portion filled with a vapor deposition material and a lid with a through hole, and the lid is covered with a substance having higher thermal conductivity than the constituent material of the lid. A vapor deposition apparatus comprising a crucible and an evaporation source having a heating unit for heating the crucible, wherein the crucible is detachable from the heating unit.

  Another configuration of the present invention is a substance having a cylindrical body with a bottom filled with a vapor deposition material, a lid with an opening and an inner lid, and the inner lid has a higher thermal conductivity than the constituent material of the inner lid. And an evaporation source having a heating part for heating the crucible, and the crucible is detachable from the heating part.

  Another configuration of the present invention is a substance having a cylindrical body with a bottom filled with a vapor deposition material, a lid with an open through hole, and an inner lid, wherein the lid and the inner lid have higher thermal conductivity than the respective constituent materials. And an evaporation source having a heating part for heating the crucible, and the crucible is detachable from the heating part.

  According to another aspect of the present invention, a cylindrical body having a bottom filled with a vapor deposition material and a lid having a through hole are formed, and the lid is formed of a substance having higher thermal conductivity than the cylindrical body having a bottom. The evaporation apparatus includes an evaporation source having a crucible and a heating unit that heats the crucible, and the crucible is detachable from the heating unit.

  Another configuration of the present invention includes a bottomed cylindrical body portion filled with a vapor deposition material, a lid with an open through hole, and an inner lid, and the inner lid is more thermally conductive than the bottomed cylindrical body portion. An evaporation apparatus comprising a crucible formed of a high substance and an evaporation source having a heating unit for heating the crucible, wherein the crucible is detachable from the heating unit.

  Another configuration of the present invention includes a bottomed cylindrical body filled with a vapor deposition material and a lid with a through hole, and the lid and the inner lid have higher thermal conductivity than the bottomed cylindrical body. An evaporation apparatus comprising: a crucible formed of a substance; and an evaporation source having a heating unit for heating the crucible, wherein the crucible is detachable from the heating unit.

  Another configuration of the present invention includes a bottomed cylindrical body portion filled with a vapor deposition material and a cover having a through hole, and is in contact with at least the inner surface of the bottomed cylindrical body portion, and the bottomed cylindrical shape A crucible having a part formed of a material having a higher thermal conductivity than the body of the body, and an evaporation source having a heating part for heating the crucible, wherein the crucible is detachable from the heating part. It is a vapor deposition device.

  Another configuration of the present invention includes a bottomed cylindrical body portion filled with a vapor deposition material and a cover having a through hole, and is in contact with at least the bottom surface of the bottomed cylindrical body portion, and the bottomed cylindrical shape A crucible having a part formed of a material having a higher thermal conductivity than the body of the body, and an evaporation source having a heating part for heating the crucible, wherein the crucible is detachable from the heating part. It is a vapor deposition device.

  According to another aspect of the present invention, there is provided a crucible having a bottomed cylindrical body portion filled with a vapor deposition material and a lid with a through hole, the lid being covered with a material having high thermal conductivity, and the crucible. An evaporation apparatus including an evaporation source having a heating unit for heating, wherein the crucible is detachable from the heating unit.

  Another configuration of the present invention is a crucible having a bottomed cylindrical body portion filled with a vapor deposition material, a lid having a through hole, and an inner lid, the inner lid being covered with a material having high thermal conductivity. The evaporation apparatus includes an evaporation source having a heating unit for heating the crucible, and the crucible is detachable from the heating unit.

  Another configuration of the present invention has a cylindrical body with a bottom filled with a vapor deposition material, a lid with an open through hole, and an inner lid, and the lid and the inner lid are covered with a material having high thermal conductivity. A vapor deposition apparatus comprising a crucible and an evaporation source having a heating unit for heating the crucible, wherein the crucible is detachable from the heating unit.

  According to another aspect of the present invention, there is provided a crucible having a bottomed cylindrical body portion filled with a vapor deposition material and a lid having a through hole, the lid being formed of a material having high thermal conductivity, and the crucible. An evaporation apparatus including an evaporation source having a heating unit for heating, wherein the crucible is detachable from the heating unit.

  Another structure of the present invention is a crucible having a bottomed cylindrical body portion filled with a vapor deposition material, a lid having a through-hole and an inner lid, wherein the inner lid is formed of a material having high thermal conductivity. The evaporation apparatus includes an evaporation source having a heating unit for heating the crucible, and the crucible is detachable from the heating unit.

  Another configuration of the present invention is a crucible having a bottomed cylindrical body portion filled with a vapor deposition material and a lid with a through hole, wherein the lid and the inner lid are formed of a material having high thermal conductivity, The evaporation apparatus includes an evaporation source having a heating unit for heating the crucible, and the crucible is detachable from the heating unit.

  Another structure of the present invention is a substance having a high thermal conductivity, having a bottomed cylindrical body portion filled with a vapor deposition material and a cover having a through hole, in contact with at least the inner wall surface of the bottomed cylindrical body portion A vapor deposition apparatus comprising: a crucible having a part formed by the above and an evaporation source having a heating part for heating the crucible, wherein the crucible is detachable from the heating part.

  Another configuration of the present invention is a substance having a high thermal conductivity, having a bottomed cylindrical body portion filled with a vapor deposition material and a cover having a through hole, in contact with at least the bottom surface of the bottomed cylindrical body portion A vapor deposition apparatus comprising: a crucible having a part formed by the above and an evaporation source having a heating part for heating the crucible, wherein the crucible is detachable from the heating part.

  In another configuration of the present invention, the material having high thermal conductivity is gold, silver, platinum, cylinder, beryllium, silicon carbide and carbon nitride diamond, boron nitride, silicon carbide, beryllium oxide, or aluminum nitride. It is characterized by being one or more of them.

  Another structure of the present invention is characterized in that, in the structure described above, the structure is one or more of a wire shape, a spherical shape, or a plate shape.

  Another structure of the present invention is characterized in that, in the structure described above, the form of the structure is a wire shape, a spherical shape, or a plate shape, or one shape or a combination of a plurality of shapes.

  Another configuration of the present invention is characterized in that, in the above configuration, the vapor deposition source has position control means capable of freely controlling the position in a uniaxial, biaxial or triaxial direction while performing vapor deposition.

  By adopting the configuration of the present invention, even if it is a crucible for vapor deposition made using a material that is cheap and easy to process, the vapor deposition material adheres to the vicinity of the through hole in use, and the vapor deposition rate becomes unstable. Can be prevented. In addition, even in a vapor deposition apparatus in which the evaporation source can be detached from the heating part having an open top, it is possible to prevent the deposition material from adhering to the through hole, so that clogging of the through hole can be prevented, The time required for maintenance and replacement of the evaporation source can be shortened, and the throughput can be increased. Furthermore, since the temperature difference between the lid near the through hole and the heater can be reduced, the clogging of the through hole is less likely to occur, the frequency of replacement of the evaporation source due to the evaporation material running out can be reduced, and the throughput can be reduced. improves.

  In addition, by providing a substance having high thermal conductivity in the vapor deposition crucible so as to be in contact with at least the wall surface of the vapor deposition material filling portion, the heat of the heater can be easily transferred into the vapor deposition material, so the temperature difference in the vapor deposition material is reduced. , Leading to stabilization of the deposition rate.

Embodiments in the present invention will be described below.
(Embodiment 1)
The perspective view of the crucible 11 for vapor deposition which is a part of the structure of this invention is shown to FIG. 1 (A) (B). The crucible 11 for vapor deposition is divided into a bottomed cylindrical body portion (vapor deposition material filling portion) 21 and a lid portion 13 having a through hole 12. This crucible for vapor deposition can also be used as a container for conveying vapor deposition material.

The vapor deposition material filling portion 21 includes copper phthalocyanine (CuPc), 4,4′-bis [N- (naphthyl) -N-phenyl-amino] biphenyl (α-NPD), tris-8-quinolinonato aluminum complex ( Alq _3), lithium fluoride (LiF), material required to form a molybdenum oxide (MoOx) such as a field emission device is filled, deposited using the evaporation source filled with the desired material to the layer to be deposited I do. The crucible for vapor deposition may be provided with an inner lid 22 for preventing bumping of the vapor deposition material as shown in FIG.

  The material of the crucible 11 for vapor deposition may be appropriately selected from any material such as titanium, tantalum, molybdenum, tungsten, boron nitride, etc. in consideration of operating temperature, reactivity, etc. The thickness of the container is the assumed internal capacity of the vapor deposition material And the shape, or the thermal conductivity of the material. In the present embodiment, the lid 13 and / or the inner lid 22 having a through hole are covered with a substance having a higher thermal conductivity than each main constituent material.

  As a material for covering the lid 13 having the through hole or the inner lid 22 or both, the material is effective as long as it has a higher thermal conductivity than the main constituent materials, but a material having a more preferable high thermal conductivity. Are silver (Ag), gold (Au), copper (Cu), aluminum (Al) and beryllium (Be). Since these materials have a very high thermal conductivity, a high effect can be expected. Although platinum (Pt) has a lower thermal conductivity than the above materials, it is a desirable material because it has a relatively high thermal conductivity and is very stable. You may use the alloy of these substances. The lid 13 and the inner lid 22 having through holes are appropriately selected in consideration of the vapor deposition temperature of the vapor deposition material, the reactivity with the vapor deposition material, and the like.

  As a method for forming such a material as a film, vapor deposition, sputtering, spraying, electroplating, electroless plating, hot dipping, spray coating, electrostatic coating, electrodeposition coating, powder coating, ink jet method, Various methods such as winding a thin film sheet are conceivable. Any method other than those listed above may be used as long as a film in close contact with the lid 13 having the through hole and / or the inner lid 22 can be obtained.

  When the electroluminescent element is manufactured using the vapor deposition crucible 11 and the vapor deposition apparatus having the lid 13 and / or the inner lid 22 having the through-hole formed in this way, the lid near the heating portion and the through-hole 12 and Since the temperature difference of the inner lid 22 is relaxed, it is possible to prevent the vapor deposition material from adhering to the through hole 12 or the vicinity of the inner lid 22 and to stabilize the vapor deposition rate, so that the electroluminescence formed by using the crucible and the apparatus. It is possible to prevent variations in the characteristics of the apparatus.

  Further, even in a vapor deposition apparatus in which the evaporation source can be removed from the heating unit having an opening at the top, it is possible to prevent the vapor deposition material from adhering to the through hole 12, thereby preventing clogging of the through hole 12. It is possible to shorten the time required for maintenance and replacement of the evaporation source and increase the throughput.

(Embodiment 2)
In the first embodiment, a film having a higher thermal conductivity than each main constituent material is formed on the lid 13 and / or the inner lid 22 having the through holes of the conventional evaporation crucible. In this embodiment, a method for solving the problem by another method will be described with reference to FIG.

  In the present embodiment, the lid 13 having the through-hole and the inner lid 22 itself are formed of a material having higher thermal conductivity than the material conventionally used as the material for the crucible for vapor deposition. At this time, the vapor deposition material filling portion 21 can be formed of the same material as the conventional one.

  When the electroluminescent element is produced using the vapor deposition crucible 11 and the vapor deposition apparatus using the lid 13 having the through hole formed in this way, the inner lid 22 or both, and the heating unit having an open top. Even in the vapor deposition apparatus to which the evaporation source can be removed, the temperature difference between the heating unit and the lid in the vicinity of the through hole 12 can be reduced.

  In addition, since only the lid 13 or the inner lid 22 or both are formed of a material having high thermal conductivity and the body portion can be a conventional one, even an expensive material can be easily processed. Manufacturing costs are reduced. Furthermore, even a material that is difficult to form a thin film as in the first embodiment can be used.

  In the present embodiment, an effect can be obtained if a material having a higher thermal conductivity than the material conventionally used for producing the crucible for vapor deposition is the material of the lid 13 or the inner lid 22 or both, In order to obtain a higher effect, a material having high thermal conductivity, preferably gold, silver, platinum, copper, aluminum, beryllium, silicon carbide and carbon nitride, boron nitride, silicon carbide, beryllium oxide, aluminum nitride, etc. Alternatively, a plurality of types may be appropriately selected in consideration of the use temperature, reactivity with the vapor deposition material to be used, and the like.

  When an electroluminescent element is produced using a vapor deposition crucible and vapor deposition apparatus using the lid 13 and / or the inner lid 22 having the through-hole formed in this way, vapor deposition in which the evaporation source can be detached from the heating section. Also in the apparatus, since the temperature difference between the heating unit and the lid near the through hole 12 is alleviated, it is possible to prevent the deposition material from adhering to the vicinity of the through hole 12 and to stabilize the vapor deposition rate. It is possible to prevent variations in the characteristics of the electroluminescence measure formed by using the same.

  Further, since it is possible to prevent the deposition material from adhering to the through hole 12, it is possible to prevent the through hole 12 from being clogged, shorten the time required for maintenance and replacement of the evaporation source, and increase the throughput. It becomes possible.

(Embodiment 3)
In the present embodiment, another embodiment of the present invention will be described with reference to FIG. Differences in heating temperature depending on the position of the material itself, such as copper phthalocyanine, molybdenum oxide, lithium fluoride, and other materials that can be used for electroluminescent devices that do not evaporate unless a relatively high temperature is applied. Becomes a problem.

  That is, the material in the vicinity of the wall surface and the bottom surface of the evaporation source is sufficiently heated, and even at the temperature at which the vapor deposition material evaporates, the material in the central portion is not heated enough to evaporate. Naturally, since the deposition rate is small and unstable, it is not practical in the case of performing deposition while moving the evaporation source. On the other hand, if the temperature of the heater is raised, the material of the wall surface will be burnt, and not only the expensive vapor deposition material will be damaged but also the vapor deposition crucible may not be reused.

  In view of this, the present embodiment is characterized in that, as shown in FIG. 2A, at least a part formed so as to be in contact with the wall surface or the bottom surface of the evaporation material filling portion in the evaporation crucible is provided.

  The part may have any shape as long as a part thereof is in contact with the wall surface or the bottom surface of the vapor deposition material filling portion. For example, shapes as shown in FIGS. It is desirable for the components to be evenly present in the vapor deposition material filling part, so that it is possible to apply heat evenly to the vapor deposition material, to obtain a stable rate, and to obtain a stable rate. Can be shortened.

  In FIG. 2A, a part 31 formed by contacting a wire-shaped material so as to be in contact with at least one of the wall surface and the bottom surface of the vapor deposition material filling portion 21 is loaded into the vapor deposition material filling portion. The vapor deposition material 30 is evenly heated by the heat transmitted from the component 31. It is desirable that the shape of the component 31 occupies the inside of the vapor deposition material filling portion 21 because heat is evenly applied to the vapor deposition material 30. As a result, the time until the deposition rate is stabilized is shortened and the stability of the deposition rate is increased, so that the throughput can be improved and the variation and unevenness of the product can be reduced.

  In FIG. 2 (B), a plurality of spherical parts 32 are charged in the vapor deposition material filling part so as to be in contact with at least the wall surface and bottom surface of the vapor deposition material filling part 21 or any other spherical part. The vapor deposition material 30 is evenly heated by the heat transmitted from the component 32. As a result, the time until the deposition rate is stabilized is shortened and the stability of the deposition rate is increased, so that the throughput can be improved and the variation and unevenness of the product can be reduced.

  In FIG. 2 (C), the plate-shaped component 33 or a component 33 produced by combining a plurality of plate-shaped materials is placed in the vapor deposition material filling portion so that it contacts at least either the wall surface or the bottom surface of the vapor deposition material filling portion 21. It is charged. It is desirable that the shape of the component 33 occupies the inside of the vapor deposition material filling portion 21 since heat is evenly applied to the vapor deposition material 30. As a result, the time until the deposition rate is stabilized is shortened and the stability of the deposition rate is increased, so that the throughput can be improved and the variation and unevenness of the product can be reduced.

  FIG. 2D shows an example in which a thin film 34 of a material having a higher thermal conductivity than the main constituent material of the evaporation crucible 11 is formed on the wall surface and the bottom surface inside the evaporation material filling portion. The material and the formation method of the thin film 34 are the same as those in the first embodiment, and will not be described.

  In FIG. 2E, the member 35 formed in a spiral shape so that the wire-like material is in contact with the wall surface and the bottom surface inside the vapor deposition material filling portion is charged into the vapor deposition material filling portion 21. 2D and 2E are not very effective only with this configuration, but a greater effect can be obtained by combining with FIGS. 2A to 2C.

  The configurations in FIGS. 2A to 2E can be used in any combination, and the parts are not touched on the shapes listed above, but are prepared so as to be in contact with at least the wall surface or bottom surface of the vapor deposition material filling portion. Any shape may be used as long as it is present, but a shape in which the inside of the vapor deposition material filling portion exists macroscopically without bias is preferable.

  As a material of parts, it seems that a certain degree of effect is exhibited if the thermal conductivity is higher than the assumed vapor deposition material, but more preferably a material having a high thermal conductivity, that is, gold, silver, platinum, copper, aluminum, beryllium, One or more types of silicon carbide and carbon nitride, boron nitride, silicon carbide, beryllium oxide, aluminum nitride, and the like may be used in consideration of the use temperature, reactivity with the deposition material, and the like. In addition, the shape of the part to be used is appropriately selected depending on the material. Also, the shape that can be applied naturally depends on the workability.

  By using the evaporation crucible as shown in the present embodiment, the temperature difference between the evaporation material near the wall surface and the evaporation material in the center can be reduced, and the evaporation rate and its stability can be improved. it can. Therefore, throughput is improved, and in-plane film thickness variation can be suppressed in a vapor deposition apparatus, film forming apparatus, and manufacturing apparatus having a mechanism for performing vapor deposition by moving an evaporation source, and high-quality display with less display unevenness and defects. An apparatus can be provided. In addition, since it is only charged into the evaporation crucible that is always used, it is possible to take measures at a very low cost.

(Embodiment 4)
FIG. 3 shows an example of a manufacturing apparatus using the present invention.

  In FIG. 3, 300 is a substrate, 310 is a film forming chamber, 320 and 330 are transfer chambers, 340 is a crucible installation chamber, 315 is an evaporation source driving robot, 342 is a crucible transfer robot, 341 is a crucible installation turntable, 311. , 312 and 313 are shutters for partitioning the rooms, and 343 is a door.

  The substrate 300 is transferred from the transfer chamber 320 into the film formation chamber 310. In the case where the vapor deposition is selectively performed, the vapor deposition is performed after the vapor deposition mask and the substrate are aligned.

  In the heating unit 200, two crucibles for evaporation (evaporation source) 100 filled with the material of the light emitting element are set. Although not shown, a sliding shutter is provided above each evaporation source. Although FIG. 3 shows an evaporation source having two evaporation crucibles, three or more evaporation crucibles may be provided, and the present invention is not limited to the configuration of FIG. The two evaporation crucibles may be filled with the same material, or may be filled with different materials such as a host material and a dopant material.

  When the evaporation source 100 set in the heating unit 200 is heated and heated to a vapor deposition temperature or higher, vapor deposition particles are ejected from the through hole in the upper part of the evaporation source. Here, it waits until a predetermined film-forming rate. According to the present invention, since the upper part of the evaporation source is difficult to cool, even if the material is open, the material is not easily clogged with the through holes, and a stable film formation rate can be obtained. After stabilization at a predetermined film formation rate, a substrate shutter (not shown) is opened, and an evaporation robot that moves the evaporation source is driven to perform evaporation on the substrate. By repeating the reciprocation of the evaporation source, a uniform film is formed on the substrate. After the deposition is completed, the substrate shutter is closed and the substrate is transferred to the transfer chamber 330. By repeating this vapor deposition, the material of the light emitting element can be formed on a large number of substrates.

  3 is provided with a mechanism for exchanging the evaporation source set in the heating unit 200. Hereinafter, the procedure will be described.

  Vent the crucible installation chamber to atmospheric pressure. At this time, since the shutter 313 is provided, the degree of vacuum in the transfer chamber 310 remains unchanged. After opening the door 343 and setting the crucible (evaporation source) filled with the material of the light emitting element on the rotary table for deposition crucible, the door is closed and the degree of vacuum is the same as or lower than that of the transfer chamber. Pull up to. Since the crucible installation chamber is smaller than the film formation chamber, it can reach a predetermined pressure in a short time. When the predetermined degree of vacuum is reached, the shutter 313 is opened, the crucible transport robot 342 is driven, the first container set in the heating unit is taken out, and the container is set on the turntable 341 for container installation. The container installation turntable is rotated, the vapor deposition crucible filled with the material is taken out, and set in the heating unit.

  In addition, the conveyance mechanism in this invention is limited to the structure where the knob part of the crucible conveyance robot hooks and conveys the inside of the vapor deposition crucible from above the vapor deposition crucible 100 as shown in FIG. Instead of this, a configuration may be adopted in which the side of the vapor deposition crucible is pinched and conveyed.

  It should be noted that the evaporation crucible set on the crucible installation turntable 341 may be heated by a built-in heater while evacuating to a temperature at which the material does not fly. Later heating time is shortened, resulting in a high throughput apparatus.

  The present invention having the above configuration will be described in more detail with the following embodiments, but the present invention is not limited to the following embodiments.

(Embodiment 5)
FIG. 4 shows a top view of a multi-chamber manufacturing apparatus. The manufacturing apparatus shown in FIG. 4 has a chamber arrangement that improves throughput.

  4 shows shutters 500a to 500n, a substrate loading chamber 520, a sealing / unloading chamber 519, transfer chambers 504 and 514, film formation chambers 506 and 509, crucible installation chambers 526a to 526d, and a pretreatment chamber. 503 is a multi-chamber manufacturing apparatus having a sealing substrate load chamber 517 and a sealing chamber 518.

Hereinafter, a procedure for manufacturing a light-emitting device by carrying a substrate provided with an anode (first electrode) and an insulator (partition wall) covering an end of the anode in advance into the manufacturing apparatus shown in FIG. 4 will be described. Note that in the case of manufacturing an active matrix light-emitting device, a plurality of thin film transistors (current control TFTs) and other thin film transistors (such as switching TFTs) connected to an anode are provided in advance on a substrate, and are formed of thin film transistors. A drive circuit is also provided. In addition, when a simple matrix light-emitting device is manufactured, the manufacturing apparatus illustrated in FIG. 4 can be used.

  First, the substrate is set in the substrate loading chamber 520. Substrate sizes of 320 mm × 400 mm, 370 mm × 470 mm, 550 mm × 650 mm, 600 mm × 720 mm, 680 mm × 880 mm, 1000 mm × 1200 mm, 1100 mm × 1250 mm, and even 1150 mm × 1300 mm can be handled.

  A substrate (a substrate provided with an anode and an insulator covering an end portion of the anode) set in the substrate loading chamber 520 is transferred to the transfer chamber 504. Note that the transfer chamber 504 is provided with a transfer mechanism (such as a transfer robot) and a vacuum exhaust unit for transferring or reversing the substrate, and the other transfer chambers 514 are also provided with a transfer mechanism and a vacuum exhaust unit, respectively. It is. A robot provided in the transfer chamber 504 can reverse the front and back surfaces of the substrate and can carry the substrate into the film formation chamber 506 by being reversed. The transfer chamber 504 can maintain atmospheric pressure or vacuum. The transfer chamber 504 is connected to an evacuation treatment chamber, and can be evacuated to a vacuum, or after evacuation, an inert gas can be introduced to an atmospheric pressure.

The vacuum evacuation chamber is provided with a magnetic levitation turbo molecular pump, a cryopump, or a dry pump. As a result, the ultimate vacuum of the transfer chamber connected to each chamber can be set to 10 ⁻⁵ to 10 ⁻⁶ Pa, and the back diffusion of impurities from the pump side and the exhaust system can be controlled. In order to prevent impurities from being introduced into the apparatus, an inert gas such as nitrogen or a rare gas is used as the introduced gas. These gases introduced into the apparatus are those purified by a gas purifier before being introduced into the apparatus. Therefore, it is necessary to provide a gas purifier so that the gas is introduced into the vapor deposition apparatus after being highly purified. Thereby, oxygen, water, and other impurities contained in the gas can be removed in advance, so that these impurities can be prevented from being introduced into the apparatus.

  In addition, before setting in the substrate loading chamber 520, a porous sponge (typically, a surfactant (weak alkali) is included in the surface of the first electrode (anode) in order to reduce point defects. It is preferable to remove dust on the surface by washing with PVA (polyvinyl alcohol), nylon or the like. As a cleaning mechanism, a cleaning device having a roll brush (manufactured by PVA) that rotates around an axis parallel to the surface of the substrate and contacts the surface of the substrate may be used, or may rotate around an axis perpendicular to the surface of the substrate. You may use the washing | cleaning apparatus which has a disk brush (product made from PVA) which contacts the surface of a board | substrate while moving.

In order to prevent moisture from entering from the film formation surface on the substrate side, it is preferable to perform vacuum heating immediately before the deposition of the film containing the organic compound, and the pretreatment chamber 503 in which the substrate can be heated from the transfer chamber 504 in vacuum. In order to thoroughly remove moisture and other gases contained in the substrate, annealing for deaeration is performed under vacuum (5 × 10 ⁻³ Torr (0.665 Pa) or less, preferably 10 ^−4. carried out in to 10 ^-6 Pa). In particular, when an organic resin film is used as a material for an interlayer insulating film or a partition, depending on the organic resin material, moisture may be easily adsorbed and degassing may occur. Therefore, before forming a layer containing an organic compound, It is effective to perform vacuum heating for removing adsorbed moisture by performing natural cooling for 30 minutes after heating for 100 minutes to 100 ° C., preferably 150 ° C. to 200 ° C., for example, for 30 minutes or more.

  If necessary, a hole injection layer made of a polymer material may be formed in the film formation chamber 512 by an ink jet method, a spin coating method, a spray method, or the like under atmospheric pressure or reduced pressure. Further, after coating by the ink jet method, the film thickness may be made uniform by a spin coater. Similarly, after coating by a spray method, the film thickness may be uniformed by a spin coater. Alternatively, the film may be formed by an inkjet method in a vacuum with the substrate placed vertically.

  For example, a poly (ethylenedioxythiophene) / poly (styrenesulfonic acid) aqueous solution (PEDOT / PSS) acting as a hole injection layer (anode buffer layer) on the first electrode (anode) in the film formation chamber 512, Polyaniline / camphor sulfonic acid aqueous solution (PANI / CSA), PTPDES, Et-PTPDK, PPBA, or the like may be applied to the entire surface and fired. When firing, it is preferably performed in the pretreatment chamber 503.

  When a hole injection layer made of a polymer material is formed by a coating method using spin coating or the like, flatness is improved, and coverage and film thickness uniformity of a film formed thereon are improved. be able to. In particular, since the thickness of the light emitting layer becomes uniform, uniform light emission can be obtained. In this case, it is preferable to perform vacuum heating (100 to 200 ° C.) immediately after forming the hole injection layer by a coating method and immediately before film formation by the vapor deposition method.

  For example, after the surface of the first electrode (anode) is cleaned with a sponge, it is carried into the substrate loading chamber 520, conveyed to the film formation chamber 512, and poly (ethylenedioxythiophene) / poly (styrenesulfone) by spin coating. Acid) Aqueous solution (PEDOT / PSS) is applied to the entire surface with a film thickness of 60 nm, then transported to the pretreatment chamber 503, pre-baked at 80 ° C. for 10 minutes, main-baked at 200 ° C. for 1 hour, and immediately before vapor deposition After vacuum heating (170 ° C., heating for 30 minutes, cooling for 30 minutes), the light-emitting layer may be formed by an evaporation method without being exposed to the atmosphere by being transferred to the film formation chamber 506. In particular, when an ITO film is used as an anode material and there are irregularities and fine particles on the surface, these effects can be reduced by setting the PEDOT / PSS film thickness to 30 nm or more.

In addition, when PEDOT / PSS is formed by spin coating, the film is formed over the entire surface, so that the end face, peripheral edge, terminal part, connection area between the cathode and lower wiring, etc. can be selectively removed. Preferably, it is preferable to remove selectively by O ₂ ashing or the like using a mask in the pretreatment chamber 503. The pretreatment chamber 503 has plasma generating means, and performs dry etching by exciting one or more kinds of gases selected from Ar, H, F, and O to generate plasma. By using the mask, only unnecessary portions can be selectively removed. Further, a UV irradiation mechanism may be provided in the pretreatment chamber 503 so that ultraviolet irradiation can be performed as the anode surface treatment.

  Next, the substrate is transported to the film formation chamber 506 connected to the transport chamber 504 by the transport mechanism 511, so that the small molecule that becomes the hole injection layer, the hole transport layer, the light emitting layer, the electron transport layer, or the electron injection layer is used. An organic compound layer is formed as appropriate. By appropriately selecting a material for the light emitting element, a light emitting element that emits light of a single color (specifically, white, red, green, or blue) can be formed as the entire light emitting element. Film formation is performed by moving a robot equipped with an evaporation source 200, and an evaporation crucible filled with a light emitting element material can be set in the evaporation source. The material for the evaporation crucible is made of titanium, and an opening for evaporation is provided at the top.

  In addition, the film formation chamber 506 is provided with crucible installation chambers 526a to 526d as shown in Embodiment Mode 2, and is provided with a plurality of vapor deposition crucibles filled with light-emitting element materials. The vapor deposition crucible filled with the necessary materials is transferred to the film formation chamber, and vapor deposition is performed sequentially. Further, a film can be selectively formed by setting a substrate by a face-down method, performing position alignment of a vapor deposition mask by a CCD or the like, and performing vapor deposition by a resistance heating method. When vapor deposition is completed, the substrate is transferred to the next transfer chamber side.

Next, the substrate is taken out of the film formation chamber 506 by a transfer mechanism installed in the transfer chamber 514 and transferred to the film formation chamber 510 without being exposed to the atmosphere, so that a cathode (or a protective film) is formed. This cathode is an inorganic film formed by an evaporation method using resistance heating (an alloy such as MgAg, MgIn, CaF ₂ , LiF, or CaN, or an element belonging to Group 1 or Group 2 of the periodic table and aluminum is co-evaporated. Film formed by a method, or a laminated film thereof). Moreover, you may form a cathode using a sputtering method.

In the case of manufacturing a top emission type or dual emission type light emitting device, the cathode is preferably transparent or translucent, and the metal film thin film (1 nm to 10 nm) or the metal film thin film (1 nm). 10 nm) and a transparent conductive film is preferably used as the cathode. In this case, a film made of a transparent conductive film (ITO (indium oxide tin oxide alloy), indium oxide zinc oxide alloy (In ₂ O ₃ —ZnO), zinc oxide (ZnO), etc.) is formed in the film formation chamber 509 by sputtering. May be formed. Through the above process, a light-emitting element having a stacked structure is formed.

  Alternatively, a protective film formed using a silicon nitride film or a silicon nitride oxide film may be formed and sealed in the deposition chamber 509 connected to the transfer chamber 514. In this case, the film formation chamber 509 is provided with a target made of silicon, a target made of silicon oxide, or a target made of silicon nitride. Alternatively, the protective film may be formed by moving a rod-shaped target with respect to the fixed substrate. Further, the protective film may be formed by moving the substrate with respect to the fixed rod-shaped target.

For example, a silicon nitride film can be formed over the cathode by using a disk-shaped target made of silicon and setting the film formation chamber atmosphere to a nitrogen atmosphere or an atmosphere containing nitrogen and argon. Further, a thin film containing carbon as a main component (DLC film, CN film, amorphous carbon film) may be formed as a protective film, or a film formation chamber using a CVD method may be provided separately. Diamond-like carbon film (also called DLC film) is formed by plasma CVD method (typically RF plasma CVD method, microwave CVD method, electron cyclotron resonance (ECR) CVD method, hot filament CVD method, etc.), combustion flame method It can be formed by sputtering, ion beam vapor deposition, laser vapor deposition or the like. The reaction gas used for film formation was hydrogen gas and a hydrocarbon gas (for example, CH ₄ , C ₂ H ₂ , C ₆ H _6, etc.), ionized by glow discharge, and negative self-bias was applied. Films are formed by accelerated collision of ions with the cathode. The CN film may be formed using C ₂ H ₄ gas and N ₂ gas as the reaction gas. Note that the DLC film and the CN film are insulating films that are transparent or translucent to visible light. Transparent to visible light means that the visible light transmittance is 80 to 100%, and translucent to visible light means that the visible light transmittance is 50 to 80%.

  Next, the substrate over which the light-emitting element is formed is transferred from the transfer chamber 514 to the sealing chamber 519.

  The sealing substrate is set and prepared in the sealing substrate load chamber 517 from the outside. Note that vacuum annealing is preferably performed in advance in order to remove impurities such as moisture. In the case of forming a sealing material to be attached to a substrate provided with a light emitting element on the sealing substrate, the sealing material is formed in the sealing chamber 518, and the sealing substrate on which the sealing material is formed is used as the sealing substrate stock. It is transferred to the chamber 530. Note that a desiccant may be provided on the sealing substrate in the sealing chamber 518. Further, a vapor deposition mask used for vapor deposition may be stocked in the sealing substrate stock chamber 530. Note that here, an example in which the sealing material is formed over the sealing substrate is described; however, there is no particular limitation, and the sealing material may be formed over the substrate over which the light-emitting element is formed.

  Next, the substrate and the sealing substrate are bonded to each other in the sealing and extraction chamber 519, the pair of bonded substrates are sealed, and the sealing material is cured by irradiating UV light with an ultraviolet irradiation mechanism provided in the extraction chamber 519. . In addition, although ultraviolet curable resin was used here as a sealing material, if it is an adhesive material, it will not specifically limit.

  Next, the pair of bonded substrates is sealed and taken out from the take-out chamber 519.

  As described above, by using the manufacturing apparatus illustrated in FIG. 4, it is not necessary to expose the light-emitting element to the atmosphere until the light-emitting element is completely enclosed in a sealed space, and thus a highly reliable light-emitting device can be manufactured. Further, the evaporation source is moved and the substrate is moved in the deposition chamber 506, whereby the evaporation is completed. Thus, the evaporation is completed in a short time, and a light-emitting device can be manufactured with high throughput.

  Although not shown here, a control device for controlling work in each processing chamber, a control device for transferring between the processing chambers, and a path for moving the substrate to each processing chamber are controlled. A control device that realizes automation is provided.

  In the manufacturing apparatus shown in FIG. 4, a substrate provided with a transparent conductive film (or metal film (TiN)) is carried in as an anode, and after forming a layer containing an organic compound, a transparent or translucent cathode (for example, A top emission (or double emission) light emitting element can be formed by forming a thin metal film (a laminate of Al, Ag) and a transparent conductive film). Indicates an element that transmits light emitted from the organic compound layer through the cathode.

  Moreover, in the manufacturing apparatus shown in FIG. 4, after carrying in the board | substrate with which the transparent conductive film was provided as an anode and forming the layer containing an organic compound, by forming the cathode which consists of a metal film (Al, Ag), It is also possible to form a bottom emission type light emitting element. Note that a bottom emission light-emitting element refers to an element that extracts light emitted from an organic compound layer from an anode, which is a transparent electrode, toward a TFT and further passes through a substrate.

  As described above, the manufacturing apparatus according to the present embodiment can cope with the manufacture of any organic light emitting element, and can perform vapor deposition for a long time. Can be improved.

  As described in Embodiment Mode 1, the evaporation crucible can also be used when conveying the evaporation material.

  The form of the container to be conveyed will be specifically described with reference to FIG. The transport container divided into an upper part (721a) and a lower part (721b) used for transport has a fixing means 706 for fixing the evaporation crucible provided on the upper part of the transport container, and a spring 705 for pressurizing the fixing means. A gas introduction port 708 serving as a gas path for holding the conveyance container provided in the lower part of the conveyance container under reduced pressure, an O-ring for fixing the upper container 721a and the lower container 721b, and a fastener 702. ing. A vapor deposition crucible 701 in which a purified vapor deposition material is sealed is installed in the transfer container. Note that the transfer container is preferably formed of a material containing stainless steel.

  In the material manufacturer, the purified vapor deposition material is sealed in the vapor deposition crucible 701. Then, the second upper portion 721a and the lower portion 721b are aligned via an O-ring, and the upper container 721a and the lower container 721b are fixed with a fastener 702, and the first container 701 is sealed in the transfer container. Thereafter, the inside of the transfer container is depressurized via the gas introduction port 708, further replaced with a nitrogen atmosphere, the spring 705 is adjusted, and the first container 701 is fixed by the fixing means 706. In addition, you may install a desiccant in the container for conveyance. When the inside of the transfer container is maintained in a vacuum, reduced pressure, or nitrogen atmosphere in this manner, even a slight amount of oxygen or water attached to the vapor deposition material can be prevented.

  In this state, the first container 701 is transported to the light emitting device manufacturer, and the first container 701 is installed in the vapor deposition chamber as shown in FIG. Thereafter, the vapor deposition material is sublimated or melted by heating to evaporate, and a vapor deposition film is formed.

  As described above, the vapor deposition apparatus that performs vapor deposition using the vapor deposition crucible also used for transporting the vapor deposition material is configured such that the evaporation source is desorbed from the heating unit, so that the upper part of the heating unit is open. It has a structure. For this reason, since the heating unit and the through hole are separated from each other, the clogging of the through hole is likely to occur. Therefore, the application of the crucible for vapor deposition having the configuration of the first embodiment or the second embodiment is very suitable.

  Note that this embodiment can be used in combination with any of Embodiment Modes 1 to 5.

  FIG. 5 shows changes in temperature and deposition rate when deposition is performed using the deposition crucible of the present invention. In this example, titanium is used as the material for the evaporation crucible, a thin silver film is wound on the lid, a thin silver film is formed on the inner lid, and FIGS. 2A and 2E in Embodiment Mode 3 are used. This is a result of vapor-depositing molybdenum oxide MoOx in a crucible for vapor deposition to which is applied).

If you take no measures, deposition rate is the limit ^{7 × 10 -3 ~8 × 10 -3} nm / s, is hardly deposited, it is also day become even smaller over time. Also, it takes 1 hour or more from the start of heating until the temperature stabilizes at a temperature at which vapor deposition can be performed. When FIG. 5 to which the present invention is applied is seen, it can be seen that the deposition rate is macroscopically stable at 1 × 10 ⁻² nm / s and the temperature rise is as fast as about 30 minutes.

  By using the present invention in this way, the stability of the deposition rate is improved, and the time until the temperature of the material is stabilized to a temperature at which deposition can be performed can be shortened. However, since it becomes possible to provide high-quality images without unevenness and the throughput is improved, the operating cost can be reduced and the price of the product can be reduced.

  In this embodiment, a method for manufacturing a thin film transistor, a capacitor, and an electroluminescent device using the present invention will be described with reference to FIGS.

  First, after forming the base insulating film 801 over the substrate 800, an amorphous silicon film is formed, and crystallized using an element that promotes crystallization, thereby forming a crystalline silicon film.

  As the substrate 800, an insulating substrate such as a glass substrate, a quartz substrate, or crystalline glass, a ceramic substrate, a stainless steel substrate, a metal substrate (tantalum, tungsten, molybdenum, etc.), a semiconductor substrate, a plastic substrate (polyimide, acrylic, polyethylene terephthalate, Polycarbonate, polyarylate, polyethersulfone, etc.) can be used, but at least materials that can withstand the heat generated during the process are used. These substrates may be used after being polished by CMP or the like, if necessary. In this embodiment, a glass substrate is used.

  The base film 801 is provided to prevent the alkali metal or alkaline earth metal in the substrate 800 from diffusing into the crystalline silicon film. This is because such an element adversely affects the semiconductor characteristics of the crystalline silicon film. As a material, silicon oxide, silicon nitride, silicon nitride oxide, silicon nitride oxide, or the like can be used. The material is formed by a single layer or a stacked structure. Note that there is no need to provide a base insulating film as long as it is a substrate that does not have to worry about diffusion of alkali metal or alkaline earth metal.

In this embodiment, the base insulating film 801 is formed using a stacked structure, and a silicon nitride oxide film is formed with a thickness of 50 nm as a first insulating film, and a silicon oxynitride film is formed with a thickness of 100 nm as a second insulating film. Note that the silicon nitride oxide film and the silicon oxynitride film have different ratios of nitrogen and oxygen, indicating that the former has a higher nitrogen content. The first base film is formed by plasma CVD using SiH ₄ , N ₂ O, NH ₃ , H ₂ as a source gas, pressure of 40 Pa (0.3 Torr), RF power of 50 W, RF frequency of 60 MHz, substrate It is formed at a temperature of 400 ° C. The second underlayer is also formed by plasma CVD, using SiH ₄ and N ₂ O as source gases, pressure of 40 Pa (0.3 Torr), RF power of 150 W, RF frequency of 60 MHz, and substrate temperature of 400 degrees. Form.

  Subsequently, an amorphous silicon film is formed with a thickness of 25 to 100 nm (preferably 30 to 60 nm) on the base insulating film. As a manufacturing method, a known method such as a sputtering method, a low pressure CVD method, or a plasma CVD method can be used. In this embodiment mode, the film is formed with a thickness of 50 nm by a plasma CVD method.

  Subsequently, the amorphous silicon film is crystallized. Crystallization is performed by heat treatment using an element that promotes crystallization of the amorphous silicon film. An example of an element that promotes crystallization is nickel. By using such an element, crystallization is performed at a lower temperature and in a shorter time than when not used. It can be suitably used when a weak substrate is used. Examples of such elements that promote crystallization include iron, palladium, tin, lead, cobalt, platinum, copper, and gold in addition to nickel. One or more of these may be used.

  As an addition method of such an element, for example, there is a method in which a salt of such an element is dissolved in a solvent and applied by a spin coating method or a dip method. As the solvent, an organic solvent, water, or the like can be used. However, it is important to select a solvent that does not adversely affect the semiconductor characteristics because it directly touches the silicon film. The same applies to the salt.

  In this embodiment, an example of using Ni as an element for promoting crystallization is inquired. Ni is good to use acetate and nitrate as 10ppm aqueous solution. This aqueous solution is applied onto the amorphous silicon film by spin coating, but the surface of the silicon film is hydrophobic and may not be uniformly applied. It is preferable to treat the surface to form an extremely thin oxide film.

  Other methods for introducing an element that promotes crystallization into an amorphous silicon film include ion implantation, heating in a water vapor atmosphere containing Ni, and sputtering using a Ni material as a target.

  Next, heat treatment is performed to crystallize the amorphous semiconductor film. Since a catalytic element is used, heat treatment may be performed at 500 to 650 degrees for about 2 to 24 hours. By this crystallization treatment, the amorphous silicon film becomes a crystalline silicon film. At this time, a magnetic field may be applied to crystallize with the magnetic energy, or a high-power microwave may be used. In this embodiment, a crystalline silicon film is formed by performing heat treatment at 550 ° C. for 4 hours after heat treatment at 500 ° C. for 1 hour using a vertical furnace.

Subsequently, crystallization with a laser may be performed. Crystallinity is improved by reducing defects in the crystalline silicon film. In the laser crystallization method, a pulse oscillation type or continuous oscillation type gas or solid and metal laser oscillation device may be used as a laser oscillation device. Examples of gas lasers include excimer lasers, Ar lasers, and Kr lasers. Solid-state lasers include YAG lasers, YVO ₄ lasers, YLF lasers, YAlO ₃ lasers, glass lasers, ruby lasers, alexandride lasers, sapphire lasers, metal Examples of the laser include a helium cadmium laser, a copper vapor laser, and a gold vapor laser. The crystal which is the laser medium of the solid laser is selected from Cr ³⁺ , Cr ⁴⁺ , Nd ³⁺ , Er ³⁺ , Ce ³⁺ , Co ²⁺ , Ti ³⁺ , Yb ³⁺ or V ³⁺ One or more species are doped as impurities.

The laser oscillated by the laser oscillation device is preferably irradiated in a linear form using an optical system. The linear laser can be obtained by using a commonly used cylindrical lens or a concave mirror. Examples of the irradiation conditions include a power density of about 0.01 to 100 MW / cm ² , and examples of the irradiation atmosphere include air, an atmosphere with a controlled oxygen concentration, an N ₂ atmosphere, or a vacuum. In the case of using a pulsed laser is a frequency 30～300Hz, it is desirable to laser energy density 100~1500mJ / cm ² (typically 200~500mJ / cm ^2). At this time, the laser light may be calculated by the FWHM of the laser beam and overlapped by 50 to 98%. Note that in this embodiment mode, the crystallization atmosphere is air.

  When laser irradiation is performed in the atmosphere, a silicon oxide film, which is a natural oxide film, is formed on the crystalline silicon film. Since this film quality cannot be controlled, it is desirable to remove it.

Next, a silicon oxide film is formed on the crystalline silicon film. The silicon oxide film is formed by irradiation with UV light in an oxygen atmosphere, a thermal oxidation method, treatment with ozone water containing hydrogen radicals or hydrogen peroxide, and the like. Next, gettering sites are formed by sputtering YCVD. When formed by sputtering, the gettering site is formed by depositing an amorphous silicon film containing an argon element to a thickness of 50 nm. The film formation conditions were film formation pressure: 0.3 Pa, gas (Ar) flow rate: 50 (sccm), film formation power: 3 kW, and substrate temperature: 150 ° C. The atomic concentration of argon elements contained in the amorphous silicon film under the above ^{conditions, 3 × 10 20 / cm 3} ~6 × 10 20 / cm 3, the atomic concentration of oxygen 1 × 10 ¹⁹ / cm ³ ~ 3 is a × 10 ¹⁹ / cm ³ order. Then, gettering is performed by performing a heat treatment at 650 ° C. for 3 minutes using a rapid annealing apparatus.

  By performing the heat treatment, at least a part of the element that promotes crystallization in the crystalline silicon film is moved to the gettering site. By this heat treatment, a natural oxide film made of a silicon oxide film is formed on the gettering site.

  Thereafter, the natural oxide film is removed with a liquid containing fluorine and a substance exhibiting surface activity, and the gettering site is heated to about 60 degrees using a TMAH (Tetra methyl ammonium hydroxide) -containing aqueous solution and etched.

  Thereafter, the etching stopper is removed by etching with a liquid containing fluorine and a substance exhibiting surface activity. The silicon oxide film used as an etching stopper film for gettering may contain a large amount of nickel, and the subsequent treatment may cause contamination of the active layer. Is desirable.

  Subsequently, so-called channel doping is performed in which a trace amount of impurities for controlling the threshold value is added to the crystalline silicon film as necessary. In order to obtain a required threshold value, boron or phosphorus is added by an ion doping method or the like.

Thereafter, as shown in FIG. 7A, patterning into a predetermined shape is performed to obtain island-like crystalline silicon films 801a to 801d. For patterning, a photoresist is applied to the crystalline silicon film, a predetermined mask shape is exposed, baked, and a mask is formed on the crystalline semiconductor film. Using this mask, crystalline silicon is formed by dry etching. This is done by etching the film. Dry etching gas, and CF _4, may be performed by using O ₂ or the like.

  Subsequently, a gate insulating film is formed so as to cover the crystalline semiconductor films 801a to 801d. The gate insulating film is formed of an insulating film containing silicon using a plasma CVD method or a sputtering method with a film thickness of 40 to 150 nm. In this embodiment, a silicon oxynitride film having a thickness of 115 nm is formed as the gate insulating film by plasma CVD.

  Next, tantalum nitride (TaN) 802 with a thickness of 30 nm is formed as a first conductive layer over the gate insulating film, and tungsten (W) 803 with a thickness of 370 nm is formed as a second conductive layer thereon. The TaN film and the W film may be formed by co-sputtering, the TaN film may be formed in a nitrogen atmosphere using a Ta target, and the W film may be formed using a W target.

  In this embodiment, the first conductive layer is TaN having a thickness of 30 nm and the second conductive layer is W having a thickness of 370 nm. However, the first conductive layer and the second conductive layer are both Ta, W, You may form with the element chosen from Ti, Mo, Al, Cu, Cr, Nd, or the alloy material or compound material which has the said element as a main component. Alternatively, a semiconductor film typified by a polycrystalline silicon film doped with an impurity element such as phosphorus may be used. Further, an AgPdCu alloy may be used. Furthermore, the combination may be selected as appropriate. The film thickness may be in the range of 20 to 100 nm for the first conductive layer and 100 to 400 nm for the second conductive layer. In this embodiment mode, a two-layer structure is used. However, one layer may be used, or a three-layer or more structure may be used.

  Next, in order to form the electrode and the wiring by etching the conductive layer, a mask made of a resist is formed through an exposure process by photolithography. In the first etching process, etching is performed under the first etching condition and the second etching condition. Etching is performed using a resist mask to form gate electrodes and wirings. Etching conditions may be selected as appropriate.

In this method, an ICP (Inductively Coupled Plasma) etching method was used. As the first etching conditions, CF ₄ , Cl ₂ and O ₂ are used as etching gases, the respective gas flow ratios are set to 25/25/10 (sccm), and 500 W is applied to the coil-type electrode at a pressure of 1.0 Pa. Etching is performed by applying RF (13.56 MHz) power to generate plasma. 150 W RF (13.56 MHz) power is also applied to the substrate side (sample stage), and a substantially negative self-bias voltage is applied. The W film is etched under this first etching condition so that the end portion of the first conductive layer is tapered.

Subsequently, the etching is performed under the second etching condition. With the mask made of resist applied, CF ₄ and Cl ₂ are used as etching gases, the respective gas flow ratios are 30/30 (sccm), the pressure is 1.0 Pa, and 500 W RF (13 .56 MHz) Electric power is applied to generate plasma, and etching is performed for about 15 seconds. 20 W RF (13.56 MHz) power is also applied to the substrate side (sample stage), and a substantially negative self-bias voltage is applied. In the second etching conditions using the gas mixture of CF ₄ and Cl ₂ are etched to the same extent, the W film and the TaN film. Note that in order to perform etching without leaving a residue on the gate insulating film, it is preferable to increase the etching time at a rate of about 10 to 20%. In this first etching process, the gate insulating film not covered with the electrode is etched by about 20 nm to 50 nm, and the end portions of the first conductive layer and the second conductive layer are applied by the effect of the bias voltage applied to the substrate side. Becomes tapered.

Next, a second etching process is performed without removing the resist mask. In the second etching process, SF ₆ , Cl _2, and O ₂ are used as etching gases, the respective gas flow ratios are set to 24/12/24 (sccm), and the coil-side power is supplied with a pressure of 1.3 Pa. 700 W RF (13.56 MHz) power is applied to generate plasma, and etching is performed for about 25 seconds. 10 W RF (13.56 MHz) power was also applied to the substrate side (sample stage), and a substantially negative self-bias voltage was applied. Under this etching condition, the W film was selectively etched to form a second shape conductive layer. At this time, the first conductive layer is hardly etched. A gate electrode including the first conductive layers 802a to 802d and the second conductive layers 803a to 803d is formed by the first and second etching processes.

Then, the first doping process is performed without removing the resist mask. Thereby, an impurity imparting N-type is added to the crystalline semiconductor layer at a low concentration. The first doping process an ion doping method or an ion conditions implantation in can be good 1 Ondopu method dose ^{1 × 10 13 ~5 × 10 14} atoms / cm 2, the accelerating voltage may be performed by 40~80kV . In this embodiment, the acceleration voltage is 50 kV. As the impurity element imparting N-type, an element belonging to Group 15 can be used, and typically phosphorus (P) or arsenic (As) is used. In the present embodiment, phosphorus (P) is used. At that time, the first conductive layer as a mask, a first impurity region self-aligned manner low concentration impurity is added ^- to form a (N region).

Subsequently, the resist mask is removed. Then, a new mask made of resist is formed, and the second doping process is performed at a higher acceleration voltage than the first doping process. In the second doping process, an impurity imparting N-type is added. The condition of the ion doping method is a dose of ^{1 × 10 13 ~3 × 10 15} atoms / cm 2, the accelerating voltage may be set 60～120KV. In this embodiment mode, the dose is set to 3.0 × 10 ¹⁵ atoms / cm ² and the acceleration voltage is set to 65 kV. In the second doping treatment, the second conductive layer is used as a mask for the impurity element, and doping is performed so that the impurity element is also added to the semiconductor layer located below the first conductive layer.

When the second doping is performed, a portion of the crystalline semiconductor layer that overlaps with the first conductive layer does not overlap with the second conductive layer or a portion that is not covered with the mask. A region (N ⁻ region) is formed. The second impurity regions impurity imparting N-type conductivity in a concentration range of ^{1 × 10 18 ~5 × 10 19} atoms / cm 3 is added. In addition, among the crystalline semiconductor film, not also covered by the mask to the conductive layer of the first shape, an exposed portion of the portion (the third impurity region: N ⁺ region) in the 1 × 10 ¹⁹ to 5 Impurities imparting N-type are added at a high concentration in the range of × 10 ²¹ atoms / cm ³ . In addition, the semiconductor layer has an N ⁺ region, but there is a portion that is partially covered only by the mask. The concentration of impurity imparting N-type in this portion, since the remains of the impurity concentration added in the first doping process, subsequently the first impurity regions ^- is referred to as (N region).

  In the present embodiment, each impurity region is formed by two doping processes. However, the present invention is not limited to this, and a desired impurity concentration can be obtained by one or more times of doping by appropriately setting conditions. An impurity region may be formed.

Next, after removing the resist mask, a new resist mask is formed, and a third doping process is performed. A fourth impurity region (impurity element imparting a conductivity type opposite to the first conductivity type and the second conductivity type is added to the semiconductor layer to be a P-channel TFT by the third doping treatment ( P ⁺ region) and a fifth impurity region (P ⁻ region) are formed.

In the third doping process, a fourth impurity region (P ⁺ region) is formed in a portion that is not covered with the resist mask and does not overlap with the first conductive layer. A fifth impurity region (P ⁻ region) is formed in a portion that is not covered and overlaps with the first conductive layer and does not overlap with the second conductive layer. As the impurity element imparting P-type, elements of Group 13 of the periodic table such as boron (B), aluminum (Al), and gallium (Ga) are known.

In this embodiment mode, boron (B) is selected as the P-type impurity element for forming the fourth impurity region and the fifth impurity region, and is formed by ion doping using diborane (B ₂ H ₆ ). did. As conditions for the ion doping method, the dose was 1 × 10 ¹⁶ atoms / cm ² and the acceleration voltage was 80 kV.

  Note that in the third doping process, a portion where an N-channel TFT is formed is covered with a resist mask.

Here, phosphorus is added to the fourth impurity region (P ⁺ region) and the fifth impurity region (P ⁻ region) at different concentrations by the first and second doping processes. However, in any of the fourth impurity region (P ⁺ region) and the fifth impurity region (P ⁻ region), the concentration of the impurity element imparting P-type is 1 × 10 5 by the third doping treatment. Doping is performed so as to be ^{19 to} 5 × 10 ²¹ atoms / cm ² . Therefore, the fourth impurity region (P ⁺ region) and the fifth impurity region (P ⁻ region) function without problems as the source region and the drain region of the P-channel TFT.

In this embodiment, the third doping once, the fourth impurity region (P ⁺ region) and the fifth impurity regions ^- has formed the (P region), as appropriate a plurality of times depending on the conditions of the doping process The fourth impurity region (P ⁺ region) and the fifth impurity region (P ⁻ region) may be formed by this doping process.

These doping processes, the first impurity region (N ^- region) 804, a second impurity region (N ^- region) 805, the third impurity regions (N ⁺ regions) 806 and 807, the fourth impurity regions (P ⁺ regions) 808 and 809 and fifth impurity regions (P ⁻ regions) 810 and 811 are formed.

  Next, the resist mask is removed to form a first passivation film 812. As this first passivation film, an insulating film containing silicon is formed to a thickness of 100 to 200 nm. As a film forming method, a plasma CVD method or a sputtering method may be used.

In this embodiment, a silicon oxide film containing nitrogen having a thickness of 100 nm is formed by a plasma CVD method. In the case of using a silicon oxide film containing nitrogen, a silicon oxynitride film manufactured from SiH ₄ , N ₂ O, NH ₃ by a plasma CVD method, or a silicon oxynitride film manufactured from SiH ₄ , N ₂ O, Alternatively, a silicon oxynitride film formed from a gas obtained by diluting SiH ₄ or N ₂ O with Ar may be formed. Also, SiH _4, N ₂ O, may be applied to a silicon oxynitride hydride film manufactured from the H ₂ as the first passivation film. Needless to say, the first passivation film 812 is not limited to the single layer structure of the silicon oxynitride film as in this embodiment mode, and another insulating film containing silicon is used as a single layer structure or a stacked structure. May be.

  Next, an interlayer insulating film 813 is formed over the first passivation film 812. An inorganic insulating film or an organic insulating film can be used as the interlayer insulating film. As the inorganic insulating film, a silicon oxide film formed by a CVD method, a silicon oxide film applied by an SOG (Spin On Glass) method, or the like can be used. As an organic insulating film, polyimide, polyamide, BCB (benzoic acid) is used. Cyclobutene), acrylic or positive photosensitive organic resin, negative photosensitive organic resin, a skeletal structure is formed by the bond of silicon and oxygen, and the substituent contains at least hydrogen, or the substituent contains fluorine, an alkyl group, Alternatively, a material having at least one of aromatic hydrocarbons, a so-called siloxane film can be used. Moreover, you may use those laminated structures.

  In this embodiment mode, the interlayer insulating film 813 is formed using siloxane. As the interlayer insulating film, a siloxane-based polymer is applied over the entire surface, dried by heat treatment at 50 to 200 ° C. for 10 minutes, and further subjected to baking treatment at 300 to 450 ° C. for 1 to 12 hours. By this baking, a 1 μm-thick siloxane film is formed on the entire surface. In this step, the siloxane-based polymer is baked, and the semiconductor layer can be hydrogenated and impurities can be activated by hydrogen in the first passivation film 812. Therefore, the number of steps can be reduced, and the process can be performed. Can be simplified. In hydrogenation, dangling bonds in a semiconductor layer are terminated by hydrogen contained in the first passivation film.

  When the interlayer insulating film is formed of a material other than siloxane, heat treatment is required for hydrogenation and activation. In that case, a separate heat treatment (heat treatment) step is required before forming the interlayer insulating film. The heat treatment may be performed at 400 to 700 ° C. in a nitrogen atmosphere having an oxygen concentration of 1 ppm or less, preferably 0.1 ppm or less. In this embodiment, activation treatment was performed by heat treatment at 410 ° C. for 1 hour. . In addition to the heat treatment method, a laser annealing method or a rapid thermal annealing method (RTA method) can be applied.

  Further, heat treatment may be performed before the first passivation film 812 is formed. However, when the material forming the first conductive layers 802a to 802d and the second conductive layers 803a to 803d is weak against heat, the first passivation film is used to protect the wiring and the like as in this embodiment. It is desirable to perform heat treatment after forming 812. Furthermore, in this case, since there is no first passivation film, hydrogenation using hydrogen contained in the passivation film cannot be performed. In this case, hydrogenation using means excited by plasma (plasma hydrogenation) or heat treatment at 300 to 450 ° C. for 1 to 12 hours in an atmosphere containing 3 to 100% hydrogen Hydrogenation by the method may be used.

  After that, a silicon nitride film, a silicon nitride oxide film, or a silicon oxynitride film may be formed by a CVD method so as to cover the interlayer insulating film 813. This film functions as an etching stopper when a conductive film formed later is etched, and can prevent over-etching of the interlayer insulating film. Further, a silicon nitride film may be formed thereon by sputtering. Since this silicon nitride film has a function of suppressing the movement of alkali metal ions, it is possible to suppress the movement of metal ions such as lithium element and sodium from the pixel electrode formed later to the semiconductor thin film.

Next, the interlayer insulating film 813 is patterned and etched to form contact holes reaching the crystalline semiconductor layers 801a to 801d. Etching of contact holes, a siloxane film is etched using a mixed gas of CF ₄ and O ₂ and He, followed by etching the silicon oxide film as a gate insulating film with a gas CHF ₃ and is formed by removing .

  At this time, the surface of the crystalline semiconductor layers 801a to 801d is exposed by opening the contact hole, but a natural oxide film may be formed on the exposed surface (not shown). If there is such a natural oxide film, the resistance between the wiring and the crystalline silicon film becomes high, and there is a risk that the drive voltage will increase or the operation will stop. It is desirable to remove it before doing so.

  Subsequently, a metal film is stacked in the contact hole and patterned to form a source electrode and a drain electrode. In this embodiment, a titanium-aluminum alloy film and a titanium film are laminated on a titanium film containing nitrogen element, and each layer is formed to 100 nm / 350 nm / 100 nm, and then patterned and etched into a desired shape to form three layers. Source electrodes and / or drain electrodes 814 to 821 are formed.

  The titanium film containing nitrogen atoms in the first layer is formed by sputtering using a target of titanium and a flow rate of nitrogen and argon of 1: 1. When the above-described titanium film containing a nitrogen element is formed over an interlayer insulating film of a siloxane-based film, it is difficult to peel off the film, and a wiring having a low resistance connection with the crystalline silicon film can be formed.

  Up to this point, semiconductor elements such as thin film transistors and capacitors have been created. In this embodiment, a top gate thin film transistor using a crystalline silicon film using an element that promotes crystallization is used. However, a bottom gate thin film transistor using an amorphous semiconductor film may be used for a pixel portion. Is possible. As the amorphous semiconductor, not only silicon but also silicon germanium can be used. When silicon germanium is used, the concentration of germanium is preferably about 0.01 to 4.5 atomic%.

Alternatively, a microcrystalline semiconductor film in which crystals of 0.5 nm to 20 nm can be observed in an amorphous semiconductor may be used. Microcrystals capable of observing 0.5 nm to 20 nm crystals are also called so-called microcrystals (μc). Semi-amorphous silicon (also referred to as SAS), which is a semi-amorphous semiconductor, can be obtained by glow discharge decomposition of a silicide gas. A typical silicide gas is SiH ₄ , and in addition, Si ₂ H ₆ , SiH ₂ Cl ₂ , SiHCl ₃ , SiCl ₄ , SiF _{4 and the} like can be used. The formation of the SAS can be facilitated by diluting the silicide gas with one or plural kinds of rare gas elements selected from hydrogen, hydrogen and helium, argon, krypton, and neon. It is preferable to dilute the silicide gas at a dilution ratio in the range of 10 times to 1000 times. The reaction generation of the film by glow discharge decomposition may be performed at a pressure in the range of 0.1 Pa to 133 Pa. The power for forming the glow discharge may be high frequency power of 1 MHz to 120 MHz, preferably 13 MHz to 60 MHz. The substrate heating temperature is preferably 300 ° C. or less, and a substrate heating temperature of 100 to 250 ° C. is suitable.

Such a SAS thus formed is shifted to a lower wavenumber side than the Raman spectrum 520 cm ^-1, the X-ray diffraction are derived from a Si crystal lattice (111), the observed diffraction peaks of (220) Is done. At least 1 atomic% or more of hydrogen or halogen is contained as a neutralizing agent for dangling bonds. As an impurity element in the film, impurities of atmospheric components such as oxygen, nitrogen, and carbon are desirably 1 × 10 ²⁰ cm ⁻¹ or less, and in particular, the oxygen concentration is 5 × 10 ¹⁹ / cm ³ or less, preferably 1 × 10 ¹⁹ / cm ³ or less The μ = 1~10cm ² / Vsec at the time of the TFT.

  In the process so far, wiring is also formed at the same time as the formation of the source electrode and drain electrode of the thin film transistor. However, in the case of using the present invention, in order to connect to the anode line or the cathode line, it is parallel to these lines around the substrate. It is not necessary to form the routing wiring formed in this way. Instead, when the configuration in which the external connection portion is formed at both ends of the anode line or the cathode line as shown in Embodiment 1, the external connection portion is also shown in FIGS. The both ends of the anode line or cathode line are connected to the nearer external connection part. When the configuration using the sealing can as shown in the second embodiment is applied, no other wiring is connected to the end connected to the sealing can.

  Subsequently, a process for producing a light emitting device using these semiconductor elements is started.

  In the light-emitting device described in this embodiment, a layer containing a light-emitting substance is sandwiched between a pair of electrodes, and elements that emit light by flowing current between the electrodes are arranged in a matrix. The light-emitting mechanism of the light-emitting element recombines electrons injected from the cathode and holes injected from the anode at the emission center in the organic compound layer by applying a voltage with the organic compound layer sandwiched between a pair of electrodes. Thus, it is said that molecular excitons are formed, and when the molecular excitons return to the ground state, energy is emitted and light is emitted.

  Singlet excitation and triplet excitation are known as excited states, and light emission is considered to be possible through either excited state. Therefore, a singlet excited state element or a triplet excited state element may be mixed in one light-emitting device depending on the characteristics of the element. For example, in three colors of RGB, an element that takes a triplet excited state in red and an element that takes a singlet excited state in blue and green may be used. In addition, since a device that takes a triplet excited state generally has a high luminous efficiency, it contributes to a decrease in driving voltage.

  As a material of the light emitting element, there are a low molecular weight, a high molecular weight, and a medium molecular light emitting material having properties between a low molecular weight and a high molecular weight. However, in this embodiment, an electroluminescent layer is formed by a vapor deposition method. The luminescent material is used. Both low molecular weight materials and high molecular weight materials can be applied by spin coating or an ink jet method by dissolving them in a solvent. Further, not only organic materials but also composite materials with inorganic materials can be used.

A first electrode 901 of the light-emitting element is formed so as to partially overlap with the drain electrode of the thin film transistor manufactured in the previous step. The first electrode is an electrode that serves as an anode or a cathode of the light-emitting element. When the anode is used, it is preferable to use a metal, an alloy, an electrically conductive compound, a mixture thereof, or the like having a high work function. As a work function, a work function of 4.0 eV or more is a rough guide. Specific examples of materials, ITO (indium tin oxide), indium 2-20% zinc oxide (ZnO) was mixed an IZO (indium zinc oxide) oxide, 2-20% silicon oxide to indium oxide (SiO ₂ ) Mixed with ITSO, gold (Au), platinum (Pt), nickel (Ni), tungsten (W), chromium (Cr), molybdenum (Mo), iron (Fe), cobalt (Co), copper (Cu) Further, palladium (Pd), a nitride of metal material (TiN), or the like can be used.

When used as a cathode, it is preferable to use a metal, an alloy, an electrically conductive compound, a mixture thereof, or the like having a low work function (the work function is 3.8 eV or less). Specific materials include elements belonging to Group 1 or Group 2 of the periodic table, that is, alkali metals such as Li and Cs, alkaline earth metals such as Mg, Ca, and Sr, and alloys containing these (Mg: Ag, Al: Li) and compounds (LiF, CsF, CaF ₂₎ other, can be formed by using a transition metal containing a rare earth metal. However, since the second electrode has a light-transmitting property in this embodiment mode, these metals or alloys containing these metals are formed very thinly, and ITO, IZO, ITSO, or other metals (including alloys) and It can be formed by laminating.

  In this embodiment, the first electrode 901 is an anode and ITSO is used. When ITSO is used as an electrode, the reliability of the light-emitting device is improved by baking at 150 to 450 degrees, preferably 300 to 400 degrees in vacuum or atmospheric pressure. In addition, a silicon nitride film is formed between the interlayer insulating film 813 made of siloxane and the first electrode made of ITSO, which is a desirable structure because the light emission efficiency in the direction of the first electrode is improved.

  In this embodiment, the first electrode is formed after the source electrode and the drain electrode of the thin film transistor are formed. However, the first electrode may be formed first, and then the electrode of the thin film transistor may be formed.

  An insulating film 902 is formed so as to cover an end portion of the first electrode 901 which is a pixel electrode connected to the thin film transistor in the pixel portion. This insulating film 902 is called a bank or a partition. As the insulating film 902, an inorganic insulating film or an organic insulating film can be used. As the inorganic insulating film, a silicon oxide film formed by a CVD method, a silicon oxide film applied by an SOG (Spin On Glass) method, or the like can be used. As an organic insulating film, a photosensitive or non-photosensitive film can be used. Polyimide, polyamide, BCB (benzocyclobutene), acrylic or positive photosensitive organic resin, negative photosensitive organic resin, skeleton structure is formed by the bond of silicon and oxygen, and the substituent contains at least hydrogen or is substituted A material having at least one of fluorine, an alkyl group, and aromatic hydrocarbon as a group, that is, a so-called siloxane film can be used. Moreover, you may use those laminated structures. Forming using a photosensitive organic material is preferable because the shape of the opening has a shape in which the radius of curvature continuously changes, and step breakage or the like hardly occurs when the electroluminescent layer is deposited. In this example, photosensitive polyimide was used.

  Subsequently, vapor deposition is performed using the vapor deposition apparatus while moving the evaporation source. The crucible for vapor deposition is made of titanium as a base material, and silver is formed on the lid and the inner lid having through holes. The material filling part of the evaporation crucible is provided with a silver wire in contact with the inner wall of the evaporation material filling part, and the three-dimensional structure is formed and arranged so as to occupy the space inside the evaporation material filling part. It is desirable to do.

Deposition may be performed by a method shown in the fourth and fifth embodiments, for example, a vacuum degree of 5 × 10 ^-3 Torr (0.665Pa) or less, is preferably evacuated to 10 ^-4 to 10 ^-6 Torr Vapor deposition is performed in the deposition chamber. At the time of vapor deposition, the organic compound is vaporized in advance by resistance heating and is scattered in the direction of the substrate by opening the shutter at the time of vapor deposition. The vaporized organic compound is scattered upward and deposited on the substrate through the opening provided in the metal mask, and the electroluminescent layer 903 (the hole injection layer, the hole transport layer, the light emission from the first electrode side). Layer, electron transport layer, electron injection layer). Note that the structure of the electroluminescent layer 903 is not limited to such a stack, and may be a single layer or a mixed layer.

  If the evaporation crucible and the evaporation apparatus of the present invention are used, even in an evaporation apparatus in which the evaporation source can be detached from the heating unit, the temperature difference between the heater by resistance heating and the lid near the through hole can be reduced during evaporation. Adhesion of the vapor deposition material in the through hole can be reduced, that is, the frequency of evaporation source replacement and maintenance can be reduced, and the throughput is improved. Furthermore, it is possible to suppress a change in the deposition rate due to clogging of the through holes, and it is possible to provide a high-quality display with little variation.

  When the electroluminescent layer 903 is formed, the second electrode 904 is formed in contact with the electroluminescent layer 903. In this embodiment, since the first electrode 901 is an anode, the second electrode 904 is formed as a cathode. The cathode material may be any of the materials described above. In this embodiment, after forming a thin Li-containing material, an ITO film is formed by sputtering to form a transparent second electrode (cathode). ) 904 was formed.

  In this embodiment, since both the first electrode 901 and the second electrode 904 are formed of a light-transmitting material, light can be extracted from both the upper surface and the lower surface of the substrate. Of course, it is possible to control the translucency of either electrode, or to obtain light emission from only the upper surface and only the lower surface, depending on the material used on the substrate side from the electroluminescent layer.

  FIG. 7B illustrates an example of a top emission structure in which the pixel electrode 901 and the thin film transistor electrode are formed in different layers. The first interlayer insulating film 813 and the second interlayer insulating film 903 can be made of the same material as the interlayer insulating film 813 in FIG. 7 and can be freely combined, but this time, both layers are made of siloxane. Form. The pixel electrode 901 is formed by laminating Al—Si \ TiN \ ITSO from the second interlayer insulating film 903 side, but it may of course be a single layer or a laminated structure of two layers or four or more layers.

  By the way, when the second electrode 904 is formed by a sputtering method, the surface of the electron injection layer or the interface between the electron injection layer and the electron transport layer may be damaged by sputtering. This can adversely affect the properties. In order to prevent this, a material which is not easily damaged by sputtering is preferably provided at a position closest to the second electrode 404. As a material that is not easily damaged by sputtering and can be used for the electroluminescent layer 903, molybdenum oxide (MoOx) can be given. However, since MoOx is a suitable material for the hole injection layer, the second electrode 904 needs to be used as an anode in order to be in contact with the second electrode 904.

  Therefore, in this case, the first electrode 901 is formed as a cathode as shown in FIG. 8B instead of being formed in the order shown in FIG. Layer), (electron transport layer), light emitting layer, (hole transport layer), hole injection layer (MoOx), and second electrode (anode), and the pixel driving thin film transistor needs to be an N-channel type There is. In addition, the layer which has each function in a parenthesis is not necessarily essential, and may be used suitably. MoOx is formed using the vapor deposition crucible and vapor deposition apparatus of the present invention. MoOx formed using the vapor deposition crucible and vapor deposition apparatus of the present invention is preferably used because a slightly oxygen-excess molybdenum oxide film having x = 3.2 to 3.0 is formed.

  In addition, the MoOx layer may be an organic / inorganic mixed layer by co-evaporation with an organic metal complex such as copper phthalocyanine (CuPc) or an organic substance.

  As described above, when the second electrode is used as an anode and the driving thin film transistor must be an N-channel type, the process is performed when a thin film transistor in the pixel portion is originally an N-type transistor using a-Si: H as a semiconductor layer. Simplified and preferred. In the case where the driver circuit portion is formed over the same substrate, only the driver circuit portion may be crystallized by irradiation with a laser or the like.

  Molybdenum oxide (MoOx) is used in this way, but because the evaporation temperature of MoOx is relatively high, the vapor deposition crucible or vapor deposition apparatus that is a conventional configuration for forming an electroluminescent element has a low or almost no vapor deposition rate. Although there was a problem that it was not vapor-deposited, the structure formed of a material having a high thermal conductivity such as silver as in this example was provided so as to be in contact with at least the inner wall of the vapor deposition crucible so that the heater was evenly distributed to MoOx. Heat is transmitted and the deposition rate is improved. In addition, the high deposition temperature means that the temperature at which the evaporated MoOx returns to a solid is also higher than other materials. Therefore, a substance having high thermal conductivity in the lid and / or inner lid of the deposition crucible It is very effective to form and use a film.

After that, a silicon oxide film containing nitrogen was formed as a second passivation film 905 by a plasma CVD method. In the case of using a silicon oxide film containing nitrogen, SiH ₄ in plasma CVD, N ₂ O, NH ₃ silicon oxynitride film manufactured from, or SiH _4, N ₂ O from a silicon oxynitride film manufactured, Alternatively, a silicon oxynitride film formed from a gas obtained by diluting SiH ₄ or N ₂ O with Ar may be formed. Alternatively, a silicon oxynitride silicon film formed from SiH ₄ , N ₂ O, and H ₂ may be applied as the first passivation film. Needless to say, the second passivation film 905 is not limited to a single layer structure, and another insulating film containing silicon may be used as a single layer structure or a stacked structure. Further, a multilayer film of a carbon nitride film and a silicon nitride film, a multilayer film of styrene polymer, a silicon nitride film, or a diamond-like carbon film may be formed instead of the silicon oxide film containing nitrogen.

  Subsequently, the display portion is sealed in order to protect the electroluminescent element from a substance that promotes deterioration such as water. When the counter substrate is used for sealing, it is bonded with an insulating sealant so that the external connection portion is exposed. A space between the counter substrate and the element substrate may be filled with an inert gas such as dry nitrogen, or a sealant may be applied to the entire pixel portion to form the counter substrate. It is preferable to use an ultraviolet curable resin or the like as the sealant. The sealant may contain a desiccant and particles for keeping the gap constant. Subsequently, an electroluminescent panel is completed by attaching a flexible wiring board to the external connection portion.

  Such an electroluminescent panel has a display method such as single color, area color, full color, etc. The full color is further divided into three colors of RBG, a method of converting a white light source into RBG with a color filter, and a short wavelength color. There is a method of converting the color into a long wavelength color using a color conversion filter. In some cases, a color filter is used to improve color purity.

  As an electronic device to which the present invention is applied, a video camera, a digital camera, a goggle type display (head mounted display), a navigation system, a sound reproduction device (car audio 4 DIO component, etc.), a notebook type personal computer, a game device, portable information Plays back a recording medium such as a terminal (mobile computer, mobile phone, portable game machine or electronic book), and a recording medium (specifically, Digital Versatile Disc (DVD)) and displays the image. And the like). Specific examples of these electronic devices are shown in FIGS.

  FIG. 9A illustrates a wall-mounted electroluminescent display device which includes a housing 2001, a display portion 2003, a speaker portion 2004, and the like. The present invention is applied to manufacture of the display portion 2003. By using the present invention, it is possible to obtain a high-quality display without unevenness even with a large-screen display device.

FIG. 9B illustrates a digital still camera, which includes a main body 2101, a display portion 2102, an image receiving portion 2103, operation keys 2104, an external connection port 2105, a shutter 2106, and the like. The present invention can be applied to the manufacturing process of the display portion 2102. By applying the present invention to the manufacturing process, an image can be displayed more accurately.

  FIG. 9C illustrates a laptop personal computer, which includes a main body 2201, a housing 2202, a display portion 2203, a keyboard 2204, an external connection port 2205, a pointing mouse 2206, and the like. The present invention can be applied when the display portion 2203 is manufactured. By applying the present invention, it is possible to obtain a high-quality display without unevenness.

  FIG. 9D illustrates a mobile computer, which includes a main body 2301, a display portion 2302, a switch 2303, operation keys 2304, an infrared port 2305, and the like. The present invention can be applied when the display portion 2302 is manufactured. The present invention can be applied to the manufacturing process of the display portion 2102. By applying the present invention to the manufacturing process, an image can be displayed more accurately.

  FIG. 9E illustrates a portable game machine including a housing 2401, a display portion 2402, speaker portions 2403, operation keys 2404, a recording medium insertion portion 2405, and the like. The present invention can be applied when the display portion 2402 is manufactured. The present invention can be applied to the manufacturing process of the display portion 2102. By applying the present invention to the manufacturing process, an image can be displayed more accurately.

  As described above, the applicable range of the present invention is so wide that it can be used for electronic devices in various fields. Further, since the display quality of the product is improved, it is possible to increase the competitiveness of the product as an electronic device equipped with a display device capable of performing high quality display.

FIG. 1 illustrates one structure of the present invention (Embodiments 1 and 2). FIG. 6 illustrates one configuration of the present invention (Embodiment 3). The figure of the manufacturing apparatus using this invention (Embodiment 4). The figure of the multi-chamber type manufacturing apparatus using this invention (Embodiment 5). The experimental result at the time of using this invention (Example 2). Example 3 of manufacturing method of electroluminescent device. Example 3 of manufacturing method of electroluminescent device. Example 3 of manufacturing method of electroluminescent device. Examples of electronic devices manufactured using the present invention (Example 4) The figure of the conventional crucible for vapor deposition. FIG. 6 is a diagram illustrating Example 1;

Claims (39)

A bottomed cylindrical body filled with a vapor deposition material;
Having a lid with a through hole;
The crucible for vapor deposition, wherein the lid is covered with a substance having higher thermal conductivity than the constituent material of the lid. A bottomed cylindrical body filled with a vapor deposition material;
Having a lid with an open through hole and an inner lid,
The crucible for vapor deposition, wherein the inner lid is covered with a substance having higher thermal conductivity than the constituent material of the inner lid. A bottomed cylindrical body filled with a vapor deposition material;
Having a lid with an open through hole and an inner lid,
The crucible for vapor deposition, wherein the lid and the inner lid are coated with a substance having higher thermal conductivity than each constituent material. A bottomed cylindrical body filled with a vapor deposition material;
Having a lid with a through hole;
The vapor deposition crucible, wherein the lid is made of a material having higher thermal conductivity than the bottomed cylindrical body. A bottomed cylindrical body filled with a vapor deposition material;
Having a lid with an open through hole and an inner lid,
The crucible for vapor deposition, wherein the inner lid is made of a material having higher thermal conductivity than the bottomed cylindrical body. A bottomed cylindrical body filled with a vapor deposition material;
Having a lid with an open through hole and an inner lid,
The crucible for vapor deposition, wherein the lid and the inner lid are made of a material having higher thermal conductivity than the bottomed cylindrical body. A bottomed cylindrical body filled with a vapor deposition material;
A crucible for vapor deposition comprising at least a part made of a substance having a higher thermal conductivity than the vapor deposition material in contact with the inner wall surface of the bottomed cylindrical body portion. A bottomed cylindrical body filled with a vapor deposition material;
An evaporation crucible comprising a part formed of a substance having a thermal conductivity higher than that of the evaporating material in contact with at least the bottom surface of the bottomed cylindrical body. A bottomed cylindrical body filled with a vapor deposition material;
Has a lid with a through hole,
The crucible for vapor deposition, wherein the lid is covered with a material having high thermal conductivity. A bottomed cylindrical body filled with a vapor deposition material;
It has a lid with an open through hole and an inner lid,
The crucible for vapor deposition, wherein the inner lid is covered with a material having high thermal conductivity. A bottomed cylindrical body filled with a vapor deposition material;
It has a lid with an open through hole and an inner lid,
The vapor deposition crucible characterized in that the lid and the inner lid are covered with a material having high thermal conductivity. A bottomed cylindrical body filled with a vapor deposition material;
Has a lid with a through hole,
The said crucible for vapor deposition characterized by the said lid | cover being formed with the material with high heat conductivity. A bottomed cylindrical body filled with a vapor deposition material;
It has a lid with an open through hole and an inner lid,
The crucible for vapor deposition, wherein the inner lid is made of a material having high thermal conductivity. A bottomed cylindrical body filled with a vapor deposition material;
It has a lid with an open through hole and an inner lid,
The crucible for vapor deposition, wherein the lid and the inner lid are made of a material having high thermal conductivity. The evaporation source has a cylindrical body with a bottom filled with a deposition material,
A crucible for vapor deposition, comprising a part formed of a substance having high thermal conductivity in contact with at least the inner wall surface of the cylindrical body having a bottom. A bottomed cylindrical body filled with a vapor deposition material;
A crucible for vapor deposition, comprising a part formed of a material having high thermal conductivity in contact with at least the bottom surface of the bottomed cylindrical body. In any one of Claims 9 thru / or Claim 16,
The material having high thermal conductivity is one or more of gold, silver, platinum, cylinder, beryllium, silicon carbide and carbon nitride diamond, boron nitride, silicon carbide, beryllium oxide, and aluminum nitride. A crucible for vapor deposition.   The crucible for vapor deposition according to any one of claims 15 to 17, wherein the shape of the component is one or more of a wire shape, a spherical shape, or a plate shape.   The crucible for vapor deposition according to any one of claims 15 to 17, wherein the shape of the part is a wire shape, a spherical shape, or a plate shape, or one shape or a combination of a plurality of shapes. A crucible having a bottomed cylindrical body filled with a vapor deposition material and a lid with a through hole, the lid being covered with a material having higher thermal conductivity than the constituent material of the lid;
An evaporation source having a heating part for heating the crucible;
The said crucible is removable from the said heating part, The vapor deposition apparatus characterized by the above-mentioned. A crucible having a bottomed cylindrical body portion filled with a vapor deposition material, a lid with an open through hole, and an inner lid, the inner lid being covered with a substance having higher thermal conductivity than the constituent material of the inner lid;
An evaporation source having a heating part for heating the crucible;
The said crucible is removable from the said heating part, The vapor deposition apparatus characterized by the above-mentioned. A crucible having a bottomed cylindrical body portion filled with a vapor deposition material, a lid with an open through hole, and an inner lid, the lid and the inner lid being covered with a substance having higher thermal conductivity than each constituent material;
An evaporation source having a heating part for heating the crucible;
The said crucible is removable from the said heating part, The vapor deposition apparatus characterized by the above-mentioned. A crucible having a bottomed cylindrical body filled with a vapor deposition material and a cover having a through hole, the lid being formed of a substance having higher thermal conductivity than the bottomed cylindrical body;
An evaporation source having a heating part for heating the crucible;
The said crucible is removable from the said heating part, The vapor deposition apparatus characterized by the above-mentioned. A crucible having a bottomed cylindrical body filled with a vapor deposition material, a cover having an opening and an inner lid, and the inner cover being made of a material having higher thermal conductivity than the bottomed cylindrical body. When,
An evaporation source having a heating part for heating the crucible;
The said crucible is removable from the said heating part, The vapor deposition apparatus characterized by the above-mentioned. A crucible having a bottomed cylindrical body portion filled with a vapor deposition material and a cover having a through-hole, wherein the lid and the inner lid are made of a material having higher thermal conductivity than the bottomed cylindrical body portion; ,
An evaporation source having a heating part for heating the crucible;
The said crucible is removable from the said heating part, The vapor deposition apparatus characterized by the above-mentioned. It has a bottomed cylindrical body filled with a vapor deposition material and a cover having a through hole, and is in contact with at least the inner wall surface of the bottomed cylindrical body, and has a thermal conductivity higher than that of the bottomed cylindrical body. A crucible having parts formed of high material,
An evaporation source having a heating part for heating the crucible;
The said crucible is removable from the said heating part, The vapor deposition apparatus characterized by the above-mentioned. It has a bottomed cylindrical body filled with a vapor deposition material and a cover having a through hole, and is in contact with at least the bottom surface of the bottomed cylindrical body, and has a thermal conductivity higher than that of the bottomed cylindrical body. A crucible having parts formed of high material,
An evaporation source having a heating part for heating the crucible;
The said crucible is removable from the said heating part, The vapor deposition apparatus characterized by the above-mentioned. A crucible having a bottomed cylindrical body filled with a vapor deposition material and a lid having a through hole, the lid being covered with a material having high thermal conductivity;
An evaporation source having a heating part for heating the crucible;
The said crucible is removable from the said heating part, The vapor deposition apparatus characterized by the above-mentioned. A crucible having a bottomed cylindrical body portion filled with a vapor deposition material, a lid having a through-hole, and an inner lid, the inner lid being covered with a material having high thermal conductivity;
An evaporation source having a heating part for heating the crucible;
The said crucible is removable from the said heating part, The vapor deposition apparatus characterized by the above-mentioned. A crucible having a bottomed cylindrical body portion filled with a vapor deposition material, a lid having an opening and an inner lid, and the lid and the inner lid being covered with a material having high thermal conductivity;
An evaporation source having a heating part for heating the crucible;
The said crucible is removable from the said heating part, The vapor deposition apparatus characterized by the above-mentioned. A crucible having a cylindrical body with a bottom filled with a vapor deposition material and a lid with a through hole, the lid being formed of a material having high thermal conductivity;
An evaporation source having a heating part for heating the crucible;
The said crucible is removable from the said heating part, The vapor deposition apparatus characterized by the above-mentioned. A crucible having a cylindrical body with a bottom filled with a vapor deposition material, a lid with a through hole, and an inner lid, the inner lid being formed of a material having high thermal conductivity;
An evaporation source having a heating part for heating the crucible;
The said crucible is removable from the said heating part, The vapor deposition apparatus characterized by the above-mentioned. A crucible having a cylindrical body with a bottom filled with a vapor deposition material and a lid with a through hole, wherein the lid and the inner lid are formed of a material having high thermal conductivity;
An evaporation source having a heating part for heating the crucible;
The said crucible is removable from the said heating part, The vapor deposition apparatus characterized by the above-mentioned. A crucible having a bottomed cylindrical body filled with a deposition material and a cover having a through-hole, and having a part formed of a material having a high thermal conductivity in contact with at least the inner wall of the bottomed cylindrical body. When,
An evaporation source having a heating part for heating the crucible;
The said crucible is removable from the said heating part, The vapor deposition apparatus characterized by the above-mentioned. A crucible having a bottomed cylindrical body filled with a vapor deposition material and a cover having a through hole, and having a part formed of a material having a high thermal conductivity in contact with at least the bottom surface of the bottomed cylindrical body. When,
An evaporation source having a heating part for heating the crucible;
The said crucible is removable from the said heating part, The vapor deposition apparatus characterized by the above-mentioned. In any one of claims 28 to 35,
The material having high thermal conductivity is one or more of gold, silver, platinum, cylinder, beryllium, silicon carbide and carbon nitride diamond, boron nitride, silicon carbide, beryllium oxide, and aluminum nitride. Vapor deposition equipment.   37. The vapor deposition apparatus according to any one of claims 34 to 36, wherein the form of the component is one or more of a wire shape, a spherical shape, or a plate shape.   37. The vapor deposition apparatus according to any one of claims 34 to 36, wherein the component has a wire shape, a spherical shape, or a plate shape in which one or a plurality of shapes are combined. 39. The vapor deposition apparatus according to any one of claims 20 to 38, wherein the vapor deposition source includes position control means capable of freely controlling a position in a uniaxial, biaxial, or triaxial direction while performing vapor deposition.

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