JP2005163090A5 - - Google Patents

Download PDF

Info

Publication number
JP2005163090A5
JP2005163090A5 JP2003402148A JP2003402148A JP2005163090A5 JP 2005163090 A5 JP2005163090 A5 JP 2005163090A5 JP 2003402148 A JP2003402148 A JP 2003402148A JP 2003402148 A JP2003402148 A JP 2003402148A JP 2005163090 A5 JP2005163090 A5 JP 2005163090A5
Authority
JP
Japan
Prior art keywords
crucible
lid
vapor deposition
cylindrical body
bottomed cylindrical
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2003402148A
Other languages
Japanese (ja)
Other versions
JP4439894B2 (en
JP2005163090A (en
Filing date
Publication date
Application filed filed Critical
Priority to JP2003402148A priority Critical patent/JP4439894B2/en
Priority claimed from JP2003402148A external-priority patent/JP4439894B2/en
Publication of JP2005163090A publication Critical patent/JP2005163090A/en
Publication of JP2005163090A5 publication Critical patent/JP2005163090A5/ja
Application granted granted Critical
Publication of JP4439894B2 publication Critical patent/JP4439894B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Claims (23)

蒸着材料を充填する有底筒状の胴部と、
貫通孔の開いた蓋と、を有し、
前記蓋は前記蓋の構成材料より熱伝導性の高い物質により被覆されていることを特徴とする蒸着用るつぼ。 A bottomed cylindrical body filled with a vapor deposition material;
A lid with a through hole,
The crucible for vapor deposition, wherein the lid is covered with a substance having higher thermal conductivity than the constituent material of the lid. 蒸着材料を充填する有底筒状の胴部と、
貫通孔の開いた蓋及び内蓋と、を有し、
前記内蓋は前記内蓋の構成材料より熱伝導性の高い物質により被覆されていることを特徴とする蒸着用るつぼ。 A bottomed cylindrical body filled with a vapor deposition material;
Has a lid and an inner lid open the through-hole, and
The crucible for vapor deposition, wherein the inner lid is covered with a substance having higher thermal conductivity than the constituent material of the inner lid. 蒸着材料を充填する有底筒状の胴部と、
貫通孔の開いた蓋及び内蓋と、を有し、
前記蓋及び前記内蓋は各々の構成材料より熱伝導性の高い物質により被覆されていることを特徴とする蒸着用るつぼ。 A bottomed cylindrical body filled with a vapor deposition material;
Has a lid and an inner lid open the through-hole, and
The crucible for vapor deposition, wherein the lid and the inner lid are coated with a substance having higher thermal conductivity than each constituent material. 蒸着材料を充填する有底筒状の胴部と、
貫通孔の開いた蓋と、を有し、
前記蓋は前記有底筒状の胴部より熱伝導性の高い物質により形成されていることを特徴とする蒸着用るつぼ。 A bottomed cylindrical body filled with a vapor deposition material;
A lid with a through hole,
The vapor deposition crucible, wherein the lid is made of a material having higher thermal conductivity than the bottomed cylindrical body. 蒸着材料を充填する有底筒状の胴部と、
貫通孔の開いた蓋及び内蓋と、を有し、
前記内蓋は前記有底筒状の胴部より熱伝導性の高い物質により形成されていることを特徴とする蒸着用るつぼ。 A bottomed cylindrical body filled with a vapor deposition material;
Has a lid and an inner lid open the through-hole, and
The crucible for vapor deposition, wherein the inner lid is made of a material having higher thermal conductivity than the bottomed cylindrical body. 蒸着材料を充填する有底筒状の胴部と、
貫通孔の開いた蓋及び内蓋と、を有し、
前記蓋及び内蓋は有底筒状の胴部より熱伝導性の高い物質により形成されていることを特徴とする蒸着用るつぼ。 A bottomed cylindrical body filled with a vapor deposition material;
Has a lid and an inner lid open the through-hole, and
The crucible for vapor deposition, wherein the lid and the inner lid are made of a material having higher thermal conductivity than the bottomed cylindrical body. 蒸着材料を充填する有底筒状の胴部と、
少なくとも前記有底筒状の胴部内壁面に接して、前記蒸着材料より熱伝導性の高い物質により形成された部品と、を有することを特徴とする蒸着用るつぼ。 A bottomed cylindrical body filled with a vapor deposition material;
At least the contact with the bottomed cylindrical barrel inner wall surface, evaporation crucible and having a a formed part by material having high thermal conductivity than the deposition material. 蒸着材料を充填する有底筒状の胴部と、
少なくとも前記有底筒状の胴部内底面に接して、前記蒸着材料より熱伝導性の高い物質により形成された部品と、を有することを特徴とする蒸着用るつぼ。 A bottomed cylindrical body filled with a vapor deposition material;
At least the contact with the bottomed cylindrical body portion inner bottom surface, evaporation crucible and having a a formed part by material having high thermal conductivity than the vapor deposition material. 請求項１乃至請求項８のいずれか一項において、
前記熱伝導性の高い物質とは金、銀、白金、胴、ベリリウム、炭化ケイ素及び窒化炭素ダイヤモンド、窒化ホウ素、炭化ケイ素、酸化ベリウム、窒化アルミニウムのうち一種もしくは複数種であることを特徴とする蒸着用るつぼ。 In any one of Claims 1 thru | or 8 ,
The material having high thermal conductivity is one or more of gold, silver, platinum, cylinder, beryllium, silicon carbide and carbon nitride diamond, boron nitride, silicon carbide, beryllium oxide, and aluminum nitride. A crucible for vapor deposition. 請求項７または請求項８において、前記部品の形態はワイヤー状、球状もしくは板状のうち１形態もしくは複数形態であることを特徴とする蒸着用るつぼ。 The crucible for vapor deposition according to claim 7 or 8 , wherein the form of the component is one form or a plurality of forms among a wire shape, a spherical shape, or a plate shape. 請求項７または請求項８において、前記部品の形態はワイヤー状、球状もしくは板状のうち１形態もしくは複数形態が組み合わされた形態であることを特徴とする蒸着用るつぼ。 According to claim 7 or claim 8, wherein the component forms evaporation crucible, wherein the wire-like, one form or more embodiments of the spherical or plate-like is in the form state combined. 蒸着材料を充填する有底筒状の胴部と、貫通孔の開いた蓋と、を有し、前記蓋が前記蓋の構成材料より熱伝導性の高い物質により被覆されているるつぼと、
前記るつぼを加熱する加熱部と、を有し、
前記るつぼは前記加熱部より脱着可能であることを特徴とする蒸着装置。 A bottomed cylindrical body portion filling the evaporation material, and has a, a lid open through hole, the lid is covered by material having high thermal conductivity than the material of the lid crucible,
Anda heating unit for heating the crucible,
The said crucible is removable from the said heating part, The vapor deposition apparatus characterized by the above-mentioned. 蒸着材料を充填する有底筒状の胴部と、貫通孔の開いた蓋及び内蓋と、を有し、前記内蓋が前記内蓋の構成材料より熱伝導性の高い物質により被覆されているるつぼと、
前記るつぼを加熱する加熱部と、を有し、
前記るつぼは前記加熱部より脱着可能であることを特徴とする蒸着装置。 A bottomed cylindrical body portion for filling the deposited material has a lid and an inner lid an open through hole, the inner lid is covered with a material having high thermal conductivity than the material of the inner cap Crucible and
Anda heating unit for heating the crucible,
The said crucible is removable from the said heating part, The vapor deposition apparatus characterized by the above-mentioned. 蒸着材料を充填する有底筒状の胴部と、貫通孔の開いた蓋及び内蓋と、を有し、前記蓋及び内蓋が各々の構成材料より熱伝導性の高い物質により被覆されているるつぼと、
前記るつぼを加熱する加熱部と、を有し、
前記るつぼは前記加熱部より脱着可能であることを特徴とする蒸着装置。 A bottomed cylindrical body portion for filling the deposited material has a lid and an inner lid an open through hole, the cap and the inner lid is covered by a substance with a high heat conductivity than each of the constituent materials Crucible and
Anda heating unit for heating the crucible,
The said crucible is removable from the said heating part, The vapor deposition apparatus characterized by the above-mentioned. 蒸着材料を充填する有底筒状の胴部と、貫通孔の開いた蓋と、を有し、前記蓋が前記有底筒状の胴部より熱伝導性の高い物質により形成されているるつぼと、
前記るつぼを加熱する加熱部と、を有し、
前記るつぼは前記加熱部より脱着可能であることを特徴とする蒸着装置。 A bottomed cylindrical body portion for filling the deposited material, anda lid open through hole, the lid is formed by material having high thermal conductivity than said bottomed tubular body portion crucible When,
Anda heating unit for heating the crucible,
The said crucible is removable from the said heating part, The vapor deposition apparatus characterized by the above-mentioned. 蒸着材料を充填する有底筒状の胴部と、貫通孔の開いた蓋及び内蓋と、を有し、前記内蓋が前記有底筒状の胴部より熱伝導性の高い物質により形成されているるつぼと、
前記るつぼを加熱する加熱部と、を有し、
前記るつぼは前記加熱部より脱着可能であることを特徴とする蒸着装置。 Forming a bottomed cylindrical body portion for filling the deposited material has a lid and an inner lid an open through hole, the inner lid by material having high thermal conductivity than said bottomed tubular body portion The crucible being,
Anda heating unit for heating the crucible,
The said crucible is removable from the said heating part, The vapor deposition apparatus characterized by the above-mentioned. 蒸着材料を充填する有底筒状の胴部と、貫通孔の開いた蓋及び内蓋と、を有し、前記蓋及び内蓋が前記有底筒状の胴部より熱伝導性の高い物質により形成されているるつぼと、
前記るつぼを加熱する加熱部と、を有し、
前記るつぼは前記加熱部より脱着可能であることを特徴とする蒸着装置。 A bottomed cylindrical body portion for filling the deposited material has a lid and an inner lid open the through-hole, high the lid and the inner lid thermal conductivity than said bottomed tubular body part material A crucible formed by,
Anda heating unit for heating the crucible,
The said crucible is removable from the said heating part, The vapor deposition apparatus characterized by the above-mentioned. 蒸着材料を充填する有底筒状の胴部と、貫通孔の開いた蓋と、を有し、少なくとも前記有底筒状の胴部内壁面に接して、前記蒸着材料より熱伝導性の高い物質により形成された部品を有するるつぼと、
前記るつぼを加熱する加熱部と、を有し、
前記るつぼは前記加熱部より脱着可能であることを特徴とする蒸着装置。 A bottomed cylindrical body portion for filling the deposited material, anda lid open through-holes, at least the contact with the bottomed cylindrical body portion wall high, thermal conductivity than the deposition material substance A crucible having a part formed by:
Anda heating unit for heating the crucible,
The said crucible is removable from the said heating part, The vapor deposition apparatus characterized by the above-mentioned. 蒸着材料を充填する有底筒状の胴部と、貫通孔の開いた蓋と、を有し、少なくとも前記有底筒状の胴部内底面に接して、前記蒸着材料より熱伝導性の高い物質により形成された部品を有するるつぼと、
前記るつぼを加熱する加熱部と、を有し、
前記るつぼは前記加熱部より脱着可能であることを特徴とする蒸着装置。 A bottomed cylindrical body portion for filling the deposited material, anda lid open through hole, in contact with at least the bottomed cylindrical body portion inner bottom surface higher, thermal conductivity than the deposition material substance A crucible having a part formed by:
Anda heating unit for heating the crucible,
The said crucible is removable from the said heating part, The vapor deposition apparatus characterized by the above-mentioned. 請求項１２乃至請求項１９のいずれか一項において、
前記熱伝導性の高い物質とは金、銀、白金、胴、ベリリウム、炭化ケイ素及び窒化炭素ダイヤモンド、窒化ホウ素、炭化ケイ素、酸化ベリウム、窒化アルミニウムのうち一種もしくは複数種であることを特徴とする蒸着装置。 In any one of Claims 12 to 19 ,
The material having high thermal conductivity is one or more of gold, silver, platinum, cylinder, beryllium, silicon carbide and carbon nitride diamond, boron nitride, silicon carbide, beryllium oxide, and aluminum nitride. Vapor deposition equipment. 請求項１８または請求項１９において、前記部品の形態はワイヤー状、球状もしくは板状のうち１形態もしくは複数形態であることを特徴とする蒸着装置。 According to claim 18 or claim 19, deposition apparatus wherein the form of the component is 1 form or plural forms of wire-like, spherical or plate-like. 請求項１８または請求項１９において、前記部品の形態はワイヤー状、球状もしくは板状のうち１形態もしくは複数形態が組み合わされた形態であることを特徴とする蒸着装置。 According to claim 18 or claim 19, wherein the component forms vapor deposition apparatus characterized in that wire-like, one form or more embodiments of the spherical or plate-like is in the form state combined. 請求項１２乃至請求項２２のいずれか一項において、蒸着しながら一軸又は２軸又は３軸方向に自在に前記るつぼの位置を制御する手段を有することを特徴とする蒸着装置。
According to any one of claims 12 to claim 22, the deposition apparatus characterized by comprising means for controlling the freely position of the crucible in a single or two or three axes direction while vapor deposition.
JP2003402148A 2003-12-01 2003-12-01 Vapor deposition crucible and vapor deposition apparatus Expired - Fee Related JP4439894B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2003402148A JP4439894B2 (en) 2003-12-01 2003-12-01 Vapor deposition crucible and vapor deposition apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2003402148A JP4439894B2 (en) 2003-12-01 2003-12-01 Vapor deposition crucible and vapor deposition apparatus

Publications (3)

Publication Number Publication Date
JP2005163090A JP2005163090A (en) 2005-06-23
JP2005163090A5 true JP2005163090A5 (en) 2007-01-18
JP4439894B2 JP4439894B2 (en) 2010-03-24

Family

ID=34725840

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2003402148A Expired - Fee Related JP4439894B2 (en) 2003-12-01 2003-12-01 Vapor deposition crucible and vapor deposition apparatus

Country Status (1)

Country Link
JP (1) JP4439894B2 (en)

Families Citing this family (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4557170B2 (en) * 2004-11-26 2010-10-06 三星モバイルディスプレイ株式會社 Evaporation source
JP5025151B2 (en) * 2005-03-23 2012-09-12 株式会社半導体エネルギー研究所 Method of making the deposit
KR101194851B1 (en) 2005-07-11 2012-10-25 엘지디스플레이 주식회사 Deposition source
KR100712217B1 (en) * 2005-09-30 2007-04-27 삼성에스디아이 주식회사 evaporating source and vacuum evaporating apparatus using the same
KR100761084B1 (en) * 2005-10-04 2007-09-21 삼성에스디아이 주식회사 evaporating source and vacuum evaporating apparatus using the same
JP2013108182A (en) * 2005-12-14 2013-06-06 Canon Inc Vapor deposition apparatus
JP2007234310A (en) * 2006-02-28 2007-09-13 Fuji Electric Holdings Co Ltd Method and device for manufacturing organic el display
DE102011000502A1 (en) * 2011-02-04 2012-08-09 Solibro Gmbh Separator and method of making a crucible therefor
JPWO2014174803A1 (en) * 2013-04-22 2017-02-23 株式会社Ｊｏｌｅｄ Method for manufacturing EL display device
CN103409720B (en) * 2013-08-23 2016-02-03 深圳市华星光电技术有限公司 A kind of coating equipment crucible
CN103556118B (en) * 2013-10-12 2016-03-02 深圳市华星光电技术有限公司 Evaporation coating device
CN103938160A (en) * 2014-03-06 2014-07-23 京东方科技集团股份有限公司 Crucible
JP2015168880A (en) * 2014-03-11 2015-09-28 株式会社半導体エネルギー研究所 crucible and vapor deposition apparatus
CN104928628B (en) * 2015-05-15 2018-03-09 京东方科技集团股份有限公司 One kind evaporation crucible
CN105174296B (en) * 2015-05-22 2016-12-07 鸿福晶体科技(安徽)有限公司 A kind of Aluminium hydroxide roasting special combination crucible cover
KR101746956B1 (en) * 2015-10-29 2017-06-14 주식회사 포스코 Particle generation apparatus and coating system including the same
CN105648404B (en) * 2016-03-21 2018-11-20 深圳市华星光电技术有限公司 Crucible is deposited
CN105648405A (en) * 2016-03-29 2016-06-08 苏州方昇光电装备技术有限公司 Organic material evaporator
KR20180007387A (en) * 2016-07-12 2018-01-23 삼성디스플레이 주식회사 Thin film deposition apparatus

Similar Documents

Publication Publication Date Title
JP2005163090A5 (en)
CN102615278B (en) Manufacture the method for metallic composite, metallic composite, the method for manufacture thermal component and thermal component
JP5362346B2 (en) Heating apparatus, coating apparatus and method for evaporating or sublimating coating materials
US7360581B2 (en) Structured thermal transfer article
KR101200693B1 (en) Linear type multi-point crucible assembly for large-size oled deposition process
US20090269521A1 (en) Porous structured thermal transfer article
TWI297735B (en) Vapor-deposition device
JP2005530031A5 (en)
WO2016184083A1 (en) Vapor-deposition crucible
US20150060021A1 (en) Heat transfer device and an associated method of fabrication
SE458205B (en) PROCEDURE AND DEVICE FOR COATING A SUBSTRATE OF MATERIAL THAT WAS TRANSFERRED ON THE ELECTRICAL ROAD
TW200835017A (en) Vapor deposition sources and methods
WO2015024280A1 (en) Crucible for coating machine
CN109393566A (en) A kind of electronic cigarette heater
TW200846483A (en) Evaporation tube evaporation apparatus with adapted evaporation characteristic
TWM376120U (en) Improved supporting structure for flat plate type heat piper
JP2003293120A (en) Evaporating source and thin film deposition system using the same
TWI805593B (en) Upflow cooling stage and cooling system for photoluminescence analysis
WO2019214271A1 (en) Crucible cover, crucible cover assembly, evaporation source, and evaporation method
JP2006009134A5 (en) Vapor deposition container and vapor deposition apparatus using the container
KR20110033590A (en) Deposition source
JP4435523B2 (en) Deposition method
US20150090428A1 (en) Heat transfer device having 3-dimensional projections and an associated method of fabrication
TW201443259A (en) Deposition source and deposition apparatus having the same
KR20040008606A (en) Device for depositing electroluminescent layer