JP4634698B2 - Vapor deposition equipment - Google Patents

Description

[0001]
BACKGROUND OF THE INVENTION
The present invention relates to a film formation apparatus used for film formation of a material that can be formed by vapor deposition (hereinafter referred to as vapor deposition material) and a method for manufacturing a light-emitting device typified by an OLED using the film formation apparatus. In particular, the present invention relates to a vapor deposition method and a vapor deposition apparatus for forming a film by evaporating a vapor deposition material from a plurality of vapor deposition sources provided facing a substrate.
[0002]
[Prior art]
In recent years, research on a light-emitting device having an EL element as a self-luminous light-emitting element has been activated. This light emitting device is also called an organic EL display (OELD) or an organic light emitting diode (OLED). These light-emitting devices have features such as fast response speed, low voltage, and low power consumption driving suitable for moving image display, so next-generation displays such as new-generation mobile phones and personal digital assistants (PDAs) It is attracting a lot of attention.
[0003]
This EL element has a structure in which a layer containing an organic compound (hereinafter referred to as an organic compound layer or EL layer) is sandwiched between an anode and a cathode, and by applying an electric field to the anode and the cathode, Luminescence (Electro Luminescence) is emitted from the EL layer. Light emission from the EL element includes light emission (fluorescence) when returning from the singlet excited state to the ground state and light emission (phosphorescence) when returning from the triplet excited state to the ground state.
[0004]
The EL layer has a laminated structure represented by “hole transport layer / light emitting layer / electron transport layer” proposed by Tang et al. Of Kodak Eastman Company. Further, EL materials for forming an EL layer are roughly classified into low molecular weight (monomer) materials and high molecular weight (polymer) materials. Low molecular weight materials are formed using a vapor deposition apparatus as shown in FIG. Be filmed.
[0005]
In the vapor deposition apparatus shown in FIG. 14, a substrate is placed on a substrate holder 1403, and an EL material, that is, a crucible 1401 enclosing the vapor deposition material, a shutter 1402 for preventing the EL material from sublimating from rising, and the EL material in the crucible are heated. A heater (not shown). Then, the EL material heated by the heater is sublimated and deposited on the rotating substrate. At this time, in order to form a film uniformly, the distance between the substrate and the crucible needs to be 1 m or more.
[0006]
[Problems to be solved by the invention]
In the above-described vapor deposition apparatus and vapor deposition method, when an EL layer is formed by vapor deposition, most of the sublimated EL material is the inner wall of the film deposition chamber of the vapor deposition apparatus, the shutter or the deposition shield (the vapor deposition material adheres to the inner wall of the film deposition chamber). It has adhered to the protective plate to prevent it. Therefore, when the EL layer is formed, the utilization efficiency of the expensive EL material is extremely low, about 1% or less, and the manufacturing cost of the light emitting device is very expensive.
[0007]
Further, in order to obtain a uniform film, the conventional vapor deposition apparatus has to have a distance of 1 m or more between the substrate and the vapor deposition source. Therefore, the vapor deposition apparatus itself is increased in size, and the time required for evacuating each film formation chamber of the vapor deposition apparatus becomes longer, so that the film formation rate is reduced and the throughput is reduced. Furthermore, since the vapor deposition apparatus has a structure in which the substrate is rotated, there is a limit to the vapor deposition apparatus intended for a large area substrate.
[0008]
Further, the EL material has a problem that it easily oxidizes and deteriorates due to the presence of oxygen and water. However, when a film is formed by the vapor deposition method, a predetermined amount of the vapor deposition material put in a container (glass bottle) is taken out, and a container (typical) placed at a position facing the film formation in the vapor deposition apparatus. In this transfer operation, there was a risk that oxygen, water, and further impurities would be mixed into the vapor deposition material.
[0009]
Furthermore, when transferring from a glass bottle to a container, for example, it has been performed by a human hand in a pretreatment chamber of a film formation chamber provided with a glove or the like. However, when a glove was provided in the pretreatment chamber, it was not possible to create a vacuum, and work was performed at atmospheric pressure, and there was a high possibility that impurities would be mixed. For example, even if the transfer is performed in a pretreatment chamber having a nitrogen atmosphere, it has been difficult to reduce moisture and oxygen as much as possible. Although it is conceivable to use a robot, since the evaporation material is in the form of powder, it is very difficult to manufacture a robot that performs the transfer operation. Therefore, it has been difficult to form an EL element, that is, a process from the formation of an EL layer on the lower electrode to the upper electrode formation process into a consistent closed system that can avoid contamination with impurities.
[0010]
Therefore, the present invention provides a vapor deposition apparatus and a vapor deposition method which are one of film deposition apparatuses that improve the use efficiency of EL materials and have excellent EL layer deposition uniformity and throughput. Moreover, the light-emitting device produced by the vapor deposition apparatus and vapor deposition method of this invention, and its production method are provided.
[0011]
The present invention is also applicable to a large area substrate having a substrate size of 320 mm × 400 mm, 370 mm × 470 mm, 550 mm × 650 mm, 600 mm × 720 mm, 680 mm × 880 mm, 1000 mm × 1200 mm, 1100 mm × 1250 mm, 1150 mm × 1300 mm, for example. Thus, a method for efficiently depositing an EL material is provided.
[0012]
Furthermore, the present invention provides a manufacturing system that can avoid contamination of the EL material with impurities.
[0013]
[Means for Solving the Problems]
In order to achieve the above object, the present invention provides a vapor deposition apparatus characterized in that a substrate and a vapor deposition source move relatively. That is, according to the present invention, in the film formation chamber (deposition chamber), the deposition source holder in which the container enclosing the deposition material is installed moves at a certain pitch with respect to the substrate, or the pitch at which the substrate is located with respect to the deposition source. It is characterized by moving by. Moreover, it is preferable that the vapor deposition source holder is moved at a certain pitch so that the ends of the sublimated vapor deposition material overlap (overlap).
[0014]
Although this evaporation source holder may be single or plural, if it is provided for each laminated film of EL layers, it can be efficiently and continuously evaporated. Moreover, the container installed in a vapor deposition source holder may be single or plural, and a plurality of containers filled with the same vapor deposition material may be installed. Note that in the case where a container having a different vapor deposition material is provided, a film can be formed on the substrate in a state where the sublimated vapor deposition materials are mixed (this is called co-deposition).
[0015]
Next, the outline of the path | route which the board | substrate of this invention and a vapor deposition source move relatively is demonstrated. In addition, although the example which a vapor deposition source holder moves with respect to a board | substrate is demonstrated using FIG. 2, this invention should just move a board | substrate and a vapor deposition source relatively, and the movement path | route of a vapor deposition source holder is limited to FIG. Is not to be done. Furthermore, although the case of four vapor deposition source holders A, B, C, and D will be described, it goes without saying that any number of vapor deposition source holders may be provided.
[0016]
FIG. 2A shows a substrate 13, vapor deposition source holders A, B, C, and D where vapor deposition sources are installed, and paths along which the vapor deposition source holders A, B, C, and D move with respect to the substrate. be written. First, the evaporation source holder A moves in the X-axis direction in order as shown by the broken line, finishes the film formation in the X-axis direction, then moves in order in the Y-axis direction, and after the film formation in the Y-axis direction ends, Stop at the dotted line position. Thereafter, similarly, the vapor deposition source holders B, C, and D sequentially move in the X-axis direction as indicated by broken lines, and the film formation in the X-axis direction is completed. Next, it moves sequentially in the Y-axis direction, and stops after the film formation in the Y-axis direction is completed. Note that the evaporation source holder may start moving from the Y-axis direction, and the path of movement is not limited to FIG. Further, the X-axis direction and the Y-axis direction may be moved alternately. Further, when the deposition source holder moves outside the substrate, the deposition on the end region of the substrate can be made uniform. Further, depending on the size of the film formation chamber, the moving speed of the end region may be reduced from the central region in order to make the deposition on the end region of the substrate uniform.
[0017]
Then, each deposition source holder returns to its original position and starts deposition on the next substrate. The timing at which each evaporation source holder returns to the original position may be any time after the end of film formation and before the next film formation, and may be during the time when another evaporation source holder is forming a film. Moreover, you may start vapor deposition to the following board | substrate from the position where each vapor deposition source holder stopped.
The practitioner can appropriately set the time for the evaporation source holder to reciprocate once, for example, 5 to 15 minutes.
[0018]
Next, a route different from FIG. 2A will be described with reference to FIG. As shown in FIG. 2B, the evaporation source holder A sequentially moves in the Y-axis direction on the substrate as indicated by a broken line, and then sequentially moves in the X-axis direction. Stop behind the deposition source holder D. Thereafter, similarly, the vapor deposition source holders B, C, and D sequentially move in the X-axis direction as indicated by broken lines, and then move sequentially in the Y-axis direction, and stop behind the previous vapor deposition source holder after the film formation is completed. To do.
[0019]
In this manner, by setting the path so that the vapor deposition source holder returns to the original position, there is no unnecessary movement of the vapor deposition source holder, the film forming speed can be improved, and the throughput of the light emitting device can be improved.
[0020]
2A and 2B, the timing at which the vapor deposition source holders A, B, C, and D start to move may be after the previous vapor deposition source holder has stopped or before it has stopped. Also good. In addition, when the movement of the next vapor deposition source holder is started before the deposited film is solidified, in the EL layer having a laminated structure, an area where the vapor deposition material is mixed at the interface with each film (mixed area) Can be formed.
[0021]
According to the present invention in which the substrate and the evaporation source holders A, B, C, and D move relative to each other as described above, it is possible to reduce the size of the apparatus without having to provide a long distance between the substrate and the evaporation source holder. Further, since the vapor deposition apparatus is small, the deposition material that has been sublimated is reduced from adhering to the inner wall of the deposition chamber or the deposition shield, and the vapor deposition material can be used without waste. Furthermore, in the vapor deposition method of the present invention, it is not necessary to rotate the substrate, so that it is possible to provide a vapor deposition apparatus that can handle a large area substrate. Further, according to the present invention in which the vapor deposition source holder moves in the X-axis direction and the Y-axis direction with respect to the substrate, it is possible to form the vapor deposition film uniformly.
[0022]
In addition, the present invention can provide a manufacturing apparatus in which a plurality of film forming chambers that perform vapor deposition are continuously arranged. As described above, since the vapor deposition process is performed in the plurality of film formation chambers, the throughput is improved.
[0023]
Furthermore, the present invention can provide a manufacturing system that enables a container in which a deposition material is sealed to be directly installed in a deposition apparatus without being exposed to the atmosphere. According to the present invention as described above, the handling of the vapor deposition material is facilitated, and the contamination of the vapor deposition material can be avoided.
[0024]
With such a vapor deposition apparatus having the vapor deposition crucible of the present invention and a vapor deposition method using the vapor deposition apparatus, a light emitting device having an organic compound layer can be efficiently produced.
[0025]
DETAILED DESCRIPTION OF THE INVENTION
Embodiments of the present invention will be described below with reference to the drawings. Note that in all the drawings for describing the embodiments, the same portions are denoted by the same reference numerals, and repeated description thereof is omitted.
[0026]
(Embodiment 1)
The vapor deposition apparatus of the present invention is shown in FIG. 1A is a cross-sectional view in the X direction (cross section taken along the dotted line AA ′), FIG. 1B is a cross-sectional view in the Y direction (cross section taken along the dotted line BB ′), and FIG. . In addition, FIG. 1 shows the thing in the middle of vapor deposition.
[0027]
In FIG. 1, the film forming chamber 11 includes a substrate holder 12, a vapor deposition source holder 17 provided with a vapor deposition shutter 15, means for moving the vapor deposition source holder (not shown), and means for creating a reduced pressure atmosphere. A substrate 13 and a vapor deposition mask 14 are installed in the film forming chamber 11. In addition, the alignment of the vapor deposition mask may be confirmed using a CCD camera (not shown). The vapor deposition source holder 17 is provided with a container in which a vapor deposition material 18 is enclosed. This film forming chamber 11 has a vacuum degree of 5 × 10 5 by means of a reduced pressure atmosphere. ^-3 Torr (0.665 Pa) or less, preferably 10 ^-Four -10 ^-6 It is evacuated to Pa.
[0028]
Further, during vapor deposition, the vapor deposition material is sublimated (vaporized) in advance by resistance heating, and is scattered toward the substrate 13 by opening the shutter 15 during vapor deposition. The evaporated evaporation material 19 scatters upward and is selectively deposited on the substrate 13 through an opening provided in the deposition mask 14. Note that it is preferable that the microcomputer can control the film forming speed, the moving speed of the evaporation source holder, and the opening and closing of the shutter. The deposition rate can be controlled by the moving speed of the deposition source holder.
[0029]
Although not shown, it is possible to perform deposition while measuring the film thickness of the deposited film with a crystal resonator provided in the film forming chamber 11. When measuring the film thickness of the deposited film using this crystal resonator, the mass change of the film deposited on the crystal resonator can be measured as a change in the resonance frequency.
[0030]
In the vapor deposition apparatus shown in FIG. 1, the distance d between the substrate 13 and the vapor deposition source holder 17 is typically 30 cm or less, preferably 20 cm or less, more preferably 5 cm to 15 cm. Use efficiency and throughput are greatly improved.
[0031]
In the vapor deposition apparatus, the vapor deposition source holder 17 includes a container (typically a crucible), a heater disposed on the outside of the container via a heat equalizing member, a heat insulating layer provided on the outside of the heater, The outer cylinder which accommodated these, the cooling pipe turned to the outer side of the outer cylinder, and the vapor deposition shutter 15 which opens and closes the opening part of the outer cylinder including the opening part of a crucible are comprised. In addition, the container which can be conveyed in the state to which this heater was fixed to the container may be sufficient. The container is made of a material such as a sintered body of BN, a composite sintered body of BN and AlN, quartz, or graphite, and can withstand high temperature, high pressure, and reduced pressure.
[0032]
The vapor deposition source holder 17 is provided with a mechanism that can move in the film forming chamber 11 in the X direction or the Y direction while keeping the level. Here, the vapor deposition source holder 17 is moved in a zigzag manner on a two-dimensional plane as shown in FIG. Moreover, the moving pitch of the vapor deposition source holder 17 may be appropriately adjusted to the interval between the insulators. The insulator 10 is arranged in a stripe shape so as to cover the end portion of the first electrode 21.
[0033]
Moreover, the organic compound with which a vapor deposition source holder is equipped does not necessarily need to be 1 type or 1 type, and multiple may be sufficient as it. For example, in addition to one kind of material provided as a light-emitting organic compound in the evaporation source holder, another organic compound (dopant material) that can be a dopant may be provided together. The organic compound layer to be deposited is composed of a host material and a light emitting material (dopant material) whose excitation energy is lower than that of the host material. The excitation energy of the dopant is the excitation energy of the hole transporting region and the excitation of the electron transport layer. It is preferable to design so that it may become lower than energy. This prevents the diffusion of the molecular excitons of the dopant and allows the dopant to emit light effectively. Further, if the dopant is a carrier trap type material, the carrier recombination efficiency can also be increased. In addition, a case where a material capable of converting triplet excitation energy into light emission is added to the mixed region as a dopant is also included in the present invention. In forming the mixed region, a concentration gradient may be provided in the mixed region.
[0034]
Further, when a plurality of organic compounds are provided in one vapor deposition source holder, it is desirable that the evaporation direction is oblique so that the organic compounds are mixed with each other at the position of the deposition target. Further, in order to perform co-evaporation, the deposition source holder may be provided with four types of deposition materials (for example, two types of host materials as the deposition material A and two types of dopant materials as the deposition material B). In addition, when the pixel size is small (or when the interval between the insulators is narrow), the inside of the container is divided into four, and the film can be accurately formed by performing co-evaporation in which each is appropriately deposited.
[0035]
Further, since the distance d between the substrate 13 and the vapor deposition source holder 17 is typically 30 cm or less, preferably 5 cm to 15 cm, the vapor deposition mask 14 may also be heated. Therefore, the vapor deposition mask 14 is a metal material having a low coefficient of thermal expansion that is not easily deformed by heat (for example, a high melting point metal such as tungsten, tantalum, chromium, nickel, or molybdenum, or an alloy containing these elements, stainless steel, inconel, hastelloy, etc. ) Is desirable. For example, a low thermal expansion alloy of 42% nickel and 58% iron can be used. Moreover, in order to cool the vapor deposition mask to be heated, a mechanism for circulating a cooling medium (cooling water, cooling gas) in the vapor deposition mask may be provided.
[0036]
In order to clean the deposit attached to the mask, it is preferable that plasma be generated in the film formation chamber by the plasma generation unit to vaporize the deposit attached to the mask and exhaust it outside the film formation chamber. Therefore, a separate electrode is provided on the mask, and the high frequency power supply 20 is connected to one of them. As described above, the mask is preferably formed of a conductive material.
[0037]
The vapor deposition mask 14 is used when a vapor deposition film is selectively formed on the first electrode 21 (cathode or anode), and is not particularly necessary when the vapor deposition film is formed on the entire surface.
[0038]
The film formation chamber is Ar, H, F, NF _Three Or a gas introducing means for introducing one or more kinds of gases selected from O, and a means for exhausting the vaporized deposit. With the above configuration, it is possible to clean the film formation chamber without touching the atmosphere during maintenance.
[0039]
For example, in order to perform cleaning, the inside of the chamber is replaced with nitrogen and then evacuated, and a plasma is generated between the mask and the electrode (substrate shutter). Can be connected. For example, when argon and hydrogen are introduced at a flow rate of 30 sccm and the atmosphere in the chamber is stabilized, an RF power of 800 W may be applied to generate plasma, and the mask and the inner wall of the chamber can be cleaned.
[0040]
The film formation chamber 11 is connected to an evacuation chamber that evacuates the film formation chamber. As the evacuation processing chamber, a magnetic levitation turbo molecular pump, a cryopump, or a dry pump is provided. As a result, the ultimate vacuum in the film forming chamber 11 is 10 ^-Five -10 ^-6 Pa can be set, and the back diffusion of impurities from the pump side and the exhaust system can be controlled. In order to prevent impurities from being introduced into the film formation chamber 11, an inert gas such as nitrogen or a rare gas is used as the introduced gas. These gases to be introduced are those purified by a gas purifier before being introduced into the apparatus. Therefore, it is necessary to provide a gas purifier so that the gas is introduced into the film forming chamber 11 after being highly purified. Accordingly, oxygen, water, and other impurities contained in the gas can be removed in advance, so that these impurities can be prevented from being introduced into the film formation chamber 11.
[0041]
Further, the substrate holder 12 includes a permanent magnet, a vapor deposition mask made of metal is fixed by a magnetic force, and the substrate 13 sandwiched therebetween is also fixed. Here, an example in which the vapor deposition mask is in close contact with the substrate 13 is shown, but a substrate holder or vapor deposition mask holder that is fixed with a certain distance may be provided as appropriate.
[0042]
With the film formation chamber having a mechanism for moving the vapor deposition source holder as described above, it is not necessary to increase the distance between the substrate and the vapor deposition source holder, and the vapor deposition film can be formed uniformly.
[0043]
Therefore, according to the present invention, the distance between the substrate and the vapor deposition source holder can be shortened, and the vapor deposition apparatus can be downsized. And since a vapor deposition apparatus becomes small, it is reduced that the sublimated vapor deposition material adheres to the inner wall in a film-forming room | chamber, or a deposition shield, and can use a vapor deposition material effectively. Furthermore, in the vapor deposition method of the present invention, since it is not necessary to rotate the substrate, it is possible to provide a vapor deposition apparatus that can handle a large area substrate.
[0044]
In addition, by reducing the distance between the substrate and the evaporation source holder in this way, the evaporated film can be deposited thinly and with good control.
[0045]
(Embodiment 2)
Next, the configuration of the container for enclosing the vapor deposition material of the present invention and the surrounding vapor deposition source holder will be described in detail with reference to FIG. FIG. 3 shows a state where the shutter is opened.
[0046]
FIG. 3A shows a cross-sectional view of the periphery of one container installed in the vapor deposition source holder 304. The heating means 303 provided in the vapor deposition source holder, the power supply 307 for the heating means, and the vapor deposition material 302 for the container. , A filter 305 provided in the container, and a shutter 306 disposed above the opening provided in the upper part of the container. As the heating means 303, resistance heating, high frequency, laser, or the like may be used. Specifically, an electric coil may be used.
[0047]
The vapor deposition material 302 heated by the heating means 303 is sublimated, and the sublimated vapor deposition material 302 rises upward from the opening of the container. At this time, the sublimated material having a certain size (filter eye) or larger cannot pass through the filter 305 provided in the container, returns to the container, and is sublimated again. Alternatively, the filter 305 may be formed of a highly conductive material and heated by a heating unit (not shown). By this heating, the vapor deposition material can be prevented from solidifying and adhering to the filter.
[0048]
A container with such a filter is used to deposit vapor deposition materials of a uniform size, so that the deposition rate can be controlled and a uniform film thickness can be obtained. it can. Of course, when uniform and uniform deposition is possible, it is not always necessary to provide a filter. Note that the shape of the container is not limited to that shown in FIG.
[0049]
Next, a container in which a vapor deposition material having a configuration different from that in FIG. 3A is enclosed will be described with reference to FIG.
[0050]
3B, the container 311 installed in the vapor deposition source holder, the vapor deposition material 312 in the container, the first heating means 313 provided in the vapor deposition source holder, and the power source 318 of the first heating means. A shutter 317 arranged on the opening of the container, a plate 316 provided above the opening, a second heating means 314 provided so as to surround the filter, and a power source 319 of the second heating means. The
[0051]
Then, the vapor deposition material 312 heated by the first heating unit 313 is sublimated, and the sublimated vapor deposition material rises upward from the opening of the container 311. At this time, the sublimated material having a certain size or more cannot pass between the plate 316 provided above the opening of the container and the second heating means 314 and collides with the plate 316. And return to the container. Since the plate 316 is heated by the second heating means 314, the vapor deposition material can be prevented from solidifying and adhering to the plate 316. Further, the plate 316 is preferably formed using a highly conductive material. A filter may be provided instead of the plate.
[0052]
Further, the heating temperature (T ₁ ) Is the sublimation temperature (T _A ), The heating temperature by the second heating means 314 (T ₂ ) May be at a lower temperature than the first heating means. This is because the vapor deposition material once sublimated is easily sublimated, and thus sublimates without applying the actual sublimation temperature. That is, each heating temperature is T ₁ ≫T ₂ > T _A If it becomes.
[0053]
Due to such a container having a heating means around the plate, vapor deposition materials having a uniform size are sublimated, and the sublimated material passes near the heating means. The adhesion of the material is reduced, the film formation rate can be controlled, and a uniform film thickness can be obtained, so that uniform and uniform deposition can be performed. Of course, when uniform and uniform deposition is possible, it is not always necessary to provide a plate. Further, the shape of the container is not limited to that shown in FIG. 3, and may be a shape as shown in FIG.
[0054]
FIG. 4A shows an example in which the heating means 402 is provided in the vapor deposition source holder 404, and a cross-sectional view of a shape example of the containers 403 and 405 in which the opening of the container is narrowed upward is described. . Alternatively, after the purified vapor deposition material is sealed in a container having a wide opening, the shape of the containers 403 and 405 illustrated in FIG. And if the diameter of the opening part of the container which narrows toward the top is made into the magnitude | size of the vapor deposition material to form into a film, the effect similar to a filter can be acquired.
[0055]
FIG. 4B shows an example in which a heating means 412 is provided in the container. The shapes of the containers 413 and 415 are the same as those in FIG. 4A, but a heating means 412 is provided in the containers themselves. And the power supply of this heating means should just be designed so that it may become an ON state in the stage installed in the vapor deposition source holder. With such a configuration in which a heating unit is provided in the container itself, even a container having an opening that is difficult to heat can sufficiently heat the vapor deposition material.
[0056]
Next, a specific configuration of the evaporation source holder will be described with reference to FIG. 5A and 5B show enlarged views of the vapor deposition source holder.
[0057]
FIG. 5A shows a configuration example in which four containers 501 each having a deposition material sealed in a deposition source holder 502 are provided in a lattice shape, and a shutter 503 is provided on each container. FIG. This is a configuration example in which four containers 511 each having a vapor deposition material sealed in a holder 512 are linearly provided, and a shutter 513 is provided on each container.
[0058]
A plurality of containers 501 and 511 in which the same material is sealed may be installed in the vapor deposition source holders 502 and 512 described in FIG. 5A or 5B, or a single container may be installed. Further, co-evaporation may be performed by installing a container in which different vapor deposition materials (for example, a host material and a guest material) are sealed. As described above, the vapor deposition material is sublimated by heating the container, and film formation is performed on the substrate.
[0059]
Further, as shown in FIG. 5A or 5B, shutters 503 and 513 may be provided above each container to control whether or not the deposited vapor deposition material is formed. Further, only one shutter may be provided above all containers. In addition, this shutter can reduce the unnecessary vapor deposition material from being sublimated and scattered without stopping the heating of the vapor deposition source holder that does not form a film, that is, the standby vapor deposition source holder. In addition, the structure of a vapor deposition source holder is not limited to FIG. 5, A practitioner should just design suitably.
[0060]
The deposition source holder and the container as described above can efficiently sublimate the deposition material, and further, the deposition can be performed in a state where the size of the deposition material is uniform, so that a uniform and non-uniform deposition film is formed. Further, since a plurality of vapor deposition materials can be installed in the vapor deposition source holder, co-vapor deposition can be easily performed. In addition, the EL layer can be formed at a time without changing the deposition chamber for each EL layer film.
[0061]
(Embodiment 3)
Next, a system of a manufacturing method in which the purified vapor deposition material is sealed in a container as described above, and the container is directly installed in a vapor deposition apparatus that is a film forming apparatus and vapor deposition is performed will be described with reference to FIG. To do.
[0062]
FIG. 6 shows a manufacturer (typically a material manufacturer) 618 that produces and refines an organic compound material, which is a vapor deposition material, and a light emitting device manufacturer that has a vapor deposition device. Describes a manufacturing system in a production factory) 619.
[0063]
First, an order 610 is made from the light emitting device manufacturer 619 to the material manufacturer 618. Based on the order 610, the material manufacturer 618 sublimates and purifies the vapor deposition material, and encloses the powder vapor deposition material 612 purified to a high purity in a first container (typically a crucible) 611. Thereafter, the material maker 618 isolates the first container 611 from the atmosphere so that no extraneous impurities adhere to the inside or outside of the first container, and the second container 621a and 621b to prevent the contamination in the clean environment chamber. Store and seal. When sealing, the insides of the second containers 621a and 621b are preferably filled with an inert gas such as a vacuum or nitrogen. Note that it is preferable to clean the first container 611 and the second containers 621a and 621b before purifying or storing the ultrahigh-purity vapor deposition material 612. In addition, the second containers 621a and 621b may be packaging films having a barrier property to block the mixing of oxygen and moisture, but in order to be able to be taken out automatically, they are sturdy in a cylindrical shape or a box shape. It is preferable to use a light-shielding container.
[0064]
After that, the first container 611 is conveyed 617 from the material manufacturer 618 to the light emitting device manufacturer 619 while being sealed in the second containers 621a and 621b.
[0065]
In the light-emitting device manufacturer 619, the first container 611 is directly introduced into the processing chamber 613 that can be evacuated while being sealed in the second containers 621a and 621b. Note that the processing chamber 613 is a vapor deposition apparatus in which a heating unit 614 and a substrate holding unit (not shown) are installed.
[0066]
Thereafter, the inside of the processing chamber 613 is evacuated to a clean state in which oxygen and moisture are reduced as much as possible, and then the first container 611 is taken out from the second containers 621a and 621b without breaking the vacuum, The container 611 is placed in contact with the heating means 614, and a vapor deposition source can be prepared. Note that a deposition target (here, a substrate) 615 is provided in the treatment chamber 613 so as to face the first container 611.
[0067]
Next, heat is applied to the vapor deposition material by the heating means 614 to form a vapor deposition film 616 on the surface of the deposition object 615. The vapor deposition film 616 thus obtained does not contain impurities, and when the light emitting element is completed using the vapor deposition film 616, high reliability and high luminance can be realized.
[0068]
Alternatively, the vapor deposition material remaining in the first container 611 after film formation may be purified by sublimation in the light-emitting device manufacturer 619. After film formation, the first container 611 is placed in the second containers 621a and 621b, taken out from the treatment chamber 613, and transferred to a purification chamber in which sublimation purification is performed. Therefore, the remaining vapor deposition material is purified by sublimation, and the powdered vapor deposition material purified to high purity is sealed in another container. Then, it conveys to the process chamber 613 in the state sealed with the 2nd container, and performs a vapor deposition process. At this time, the relationship between the temperature (T3) for purifying the remaining vapor deposition material, the rising temperature (T4) around the vapor deposition material, and the temperature (T5) around the vapor deposition material subjected to sublimation purification is T3> T4. It is preferable that T5 is satisfied. That is, in the case of sublimation purification, if the temperature is lowered toward the container that encloses the vapor deposition material to be sublimated and purified, convection occurs and the sublimation purification can be performed efficiently. Note that a purification chamber in which sublimation purification is performed may be provided in contact with the treatment chamber 613, and the sublimation-purified deposition material may be transported without using a second container for sealing.
[0069]
As described above, the first container 611 is installed in the vapor deposition chamber which is the processing chamber 613 without being exposed to the atmosphere, and vapor deposition is performed while maintaining the purity at the stage where the vapor deposition material 612 is stored by the material manufacturer. Make it possible. Therefore, according to the present invention, it is possible to realize a manufacturing system that fully automates to improve throughput, and to realize a consistent closed system that can avoid contamination of the vapor deposition material 612 purified by the material manufacturer 618. Become. Furthermore, since the material maker directly stores the vapor deposition material 612 in the first container 611 based on the order, only a necessary amount can be provided to the light emitting device manufacturer, and a relatively expensive vapor deposition material can be used efficiently. . Note that the first container and the second container can be reused, leading to low cost.
[0070]
Next, the form of the container to convey is demonstrated concretely using FIG. The second container divided into an upper part (621a) and a lower part (621b) used for conveyance is for fixing the first container provided on the upper part of the second container, and pressurizing the fixing means. A spring 705, a gas inlet 708 serving as a gas path for holding the second container provided under the second container under reduced pressure, an O-ring 707 for fixing the upper container 621a and the lower container 621b, It has a fastener 702. In the second container, a first container 611 in which a purified vapor deposition material is enclosed is installed. Note that the second container is preferably formed using a material containing stainless steel, and the first container is preferably formed using a material containing titanium.
[0071]
In the material manufacturer, the purified deposition material is sealed in the first container 611. Then, the second upper part 621a and the lower part 621b are aligned via the O-ring 707, the upper container 621a and the lower container 621b are fixed by the fastener 702, and the first container 611 is sealed in the second container. . Thereafter, the inside of the second container is depressurized via the gas inlet 708, further replaced with a nitrogen atmosphere, the spring 705 is adjusted, and the first container 611 is fixed by the fixing means 706. In addition, you may install a desiccant in a 2nd container. By keeping the inside of the second container in a vacuum, reduced pressure, or nitrogen atmosphere in this way, even a slight amount of oxygen or water can be prevented from adhering to the vapor deposition material.
[0072]
In this state, the first container 611 is transferred directly to the light emitting device manufacturer 619 and installed in the processing chamber 613. Thereafter, the vapor deposition material is sublimated by heating, and a vapor deposition film 616 is formed.
[0073]
Next, a mechanism for installing the first container 611 that is sealed and transported in the second container in the film formation chamber 806 will be described with reference to FIGS. 8 and 9. 8 and 9 show the middle of the conveyance of the first container.
[0074]
FIG. 8A shows a table 804 on which the first container or the second container is placed, a vapor deposition source holder 803, means 807 for moving the table 804 and the vapor deposition source holder 803, and the first container. A top view of an installation chamber (also referred to as a load lock chamber) 805 having a transfer means 802 for performing the above is described, and FIG. 8B is a perspective view of the installation chamber. The installation chamber 805 is disposed adjacent to the film formation chamber 806, and the atmosphere of the installation chamber can be controlled by means for controlling the atmosphere via the gas inlet. In addition, the conveyance means of this invention is not limited to the structure which conveys across the side surface of a 1st container as it describes in FIG. 8, From the upper direction of a 1st container, this 1st container It may be configured to carry (pinch) the sheet.
[0075]
In such an installation chamber 805, the second container is placed on the table 804 with the fastener 702 removed. Next, the inside of the installation chamber 805 is depressurized by means for controlling the atmosphere. When the pressure in the installation chamber is equal to the pressure in the second container, the second container can be easily opened. Then, the upper part 621 a of the second container is removed by the conveying means 802, and the first container 611 is installed in the vapor deposition source holder 803. Although not shown, a place where the removed upper portion 621a is disposed is provided as appropriate. Then, the moving unit 807 moves (slides), and the evaporation source holder 803 moves from the installation chamber 805 to the film formation chamber 806.
[0076]
Thereafter, the vapor deposition material is sublimated by the heating means provided in the vapor deposition source holder 803, and film formation is started. When a shutter (not shown) provided in the vapor deposition source holder 803 is opened during the film formation, the sublimated vapor deposition material scatters in the direction of the substrate, is vapor deposited on the substrate, and the light emitting layer (hole transport layer, hole injection). A layer, an electron transport layer, and an electron injection layer).
[0077]
After the vapor deposition is completed, the vapor deposition source holder 803 returns to the installation chamber 805, and the first container 611 installed in the vapor deposition source holder 803 is transferred to the second container installed on the table 804 by the transport unit 802. It moves to a lower container (not shown) and is sealed by the upper container 621a. At this time, it is preferable that the first container, the upper container 621a, and the lower container are sealed with the transported combination. In this state, the installation chamber 805 is set to atmospheric pressure, the second container is taken out of the installation chamber, the fastener 702 is fixed, and the material is delivered to the material manufacturer 618.
[0078]
Note that the moving unit 807 may have a function of rotating in order to efficiently carry the vapor deposition source holder that starts vapor deposition and the vapor deposition source holder that has completed vapor deposition. Moreover, the conveyance means 802 may have the arm of the number of the 1st container installed in a vapor deposition source holder, and may provide the conveyance means 802 with two or more.
[0079]
Further, instead of the moving means 807, a rotating table (rotating table 820) is arranged between the table 804 and the vapor deposition source holder 803, and the first container is placed on the vapor deposition source holder before the vapor deposition is started. And the installation to the 2nd container of the 1st container after the end of vapor deposition can be performed efficiently.
[0080]
An efficient method will be described with reference to FIG. 17. When the previous vapor deposition source holder 803 is performing vapor deposition, as described above, the following first containers 611 (numbered 1-4 are attached). Is installed on one of the turntables 820 by a conveying means. Then, the turntable 820 is rotated 180 degrees. Thereafter, the first container 611 of the vapor deposition source holder 803 that has completed vapor deposition is removed from the vapor deposition source holder 803 by the conveying means 802 and placed on the other side of the turntable 820. At this time, the first container 611 is rotated 90 degrees counterclockwise and then placed on the turntable. Then, the turntable 820 is rotated 180 degrees. Then, the next first container installed on one of the turntables 820 is installed on the deposition source holder 803 by the transfer means, and the deposition source holder moves to the film formation chamber. After that, the first container installed on the other side of the turntable 820 is installed on the table 804 by the conveying means 802, sealed with the second container, and taken out from the installation chamber 805. With such a configuration, it is possible to efficiently perform the installation of the first container before starting the vapor deposition on the vapor deposition source holder and the installation of the first container after the vapor deposition on the second container.
[0081]
Note that the transport unit 802 may have a mechanism for sandwiching the side surface of the first container, or may have a function of having a mechanism for sandwiching the upper surface, that is, the lid. Further, heating means may be provided on the turntable to preheat the material in the evaporation source holder.
In addition, maintenance such as replacement of the crystal resonator installed in the evaporation source holder can be performed in the installation room.
[0082]
FIG. 20 illustrates a case where the first container is exchanged before and after another vapor deposition.
[0083]
The installation chamber 805 shown in FIG. 20 includes a first transfer means 825 for opening the lid of the second container, and a second container for taking out the first container from the second container and installing it in the vapor deposition source holder. It has the conveyance means 826, It is characterized by the above-mentioned. Each of the first and second transport means has a knob 823.
[0084]
First, the lid of the second container fixed to the turntable is opened, and the turntable 820 is rotated halfway by the rotation shaft 821. Then, using the second transfer means, the first container is taken out from the second container with the lid open, the opening / closing window 824 is opened, transferred to the vapor deposition source holder provided in the film formation chamber 806, and installed. . In the case of opening the opening / closing window, the installation chamber and the film formation chamber are kept in the same reduced pressure state to prevent contamination of the film formation chamber. After closing the open / close window, the vapor deposition source holder 803 moves, and vapor deposition on the substrate 822 installed in the film formation chamber is started.
[0085]
While vapor deposition is performed in the film formation chamber 806, the installation chamber is opened to atmospheric pressure, a second container filled with a new vapor deposition material is installed on the turntable 820, and the installation chamber is again decompressed. . At this time, it is preferable that an empty turntable be in front of the rotating shaft.
[0086]
After that, the first container after vapor deposition is returned to the second container of the turntable using the second conveying means 826, and the lid held by the first conveying means 825 is closed. Next, the lid of the new second container is opened by the first transporting means 825, the first container is taken out by the second transporting means 826, and placed in the vapor deposition source holder. While vapor deposition is performed in the film formation chamber, the installation chamber is set to atmospheric pressure, the used first and second containers are taken out, and new first and second containers are installed.
[0087]
As described above, the first and second containers can be exchanged efficiently without exposing the first container in which the material is sealed to the atmosphere.
[0088]
Next, a mechanism for installing a plurality of first containers sealed in a second container in a plurality of vapor deposition source holders by a method different from that shown in FIGS. Will be described.
[0089]
FIG. 9A shows a table 904 on which the first container or the second container is placed, a plurality of vapor deposition source holders 903, a plurality of transport means 902 for transporting the first container, and a turntable 907. FIG. 9B is a perspective view of the installation chamber 905. FIG. Further, the installation chamber 905 is disposed adjacent to the film formation chamber 906, and the atmosphere of the installation chamber can be controlled by means for controlling the atmosphere via the gas inlet.
[0090]
A plurality of first containers 611 are installed in a plurality of evaporation source holders 905 by such a rotating table 907 and a plurality of transporting means 902, and a plurality of first containers 611 from a plurality of evaporation source holders after film formation is completed. Can be efficiently performed on the table 904. At this time, the first container 611 is preferably installed in the second container that has been transported.
[0091]
The vapor deposition film formed by the vapor deposition apparatus as described above can reduce impurities to the limit. When a light emitting element is completed using the vapor deposition film, high reliability and luminance can be realized. In addition, such a manufacturing system allows the container enclosed by the material manufacturer to be directly installed in the vapor deposition system, so that the vapor deposition material can prevent the adhesion of oxygen and water, and it can be used for future ultra-high purity of light emitting devices. It becomes possible. Moreover, waste of material can be eliminated by repurifying the container having the remaining evaporation material. Furthermore, the first container and the second container can be reused, and cost reduction can be realized.
[0092]
【Example】
Embodiments of the present invention will be described below with reference to the drawings. In all the drawings for explaining the embodiments, the same reference numerals are given to the same portions, and the repeated explanation thereof is omitted.
[0093]
Example 1
In this embodiment, an example in which a TFT is formed over a substrate having an insulating surface and an EL element which is a light emitting element is formed is shown in FIG. In this embodiment, a cross-sectional view of one TFT connected to an EL element in a pixel portion is shown.
[0094]
First, as illustrated in FIG. 10A, a base insulating film 201 including a stack of insulating films such as a silicon oxide film, a silicon nitride film, or a silicon oxynitride film is formed over a substrate 200 having an insulating surface. Although a two-layer structure is used here as the base insulating film 201, a single-layer film of the insulating film or a structure in which two or more layers are stacked may be used. As the first layer of the base insulating film, a plasma CVD method is used, and SiH _Four , NH _Three And N ₂ A silicon oxynitride film formed using O as a reaction gas is formed to a thickness of 10 to 200 nm (preferably 50 to 100 nm). Here, a silicon oxynitride film (composition ratio: Si = 32%, O = 27%, N = 24%, H = 17%) with a thickness of 50 nm is formed. Next, as the second layer of the base insulating film, a plasma CVD method is used, and SiH _Four And N ₂ A silicon oxynitride film formed using O as a reaction gas is formed to a thickness of 50 to 200 nm (preferably 100 to 150 nm). Here, a 100-nm-thick silicon oxynitride film (composition ratio Si = 32%, O = 59%, N = 7%, H = 2%) is formed.
[0095]
Next, a semiconductor layer is formed over the base insulating film 201. The semiconductor layer is formed by forming a semiconductor film having an amorphous structure by a known means (sputtering method, LPCVD method, plasma CVD method, etc.), and then crystallizing treatment (laser crystallization method, thermal crystallization method, or A crystalline semiconductor film obtained by performing a thermal crystallization method using a catalyst such as nickel) is formed into a desired shape by patterning. The semiconductor layer is formed with a thickness of 25 to 80 nm (preferably 30 to 60 nm). There is no limitation on the material of the crystalline semiconductor film, but it is preferably formed of silicon or a silicon germanium alloy.
[0096]
In the case of producing a crystalline semiconductor film by laser crystallization, a pulse oscillation type or continuous emission type excimer laser, YAG laser, YVO _Four A laser can be used. When these lasers are used, it is preferable to use a method in which laser light emitted from a laser oscillator is linearly collected by an optical system and irradiated onto a semiconductor film. Crystallization conditions are appropriately selected by the practitioner. When an excimer laser is used, the pulse oscillation frequency is 30 Hz and the laser energy density is 100 to 400 mJ / cm. ² (Typically 200-300mJ / cm ² ). When a YAG laser is used, the second harmonic is used, the pulse oscillation frequency is 1 to 10 kHz, and the laser energy density is 300 to 600 mJ / cm. ² (Typically 350-500mJ / cm ² ) Then, if the laser beam condensed linearly with a width of 100 to 1000 μm, for example 400 μm, is irradiated over the entire surface of the substrate, the superposition ratio (overlap ratio) of the linear laser light at this time is 50 to 98%. Good.
[0097]
Next, the surface of the semiconductor layer is washed with an etchant containing hydrofluoric acid to form a gate insulating film 202 that covers the semiconductor layer. The gate insulating film 202 is formed of an insulating film containing silicon with a thickness of 40 to 150 nm by using a plasma CVD method or a sputtering method. In this embodiment, a silicon oxynitride film (composition ratio Si = 32%, O = 59%, N = 7%, H = 2%) is formed to a thickness of 115 nm by plasma CVD. Needless to say, the gate insulating film 202 is not limited to a silicon oxynitride film, and another insulating film containing silicon may be used as a single layer or a stacked structure.
[0098]
Next, after cleaning the surface of the gate insulating film 202, the gate electrode 210 is formed.
[0099]
Next, an impurity element imparting p-type conductivity to the semiconductor (such as B), here boron, is added as appropriate, so that the source region 211 and the drain region 212 are formed. After the impurity element is added, heat treatment, intense light irradiation, or laser light irradiation is performed to activate the impurity element. Simultaneously with activation, plasma damage to the gate insulating film and plasma damage to the interface between the gate insulating film and the semiconductor layer can be recovered. In particular, in an atmosphere of room temperature to 300 ° C., the impurity element is activated from the front surface or the back surface using an excimer laser. Alternatively, the YAG laser may be activated by irradiation with the second harmonic, and the YAG laser is a preferable activation means because it requires less maintenance.
[0100]
In the subsequent steps, after hydrogenation, an insulator 213a made of an organic material or an inorganic material (for example, made of a photosensitive organic resin) is formed, and then an aluminum nitride film, AlN _X O _Y A first protective film 213b made of an aluminum oxynitride film or a silicon nitride film is formed. AlN _X O _Y The film indicated by may be formed by introducing oxygen, nitrogen, or a rare gas from the gas introduction system by RF sputtering using a target made of AlN or Al. AlN _X O _Y In the layer represented by the above, it may be in a range containing several atom% or more of nitrogen, preferably 2.5 to 47.5 atom%, and oxygen may be 47.5 atom% or less, preferably 0.01 to less than 20 atom%. That's fine. Next, a contact hole reaching the source region 211 or the drain region 212 is formed. Next, a source electrode (wiring) 215 and a drain electrode 214 are formed to complete a TFT (p-channel TFT). This TFT is a TFT that controls a current supplied to an OLED (Organic Light Emitting Device).
[0101]
Further, the TFT structure is not limited to the TFT structure of this embodiment, and if necessary, a lightly doped drain (LDD) structure having an LDD region between a channel formation region and a drain region (or source region) may be used. . In this structure, a region to which an impurity element is added at a low concentration is provided between a channel formation region and a source region or a drain region formed by adding an impurity element at a high concentration, and this region is referred to as an LDD region. I'm calling. Further, a so-called GOLD (Gate-drain Overlapped LDD) structure in which the LDD region is disposed so as to overlap the gate electrode through a gate insulating film may be employed. Note that it is preferable that the gate electrode has a stacked structure, the upper gate electrode and the lower gate electrode are etched to have different taper angles, and the LDD structure or the GOLD structure is formed by self-alignment using the gate electrode as a mask.
[0102]
In this embodiment, the p-channel TFT is used for explanation. However, it goes without saying that an n-channel TFT can be formed by using an n-type impurity element (P, As, etc.) instead of the p-type impurity element. Yes.
[0103]
Next, in the pixel portion, first electrodes 217 in contact with the connection electrodes in contact with the drain region are arranged in a matrix. The first electrode 217 serves as an anode or a cathode of the light emitting element. Next, an insulator (referred to as a bank, a partition, a barrier, a bank, or the like) 216 is formed to cover the end portion of the first electrode 217. As the insulator 216, a photosensitive organic resin is used. For example, when negative photosensitive acrylic is used as the material of the insulator 216, the insulator 216 has a curved surface having a first radius of curvature at the upper end of the insulator 216, and a second radius of curvature at the lower end of the insulator. It is preferable that the first curvature radius and the second curvature radius are 0.2 μm to 3 μm. Next, a layer 218 containing an organic compound is formed in the pixel portion, and a second electrode 219 is formed thereon to complete an EL element. The second electrode 219 serves as a cathode or an anode of the EL element.
[0104]
Alternatively, the insulator 216 covering the end portion of the first electrode 217 may be covered with a second protective film formed of an aluminum nitride film, an aluminum nitride oxide film, or a silicon nitride film.
[0105]
For example, FIG. 10B illustrates an example in which positive photosensitive acrylic is used as a material for the insulator 216. Only the upper end portion of the insulator 316a using positive photosensitive acrylic has a curved surface having a radius of curvature, and the insulator 316a is made of an aluminum nitride film, an aluminum nitride oxide film, or a silicon nitride film. 2 with a protective film 316b.
[0106]
Next, when the first electrode 217 is used as an anode, a metal having a high work function (Pt, Cr, W, Ni, Zn, Sn, In) is used as the material of the first electrode 217, and the ends are insulated. After covering with an object (referred to as a bank, a partition, a barrier, a bank, or the like) 216 or 316, the insulator 216 or the like is formed using the vapor deposition apparatus having the vapor deposition source holder and the film formation chamber described in Embodiments 1 and 2. Deposition is performed while moving the deposition source in accordance with 316a and 316b. For example, the degree of vacuum is 5 × 10 ^-3 Torr (0.665 Pa) or less, preferably 10 ^-Four -10 ^-6 Vapor deposition is performed in a deposition chamber evacuated to Pa. At the time of vapor deposition, the organic compound is vaporized in advance by resistance heating, and is scattered in the direction of the substrate by opening the shutter at the time of vapor deposition. The vaporized organic compound is scattered upward and deposited on the substrate through an opening provided in the metal mask, and includes a light emitting layer (including a hole transport layer, a hole injection layer, an electron transport layer, and an electron injection layer). ) Is formed.
[0107]
Moreover, when forming the layer containing the organic compound which shows white as a whole light emitting element by a vapor deposition method, it can form by laminating | stacking each light emitting layer. For example, Alq _Three , Alq partially doped with Nile Red, a red luminescent dye _Three , P-EtTAZ, and TPD (aromatic diamine) are sequentially laminated to obtain a white color.
[0108]
In the case of using a vapor deposition method, as shown in Embodiment Mode 3, a first container (typically a crucible) in which an EL material that is a vapor deposition material is stored in advance by a material manufacturer is provided in a film formation chamber. It is preferable to install. The installation is preferably performed without exposure to the atmosphere, and the crucible is preferably introduced into the film formation chamber while being sealed in the second container. Desirably, a chamber (installation chamber) having vacuum evacuation means connected to the film formation chamber is provided, where the crucible is taken out from the second container in a vacuum or an inert gas atmosphere, and the crucible is installed in the film formation chamber. . By doing so, the crucible and the EL material housed in the crucible can be prevented from contamination.
[0109]
Next, the second electrode 219 is formed as a cathode over the light-emitting layer. The second electrode 219 includes a thin film containing a metal (Li, Mg, Cs) having a small work function and a transparent conductive film (ITO (indium tin oxide alloy), indium oxide zinc oxide alloy (In ₂ O _Three -ZnO), zinc oxide (ZnO) or the like. In order to reduce the resistance of the cathode, an auxiliary electrode may be provided over the insulator 216. The light-emitting element thus obtained emits white light. Note that although the example in which the layer 218 containing an organic compound is formed by an evaporation method is shown here, the layer is not particularly limited, and may be formed by a coating method (spin coating method, ink jet method, or the like).
[0110]
Further, in this embodiment, an example in which a layer made of a low molecular material is stacked as the organic compound layer is shown, but a layer made of a high molecular material and a layer made of a low molecular material may be stacked.
[0111]
Note that an active matrix light-emitting device having a TFT can have two structures in the light emission direction. One is a structure in which light emitted from the light-emitting element passes through the second electrode and enters the eyes of the observer. In the case where a structure in which light emitted from the light-emitting element passes through the second electrode and enters the eyes of an observer, the light-emitting element can be manufactured using the above-described process.
[0112]
In another structure, light emitted from the light emitting element passes through the first electrode and the substrate and enters the eyes of the observer. In the case where a structure in which light emitted from the light-emitting element passes through the first electrode and enters the eyes of the observer, the first electrode 217 is preferably formed using a light-transmitting material. For example, when the first electrode 217 is used as an anode, a transparent conductive film (ITO (indium tin oxide alloy), indium oxide zinc oxide alloy (In ₂ O _Three −ZnO), zinc oxide (ZnO), or the like, and an end portion is covered with an insulator (referred to as a bank, a partition, a barrier, a bank, or the like) 216, and then a layer 218 containing an organic compound is formed thereon. Metal film (MgAg, MgIn, AlLi, CaF ₂ And a second electrode 219 made of an alloy such as CaN, or a film formed by co-evaporation of an element belonging to Group 1 or 2 of the periodic table and aluminum. In forming the cathode, a resistance heating method by vapor deposition may be used, and the cathode may be selectively formed using a vapor deposition mask.
[0113]
After the formation up to the second electrode 219 through the above steps, a sealing substrate is bonded to the light-emitting element formed over the substrate 200 with a sealant.
[0114]
In this embodiment, the top gate type TFT is described as an example. However, the present invention can be applied regardless of the TFT structure. For example, the present invention can be applied to a bottom gate type (reverse stagger type) TFT or a forward stagger type TFT. Is possible.
[0115]
For example, in the bottom gate type, as shown in FIG. 19, a base insulating film 51, a gate electrode 52, a gate insulating film 53, a semiconductor film 54 having an impurity region and a channel formation region, and an interlayer insulating film 55 are formed on a substrate 50. Then, contact holes are formed in the interlayer insulating film at positions corresponding to the impurity regions, and source / drain wirings 56 are formed in the contact holes. Similarly to FIG. 10, the first electrode 57 covering the end of the source / drain wiring, the insulating film 58 covering the end of the first electrode, the protective film 59 covering the insulating film, the layer 60 having an organic compound, A second electrode 61 is formed. In FIG. 19, since an inorganic material is used for the interlayer insulating film 55 and an organic material is used for the insulating film 58, an insulating film containing nitrogen such as silicon nitride is provided as a protective film 59 covering the insulating film.
[0116]
In the case where such a bottom gate type is used for a TFT having an amorphous semiconductor film, a crystallization process is unnecessary, so that a material such as aluminum having low heat resistance can be used for the gate electrode.
[0117]
Next, an overall external view of the active matrix light-emitting device will be described with reference to FIG. 11A is a top view illustrating the light-emitting device, and FIG. 11B is a cross-sectional view taken along line AA ′ in FIG. 11A. A source side driver circuit 1101, a pixel portion 1102, and a gate side driver circuit 1103 are provided over a substrate 1110. Further, a space 1107 is formed on the inner side surrounded by the sealing substrate 1104, the sealant 1105, and the substrate 1110.
[0118]
Note that a wiring 1108 for transmitting a signal input to the source side driver circuit 1101 and the gate side driver circuit 1103 receives a video signal and a clock signal from an FPC (flexible printed circuit) 1109 serving as an external input terminal. Although only the FPC is shown here, a printed wiring board (PWB) may be attached to the FPC. The light-emitting device in this specification includes not only a light-emitting device body but also a state in which an FPC or a PWB is attached thereto.
[0119]
Next, a cross-sectional structure is described with reference to FIG. A driver circuit and a pixel portion are formed over the substrate 1110. Here, a source side driver circuit 1101 and a pixel portion 1102 are shown as the driver circuits.
[0120]
Note that the source side driver circuit 1101 is a CMOS circuit in which an n-channel TFT 1123 and a p-channel TFT 1124 are combined. Further, the TFT forming the driver circuit may be formed of a CMOS circuit, a PMOS circuit, or an NMOS circuit. Further, in this embodiment, a driver integrated type in which a drive circuit is formed on a substrate is shown, but this is not always necessary, and it can be formed outside the substrate.
[0121]
The pixel portion 1102 is formed by a plurality of pixels including a switching TFT 1111, a current control TFT 1112, and a first electrode (anode) 1113 electrically connected to the drain thereof.
[0122]
In addition, insulating films 1114 are formed on both ends of the first electrode (anode) 1113, and a layer 1115 containing an organic compound is formed on the first electrode (anode) 1113. The layer 1115 containing an organic compound is formed by moving the evaporation source holder in accordance with the insulating film 1114 using the evaporation apparatus described in Embodiments 1 and 2. Further, a second electrode (cathode) 1116 is formed over the layer 1115 containing an organic compound. Thus, a light-emitting element 1118 including the first electrode (anode) 1112, the layer 1115 containing an organic compound, and the second electrode (cathode) 1116 is formed. Here, since the light-emitting element 1118 emits white light, a colored layer, for example, a color filter 1131 and a light-blocking layer (BM) 1132 (for the sake of simplicity, an overcoat layer is not shown here) is provided. As shown in FIG. 18, a color filter or a color filter and a color conversion layer may be provided on the white light-emitting element, or a color conversion layer and a color filter may be provided so as to overlap each other. A color conversion layer may be provided.
[0123]
Note that FIG. 18 illustrates a structure in which light emitted from the light-emitting element passes through the second electrode and enters the eyes of the observer. Therefore, the color filter is disposed on the sealing substrate side 1104, but the light emitted from the light-emitting element. In the case of a structure that passes through the first electrode and enters the observer's eyes, the color filter may be disposed on the substrate 1110 side.
[0124]
The second electrode (cathode) 1116 also functions as a wiring common to all pixels, and is electrically connected to the FPC 1109 through the connection wiring 1108. In addition, a third electrode (auxiliary electrode) 1117 is formed over the insulating film 1114, and the resistance of the second electrode is reduced.
[0125]
In addition, the sealing substrate 1104 is attached to the light emitting element 1118 formed over the substrate 1110 with a sealant 1105. Note that a spacer made of a resin film may be provided in order to secure a space between the sealing substrate 1104 and the light-emitting element 1118. The space 1107 inside the sealing agent 1105 is filled with an inert gas such as nitrogen. Note that an epoxy resin is preferably used as the sealant 1105. The sealing agent 1105 is preferably a material that does not transmit moisture and oxygen as much as possible. Furthermore, a substance having an effect of absorbing oxygen and water may be contained in the space 1107.
[0126]
In this embodiment, a plastic substrate made of FRP (Fiberglass-Reinforced Plastics), PVF (polyvinyl fluoride), Mylar, polyester, acrylic, or the like is used as a material constituting the sealing substrate 1104 in addition to a glass substrate or a quartz substrate. be able to. In addition, after the sealing substrate 1104 is bonded using the sealing agent 1105, the sealing substrate 1104 can be further sealed with a sealing agent so as to cover the side surface (exposed surface).
[0127]
By encapsulating the light-emitting element as described above, the light-emitting element can be completely blocked from the outside, and a substance that promotes deterioration of the organic compound layer such as moisture and oxygen can be prevented from entering from the outside. Therefore, a highly reliable light-emitting device can be obtained.
[0128]
Further, this embodiment can be freely combined with Embodiment Modes 1 to 3.
[0129]
(Example 2)
In this embodiment, an example of a multi-chamber manufacturing apparatus in which the production from the first electrode to sealing is fully automated is shown in FIG.
[0130]
FIG. 12 shows gates 100a to 100x, a preparation chamber 101, a take-out chamber 119, transfer chambers 102, 104a, 108, 114, 118, delivery chambers 105, 107, 111, and film formation chambers 106R, 106B, 106G. , 106H, 106E, 109, 110, 112, 113, installation chambers 126R, 126G, 126B, 126E, 126H for installing the evaporation source, pretreatment chamber 103, sealing substrate load chamber 117, and sealing chamber 116. And a multi-chamber manufacturing apparatus having cassette chambers 111a and 111b, a tray mounting stage 121, a cleaning chamber 122, a bake chamber 123, and a mask stock chamber 124.
[0131]
Hereinafter, a procedure for manufacturing a light-emitting device by loading a substrate on which a thin film transistor, an anode, and an insulator covering an end portion of the anode are provided in advance into the manufacturing apparatus illustrated in FIG.
[0132]
First, the substrate is set in the cassette chamber 120a or the cassette chamber 120b. When the substrate is a large substrate (for example, 300 mm × 360 mm), it is set in the cassette chamber 120a or 120b. When the substrate is a normal substrate (for example, 127 mm × 127 mm), the substrate is transferred to the tray mounting stage 121 and the tray (for example, 300 mm) A plurality of substrates are set to × 360 mm).
[0133]
Next, a substrate provided with a plurality of thin film transistors and an anode and an insulator covering the end of the anode is transferred to the transfer chamber 118 and further transferred to the cleaning chamber 122, where impurities (such as fine particles) on the substrate surface are removed with the solution. Remove. When cleaning is performed in the cleaning chamber 122, the substrate is set with the film formation surface facing downward under atmospheric pressure. Subsequently, in order to dry, it conveys to the baking chamber 123, and heats, and a solution is evaporated.
[0134]
Next, the film is transferred to the film formation chamber 112, and an organic compound layer serving as a hole injection layer is formed on the entire surface over a substrate provided with a plurality of thin film transistors and an anode and an insulator covering an end portion of the anode in advance. . In this example, copper phthalocyanine (CuPc) was deposited to a thickness of 20 nm. In the case of forming PEDOT as the hole injection layer, a spin coater may be provided in the deposition chamber 112 and formed by a spin coating method. Note that in the case where an organic compound layer is formed by a spin coating method in the film formation chamber 112, the film formation surface of the substrate is set upward at atmospheric pressure. At this time, after film formation using water or an organic solvent as a solvent is performed, the film is transferred to a baking chamber 123 for baking, and heat treatment in vacuum is performed to vaporize moisture.
[0135]
Next, the substrate is transferred from the transfer chamber 118 provided with the substrate transfer mechanism to the preparation chamber 101. In the manufacturing apparatus of this embodiment, the preparation chamber 101 is provided with a substrate reversing mechanism, and the substrate can be reversed appropriately. The charging chamber 101 is connected to a vacuum evacuation treatment chamber, and after evacuating, it is preferable to introduce an inert gas to an atmospheric pressure.
[0136]
Next, the material is transferred to a transfer chamber 102 connected to the preparation chamber 101. It is preferable to maintain a vacuum by evacuating in advance so that moisture and oxygen do not exist in the transfer chamber 102 as much as possible.
[0137]
The vacuum evacuation chamber is provided with a magnetic levitation turbo molecular pump, a cryopump, or a dry pump. As a result, the ultimate vacuum of the transfer chamber connected to the preparation chamber is reduced to 10 ^-Five -10 ^-6 Pa can be set, and the back diffusion of impurities from the pump side and the exhaust system can be controlled. In order to prevent impurities from being introduced into the apparatus, an inert gas such as nitrogen or a rare gas is used as the introduced gas. These gases introduced into the apparatus are those purified by a gas purifier before being introduced into the apparatus. Therefore, it is necessary to provide a gas purifier so that the gas is introduced into the vapor deposition apparatus after being highly purified. Thereby, oxygen, water, and other impurities contained in the gas can be removed in advance, so that these impurities can be prevented from being introduced into the apparatus.
[0138]
In addition, when it is desired to remove a film containing an organic compound formed in an unnecessary place, the film may be transferred to the pretreatment chamber 103 and the organic compound film stack may be selectively removed using a metal mask. The pretreatment chamber 103 has plasma generating means, and performs dry etching by exciting one or more gases selected from Ar, H, F, and O to generate plasma. In order to remove moisture and other gases contained in the substrate, annealing for deaeration is preferably performed in a vacuum, and is transferred to a pretreatment chamber 103 connected to the transfer chamber 102, where annealing is performed. You may go.
[0139]
Next, the substrate is transferred from the transfer chamber 102 to the delivery chamber 105 and from the delivery chamber 105 to the transfer chamber 104a without being exposed to the atmosphere. Then, on the hole injection layer (CuPc) provided on the entire surface, an organic compound layer made of a low molecule to be a hole transport layer or a light emitting layer is formed. As the entire light emitting element, an organic compound layer that emits light of a single color (specifically, white) or full color (specifically, red, green, and blue) can be formed. In this embodiment, red, green, An example in which an organic compound layer that emits blue light is formed in each of the film formation chambers 106R, 106G, and 106B by an evaporation method will be described.
[0140]
First, the film formation chambers 106R, 106G, and 106B will be described. In each of the film formation chambers 106R, 106G, and 106B, the movable vapor deposition source holder described in the first and second embodiments is installed. A plurality of vapor deposition source holders are prepared, the first vapor deposition source holder has an EL material that forms a hole transport layer of each color, the second vapor deposition source holder has an EL material that forms a light emitting layer of each color, The third vapor deposition source holder is filled with an EL material for forming an electron transport layer of each color, and the fourth vapor deposition source holder is filled with an EL material for forming an electron injection layer of each color. 106G and 106B.
[0141]
Installation in each of these film formation chambers uses the manufacturing system described in Embodiment 3 and directly installs a container (typically a crucible) in which an EL material is stored in advance by a material manufacturer in the film formation chamber. Is preferred. Furthermore, it is preferable that the installation is performed without touching the atmosphere. When the material is transferred from the material manufacturer, the crucible is preferably introduced into the film formation chamber while being sealed in the second container. Desirably, the installation chambers 126R, 126G, and 126B having vacuum exhaust means connected to the film formation chambers 106R, 106G, and 106B are set to a vacuum or an inert gas atmosphere, in which the crucible is taken out from the second container, A crucible is installed in the deposition chamber. By doing so, the crucible and the EL material housed in the crucible can be prevented from contamination.
[0142]
Next, the film forming process will be described. First, the metal mask stored in the mask stock chamber 124 is transferred to the film forming chamber 106R and installed. Then, a hole transport layer is formed using a mask. In this example, α-NPD was deposited to 60 nm. Thereafter, using the same mask, a red light emitting layer is formed, and then an electron transport layer and an electron injection layer are formed. In this example, Alq to which DCM is added as the light emitting layer _Three Of 40 nm and Alq as the electron transport layer _Three Of 40 nm and CaF as an electron injection layer ₂ Was deposited to 1 nm.
[0143]
Specifically, in the film formation chamber 106R, a first vapor deposition source holder in which an EL material for a hole transport layer is disposed and a second vapor deposition source holder in which an EL material for a light emitting layer is disposed in a state where a mask is disposed. Then, the third vapor deposition source holder in which the EL material for the electron transport layer is installed and the fourth vapor deposition source holder in which the electron injection layer is installed are sequentially moved to form a film. Further, the organic compound is vaporized by resistance heating at the time of film formation, and at the time of film formation, the shutter (not shown) provided in the vapor deposition source holder is opened and scattered in the direction of the substrate. The vaporized organic compound scatters upward, and is deposited on a substrate through an opening (not shown) provided in a metal mask (not shown) provided as appropriate.
[0144]
In this manner, a light emitting element that emits red light (from a hole transport layer to an electron injection layer) can be formed in one film formation chamber without opening to the atmosphere. Note that the layers to be continuously formed in one film formation chamber are not limited to the hole transport layer to the electron injection layer, and may be appropriately set by the practitioner.
[0145]
Then, the substrate over which the red light emitting element is formed is transferred to the film formation chamber 106G by the transfer mechanism 104b. A metal mask stored from the mask stock chamber 124 is transferred to the film forming chamber 106G and installed. The mask may be a mask obtained when a red light emitting element is formed. Then, a hole transport layer is formed using a mask. In this example, α-NPD was deposited to 60 nm. Thereafter, using the same mask, a green light emitting layer is formed, and then an electron transport layer and an electron injection layer are formed. In this example, Alq to which DMQD is added as the light emitting layer is used. _Three Of 40 nm and Alq as the electron transport layer _Three Of 40 nm and CaF as an electron injection layer ₂ Was deposited to 1 nm.
[0146]
Specifically, in the film formation chamber 106G, a first vapor deposition source holder in which an EL material for a hole transport layer is disposed and a second vapor deposition source holder in which an EL material for a light emitting layer is disposed in a state where a mask is disposed. Then, the third vapor deposition source holder in which the EL material for the electron transport layer is installed and the fourth vapor deposition source holder in which the electron injection layer is installed are sequentially moved to form a film. Further, the organic compound is vaporized by resistance heating at the time of film formation, and at the time of film formation, the shutter (not shown) provided in the vapor deposition source holder is opened and scattered in the direction of the substrate. The vaporized organic compound scatters upward, and is deposited on a substrate through an opening (not shown) provided in a metal mask (not shown) provided as appropriate.
[0147]
In this manner, a light emitting element that emits green light (from a hole transport layer to an electron injection layer) can be formed in one film formation chamber without opening to the atmosphere. Note that the layers to be continuously formed in one film formation chamber are not limited to the hole transport layer to the electron injection layer, and may be appropriately set by the practitioner.
[0148]
Then, the substrate over which the green light emitting element is formed is transferred to the film formation chamber 106B by the transfer mechanism 104b. A metal mask stored from the mask stock chamber 124 is transferred to the film forming chamber 106B and installed. The mask may be a mask obtained when a red or green light emitting element is formed. Then, films functioning as a hole transport layer and a blue light-emitting layer are formed using a mask. In this example, α-NPD was deposited to 60 nm. Thereafter, using the same mask, a blocking layer is formed, and then an electron transport layer and an electron injection layer are formed. In this example, 10 nm of BCP is formed as a blocking layer, and Alq is formed as an electron transport layer. _Three Of 40 nm and CaF as an electron injection layer ₂ Was deposited to 1 nm.
[0149]
Specifically, in the film formation chamber 106B, the first vapor deposition source holder in which the EL material of the hole transport layer and the blue light emitting layer is installed, and the EL material of the blocking layer are installed in a state where the mask is installed. The second vapor deposition source holder, the third vapor deposition source holder in which the EL material for the electron transport layer is disposed, and the fourth vapor deposition source holder in which the electron injection layer is disposed are sequentially moved to form a film. Further, the organic compound is vaporized by resistance heating at the time of film formation, and at the time of film formation, the shutter (not shown) provided in the vapor deposition source holder is opened and scattered in the direction of the substrate. The vaporized organic compound scatters upward, and is deposited on a substrate through an opening (not shown) provided in a metal mask (not shown) provided as appropriate.
[0150]
In this manner, a light emitting element that emits green light (from a hole transport layer to an electron injection layer) can be formed in one film formation chamber without opening to the atmosphere. Note that the layers continuously formed in one film formation chamber are not limited to the hole transport layer to the electron injection layer, and may be set as appropriate by the practitioner.
[0151]
Note that the order of forming the respective colors is not limited to the present embodiment, and may be set as appropriate by the practitioner. Further, the hole transport layer, the electron transport layer, the electron injection layer, and the like can be shared by each color. For example, a hole injection layer or a hole transport layer common to red, green, and blue light-emitting elements is formed in the film formation chamber 106H, and light-emitting layers of each color are formed in the film formation chambers 106R, 106G, and 106B. An electron transport layer or an electron injection layer common to red, green, and blue light-emitting elements may be formed in the chamber 106E. It is also possible to form an organic compound layer that emits monochromatic (specifically, white) light emission in each film formation chamber.
[0152]
Note that it is possible to perform film formation at the same time in each of the film formation chambers 106R, 106G, and 106B. By sequentially moving the film formation chambers, a light-emitting element can be formed efficiently. improves. Furthermore, when a certain film formation chamber is under maintenance, each light emitting element can be formed in the remaining film formation chamber, and the throughput of the light emitting device is improved.
[0153]
When using the vapor deposition method, for example, the degree of vacuum is 5 × 10. ^-3 Torr (0.665 Pa) or less, preferably 10 ^-Four -10 ^-6 Vapor deposition is preferably performed in a film formation chamber evacuated to Pa.
[0154]
Next, after the substrate is transferred from the transfer chamber 104a to the delivery chamber 107, the substrate is transferred from the transfer chamber 107 to the transfer chamber 108 without being exposed to the atmosphere. The substrate is transferred to the film formation chamber 110 by a transfer mechanism installed in the transfer chamber 108, and is formed into a very thin metal film (an alloy such as MgAg, MgIn, AlLi, CaN, or the first or second group of the periodic table). A cathode (lower layer) made of a film formed by co-evaporation with an element belonging to aluminum is formed by vapor deposition using resistance heating. After forming a cathode (lower layer) made of a thin metal layer, it is transported to the film formation chamber 109 and is made of a transparent conductive film (ITO (indium tin oxide alloy), indium zinc oxide alloy (In ₂ O _Three A cathode (upper layer) made of (ZnO), zinc oxide (ZnO) or the like is formed, and a cathode made of a laminate of a thin metal layer and a transparent conductive film is appropriately formed.
[0155]
Through the above process, the light-emitting element having the stacked structure illustrated in FIG. 10 is formed.
[0156]
Next, the film is transferred from the transfer chamber 108 to the deposition chamber 113 without being exposed to the air, and a protective film formed of a silicon nitride film or a silicon nitride oxide film is formed. Here, a sputtering apparatus provided with a target made of silicon, a target made of silicon oxide, or a target made of silicon nitride in the film formation chamber 113 is used. For example, a silicon nitride film can be formed by using a target made of silicon and setting a film formation chamber atmosphere to a nitrogen atmosphere or an atmosphere containing nitrogen and argon.
[0157]
Next, the substrate on which the light-emitting element is formed is transferred from the transfer chamber 108 to the delivery chamber 111 without being exposed to the atmosphere, and further transferred from the delivery chamber 111 to the transfer chamber 114. Next, the substrate over which the light-emitting element is formed is transferred from the transfer chamber 114 to the sealing chamber 116. Note that a sealing substrate provided with a sealant is preferably prepared in the sealing chamber 116.
[0158]
The sealing substrate is prepared by being set in the sealing substrate load chamber 117 from the outside. Note that it is preferable to perform annealing in advance in vacuum, for example, in the sealing substrate load chamber 117 in order to remove impurities such as moisture. In the case of forming a sealing material to be attached to a substrate provided with a light-emitting element over the sealing substrate, the sealing chamber is set to atmospheric pressure, and then the sealing substrate is loaded into the sealing substrate load chamber and the transfer chamber 114. And a sealing substrate on which the sealing material is formed is transferred to the sealing chamber 116. Note that a desiccant may be provided on the sealing substrate in the sealing substrate load chamber.
[0159]
Next, in order to degas the substrate provided with the light-emitting element, after annealing in a vacuum or an inert atmosphere, the sealing substrate provided with the sealant and the substrate provided with the light-emitting element are attached. Match. The sealed space is filled with nitrogen or an inert gas. Note that here, an example in which the sealing material is formed over the sealing substrate is described; however, there is no particular limitation, and the sealing material may be formed over the substrate over which the light-emitting element is formed.
[0160]
Next, the pair of bonded substrates is irradiated with UV light by an ultraviolet irradiation mechanism provided in the sealing chamber 116 to cure the sealing material. In addition, although ultraviolet curable resin was used here as a sealing material, if it is an adhesive material, it will not specifically limit.
[0161]
Next, the pair of bonded substrates is transferred from the sealing chamber 116 to the transfer chamber 114 and then transferred from the transfer chamber 114 to the take-out chamber 119 and taken out.
[0162]
As described above, by using the manufacturing apparatus illustrated in FIG. 12, it is not necessary to expose the light-emitting element to the atmosphere until the light-emitting element is completely enclosed in the sealed space, so that a highly reliable light-emitting device can be manufactured. Note that in the transfer chamber 114, vacuum and a nitrogen atmosphere at atmospheric pressure are repeated, but it is desirable that the transfer chambers 102, 104a, and 108 are always kept in vacuum.
[0163]
An in-line manufacturing apparatus can also be used.
[0164]
In addition, it is also possible to carry a transparent conductive film as an anode into the manufacturing apparatus shown in FIG. 12 to form a light emitting element having a direction opposite to the light emitting direction by the stacked structure.
[0165]
In addition, this embodiment can be freely combined with Embodiment Modes 1 to 3 and Embodiment 1.
[0166]
(Example 3)
In this example, FIG. 13 shows an example of a multi-chamber manufacturing apparatus in which the production from the first electrode to the sealing different from Example 2 is fully automated.
[0167]
FIG. 13 shows gates 100a to 100s, take-out chamber 119, transfer chambers 104a, 108, 114, and 118, delivery chambers 105 and 107, preparation chamber 101, first film formation chamber 106A, and second film formation. A chamber 106B, a third film formation chamber 106C, a fourth film formation chamber 106D, other film formation chambers 109a, 109b, 113a, 113b, processing chambers 120a, 120b, an installation chamber 126A for installing a deposition source, 126B, 126C, 126D, pretreatment chambers 103a, 103b, first sealing chamber 116a, second sealing chamber 116b, first stock chamber 130a, second stock chamber 130b, cassette chambers 111a, 111b, This is a multi-chamber manufacturing apparatus having a tray mounting stage 121 and a cleaning chamber 122.
[0168]
Hereinafter, a procedure for manufacturing a light-emitting device by loading a substrate provided with a thin film transistor and an anode and an insulator covering an end portion of the anode in advance into the manufacturing apparatus shown in FIG. 13 will be described.
[0169]
First, the substrate is set in the cassette chamber 111a or the cassette chamber 111b. When the substrate is a large substrate (for example, 300 mm × 360 mm), it is set in the cassette chamber 111a or 111b. When the substrate is a normal substrate (for example, 127 mm × 127 mm), it is transported to the tray mounting stage 121, and the tray (for example, 300 mm) A plurality of substrates are set to × 360 mm).
[0170]
Next, a substrate provided with a plurality of thin film transistors and an anode and an insulator covering the end of the anode is transferred to the transfer chamber 118 and further transferred to the cleaning chamber 122, and impurities (such as fine particles) on the substrate surface are removed with the solution. Remove. When cleaning is performed in the cleaning chamber 122, the substrate is set with the film-forming surface of the substrate facing downward under atmospheric pressure.
[0171]
In addition, when it is desired to remove a film containing an organic compound formed in an unnecessary place, the film may be transferred to the pretreatment chamber 103 and the stack of organic compound films may be selectively removed. The pretreatment chamber 103 has plasma generating means, and performs dry etching by exciting one or more gases selected from Ar, H, F, and O to generate plasma. Further, in order to remove moisture and other gases contained in the substrate and to reduce plasma damage, it is preferable to perform annealing in a vacuum, which is transferred to the pretreatment chamber 103 where annealing (for example, UV irradiation) is performed. You may go. In addition, in order to remove moisture and other gases contained in the organic resin material, the substrate may be heated in a reduced pressure atmosphere in the pretreatment chamber 103.
[0172]
Next, the substrate is transferred from the transfer chamber 118 provided with the substrate transfer mechanism to the preparation chamber 101. In the manufacturing apparatus of this embodiment, the preparation chamber 101 is provided with a substrate reversing mechanism, and the substrate can be reversed appropriately. The charging chamber 101 is connected to a vacuum evacuation treatment chamber, and after evacuating, it is preferable to introduce an inert gas to an atmospheric pressure.
[0173]
Next, the material is transferred to a transfer chamber 104 a connected to the preparation chamber 101. It is preferable to maintain a vacuum by evacuating in advance so that moisture and oxygen do not exist in the transfer chamber 104a as much as possible.
[0174]
The vacuum evacuation chamber is provided with a magnetic levitation turbo molecular pump, a cryopump, or a dry pump. As a result, the ultimate vacuum of the transfer chamber connected to the preparation chamber is reduced to 10 ^-Five -10 ^-6 Pa can be set, and the back diffusion of impurities from the pump side and the exhaust system can be controlled. In order to prevent impurities from being introduced into the apparatus, an inert gas such as nitrogen or a rare gas is used as the introduced gas. These gases introduced into the apparatus are those purified by a gas purifier before being introduced into the apparatus. Therefore, it is necessary to provide a gas purifier so that the gas is introduced into the vapor deposition apparatus after being highly purified. Thereby, oxygen, water, and other impurities contained in the gas can be removed in advance, so that these impurities can be prevented from being introduced into the apparatus.
[0175]
Next, the substrate is transferred from the transfer chamber 104a to the first to fourth film formation chambers 106A to 106D. And the organic compound layer which consists of a low molecule used as a positive hole injection layer, a positive hole transport layer, and a light emitting layer is formed.
[0176]
An organic compound layer that emits light of a single color (specifically, white) or full color (specifically, red, green, and blue) can be formed as the entire light-emitting element. An example will be described in which an organic compound layer is formed simultaneously in each of the film formation chambers 106A, 106B, 106C, and 106D. Note that the simultaneous film formation here means that film formation is performed almost simultaneously in each film formation chamber, and the film formation process is performed substantially in parallel (or in parallel). It means being called.
[0177]
The organic compound layer that emits white light is a three-wavelength type containing three primary colors of red, green, and blue, and blue / yellow or blue-green / orange when the light-emitting layers having different emission colors are stacked. In this embodiment, an example in which a white light emitting element is obtained using this three-wavelength type will be described.
[0178]
First, the film forming chambers 106A, 106B, 106C, and 106D will be described. The movable vapor deposition source holder described in Embodiment Mode 1 is installed in each of the film formation chambers 106A, 106B, 106C, and 106D. A plurality of vapor deposition source holders are prepared, aromatic diamine (TPD) that forms a white light emitting layer in the first vapor deposition source holder, p-EtTAZ that forms a white light emitting layer in the second vapor deposition source holder, Alq for forming a white light emitting layer in the third vapor deposition source holder _Three , Alq for forming a white light emitting layer on the fourth evaporation source holder _Three EL material added with NileRed, a red luminescent dye, and Alq for the fifth evaporation source holder _Three Is placed in each film forming chamber in this state.
[0179]
The EL system is preferably installed in these film formation chambers by using the manufacturing system described in Embodiment Mode 3. That is, it is preferable to form a film using a container (typically a crucible) in which an EL material is stored in advance by a material manufacturer. Further, it is preferable that the installation is performed without touching the atmosphere. When the material is transferred from the material manufacturer, the crucible is preferably introduced into the film formation chamber while being sealed in the second container. Desirably, the installation chambers 126A, 126B, 126C, and 126D having vacuum evacuation means connected to the respective film formation chambers 106A, 106B, 106C, and 106D are set to a vacuum or an inert gas atmosphere. And place a crucible in the film formation chamber. By doing so, the crucible and the EL material housed in the crucible can be prevented from contamination. Note that a metal mask can be stocked in the installation chambers 126A, 126B, 126C, and 126D.
[0180]
Next, the film forming process will be described. In the film formation chamber 106A, a mask is transferred and installed from the installation chamber as necessary. Thereafter, the first to fifth vapor deposition source holders start moving in order, and vapor deposition is performed on the substrate. Specifically, TPD is sublimated from the first vapor deposition source holder by heating and vapor deposited on the entire surface of the substrate. Thereafter, p-EtTAZ is sublimated from the second vapor deposition source holder, and Alq from the third vapor deposition source holder. _Three Is sublimated and Alq is removed from the fourth evaporation source holder. _Three : NileRed is sublimated, Alq from the fifth evaporation source holder _Three Is sublimated and deposited on the entire surface of the substrate.
[0181]
When using the vapor deposition method, for example, the degree of vacuum is 5 × 10. ^-3 Torr (0.665 Pa) or less, preferably 10 ^-Four -10 ^-6 Vapor deposition is preferably performed in a film formation chamber evacuated to Pa.
[0182]
Note that the evaporation source holder in which each EL material is installed is provided in each film formation chamber, and vapor deposition is similarly performed in the film formation chambers 106B to 106D. That is, it becomes possible to perform the film forming process in parallel. Therefore, even if a certain film formation chamber performs maintenance or cleaning, film formation processing can be performed in the remaining film formation chambers, and the film formation tact time can be improved, and thus the throughput of the light emitting device can be improved.
[0183]
Next, after the substrate is transferred from the transfer chamber 104a to the delivery chamber 105, the substrate is transferred from the transfer chamber 105 to the transfer chamber 108 without being exposed to the atmosphere.
[0184]
Next, the substrate is transferred to the film formation chamber 109a or the film formation chamber 109b by a transfer mechanism installed in the transfer chamber 108 to form a cathode. This cathode is a very thin metal film (an alloy such as MgAg, MgIn, AlLi, CaN, or the like, or an element belonging to Group 1 or 2 of the periodic table and co-deposited with aluminum formed by an evaporation method using resistance heating. Cathode (lower layer) formed by a sputtering method, a transparent conductive film (ITO (indium tin oxide alloy), indium zinc oxide alloy (In ₂ O _Three (ZnO), zinc oxide (ZnO), or the like) and a laminated film. Therefore, it is preferable to arrange a film forming chamber for forming a thin metal film in this manufacturing apparatus.
[0185]
Through the above process, the light-emitting element having the stacked structure illustrated in FIG. 10 is formed.
[0186]
Next, the protective film made of a silicon nitride film or a silicon nitride oxide film is formed by being transferred from the transfer chamber 108 to the deposition chamber 113a or the deposition chamber 113b without being exposed to the air. Here, a target made of silicon, a target made of silicon oxide, or a target made of silicon nitride is provided in the film formation chamber 113a or 113b. For example, a silicon nitride film can be formed by using a target made of silicon and setting a film formation chamber atmosphere to a nitrogen atmosphere or an atmosphere containing nitrogen and argon.
[0187]
Next, the substrate over which the light-emitting element is formed is transferred from the transfer chamber 108 to the delivery chamber 107 without being exposed to the atmosphere, and further transferred from the delivery chamber 107 to the transfer chamber 114.
[0188]
Next, the substrate over which the light-emitting element is formed is transferred from the transfer chamber 114 to the processing chamber 120a or the processing chamber 120b. In the processing chamber 120a or 120b, a sealing material is formed on the substrate. In this embodiment, an ultraviolet curable resin is used as the sealing material, but it is not particularly limited as long as it is an adhesive. Note that the sealant is preferably formed after the processing chambers 120a and 120b are at atmospheric pressure. Then, the substrate on which the sealing material is formed is transferred to the first sealing chamber 116a and the second sealing chamber 116b through the transfer chamber 114.
[0189]
Then, the sealing substrate on which the color filter, the light shielding layer (BM), and the overcoat layer are formed is conveyed to the first stock chamber 130a and the second stock chamber 130b. Further, instead of a color filter, a layer in which a color filter and a color conversion layer are laminated or a color conversion layer may be provided as shown in FIG. Thereafter, the sealing substrate is transferred to the first sealing chamber 130a or the second sealing chamber 130b.
[0190]
Next, annealing is performed in a vacuum or an inert atmosphere to degas the substrate on which the light-emitting element is provided, and then the substrate on which the sealing material is provided and the substrate on which a color filter or the like is formed are bonded to each other. . The sealed space is filled with nitrogen or an inert gas. Although an example in which the sealing material is formed on the substrate is shown here, the sealing material may be formed on the sealing substrate without any particular limitation. That is, a color filter, a light shielding layer (BM), an overcoat layer, and a sealing material may be formed on the sealing substrate and then transferred to the first stock chamber 130a and the second stock chamber 130b.
[0191]
Next, the sealing material is cured by irradiating the pair of bonded substrates with UV light by an ultraviolet irradiation mechanism provided in the first sealing chamber 116a or the second sealing chamber 116b.
[0192]
Next, the pair of bonded substrates is transferred from the sealing chamber 116 to the transfer chamber 114 and then transferred from the transfer chamber 114 to the take-out chamber 119 and taken out.
[0193]
As described above, by using the manufacturing apparatus illustrated in FIG. 13, it is not necessary to expose the light-emitting element to the atmosphere until the light-emitting element is completely enclosed in the sealed space, so that a highly reliable light-emitting device can be manufactured. Note that in the transfer chamber 114, vacuum and a nitrogen atmosphere at atmospheric pressure are repeated, but it is desirable that the transfer chambers 102, 104a, and 108 are always kept in vacuum.
[0194]
An in-line manufacturing apparatus can also be used.
[0195]
Further, it is also possible to carry a transparent conductive film as an anode into the manufacturing apparatus shown in FIG. 13 to form a light emitting element having a direction opposite to the light emitting direction by the laminated structure.
[0196]
FIG. 15 shows an example of a manufacturing apparatus different from FIG. Since the film formation may be performed in the same manner as in FIG. 13, a detailed film formation process is omitted, but the difference in the configuration of the manufacturing apparatus is that a delivery chamber 111 and a transfer chamber 117 are additionally provided. Two sealing chambers 116b, a second stock chamber 130b, and film formation chambers (seal formation) 120c and 120d are provided. That is, in FIG. 15, since all the film formation chambers, sealing chambers, and stock chambers are directly connected to a certain transfer chamber, the transfer can be performed efficiently, and the light emitting device can be manufactured in parallel. The throughput of the apparatus is improved.
[0197]
Further, the parallel processing method of the light emitting device of this embodiment can be combined with the second embodiment. That is, a plurality of film formation chambers 106R, 106G, and 106B may be provided to perform the film formation process.
[0198]
This embodiment can be freely combined with the embodiment mode and embodiment 1.
[0199]
(Example 4)
As an electronic device using the light emitting device of the present invention, a video camera, a digital camera, a goggle type display (head mounted display), a navigation system, a sound reproduction device (car audio, audio component, etc.), a notebook type personal computer, a game device, A portable information terminal (mobile computer, cellular phone, portable game machine, electronic book, or the like), an image reproducing apparatus (specifically, a digital versasatile disc (DVD) or the like) provided with a recording medium, A device having a display capable of displaying). In particular, it is desirable to use a light-emitting device for a portable information terminal that often has an opportunity to see a screen from an oblique direction because the wide viewing angle is important. Specific examples of these electronic devices are shown in FIGS.
[0200]
FIG. 16A illustrates a light-emitting device, which includes a housing 2001, a support base 2002, a display portion 2003, a speaker portion 2004, a video input terminal 2005, and the like. The light emitting device of the present invention can be used for the display portion 2003. Further, according to the present invention, the light-emitting device shown in FIG. Since the light-emitting device is a self-luminous type, a backlight is not necessary and a display portion thinner than a liquid crystal display can be obtained. The light emitting device includes all information display light emitting devices such as a personal computer, a TV broadcast receiver, and an advertisement display.
[0201]
FIG. 16B illustrates a digital still camera, which includes a main body 2101, a display portion 2102, an image receiving portion 2103, operation keys 2104, an external connection port 2105, a shutter 2106, and the like. The light emitting device of the present invention can be used for the display portion 2102. In addition, the digital still camera shown in FIG. 16B is completed by the present invention.
[0202]
FIG. 16C illustrates a laptop personal computer, which includes a main body 2201, a housing 2202, a display portion 2203, a keyboard 2204, an external connection port 2205, a pointing mouse 2206, and the like. The light-emitting device of the present invention can be used for the display portion 2203. Further, according to the present invention, the light-emitting device shown in FIG. 16C is completed.
[0203]
FIG. 16D illustrates a mobile computer, which includes a main body 2301, a display portion 2302, a switch 2303, operation keys 2304, an infrared port 2305, and the like. The light emitting device of the present invention can be used for the display portion 2302. Further, according to the present invention, the mobile computer shown in FIG. 16D is completed.
[0204]
FIG. 16E illustrates a portable image reproducing device (specifically, a DVD reproducing device) provided with a recording medium, which includes a main body 2401, a housing 2402, a display portion A 2403, a display portion B 2404, and a recording medium (DVD or the like). A reading unit 2405, operation keys 2406, a speaker unit 2407, and the like are included. Although the display portion A 2403 mainly displays image information and the display portion B 2404 mainly displays character information, the light-emitting device of the present invention can be used for the display portions A, B 2403, and 2404. Note that an image reproducing device provided with a recording medium includes a home game machine and the like. Further, according to the present invention, the DVD reproducing apparatus shown in FIG.
[0205]
FIG. 16F illustrates a goggle type display (head mounted display), which includes a main body 2501, a display portion 2502, and an arm portion 2503. The light emitting device of the present invention can be used for the display portion 2502. In addition, the goggle type display shown in FIG. 16F is completed by the present invention.
[0206]
FIG. 16G illustrates a video camera, which includes a main body 2601, a display portion 2602, a housing 2603, an external connection port 2604, a remote control receiving portion 2605, an image receiving portion 2606, a battery 2607, an audio input portion 2608, operation keys 2609, and the like. . The light-emitting device of the present invention can be used for the display portion 2602. Further, according to the present invention, the video camera shown in FIG. 16G is completed.
[0207]
Here, FIG. 16H shows a cellular phone, which includes a main body 2701, a housing 2702, a display portion 2703, an audio input portion 2704, an audio output portion 2705, operation keys 2706, an external connection port 2707, an antenna 2708, and the like. The light emitting device of the present invention can be used for the display portion 2703. Note that the display portion 2703 can suppress current consumption of the mobile phone by displaying white characters on a black background. In addition, the mobile phone shown in FIG. 16H is completed by the present invention.
[0208]
If the emission luminance of the luminescent material is increased in the future, the light including the output image information can be enlarged and projected by a lens or the like to be used for a front type or rear type projector.
[0209]
In addition, the electronic devices often display information distributed through electronic communication lines such as the Internet and CATV (cable television), and in particular, opportunities to display moving image information are increasing. Since the response speed of the light emitting material is very high, the light emitting device is preferable for displaying moving images.
[0210]
【The invention's effect】
By this invention, the distance of a board | substrate and a vapor deposition source holder can be shortened, and size reduction of a vapor deposition apparatus can be achieved. And since a vapor deposition apparatus becomes small, it is reduced that the sublimated vapor deposition material adheres to the inner wall in a film-forming chamber, or an adhesion shield, and can use a vapor deposition material effectively. Furthermore, in the vapor deposition method of the present invention, it is not necessary to rotate the substrate, so that it is possible to provide a vapor deposition apparatus that can handle a large area substrate.
[0211]
In addition, the present invention can provide a manufacturing apparatus in which a plurality of film forming chambers that perform vapor deposition are continuously arranged. In this manner, since the parallel processing is performed in the plurality of film formation chambers, the throughput of the light emitting device is improved.
[0212]
Furthermore, the present invention can provide a manufacturing system that enables a container in which a deposition material is sealed to be directly installed in a deposition apparatus without being exposed to the atmosphere. According to the present invention as described above, the handling of the vapor deposition material is facilitated, and the contamination of the vapor deposition material can be avoided. With such a manufacturing system, the container enclosed by the material manufacturer can be installed directly on the vapor deposition system, so that the vapor deposition material can prevent oxygen and water from adhering, and it is possible to cope with further ultra-high purity of the light emitting element in the future. It becomes.
[Brief description of the drawings]
FIG. 1 is a view showing a vapor deposition apparatus of the present invention.
FIG. 2 is a view showing a vapor deposition apparatus of the present invention.
FIG. 3 is a view showing a container of the present invention.
FIG. 4 is a view showing a container of the present invention.
FIG. 5 is a view showing a vapor deposition source holder according to the present invention.
FIG. 6 is a diagram showing a manufacturing system of the present invention.
FIG. 7 is a view showing a transport container according to the present invention.
FIG. 8 is a view showing a vapor deposition apparatus of the present invention.
FIG. 9 is a view showing a vapor deposition apparatus of the present invention.
FIG. 10 shows a light-emitting device of the present invention.
FIG. 11 shows a light-emitting device of the present invention.
FIG. 12 is a view showing a vapor deposition apparatus of the present invention.
FIG. 13 is a view showing a vapor deposition apparatus of the present invention.
FIG. 14 shows a vapor deposition apparatus.
FIG. 15 is a view showing a vapor deposition apparatus of the present invention.
FIG. 16 illustrates an example of an electronic device using the present invention.
FIG. 17 shows a vapor deposition apparatus of the present invention.
FIG. 18 shows a light-emitting device of the present invention.
FIG 19 shows a light-emitting device of the present invention.
FIG. 20 is a view showing a vapor deposition apparatus of the present invention.

Claims (2)

A first container enclosing a vapor deposition material;
Means for heating the first container;
A vapor deposition source holder for holding the first container and the heating means;
Means for moving the vapor deposition source holder in the X-axis direction and the Y-axis direction,
The vapor deposition source holder is moved in the Y-axis direction outside the substrate so that the vapor deposition material deposited by the first movement in the X-axis direction and the bottom of the vapor deposition material being vapor-deposited by the second movement in the X-axis direction overlap. And depositing a deposition material on the substrate by moving the deposition source holder in the X-axis direction at an end region of the substrate at a lower speed than the central region of the substrate . A first container enclosing a vapor deposition material;
First heating means for heating the first container;
A plate disposed above the opening of the first container;
Second heating means for heating surrounding the plate;
Having a gap between the plate and the second heating means;
And a vapor deposition source holder for holding the first container and the first and second heating means,
Means for moving the vapor deposition source holder in the X-axis direction and the Y-axis direction,
The vapor deposition source holder is moved in the Y-axis direction outside the substrate so that the vapor deposition material deposited by the first movement in the X-axis direction and the bottom of the vapor deposition material being vapor-deposited by the second movement in the X-axis direction overlap. And moving the deposition source holder in the end region of the substrate at a speed lower than the central region of the substrate in the X-axis direction ,
Moreover, the sublimation temperature (TA) of the vapor deposition material, the temperature (T2) at which the second heating means heats the plate, and the temperature (T1) at which the first heating means heats the first container. However, T1 is heated at a temperature higher than T2, and T2 is heated at a temperature higher than TA to deposit a deposition material on the substrate.

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