JP4305511B2 - 高温鉛フリーはんだおよび半導体素子収納用パッケージ - Google Patents
高温鉛フリーはんだおよび半導体素子収納用パッケージ Download PDFInfo
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- JP4305511B2 JP4305511B2 JP2006543117A JP2006543117A JP4305511B2 JP 4305511 B2 JP4305511 B2 JP 4305511B2 JP 2006543117 A JP2006543117 A JP 2006543117A JP 2006543117 A JP2006543117 A JP 2006543117A JP 4305511 B2 JP4305511 B2 JP 4305511B2
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- 229910000679 solder Inorganic materials 0.000 title claims description 71
- 239000004065 semiconductor Substances 0.000 title description 8
- 239000000956 alloy Substances 0.000 claims description 24
- 229910045601 alloy Inorganic materials 0.000 claims description 22
- 229910052737 gold Inorganic materials 0.000 claims description 11
- 239000000203 mixture Substances 0.000 claims description 10
- 229910052709 silver Inorganic materials 0.000 claims description 9
- 229910052718 tin Inorganic materials 0.000 claims description 8
- 229910052747 lanthanoid Inorganic materials 0.000 claims description 6
- 150000002602 lanthanoids Chemical class 0.000 claims description 6
- 229910052787 antimony Inorganic materials 0.000 claims description 5
- 229910052797 bismuth Inorganic materials 0.000 claims description 4
- 229910052738 indium Inorganic materials 0.000 claims description 4
- 238000007789 sealing Methods 0.000 claims 3
- 239000010931 gold Substances 0.000 description 18
- 229910015363 Au—Sn Inorganic materials 0.000 description 13
- 230000008018 melting Effects 0.000 description 9
- 238000002844 melting Methods 0.000 description 9
- 238000005476 soldering Methods 0.000 description 9
- 239000006023 eutectic alloy Substances 0.000 description 8
- 229910052802 copper Inorganic materials 0.000 description 4
- 230000005496 eutectics Effects 0.000 description 4
- 229910052751 metal Inorganic materials 0.000 description 4
- 239000000463 material Substances 0.000 description 3
- 239000002184 metal Substances 0.000 description 3
- 229910000851 Alloy steel Inorganic materials 0.000 description 2
- PNEYBMLMFCGWSK-UHFFFAOYSA-N Alumina Chemical compound [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 2
- 229910020816 Sn Pb Inorganic materials 0.000 description 2
- 229910020922 Sn-Pb Inorganic materials 0.000 description 2
- 229910008783 Sn—Pb Inorganic materials 0.000 description 2
- 229910052804 chromium Inorganic materials 0.000 description 2
- 229910052732 germanium Inorganic materials 0.000 description 2
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 2
- 239000003673 groundwater Substances 0.000 description 2
- 229910000765 intermetallic Inorganic materials 0.000 description 2
- 229910000833 kovar Inorganic materials 0.000 description 2
- 239000011159 matrix material Substances 0.000 description 2
- 229910052759 nickel Inorganic materials 0.000 description 2
- 238000007747 plating Methods 0.000 description 2
- 239000007790 solid phase Substances 0.000 description 2
- 229910001220 stainless steel Inorganic materials 0.000 description 2
- 239000010935 stainless steel Substances 0.000 description 2
- 229910052684 Cerium Inorganic materials 0.000 description 1
- 229910052692 Dysprosium Inorganic materials 0.000 description 1
- 229910052691 Erbium Inorganic materials 0.000 description 1
- 229910052693 Europium Inorganic materials 0.000 description 1
- 229910052688 Gadolinium Inorganic materials 0.000 description 1
- 229910052689 Holmium Inorganic materials 0.000 description 1
- 229910052765 Lutetium Inorganic materials 0.000 description 1
- 206010027439 Metal poisoning Diseases 0.000 description 1
- 229910052779 Neodymium Inorganic materials 0.000 description 1
- 229910052777 Praseodymium Inorganic materials 0.000 description 1
- 229910052772 Samarium Inorganic materials 0.000 description 1
- 229910052771 Terbium Inorganic materials 0.000 description 1
- 229910052775 Thulium Inorganic materials 0.000 description 1
- 229910052769 Ytterbium Inorganic materials 0.000 description 1
- 238000003916 acid precipitation Methods 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 230000000052 comparative effect Effects 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000011156 evaluation Methods 0.000 description 1
- 229910052733 gallium Inorganic materials 0.000 description 1
- 230000020169 heat generation Effects 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 230000001771 impaired effect Effects 0.000 description 1
- 229910052746 lanthanum Inorganic materials 0.000 description 1
- 208000008127 lead poisoning Diseases 0.000 description 1
- 244000144972 livestock Species 0.000 description 1
- 239000000155 melt Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 229910052750 molybdenum Inorganic materials 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 229910052698 phosphorus Inorganic materials 0.000 description 1
- 229910052761 rare earth metal Inorganic materials 0.000 description 1
- 239000003870 refractory metal Substances 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical group [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
- 229910052725 zinc Inorganic materials 0.000 description 1
Images
Classifications
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- C—CHEMISTRY; METALLURGY
- C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
- C22C—ALLOYS
- C22C5/00—Alloys based on noble metals
- C22C5/02—Alloys based on gold
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K35/00—Rods, electrodes, materials, or media, for use in soldering, welding, or cutting
- B23K35/22—Rods, electrodes, materials, or media, for use in soldering, welding, or cutting characterised by the composition or nature of the material
- B23K35/24—Selection of soldering or welding materials proper
- B23K35/26—Selection of soldering or welding materials proper with the principal constituent melting at less than 400 degrees C
- B23K35/262—Sn as the principal constituent
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K35/00—Rods, electrodes, materials, or media, for use in soldering, welding, or cutting
- B23K35/22—Rods, electrodes, materials, or media, for use in soldering, welding, or cutting characterised by the composition or nature of the material
- B23K35/24—Selection of soldering or welding materials proper
- B23K35/30—Selection of soldering or welding materials proper with the principal constituent melting at less than 1550 degrees C
- B23K35/3006—Ag as the principal constituent
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- C—CHEMISTRY; METALLURGY
- C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
- C22C—ALLOYS
- C22C13/00—Alloys based on tin
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- C—CHEMISTRY; METALLURGY
- C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
- C22C—ALLOYS
- C22C30/00—Alloys containing less than 50% by weight of each constituent
- C22C30/04—Alloys containing less than 50% by weight of each constituent containing tin or lead
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/02—Containers; Seals
- H01L23/10—Containers; Seals characterised by the material or arrangement of seals between parts, e.g. between cap and base of the container or between leads and walls of the container
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
- H01L2224/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
- H01L2224/4805—Shape
- H01L2224/4809—Loop shape
- H01L2224/48091—Arched
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- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L24/42—Wire connectors; Manufacturing methods related thereto
- H01L24/47—Structure, shape, material or disposition of the wire connectors after the connecting process
- H01L24/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/0001—Technical content checked by a classifier
- H01L2924/00014—Technical content checked by a classifier the subject-matter covered by the group, the symbol of which is combined with the symbol of this group, being disclosed without further technical details
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- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
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- H01L2924/01004—Beryllium [Be]
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- H01—ELECTRIC ELEMENTS
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- H01L2924/01057—Lanthanum [La]
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- H01—ELECTRIC ELEMENTS
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- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
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- H01L2924/01063—Europium [Eu]
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- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
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- H01L2924/01066—Dysprosium [Dy]
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- H01L2924/01068—Erbium [Er]
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- H—ELECTRICITY
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- H01L2924/01078—Platinum [Pt]
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- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
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- H01L2924/01079—Gold [Au]
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- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/013—Alloys
- H01L2924/0132—Binary Alloys
- H01L2924/01322—Eutectic Alloys, i.e. obtained by a liquid transforming into two solid phases
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- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/15—Details of package parts other than the semiconductor or other solid state devices to be connected
- H01L2924/151—Die mounting substrate
- H01L2924/1515—Shape
- H01L2924/15153—Shape the die mounting substrate comprising a recess for hosting the device
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- H—ELECTRICITY
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- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
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- H01L2924/161—Cap
- H01L2924/1615—Shape
- H01L2924/16152—Cap comprising a cavity for hosting the device, e.g. U-shaped cap
- H01L2924/1617—Cavity coating
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/15—Details of package parts other than the semiconductor or other solid state devices to be connected
- H01L2924/161—Cap
- H01L2924/1615—Shape
- H01L2924/16195—Flat cap [not enclosing an internal cavity]
Description
表1において耐ヒートサイクル性は、JIS C 0025に準じて実施した。ただし、低温を−55℃、高温を+150℃、低温および高温に維持されている時間を30分とした。耐ヒートサイクル性の評価基準は、蓋部材と容器本体の接合部がヒビ割れしたり、剥離したりするときを終点として、終点に至るまでの回数を測定する。ヒートサイクルが1000回以上であれば、パッケージのはんだ付けに用いて全く問題はない。また機械的強度の測定方法は、JIS Z 3198-2に準じた。本発明のはんだ合金の機械的強度は、50MPa以上であれば携帯電話やノート型パソコンのようなモバイル電子機器のはんだ付けに用いても、常用の衝撃に対して充分耐えられるものである。
2 半導体素子
3 蓋部材
4 ボンディングワイヤ
5 高温はんだ
Claims (6)
- Ag2〜12質量%、Au40〜55質量%、残部Snからなることを特徴とする溶融封止用高温鉛フリーはんだ合金。
- Ag8〜12質量%、Au48〜55質量%、残部Snからなることを特徴とする請求項1に記載の溶融封止用高温鉛フリーはんだ合金。
- Ag11質量%、Au40質量%、残部Snと、Ag11質量%、Au55質量%、残部Snと、Ag2質量%、Au50質量%、残部Snの3点の組成域に囲まれた範囲の合金組成であることを特徴とする溶融封止用高温鉛フリーはんだ合金。
- 請求項1〜3のいずれかに記載の高温鉛フリーはんだ合金に、さらにCu、In、Bi、Sb、Geから選ばれた1種以上を合計で5質量%以下含有する溶融封止用高温鉛フリーはんだ合金。
- 請求項1〜4のいずれかに記載の高温鉛フリーはんだに、さらにランタノイドを0.5質量%以下含有する溶融封止用高温鉛フリーはんだ合金。
- 容器本体と蓋部材が請求項1〜5のいずれかに記載の高温鉛フリーはんだ合金で接合されているとともに、該接合部の耐ヒートサイクルが1000回以上であることを特徴とする半導体素子収納用パッケージ。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
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JP2004317709 | 2004-11-01 | ||
JP2004317709 | 2004-11-01 | ||
PCT/JP2005/019472 WO2006049024A1 (ja) | 2004-11-01 | 2005-10-24 | 高温鉛フリーはんだおよび半導体素子収納用パッケージ |
Publications (2)
Publication Number | Publication Date |
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JPWO2006049024A1 JPWO2006049024A1 (ja) | 2008-05-29 |
JP4305511B2 true JP4305511B2 (ja) | 2009-07-29 |
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JP2006543117A Expired - Fee Related JP4305511B2 (ja) | 2004-11-01 | 2005-10-24 | 高温鉛フリーはんだおよび半導体素子収納用パッケージ |
Country Status (3)
Country | Link |
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JP (1) | JP4305511B2 (ja) |
CN (1) | CN101048521A (ja) |
WO (1) | WO2006049024A1 (ja) |
Cited By (5)
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CN102368681A (zh) * | 2011-09-22 | 2012-03-07 | 武汉昊昱微电子股份有限公司 | 一种晶振焊接封装方法 |
WO2015087588A1 (ja) | 2013-12-10 | 2015-06-18 | 住友金属鉱山株式会社 | Au-Sn-Ag系はんだ合金並びにこのAu-Sn-Ag系はんだ合金を用いて封止された電子部品及び電子部品搭載装置 |
JP2015157307A (ja) * | 2014-02-25 | 2015-09-03 | 住友金属鉱山株式会社 | Au−Sn−Ag系はんだ合金並びにこのAu−Sn−Ag系はんだ合金を用いて封止された電子部品及び電子部品搭載装置 |
WO2016139848A1 (ja) * | 2015-03-05 | 2016-09-09 | 住友金属鉱山株式会社 | Au-Sn-Ag系はんだペースト並びにこのAu-Sn-Ag系はんだペーストを用いて接合もしくは封止された電子部品 |
US9796054B2 (en) | 2014-09-30 | 2017-10-24 | Sumitomo Metal Mining Co., Ltd. | Au—Sn—Ag-based solder alloy, electronic device sealed or joined using the same, and electronic apparatus equipped with the electronic device |
Families Citing this family (14)
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JP5231727B2 (ja) * | 2006-09-29 | 2013-07-10 | 株式会社東芝 | 接合方法 |
WO2008041350A1 (en) | 2006-09-29 | 2008-04-10 | Kabushiki Kaisha Toshiba | Joint with first and second members with a joining layer located therebetween containing sn metal and another metallic material; methods for forming the same joint |
TWI436710B (zh) * | 2011-02-09 | 2014-05-01 | Murata Manufacturing Co | Connection structure |
JP5849421B2 (ja) * | 2011-03-29 | 2016-01-27 | 日亜化学工業株式会社 | 半田及び半田を用いた半導体装置並びに半田付け方法 |
JP5281122B2 (ja) * | 2011-06-16 | 2013-09-04 | 株式会社フジクラ | 接合方法、及び、製造方法 |
CN102615447B (zh) * | 2012-03-26 | 2014-11-05 | 广东工业大学 | 一种锡基无铅焊料及其制备方法 |
JP2014018859A (ja) * | 2012-07-24 | 2014-02-03 | Nippon Genma:Kk | はんだ |
JP2015098048A (ja) * | 2013-11-19 | 2015-05-28 | 住友金属鉱山株式会社 | Pbを含まないZn−Ge系はんだ合金およびそれを用いた電子部品 |
JP6365183B2 (ja) * | 2014-09-26 | 2018-08-01 | 住友金属鉱山株式会社 | ボール状Au−Sn−Ag系はんだ合金並びにこのボール状Au−Sn−Ag系はんだ合金を用いて封止された電子部品及び電子部品搭載装置 |
JP2016073979A (ja) * | 2014-10-02 | 2016-05-12 | 住友金属鉱山株式会社 | ボール状Au−Sn−Ag系はんだ合金並びにこのボール状Au−Sn−Ag系はんだ合金を用いて封止された電子部品及び電子部品搭載装置 |
JP6413668B2 (ja) * | 2014-11-11 | 2018-10-31 | 住友金属鉱山株式会社 | Au−Sn−Ag系はんだ合金とはんだ材料並びにこのはんだ合金又ははんだ材料を用いて封止された電子部品及び電子部品搭載装置 |
JP2016203208A (ja) * | 2015-04-22 | 2016-12-08 | 住友金属鉱山株式会社 | Au−Sn−Ag系はんだペースト並びにこのAu−Sn−Ag系はんだペーストを用いて接合もしくは封止された電子部品 |
JP6702213B2 (ja) * | 2017-01-31 | 2020-05-27 | 信越化学工業株式会社 | 合成石英ガラスリッド用基材及び合成石英ガラスリッド並びにそれらの製造方法 |
CN113369745B (zh) * | 2021-05-21 | 2022-11-04 | 北京理工大学 | 四元共晶焊料及制备方法、以及焊料成分 |
Family Cites Families (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2001009587A (ja) * | 1999-04-27 | 2001-01-16 | Nec Kansai Ltd | ろう材,ろう付け部材およびろう付け方法 |
JP4144415B2 (ja) * | 2003-01-07 | 2008-09-03 | 千住金属工業株式会社 | 鉛フリーはんだ |
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2005
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Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102368681A (zh) * | 2011-09-22 | 2012-03-07 | 武汉昊昱微电子股份有限公司 | 一种晶振焊接封装方法 |
WO2015087588A1 (ja) | 2013-12-10 | 2015-06-18 | 住友金属鉱山株式会社 | Au-Sn-Ag系はんだ合金並びにこのAu-Sn-Ag系はんだ合金を用いて封止された電子部品及び電子部品搭載装置 |
JP2015157307A (ja) * | 2014-02-25 | 2015-09-03 | 住友金属鉱山株式会社 | Au−Sn−Ag系はんだ合金並びにこのAu−Sn−Ag系はんだ合金を用いて封止された電子部品及び電子部品搭載装置 |
US9796054B2 (en) | 2014-09-30 | 2017-10-24 | Sumitomo Metal Mining Co., Ltd. | Au—Sn—Ag-based solder alloy, electronic device sealed or joined using the same, and electronic apparatus equipped with the electronic device |
WO2016139848A1 (ja) * | 2015-03-05 | 2016-09-09 | 住友金属鉱山株式会社 | Au-Sn-Ag系はんだペースト並びにこのAu-Sn-Ag系はんだペーストを用いて接合もしくは封止された電子部品 |
Also Published As
Publication number | Publication date |
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JPWO2006049024A1 (ja) | 2008-05-29 |
CN101048521A (zh) | 2007-10-03 |
WO2006049024A1 (ja) | 2006-05-11 |
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