JP4248890B2 - 基板貼り合わせ装置及び基板貼り合わせ方法 - Google Patents

基板貼り合わせ装置及び基板貼り合わせ方法 Download PDF

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Publication number
JP4248890B2
JP4248890B2 JP2003041664A JP2003041664A JP4248890B2 JP 4248890 B2 JP4248890 B2 JP 4248890B2 JP 2003041664 A JP2003041664 A JP 2003041664A JP 2003041664 A JP2003041664 A JP 2003041664A JP 4248890 B2 JP4248890 B2 JP 4248890B2
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JP
Japan
Prior art keywords
chamber
pressure
pump
substrates
substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP2003041664A
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English (en)
Japanese (ja)
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JP2003315808A (ja
JP2003315808A5 (enExample
Inventor
英一 石山
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shibaura Mechatronics Corp
Original Assignee
Shibaura Mechatronics Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Publication date
Application filed by Shibaura Mechatronics Corp filed Critical Shibaura Mechatronics Corp
Priority to JP2003041664A priority Critical patent/JP4248890B2/ja
Priority to US10/369,725 priority patent/US20030173020A1/en
Publication of JP2003315808A publication Critical patent/JP2003315808A/ja
Publication of JP2003315808A5 publication Critical patent/JP2003315808A5/ja
Application granted granted Critical
Publication of JP4248890B2 publication Critical patent/JP4248890B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333—Constructional arrangements; Manufacturing methods
    • G02F1/1341—Filling or closing of cells
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333—Constructional arrangements; Manufacturing methods
    • G02F1/1341—Filling or closing of cells
    • G02F1/13415—Drop filling process

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  • Physics & Mathematics (AREA)
  • Nonlinear Science (AREA)
  • Mathematical Physics (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Liquid Crystal (AREA)
  • Lining Or Joining Of Plastics Or The Like (AREA)
JP2003041664A 2002-02-22 2003-02-19 基板貼り合わせ装置及び基板貼り合わせ方法 Expired - Fee Related JP4248890B2 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2003041664A JP4248890B2 (ja) 2002-02-22 2003-02-19 基板貼り合わせ装置及び基板貼り合わせ方法
US10/369,725 US20030173020A1 (en) 2002-02-22 2003-02-21 Substrate laminating apparatus and method

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2002-46691 2002-02-22
JP2002046691 2002-02-22
JP2003041664A JP4248890B2 (ja) 2002-02-22 2003-02-19 基板貼り合わせ装置及び基板貼り合わせ方法

Publications (3)

Publication Number Publication Date
JP2003315808A JP2003315808A (ja) 2003-11-06
JP2003315808A5 JP2003315808A5 (enExample) 2006-04-13
JP4248890B2 true JP4248890B2 (ja) 2009-04-02

Family

ID=28043671

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2003041664A Expired - Fee Related JP4248890B2 (ja) 2002-02-22 2003-02-19 基板貼り合わせ装置及び基板貼り合わせ方法

Country Status (2)

Country Link
US (1) US20030173020A1 (enExample)
JP (1) JP4248890B2 (enExample)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4598463B2 (ja) * 2004-09-21 2010-12-15 芝浦メカトロニクス株式会社 真空装置、基板貼り合わせ装置、及び基板貼り合わせ方法
KR100722969B1 (ko) * 2006-04-06 2007-05-30 주식회사 아바코 유기발광소자의 합착 시스템
JP5455189B2 (ja) * 2009-03-30 2014-03-26 芝浦メカトロニクス株式会社 基板貼り合わせ装置及び基板貼り合わせ方法
CN102649509B (zh) * 2011-07-21 2014-04-09 北京京东方光电科技有限公司 一种传送基板的系统及方法
BR112015015309B8 (pt) * 2013-01-22 2021-10-26 Essilor Int Máquina para revestir um artigo óptico com uma composição predeterminada de revestimento e método para usar a máquina
JP5705937B2 (ja) * 2013-09-13 2015-04-22 信越エンジニアリング株式会社 貼合デバイスの製造装置及び製造方法
WO2020069206A1 (en) 2018-09-28 2020-04-02 Lam Research Corporation Vacuum pump protection against deposition byproduct buildup

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6170496B1 (en) * 1998-08-26 2001-01-09 Taiwan Semiconductor Manufacturing Co., Ltd. Apparatus and method for servicing a wafer platform
US6672358B2 (en) * 1998-11-06 2004-01-06 Canon Kabushiki Kaisha Sample processing system
US6254716B1 (en) * 1999-10-25 2001-07-03 Sony Corporation Apparatus and method for use in the manufacture of multiple layer optical disc
US6466829B1 (en) * 2000-04-20 2002-10-15 Delphi Technologies, Inc. Table look-up method for dynamic control
US6476716B1 (en) * 2000-11-15 2002-11-05 Dallas Semiconductor Corporation Temperature-controlled variable resistor

Also Published As

Publication number Publication date
JP2003315808A (ja) 2003-11-06
US20030173020A1 (en) 2003-09-18

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