JP4244389B2 - クリーンルーム内装置 - Google Patents

クリーンルーム内装置 Download PDF

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Publication number
JP4244389B2
JP4244389B2 JP2006252873A JP2006252873A JP4244389B2 JP 4244389 B2 JP4244389 B2 JP 4244389B2 JP 2006252873 A JP2006252873 A JP 2006252873A JP 2006252873 A JP2006252873 A JP 2006252873A JP 4244389 B2 JP4244389 B2 JP 4244389B2
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JP
Japan
Prior art keywords
air
shutter
clean
opening
clean room
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP2006252873A
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English (en)
Japanese (ja)
Other versions
JP2008078198A (ja
Inventor
英次 佐方
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Murata Machinery Ltd
Original Assignee
Murata Machinery Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Murata Machinery Ltd filed Critical Murata Machinery Ltd
Priority to JP2006252873A priority Critical patent/JP4244389B2/ja
Priority to TW96134286A priority patent/TW200901351A/zh
Publication of JP2008078198A publication Critical patent/JP2008078198A/ja
Application granted granted Critical
Publication of JP4244389B2 publication Critical patent/JP4244389B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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  • Ventilation (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
JP2006252873A 2006-09-19 2006-09-19 クリーンルーム内装置 Expired - Fee Related JP4244389B2 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2006252873A JP4244389B2 (ja) 2006-09-19 2006-09-19 クリーンルーム内装置
TW96134286A TW200901351A (en) 2006-09-19 2007-09-13 Apparatus inside clean room

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2006252873A JP4244389B2 (ja) 2006-09-19 2006-09-19 クリーンルーム内装置

Publications (2)

Publication Number Publication Date
JP2008078198A JP2008078198A (ja) 2008-04-03
JP4244389B2 true JP4244389B2 (ja) 2009-03-25

Family

ID=39349999

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2006252873A Expired - Fee Related JP4244389B2 (ja) 2006-09-19 2006-09-19 クリーンルーム内装置

Country Status (2)

Country Link
JP (1) JP4244389B2 (enExample)
TW (1) TW200901351A (enExample)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4706938B2 (ja) * 2008-11-21 2011-06-22 村田機械株式会社 クリーンルーム用の自動倉庫と自動倉庫での物品の保管方法

Also Published As

Publication number Publication date
TW200901351A (en) 2009-01-01
TWI376002B (enExample) 2012-11-01
JP2008078198A (ja) 2008-04-03

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