TWI376002B - - Google Patents
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- Publication number
- TWI376002B TWI376002B TW96134286A TW96134286A TWI376002B TW I376002 B TWI376002 B TW I376002B TW 96134286 A TW96134286 A TW 96134286A TW 96134286 A TW96134286 A TW 96134286A TW I376002 B TWI376002 B TW I376002B
- Authority
- TW
- Taiwan
- Prior art keywords
- air
- opening
- clean
- shutter
- door
- Prior art date
Links
- 238000007664 blowing Methods 0.000 claims description 4
- 239000007789 gas Substances 0.000 description 13
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 3
- 238000012986 modification Methods 0.000 description 3
- 230000004048 modification Effects 0.000 description 3
- 238000004140 cleaning Methods 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 230000002093 peripheral effect Effects 0.000 description 2
- 230000003111 delayed effect Effects 0.000 description 1
- 229910001873 dinitrogen Inorganic materials 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000007689 inspection Methods 0.000 description 1
- 239000004973 liquid crystal related substance Substances 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
Landscapes
- Ventilation (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2006252873A JP4244389B2 (ja) | 2006-09-19 | 2006-09-19 | クリーンルーム内装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| TW200901351A TW200901351A (en) | 2009-01-01 |
| TWI376002B true TWI376002B (enExample) | 2012-11-01 |
Family
ID=39349999
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW96134286A TW200901351A (en) | 2006-09-19 | 2007-09-13 | Apparatus inside clean room |
Country Status (2)
| Country | Link |
|---|---|
| JP (1) | JP4244389B2 (enExample) |
| TW (1) | TW200901351A (enExample) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4706938B2 (ja) * | 2008-11-21 | 2011-06-22 | 村田機械株式会社 | クリーンルーム用の自動倉庫と自動倉庫での物品の保管方法 |
-
2006
- 2006-09-19 JP JP2006252873A patent/JP4244389B2/ja not_active Expired - Fee Related
-
2007
- 2007-09-13 TW TW96134286A patent/TW200901351A/zh not_active IP Right Cessation
Also Published As
| Publication number | Publication date |
|---|---|
| TW200901351A (en) | 2009-01-01 |
| JP2008078198A (ja) | 2008-04-03 |
| JP4244389B2 (ja) | 2009-03-25 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| MM4A | Annulment or lapse of patent due to non-payment of fees |