200901351 九、發明說明 【發明所屬之技術領域】 本發明係關於一種在無塵室內 置’尤其是關於一種通過開口而迅 【先前技術】 在無塵室內於處理裝置間進行 無人搬運車或有軌道台車等。在與 車之間收授物品之前，有必要打開 開口與搬運台車的開口，並以清淨 與搬運台車之間的空氣。 第6圖係顯示先前例中的處理 的空氣之置換。元件符號4爲無人 之例：8、10爲擋門，藉由使該等 ’再以清淨用空氣來置換處理裝置 。然而一旦如第6圖般地使清淨用 換上就要花費時間，造成收授延遲 揭示從無人搬運車之車體朝向處理 出空氣的技術。 (專利文獻1 )日本特開2004· 【發明內容】 (發明所欲解決之問題） 本發明之課題在於以清淨的氣 使用於物品之收授的裝 速地進行物品之收授。 物品之搬運中’被用到 處理裝置於該等搬運台 處理裝置側之裝載埠的 用空氣來置換處理裝置 裝置2與搬運台車之間 搬運車，其係搬運台車 擋門同步並慢慢地打開 與搬運台車之間的空氣 空氣吹出，則在空氣置 。另外專利文獻1，已 裝置等之側經常性地吹 -299895號公報 體迅速地置換搬運台車 -4- 200901351 與處理裝置之間的空氣，而縮短物品之收授前的等待時間 0 申請專利範圍第2項之發明中所追加的課題，係在於 以清淨的氣體推送搬運台車與處理裝置間之空氣，而可在 更短時間內進行物品之收授。 申請專利範圍第3項之發明中所追加的課題，係在於 可在搬運台車與裝置處理間供給多量之清淨的氣體。 (解決問題之手段） 本發明是一種無塵室內裝置，係具備：物品收授用的 開口；及開閉該開口的擋門；以及用以將清淨的氣體供給 至前述開口之內部的手段之無塵室內裝置，其特徵在於： 將用來使清淨之氣體吹出至外部的吹出口設置於前述擋門 。清淨之氣體可爲清淨空器或清淨之氮氣等。 較佳爲，將吹出口設置於前述擋門覆蓋開口的面之中 心部附近。另外，吹出口之位置只要是在擋門覆蓋開口的 面之中心部附近即可’並沒有必要正確地位於中心’例如 亦可從面之中心移位面之上下方向的寬度與水平方向之寬 度的1 〇 %左右。 較佳爲，無塵室內裝置係固定於無麈室內的裝置’用 以在與搬運台車之間收授物品。 (發明效果） 本發明由於係以來自吹出口的清淨之氣體’來置換擦 -5- 200901351 門與物品之收授對方之間的空氣，所以可縮短物品之收收 前的等待時間。 申請專利範圍第2項之發明，由於係從擋門之大致中 央部供給清淨之氣體，以逐出與物品之收授對方之間的空 氣，所以可有效率地以清淨之氣體來置換環境雰圍，且更 可縮短等待時間。 ’ 申請專利範圍第3項之發明，由於係從固定於無塵室 內的裝置供給清淨之氣體，所以相較於從搬運台車等供給 清淨之氣體的情況，可更簡單地供給大量的清淨之氣體。 【實施方式】 以下係顯示實施本發明用的最佳實施例。 (實施例） 第1圖至第5圖係顯示實施例與其變化。各圖中，元 件符號2爲無塵室內之處理裝置；4爲無人搬運車，亦可 爲有軌道台車等；在處理裝置2設置有用以在與無人搬運 車4之間收授物品1 6的裝載埠6。在無人搬運車，於行走 方向之左右設置有用以收授物品1 6的開口，利用輥子1 2 來捲取/抽出擋門1 〇藉以將開口打開/關閉。元件符號1 4 爲風機濾網機組（fan filter unit )，用以供給清淨用空氣 至無人搬運車4內；1 6爲收授對象之物品，例如爲液晶基 板或半導體、光柵遮罩等的卡匣。元件符號18爲刻度機 械臂等的移載裝置。 -6 - 200901351 在裝載埠6內從風機濾網機組20供給清淨用空氣， 亦可供給清淨之氮等的氣體來取代清淨用空氣。在裝載埠 6之開口面設置有被擋門22所覆蓋且設於開口面之中央部 之例如1處的吹出口 24，一旦擋門22藉由開閉裝置26而 移動於上方’裝載埠6就會打開。另外，亦可以只有在無 人搬運車4到達裝載埠6時才會打開吹出口 24的方式， 設置用以打開/關閉吹出口 2 4的擋門等。又亦可爲檢查裝 置或貯藏庫等來取代處理裝置2，亦可爲有軌道台車等來 取代無人搬運車4。 第2圖係顯示從正面觀看到擋門22之姿勢，點線內 的區域係顯示由於擋門22位於開閉裝置26內，所以可從 裝載埠6之開口面脫離的區域。然後，吹出口 24，在擋門 22內’雖然係位於裝載埠6的開口面之大致中央部，但是 並不需要嚴格地位設於中央部。 第3圖係變化例的擋門3 2，其在裝載埠的開口面之大 致中央部’於擋門32設置吹出口 34，且於其周圍設置複 數個吹出口 35。中央的吹出口 34之開口面積係形成比周 圍的吹出口 35之各個開口面積較大。 第4圖係顯示第2變化例的擋門4 2。擋門4 2，係在 裝載埠的開口面之大致全面’設置例如形成棋盤格狀之多 個吹出口 44。 藉由第1圖、第5圖，說明實施例中的吹出口 24之 動作。在裝載埠6內從風機濾網機組2 0經常供給清淨用 空氣，且從吹出口 24經常吹出清淨用空氣。一旦無人搬 200901351 運車4到達時，來自擋門22之中央部的吹出口 24之清淨 用空氣，就會噴出至無人搬運車4之擋門10側並分成上 下左右，且以清淨用空氣推送裝載埠6與無人搬運車4之 間的空氣之方式而置換。 吹出口 24係位於裝載埠6的開口面之中央部，清淨 用空氣一旦從此處朝上下左右擴展時，就可最有效率地以 清淨用空氣來置換擋門1 〇、22間的空氣。相對於此在第3 圖的擋門3 2之情況，由於在中央部之吹出口 3 4以外具有 周圍的吹出口 35，所以來自吹出口 34的清淨用空氣很難 朝上下左右擴展，且置換擋門32、10間的空氣所需之時 間會變得稍長。在第4圖的變化例之情況，雖然來自在擋 門42配置成棋盤格狀之周邊之開口的清淨用空氣’容易 到達無人搬運車4並朝上下左右擴展’但是來自擋門42 之中央部之吹出口的清淨用空氣’卻因來自周邊之吹出口 的清淨用空氣之氣流而很難吹出，使得擋門42之中央部 附近的空氣之置換會延遲。 藉由來自吹出口 24等的清淨用空氣，一旦以清淨用 空氣來置換處理裝置2與無人搬運車4間之空氣時，就可 增加例如擋門22、1 0之開閉速度’並在更短時間內收授 物品1 6。因此可縮短物品之收授爲止的等待時間。又由於 使清淨用空氣從處理裝置2側吹出’所以相較於從無人搬 運車4側吹出的情況可吹出更大流量的清淨用空氣。 【圖式簡單說明】 -8- 200901351 第1圖係以模型顯示實施例之無塵室內裝置與無人搬 運車的側視圖。 第2圖係在實施例之無塵室內裝置中所用的擋門之正 面圖。 第3圖係變化例的擋門之正面圖。 第4圖係以模型顯示第2變化例的擋門之側視圖。 第5圖係以模型顯示實施例之無塵室內裝置與無人搬 運車的正面圖。 第6圖係以模型顯示習知例中的擋門之側視圖。 【主要元件符號說明】 2 :處理裝置 4 :無人搬運車 6 :裝載埠 8、1 〇 :擋門 1 2 :輥子 14、2〇 :風機濾網機組 1 6 :物品 1 8 :移載裝置 22 、 32 、 42 :擋門 24 、 34 、 35 、 44 :吹出口 26 :開閉裝置200901351 IX. INSTRUCTIONS OF THE INVENTION [Technical field to which the invention pertains] The present invention relates to a built-in in a clean room, especially with respect to a type of opening through an opening. [Prior Art] An unmanned vehicle or rail is placed between processing devices in a clean room. Trolley, etc. Before accepting items between the vehicle and the vehicle, it is necessary to open the opening and the opening of the trolley, and clean and transport the air between the trolleys. Figure 6 shows the replacement of the treated air in the previous example. The component symbol 4 is an example of no one: 8 and 10 are gates, and the processing device is replaced by the air for cleaning. However, it takes time to replace the cleaning as shown in Fig. 6, resulting in a delay in the receipt of the technique of exposing the air from the body of the automated guided vehicle. (Patent Document 1) Japanese Laid-Open Patent Publication No. 2004. SUMMARY OF THE INVENTION (Problems to be Solved by the Invention) An object of the present invention is to carry out the collection of articles using the clean gas for the purpose of the receipt of articles. In the conveyance of the article, the air used to load the processing device on the side of the transfer table processing device replaces the transport device between the processing device device 2 and the transport carriage, and the transport carriage door is synchronized and slowly opened. The air blown between the air and the transport trolley is placed in the air. Further, in Patent Document 1, the side of the apparatus or the like is frequently blown - the body of the 299895 is rapidly replaced with the air between the transporting carriage -4-200901351 and the processing apparatus, and the waiting time before the receipt of the article is shortened. The additional problem in the invention of the second aspect is that the air between the transporting carriage and the processing device is pushed by the clean gas, and the article can be received in a shorter time. An additional problem in the invention of claim 3 is that a large amount of clean gas can be supplied between the conveyance trolley and the apparatus. (Means for Solving the Problem) The present invention provides a clean room apparatus including: an opening for receiving articles; a shutter for opening and closing the opening; and a means for supplying a clean gas to the inside of the opening A dust chamber device is characterized in that an air outlet for blowing a clean gas to the outside is provided in the door. The clean gas can be a clean air or a clean nitrogen gas. Preferably, the air outlet is provided in the vicinity of the center of the surface of the door covering the opening. Further, the position of the air outlet may be "nearly located at the center" in the vicinity of the center portion of the surface covering the opening of the door, for example, the width in the upper and lower directions and the width in the horizontal direction from the center of the surface of the surface. About 1% of the total. Preferably, the clean room device is fixed to the device in the interior of the chamber for receiving articles between the trolley and the transport trolley. (Effect of the Invention) In the present invention, since the air between the door and the article is exchanged by the cleaned gas from the air outlet, the waiting time before the article is collected can be shortened. According to the invention of claim 2, since the clean gas is supplied from the substantially central portion of the door to evict the air between the other party and the object, the environment can be efficiently replaced with a clean gas. And can shorten the waiting time. In the invention of the third aspect of the patent application, since the clean gas is supplied from the device fixed in the clean room, a large amount of clean gas can be supplied more easily than when the clean gas is supplied from the transport trolley or the like. . [Embodiment] The following is a preferred embodiment for carrying out the invention. (Embodiment) Figs. 1 to 5 show an embodiment and variations thereof. In each of the figures, the component symbol 2 is a processing device in a clean room; 4 is an unmanned transport vehicle, and may be a railcar or the like; and the processing device 2 is provided to receive an article 16 between the unmanned transport vehicle 4 and the unmanned transport vehicle 4; Load 埠6. In the automated guided vehicle, an opening for receiving the article 16 is provided to the left and right of the traveling direction, and the roller 1 is used to take up/unload the shutter 1 to open/close the opening. The component symbol 1 4 is a fan filter unit for supplying clean air to the unmanned transport vehicle 4; and 16 is a target object such as a liquid crystal substrate or a semiconductor, a grating mask, or the like. cassette. The component symbol 18 is a transfer device such as a scale arm. -6 - 200901351 The clean air is supplied from the fan filter unit 20 in the loading cassette 6, and a clean air such as nitrogen can be supplied instead of the clean air. The opening surface of the loading cassette 6 is provided with, for example, a blowing port 24 which is covered by the shutter 22 and is provided at a central portion of the opening surface. Once the shutter 22 is moved by the opening and closing device 26, the loading unit 6 is mounted. Will open. Further, it is also possible to provide a shutter for opening/closing the air outlet 24, etc. only when the unmanned transport vehicle 4 reaches the loading port 6 to open the air outlet 24. Alternatively, the processing device 2 may be replaced by an inspection device, a storage, or the like, or the automated guided vehicle 4 may be replaced by a railcar or the like. Fig. 2 shows the posture of the shutter 22 as viewed from the front, and the area in the dotted line shows the area which can be detached from the opening surface of the loading cassette 6 because the shutter 22 is located in the opening and closing device 26. Then, the air outlet 24 is located in the shutter door 22 at a substantially central portion of the opening surface of the loading magazine 6, but does not need to be strictly located at the center portion. Fig. 3 is a view showing a stopper door 3 2 of a variation in which a central portion of the opening surface of the loading port is provided with a blowing port 34 at the shutter 32, and a plurality of air outlets 35 are provided around the opening. The opening area of the central air outlet 34 is formed to be larger than the respective opening areas of the peripheral air outlets 35. Fig. 4 is a view showing the shutter 4 2 of the second modification. The shutter 4 2 is provided with, for example, a plurality of air outlets 44 formed in a checkerboard shape in a substantially comprehensive manner of the opening surface of the loading jaw. The operation of the air outlet 24 in the embodiment will be described with reference to Figs. 1 and 5 . The clean air is frequently supplied from the fan filter unit 20 in the loading cassette 6, and the clean air is often blown out from the air outlet 24. When the unmanned transport 200901351 arrives at the vehicle 4, the clean air from the air outlet 24 of the central portion of the shutter 22 is ejected to the side of the door 10 of the automated guided vehicle 4, and is divided into up, down, left, and right, and is pumped with clean air. The air between the crucible 6 and the automated guided vehicle 4 is replaced by the air. The air outlet 24 is located at the center of the opening surface of the loading cassette 6, and when the clean air expands from above to the left and right, the air between the shutters 1 and 22 can be replaced most efficiently with the clean air. In the case of the shutter 3 in the third embodiment, since the peripheral air outlets 35 are provided in the center portion, the air for cleaning from the air outlets 34 is hard to expand up and down, and is replaced. The time required to block the air between the doors 32, 10 becomes slightly longer. In the case of the modification of Fig. 4, the clean air from the opening arranged in the checkerboard shape of the door 42 is easy to reach the automated guided vehicle 4 and expands up and down and left and right, but from the central portion of the shutter 42 The clean air of the outlet is difficult to blow due to the flow of clean air from the peripheral air outlet, so that the replacement of air near the central portion of the shutter 42 is delayed. When the air from the air outlet 24 or the like is used to replace the air between the processing device 2 and the automated guided vehicle 4 with the clean air, the opening and closing speeds of the shutters 22 and 10 can be increased, for example, in a shorter period. Receive items 16 in time. Therefore, the waiting time until the article is received can be shortened. Further, since the clean air is blown out from the side of the processing apparatus 2, a larger flow rate of clean air can be blown than when the air is blown from the unmanned vehicle 4 side. BRIEF DESCRIPTION OF THE DRAWINGS -8- 200901351 Fig. 1 is a side view showing a clean room unit and an unmanned vehicle of the embodiment in a model. Fig. 2 is a front elevational view of the shutter used in the clean room unit of the embodiment. Figure 3 is a front view of the door of the variation. Fig. 4 is a side view showing the door of the second modification in a model. Fig. 5 is a front view showing the clean room unit and the unmanned vehicle of the embodiment in a model. Fig. 6 is a side view showing the door in the conventional example in a model. [Description of main component symbols] 2: Processing device 4: Unmanned transport vehicle 6: Loading 埠 8, 1 〇: Door 1 2 : Roller 14, 2 〇: Fan filter unit 1 6 : Item 1 8 : Transfer device 22 , 32, 42: door 24, 34, 35, 44: air outlet 26: opening and closing device