JP2008078198A - Apparatus inside clean room - Google Patents

Apparatus inside clean room Download PDF

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JP2008078198A
JP2008078198A JP2006252873A JP2006252873A JP2008078198A JP 2008078198 A JP2008078198 A JP 2008078198A JP 2006252873 A JP2006252873 A JP 2006252873A JP 2006252873 A JP2006252873 A JP 2006252873A JP 2008078198 A JP2008078198 A JP 2008078198A
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air
shutter
clean
opening
clean room
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JP2006252873A
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JP4244389B2 (en
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Eiji Sakata
英次 佐方
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Murata Machinery Ltd
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Murata Machinery Ltd
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Priority to JP2006252873A priority Critical patent/JP4244389B2/en
Priority to TW96134286A priority patent/TW200901351A/en
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Abstract

<P>PROBLEM TO BE SOLVED: To rapidly replace an air between a carriage and a processor with a clean gas and to shorten waiting time up to the delivery of a product. <P>SOLUTION: An outlet 24 is provided at the central part of a shutter 22 that covers the load port 6 of a processor 2 inside the clean room, so as to blow out clean air from the load port 6 to the outside. When an unmanned carrier 4 arrives, air between the unmanned carrier 4 and the shutter 22 is replaced with clean air from the outlet 24. <P>COPYRIGHT: (C)2008,JPO&INPIT

Description

この発明は、クリーンルーム内で物品の受け渡しに使用する装置に関し、特に開口を通しての物品の受け渡しを迅速に行うことに関する。   The present invention relates to an apparatus used for delivering an article in a clean room, and more particularly, to quickly delivering an article through an opening.

クリーンルーム内での処理装置間の物品の搬送には、無人搬送車や有軌道台車などが用いられている。処理装置とこれらの搬送台車の間で物品を受け渡しする前に、処理装置側のロードポートの開口と搬送台車の開口とを開いて、クリーンエアで処理装置と搬送台車の間の空気を置換する必要がある。   An automated guided vehicle, a tracked carriage, or the like is used for transporting articles between processing apparatuses in a clean room. Before delivering the article between the processing device and these transport carts, the load port opening on the processing device side and the opening of the transport cart are opened, and the air between the processing device and the transport cart is replaced with clean air. There is a need.

図６に、従来例での処理装置２と搬送台車の間の空気の置換を示す。４は無人搬送車で搬送台車の例で、８，１０はシャッタでこれらを同期して徐々に開くことにより、クリーンエアで処理装置と搬送台車の間の空気を置換する。しかしながら図６のようにクリーンエアを吹き出させると、空気の置換に時間がかかり、受け渡しが遅くなる。なお特許文献１は、無人搬送車の車体から処理装置などの側へ、常時空気を吹き出すことを開示している。
特開２００４−２９９８９５号公報 FIG. 6 shows replacement of air between the processing apparatus 2 and the transport carriage in the conventional example. Reference numeral 4 is an example of an automatic guided vehicle, and reference numerals 8 and 10 are shutters which are opened gradually in synchronization with each other, whereby the air between the processing apparatus and the transport cart is replaced with clean air. However, when clean air is blown out as shown in FIG. 6, it takes time to replace the air, and the delivery is slow. Patent Document 1 discloses that air is constantly blown out from the body of an automated guided vehicle to the side of a processing device or the like.
JP 2004-299895 A

この発明の課題は、搬送台車と処理装置の間の空気をクリーンなガスで速やかに置換し、物品の受け渡し前の待ち時間を短縮することにある。
請求項２の発明での追加の課題は、搬送台車と処理装置間の空気をクリーンなガスで押し出し、より短時間で物品の受け渡しができるようにすることにある。
請求項３の発明での追加の課題は、搬送台車と処理装置間に多量のクリーンなガスを供給できるようにすることにある。 An object of the present invention is to quickly replace the air between the transport carriage and the processing apparatus with clean gas, and to shorten the waiting time before delivery of the article.
An additional problem in the invention of claim 2 is to extrude air between the transport carriage and the processing apparatus with clean gas so that articles can be delivered in a shorter time.
An additional problem in the invention of claim 3 is that a large amount of clean gas can be supplied between the transport carriage and the processing apparatus.

この発明は、物品の受け渡し用の開口と、開口を開閉するシャッタと、開口の内部にクリーンなガスを供給するための手段とを備えたクリーンルーム内装置であって、クリーンなガスを外部へ吹き出させるための吹出口をシャッタに設けたことを特徴とする。クリーンなガスはクリーンエアやクリーンな窒素ガスなどとする。   The present invention relates to an apparatus in a clean room comprising an opening for delivering articles, a shutter for opening and closing the opening, and means for supplying clean gas into the opening, and the clean gas is blown out to the outside. A blower outlet is provided in the shutter. Clean gas is clean air or clean nitrogen gas.

好ましくは、吹出口を前記シャッタが開口を覆う面の中心部付近に設ける。なお吹出口の位置はシャッタが前記開口を覆う面の中心部付近に有れば良く、正確に中心に有る必要は無く、例えば面の上下方向の幅と水平方向の幅との１０％程度、面の中心からシフトしていても良い。   Preferably, the air outlet is provided near the center of the surface where the shutter covers the opening. The position of the air outlet is only required to be near the center of the surface where the shutter covers the opening, and does not need to be exactly at the center, for example, about 10% of the vertical and horizontal widths of the surface, It may be shifted from the center of the surface.

好ましくは、クリーンルーム内装置がクリーンルーム内に固定の装置で、搬送台車との間で物品を受け渡しする。   Preferably, the device in the clean room is a device fixed in the clean room, and delivers articles to and from the transport carriage.

この発明では、シャッタと物品の受け渡し相手との間の空気を、吹出口からのクリーンなガスで置換するので、物品の受け渡し前の待ち時間を短縮できる。   In this invention, since the air between the shutter and the delivery partner of the article is replaced with clean gas from the outlet, the waiting time before delivery of the article can be shortened.

請求項２の発明では、シャッタのほぼ中央部からクリーンなガスを供給して、物品の受け渡し相手との間の空気を追い出すので、効率的にクリーンなガスで雰囲気を置換でき、待ち時間をより短縮できる。   According to the second aspect of the present invention, clean gas is supplied from the substantially central portion of the shutter to expel air between the article delivery partner, so that the atmosphere can be efficiently replaced with clean gas, and the waiting time is further increased. Can be shortened.

請求項３の発明では、クリーンルーム内に固定の装置からクリーンなガスを供給するので、搬送台車などからクリーンなガスを供給する場合に比べ、より簡単に大流量のクリーンなガスを供給できる。   In the invention of claim 3, since clean gas is supplied from a fixed device into the clean room, clean gas with a large flow rate can be supplied more easily than when clean gas is supplied from a transport carriage or the like.

以下に本発明を実施するための最適実施例を示す。   In the following, an optimum embodiment for carrying out the present invention will be shown.

図１〜図５に、実施例とその変形とを示す。各図において、２はクリーンルーム内の処理装置で、４は無人搬送車であり、有軌道台車などでも良く、処理装置２には無人搬送車４との間で物品１６を受け渡すためのロードポート６が設けてある。無人搬送車４には、物品１６を受け渡しするための開口が走行方向の左右に設けられ、シャッタ１０をローラ１２で巻き取り／繰り出すことにより開口を開閉する。１４はファンフィルタユニットで、無人搬送車４内にクリーンエアを供給し、１６は受け渡し対象の物品で、例えば液晶基板や半導体，レチクルなどのカセットである。１８はスカラアームなどの移載装置である。   1 to 5 show an embodiment and its modifications. In each figure, 2 is a processing device in the clean room, 4 is an automatic guided vehicle, and may be a tracked carriage, etc., and a load port for delivering the article 16 to the processing device 2 with the automatic guided vehicle 4 6 is provided. In the automatic guided vehicle 4, openings for delivering the articles 16 are provided on the left and right sides in the traveling direction, and the openings are opened and closed by winding / unwinding the shutter 10 with the rollers 12. Reference numeral 14 denotes a fan filter unit that supplies clean air into the automatic guided vehicle 4, and reference numeral 16 denotes an article to be delivered, for example, a cassette such as a liquid crystal substrate, a semiconductor, or a reticle. Reference numeral 18 denotes a transfer device such as a SCARA arm.

ロードポート６内にはファンフィルタユニット２０からクリーンエアが供給され、クリーンエアに代えて、クリーンな窒素などのガスを供給しても良い。ロードポート６の開口面はシャッタ２２で覆われ、開口面の中央部の例えば１箇所に吹出口２４が設けられ、開閉装置２６によりシャッタ２２が上方に移動すると、ロードポート６が開く。なお無人搬送車４がロードポート６に到着した際にのみ吹出口２４を開くように、吹出口２４を開閉するシャッタなどを設けても良い。また処理装置２に代えて検査装置やストッカなどでも良く、無人搬送車４に代えて有軌道台車などでも良い。   Clean air is supplied into the load port 6 from the fan filter unit 20, and a clean gas such as nitrogen may be supplied instead of clean air. The opening surface of the load port 6 is covered with a shutter 22, and a blowout port 24 is provided, for example, at one position in the center of the opening surface. When the shutter 22 is moved upward by the opening / closing device 26, the load port 6 opens. A shutter for opening and closing the air outlet 24 may be provided so that the air outlet 24 is opened only when the automatic guided vehicle 4 arrives at the load port 6. Further, an inspection device or a stocker may be used instead of the processing device 2, and a tracked carriage may be used instead of the automatic guided vehicle 4.

図２はシャッタ２２を正面から見た姿を示し、点線内の領域はシャッタ２２が開閉装置２６内にあるため、ロードポート６の開口面から外れた領域を示している。そして吹出口２４は、シャッタ２２内で、ロードポート６の開口面のほぼ中央部に有るが、厳密に中央部に有る必要はない。   FIG. 2 shows the shutter 22 as seen from the front, and the area within the dotted line shows the area outside the opening surface of the load port 6 because the shutter 22 is in the opening / closing device 26. The air outlet 24 is located in the shutter 22 at substantially the center of the opening surface of the load port 6, but does not need to be strictly at the center.

図３に変形例のシャッタ３２を示し、ロードポートの開口面のほぼ中央部で、シャッタ３２に吹出口３４を設け、その周囲に複数個の吹出口３５を設けている。中央の吹出口３４の開口面積は周囲の吹出口３５の個々の開口面積よりも大きくしてある。   FIG. 3 shows a shutter 32 according to a modified example, in which an air outlet 34 is provided in the shutter 32 at a substantially central portion of the opening surface of the load port, and a plurality of air outlets 35 are provided around the air outlet 34. The opening area of the central outlet 34 is larger than the individual opening areas of the surrounding outlets 35.

図４に、第２の変形例のシャッタ４２を示す。シャッタ４２では、ロードポートの開口面のほぼ全面に、例えば碁盤目状に多数個の吹出口４４を設けてある。   FIG. 4 shows a shutter 42 according to a second modification. In the shutter 42, a large number of air outlets 44 are provided, for example, in a grid pattern, on almost the entire opening surface of the load port.

図１，図５により、実施例での吹出口２４の動作を説明する。ロードポート６内にはファンフィルタユニット２０から常時クリーンエアが供給されており、吹出口２４から常時クリーンエアが吹き出している。無人搬送車４が到着すると、シャッタ２２の中央部の吹出口２４からのクリーンエアは、無人搬送車４のシャッタ１０側に噴出して上下左右に分かれ、ロードポート６と無人搬送車４との間の空気をクリーンエアで押し出すようにして置換する。   The operation of the air outlet 24 in the embodiment will be described with reference to FIGS. Clean air is constantly supplied from the fan filter unit 20 into the load port 6, and clean air is constantly discharged from the outlet 24. When the automatic guided vehicle 4 arrives, clean air from the outlet 24 at the center of the shutter 22 is ejected to the shutter 10 side of the automatic guided vehicle 4 and is divided into upper, lower, left, and right, and the load port 6 and the automatic guided vehicle 4 The air in between is pushed out with clean air and replaced.

吹出口２４はロードポート６の開口面の中央部にあり、ここからクリーンエアが上下左右に拡がると、最も効率的にシャッタ１０，２２間の空気をクリーンエアで置換できる。これに対して図３のシャッタ３２の場合、中央部の吹出口３４以外に周囲の吹出口３５が有るので、吹出口３４からのクリーンエアが上下左右に拡がり難くなり、シャッタ３２，１０間の空気を置換するのに要する時間がやや長くなる。図４の変形例の場合、シャッタ４２に碁盤目上に配置した周辺の開口からのクリーンエアは、無人搬送車４側に達して上下左右に拡がりやすいが、シャッタ４２の中央部の吹出口からのクリーンエアは、周辺の吹出口からのクリーンエアの気流のため吹き出し難くなり、シャッタ４２の中央部付近の空気の置換が遅れる。   The air outlet 24 is located at the center of the opening surface of the load port 6, and when clean air spreads up and down and left and right from here, the air between the shutters 10 and 22 can be replaced with clean air most efficiently. On the other hand, in the case of the shutter 32 shown in FIG. 3, the peripheral air outlet 35 is provided in addition to the central air outlet 34, so that clean air from the air outlet 34 is difficult to spread vertically and horizontally. The time required to replace the air is slightly longer. In the case of the modification of FIG. 4, clean air from the peripheral openings arranged on the grid of the shutter 42 easily reaches the automatic guided vehicle 4 side and spreads up and down, left and right, but from the air outlet at the center of the shutter 42. The clean air is difficult to be blown out due to the flow of clean air from the surrounding air outlets, and replacement of air near the center of the shutter 42 is delayed.

吹出口２４等からのクリーンエアにより、処理装置２と無人搬送車４間の空気をクリーンエアで置換できると、例えばシャッタ２２，１０の開閉速度を増して、より短時間で物品１６を受け渡しできる。このため物品の受け渡しまでの待ち時間を短縮できる。また処理装置２側からクリーンエアを吹き出させるので、無人搬送車４側から吹き出せる場合に比べより大流量のクリーンエアを吹き出すことができる。
If the air between the processing device 2 and the automatic guided vehicle 4 can be replaced with clean air by the clean air from the air outlet 24 or the like, for example, the opening / closing speed of the shutters 22 and 10 can be increased and the article 16 can be delivered in a shorter time. . For this reason, the waiting time until delivery of articles can be shortened. Moreover, since clean air is blown out from the processing apparatus 2 side, a larger flow rate of clean air can be blown out as compared with the case where it can be blown out from the automatic guided vehicle 4 side.

実施例のクリーンルーム内装置と無人搬送車とを模式的に示す側面図The side view which shows typically the apparatus in the clean room of an Example, and an automatic guided vehicle 実施例のクリーンルーム内装置で用いたシャッタの正面図Front view of the shutter used in the clean room apparatus of the embodiment 変形例のシャッタの正面図Front view of a modified shutter 第２の変形例のシャッタを模式的に示す側面図The side view which shows typically the shutter of a 2nd modification. 実施例のクリーンルーム内装置と無人搬送車とを模式的に示す正面図The front view which shows typically the apparatus in the clean room of an Example, and an automatic guided vehicle 従来例でのシャッタを模式的に示す側面図Side view schematically showing a shutter in a conventional example

符号の説明Explanation of symbols

２ 処理装置
４ 無人搬送車
６ ロードポート
８，１０ シャッタ
１２ ローラ
１４，２０ ファンフィルタユニット
１６ 物品
１８ 移載装置
２２，３２，４２ シャッタ
２４，３４，３５，４４ 吹出口
２６ 開閉装置 2 Processing device 4 Automatic guided vehicle 6 Load port 8, 10 Shutter 12 Roller 14, 20 Fan filter unit 16 Article 18 Transfer device 22, 32, 42 Shutter 24, 34, 35, 44 Air outlet 26 Opening / closing device

Claims (3)

物品の受け渡し用の開口と、該開口を開閉するシャッタと、前記開口の内部にクリーンなガスを供給するための手段とを備えたクリーンルーム内装置であって、
クリーンなガスを外部へ吹き出させるための吹出口を前記シャッタに設けたことを特徴とする、クリーンルーム内装置。 A device in a clean room comprising an opening for delivering an article, a shutter for opening and closing the opening, and means for supplying clean gas into the opening,
An apparatus in a clean room, characterized in that an air outlet for blowing out clean gas to the outside is provided in the shutter. 前記吹出口を前記シャッタが前記開口を覆う面の中心部付近に設けたことを特徴とする、請求項１のクリーンルーム内装置。 The in-clean room apparatus according to claim 1, wherein the air outlet is provided in the vicinity of a central portion of a surface where the shutter covers the opening. 前記クリーンルーム内装置がクリーンルーム内に固定の装置であることを特徴とする、請求項１または２のクリーンルーム内装置。
The device in a clean room according to claim 1 or 2, wherein the device in the clean room is a device fixed in the clean room.
JP2006252873A 2006-09-19 2006-09-19 Clean room equipment Expired - Fee Related JP4244389B2 (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2006252873A JP4244389B2 (en) 2006-09-19 2006-09-19 Clean room equipment
TW96134286A TW200901351A (en) 2006-09-19 2007-09-13 Apparatus inside clean room

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2006252873A JP4244389B2 (en) 2006-09-19 2006-09-19 Clean room equipment

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JP2008078198A true JP2008078198A (en) 2008-04-03
JP4244389B2 JP4244389B2 (en) 2009-03-25

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010120768A (en) * 2008-11-21 2010-06-03 Murata Machinery Ltd Automated warehouse for clean room and method for storing articles in automated warehouse

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010120768A (en) * 2008-11-21 2010-06-03 Murata Machinery Ltd Automated warehouse for clean room and method for storing articles in automated warehouse
JP4706938B2 (en) * 2008-11-21 2011-06-22 村田機械株式会社 Clean room automatic warehouse and how to store goods in automatic warehouse
KR101328037B1 (en) * 2008-11-21 2013-11-13 무라다기카이가부시끼가이샤 Warehouse for clean room and article keeping method therein

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TWI376002B (en) 2012-11-01
TW200901351A (en) 2009-01-01
JP4244389B2 (en) 2009-03-25

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