JP4674574B2 - Delivery device and system - Google Patents

Delivery device and system Download PDF

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JP4674574B2
JP4674574B2 JP2006231664A JP2006231664A JP4674574B2 JP 4674574 B2 JP4674574 B2 JP 4674574B2 JP 2006231664 A JP2006231664 A JP 2006231664A JP 2006231664 A JP2006231664 A JP 2006231664A JP 4674574 B2 JP4674574 B2 JP 4674574B2
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shutter
delivery
delivery device
inclined surface
downward
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JP2008056364A (en
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英次 佐方
亨 鈴木
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Murata Machinery Ltd
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この発明は、搬送台車等とロードポート等の間での物品の受け渡しに関し、特に受け渡し装置のシャッタを開き始めた際に渦が形成されないようにして、搬送台車等とロードポート等の間にクリーンな雰囲気が形成されるようにすることに関する。   The present invention relates to delivery of articles between a transport cart or the like and a load port, and in particular, when a shutter of the delivery device starts to open, a vortex is not formed so that a clean space between the transport cart or the load port and the like is achieved. It is related with making sure that an atmosphere is formed.

クリーンルーム内で、搬送台車とロードポート間やロードポート間などで物品を受け渡す場合、物品の受け渡し前にこれらのスペースにクリーンな雰囲気を形成する必要がある。この点に付き、特許文献１は搬送台車側の開口にシャッタを設けて、受け渡し前にシャッタを開くようにすることを提案している。   When an article is delivered between a transport cart and a load port or between load ports in a clean room, it is necessary to form a clean atmosphere in these spaces before delivering the article. In connection with this point, Patent Document 1 proposes that a shutter be provided at the opening on the side of the transport carriage so that the shutter is opened before delivery.

特許文献１では、搬送台車のシャッタは下から上へ巻き上げる。ロードポート側のシャッタは上から下へ下降するものが多いので、シャッタを開き始めた際の気流は図４のようになる。ここで２は通路で、床面４にはグレーティングなどが施されており、上から下向きにクリーンエアの気流が存在する。６は半導体や液晶などの処理装置で、８はそのロードポートであり、９は開口、１０はシャッタである。無人搬送車１２は液晶基板のカセットや半導体カセット、レチクルのカセットなどの物品１４を、スカラアームなどの移載装置で、ロードポート８との間で移載し、ファンフィルタユニット１８からクリーンエアを供給する。１９は開口、２０はそのシャッタである。   In Patent Document 1, the shutter of the transport carriage is rolled up from the bottom to the top. Since many shutters on the load port side descend from the top to the bottom, the airflow when the shutter starts to open is as shown in FIG. Here, 2 is a passage, and the floor surface 4 is provided with a grating or the like, and there is a flow of clean air downward from above. 6 is a processing device such as a semiconductor or a liquid crystal, 8 is a load port, 9 is an opening, and 10 is a shutter. The automatic guided vehicle 12 transfers an article 14 such as a liquid crystal substrate cassette, a semiconductor cassette, or a reticle cassette to and from the load port 8 using a transfer device such as a scalar arm, and clean air is supplied from the fan filter unit 18. Supply. Reference numeral 19 is an opening, and 20 is the shutter.

ここで無人搬送車１２が停止し、シャッタ１０，２０を同期して開くと、図４の横向きの実線の気流が生じ、破線で示す渦が形成される。処理装置６と無人搬送車１２間の気流を平面視で図５に示すと、開口９，１９の左右（無人搬送車１２の走行方向）の気流は、開口９，１９の左右に逃げることができるが、他の部分の気流は左右に逃げることができず、渦を解消できない。   When the automatic guided vehicle 12 is stopped and the shutters 10 and 20 are opened synchronously, a horizontal solid air current in FIG. 4 is generated, and a vortex indicated by a broken line is formed. When the airflow between the processing device 6 and the automatic guided vehicle 12 is shown in FIG. 5 in a plan view, the airflow left and right of the openings 9 and 19 (traveling direction of the automatic guided vehicle 12) can escape to the left and right of the openings 9 and 19. Yes, but the airflow in other parts cannot escape to the left and right, and the vortex cannot be resolved.

シャッタ１０，２０を開き始めた際には、無人搬送車１２の走行風などにより、床面付近の空気が巻き上げられて、開口９，１９間に汚染空気が存在する可能性がある。また通路２のクリーン度を低くし、ロードポート８や無人搬送車１２内で局所的にクリーンな雰囲気を形成している場合、受け渡し前に受け渡し経路の空気をクリーンな空気で置換しておく必要がある。渦が形成されると、クリーンな空気による置換が遅れ、その分物品の受け渡しを遅らせる必要がある。
特開２００１−２３３２２０号公報 When the shutters 10 and 20 start to open, air near the floor surface is rolled up by the traveling wind of the automatic guided vehicle 12 and there is a possibility that contaminated air exists between the openings 9 and 19. Also, when the cleanliness of the passage 2 is lowered and a clean atmosphere is locally formed in the load port 8 or the automatic guided vehicle 12, it is necessary to replace the air in the delivery path with clean air before delivery. There is. When the vortex is formed, the replacement with clean air is delayed, and it is necessary to delay the delivery of the article.
JP 2001-233220 A

この発明の課題は、受け渡し装置と受け渡し相手間の受け渡し経路に渦が形成されないようにして、速やかに受け渡し経路にクリーンな雰囲気を形成することにある。 An object of the present invention is to quickly form a clean atmosphere in the delivery path so that no vortex is formed in the delivery path between the delivery device and the delivery partner .

この発明は、シャッタで覆った開口の内部に物品を収納し、シャッタを上下もしくは左右に、受け渡し相手のシャッタと逆方向に開いて、物品を受け渡すクリーンルーム用の受け渡し装置であって、
シャッタを下向きに開く受け渡し相手との間で物品を受け渡すために、受け渡し装置のシャッタを上向きに移動させるように構成すると共に、受け渡し装置のシャッタの周囲のフレームの下縁をシャッタの内側から外側へと下向きに傾斜する傾斜面とすることにより、シャッタを開き始める際に、受け渡し装置のシャッタとその周囲の傾斜面との間から、傾斜面に沿って下向きに気流を吹き出させるように構成したことを特徴とする。 This invention is a delivery device for a clean room that houses an article in an opening covered with a shutter, opens the shutter up and down or left and right in a direction opposite to the delivery partner shutter, and delivers the article,
In order to deliver articles to and from a delivery partner that opens the shutter downward, the shutter of the delivery device is configured to move upward, and the lower edge of the frame around the shutter of the delivery device is moved from the inside of the shutter to the outside. By making the inclined surface inclined downward, the airflow is blown downward along the inclined surface from between the shutter of the delivery device and the surrounding inclined surface when the shutter starts to open. It is characterized by that.

この発明はまた、シャッタで覆った開口の内部に物品を収納し、シャッタを上下もしくは左右に、受け渡し相手のシャッタと逆方向に開いて、物品を受け渡すクリーンルーム用の受け渡し装置であって、
シャッタを上向きに開く受け渡し相手との間で物品を受け渡すために、受け渡し装置のシャッタを下向きに移動させるように構成すると共に、受け渡し装置のシャッタの周囲のフレームの上縁をシャッタの内側から外側へと上向きに傾斜する傾斜面とすることにより、シャッタを開き始める際に、受け渡し装置のシャッタとその周囲の傾斜面との間から、傾斜面に沿って上向きに気流を吹き出させるように構成したことを特徴とする。 The present invention is also a clean room delivery device for delivering an article by storing the article in an opening covered with a shutter, opening the shutter vertically or horizontally, in a direction opposite to the delivery partner shutter, and delivering the article,
In order to deliver an article to and from a delivery partner that opens the shutter upward, the shutter of the delivery device is configured to move downward, and the upper edge of the frame around the shutter of the delivery device is moved from the inside to the outside of the shutter. By making the inclined surface inclined upward, the airflow is blown upward along the inclined surface from between the shutter of the delivery device and the surrounding inclined surface when the shutter starts to open. It is characterized by that.

またこの発明は、シャッタで覆った開口の内部に物品を収納する受け渡し装置と、開口をシャッタで覆った受け渡し相手とを備え、前記各シャッタを上下互い違いに同期して開いて、受け渡し装置と受け渡し相手との間で物品を受け渡すクリーンルーム用の受け渡しシステムであって、
シャッタを上向きに開く受け渡し相手との間で物品を受け渡すために、受け渡し装置のシャッタを下向きに移動させるように構成すると共に、受け渡し装置のシャッタの周囲のフレームの下縁をシャッタの内側から外側へと下向きに傾斜する傾斜面とすることにより、シャッタを開き始める際に、受け渡し装置のシャッタとその周囲の傾斜面との間から、傾斜面に沿って下向きに気流を吹き出させるように、受け渡し装置を構成したことを特徴とする。 The present invention also includes a delivery device for storing articles in an opening covered with a shutter, and a delivery partner whose opening is covered with a shutter, and the shutters are opened in synchronization with each other in the vertical direction to deliver the delivery device and the delivery device. A delivery system for a clean room that delivers goods to and from an opponent,
In order to deliver an article to and from a delivery partner that opens the shutter upward, the shutter of the delivery device is configured to move downward, and the lower edge of the frame around the shutter of the delivery device is moved from the inside to the outside of the shutter. By making the inclined surface inclined downward, the delivery is performed so that airflow is blown downward along the inclined surface from between the shutter of the delivery device and the surrounding inclined surface when the shutter starts to open. The apparatus is constituted.

この発明では、受け渡し装置と受け渡し相手とからの気流は上下もしくは左右互い違いに吹き出す。ここで受け渡し装置からの気流は開口から遠ざかるように吹き出すので、受け渡し装置と受け渡し相手との間の、受け渡し経路に沿った空気は、受け渡し装置からの気流に随伴して移動し、速やかに受け渡し経路をクリーンな雰囲気に置き換えることができる。このため受け渡し時の物品の汚染を防止すると共に、受け渡し作業を短時間で開始できる。 In this invention, the airflow from the delivery device and the delivery partner blows up and down or left and right alternately. Here, since the airflow from the delivery device blows away from the opening, the air along the delivery path between the delivery device and the delivery partner moves along with the airflow from the delivery device and promptly passes the delivery route. Can be replaced with a clean atmosphere. For this reason, it is possible to prevent the article from being contaminated during delivery, and to start delivery work in a short time .

請求項１，３の発明では、受け渡し装置から開口の下側へ向けて気流を吹き出させる。このためシャッタを下向きに開くことが多い処理装置との間の受け渡しに適している。さらにシャッタの周囲の開口の下縁を下向きに傾斜させて、気流を下向きに形成するので、シャッタの形状を利用して下向きの渦流を形成する場合や、下向きの渦流形成用の特別の流路を設ける場合に比べ、簡単に下向きの気流を形成できる。また下向きの傾斜面は長さを長くできるので、確実に気流を下向きに傾斜させることができる。 In the first and third aspects of the invention, the airflow is blown out from the delivery device toward the lower side of the opening. Therefore, it is suitable for delivery to and from a processing apparatus that often opens the shutter downward. Furthermore, the lower edge of the opening around the shutter is inclined downward to form the airflow downward, so when using the shutter shape to form a downward vortex, or a special flow path for downward vortex formation Compared to the case of providing the airflow, a downward airflow can be easily formed. Moreover, since the downward inclined surface can be lengthened, the airflow can be reliably inclined downward.

以下に本発明を実施するための最適実施例を示す。   In the following, an optimum embodiment for carrying out the present invention will be shown.

図１〜図３に、実施例を示し、図４，図５と同じ記号は同じものを表す。実施例では無人搬送車１２を例とするが、有軌道台車や天井走行車などでもよく、あるいはロードポート間での物品の受け渡しに用いる受け渡し装置でも良い。ここでは移載装置１６を備えているものが受け渡し装置で、移載装置を備えていないものが受け渡し相手である。   1 to 3 show an embodiment, and the same symbols as those in FIGS. 4 and 5 denote the same components. In the embodiment, the automatic guided vehicle 12 is taken as an example, but a tracked carriage, an overhead traveling vehicle, or the like may be used, or a delivery device used for delivery of articles between load ports may be used. Here, the transfer device 16 includes the transfer device 16 and the transfer device does not include the transfer device.

図１，図２において、無人搬送車１２のシャッタ２０の周囲のフレーム２１の開口１９は、下向きの傾斜面２２を下縁部に備えている。下縁部を図１の左側に拡大して示すと、傾斜面２２はシャッタ２０の内から外側の下向きに傾斜する面で、シャッタ２０を巻き上げると、気流は下縁部２２に沿って斜め下向きに吹き出す。シャッタ１０は下向きに開き、無人搬送車１２はロードポート８に面して停止し、シャッタ２０，１０を同期して開き始めると、気流は図１の実線のようになる。無人搬送車１２からの傾斜面２２に沿った気流は斜め下向きに吹き出すので、受け渡し経路の空気はこれに随伴して下向きに移動し、受け渡し経路には渦が実質的に形成されない。   1 and 2, the opening 19 of the frame 21 around the shutter 20 of the automatic guided vehicle 12 includes a downward inclined surface 22 at the lower edge. When the lower edge portion is enlarged and shown on the left side of FIG. 1, the inclined surface 22 is a surface inclined downward from the inside of the shutter 20, and when the shutter 20 is rolled up, the airflow is obliquely downward along the lower edge portion 22. To blow out. The shutter 10 opens downward, the automatic guided vehicle 12 stops facing the load port 8, and when the shutters 20 and 10 start to open synchronously, the airflow becomes as shown by the solid line in FIG. 1. Since the airflow along the inclined surface 22 from the automatic guided vehicle 12 blows off obliquely downward, the air in the delivery path moves downward along with this, and a vortex is not substantially formed in the delivery path.

図２はシャッタ１０，２０をさらに開いた状態を示し、傾斜面２２の影響は小さくなり、無人搬送車１２からの気流は水平ないしやや下向きに吹き出し、シャッタ１０，２０を大きく開いたことに伴い、受け渡し経路の空気の置換がさらに進む。シャッタ１０，２０を全開した時点では、受け渡し経路はクリーンな空気やクリーンなガスにより置換されており、速やかに物品１４を移載できる。   FIG. 2 shows a state in which the shutters 10 and 20 are further opened. The influence of the inclined surface 22 is reduced, and the airflow from the automatic guided vehicle 12 blows out horizontally or slightly downward, and the shutters 10 and 20 are greatly opened. The air replacement in the delivery path further proceeds. When the shutters 10 and 20 are fully opened, the delivery path is replaced with clean air or clean gas, and the article 14 can be transferred quickly.

図３はシャッタ２９を上向きに開く場合の変形例を示し、シャッタ３０は下向きに巻き取られ、シャッタ３０の周囲のフレーム３１では、上向きの傾斜面３２をシャッタ３０の上側に設け、３４は下側に突き出した底部で、シャッタ３０よりも無人搬送車１２の内側にある。ここでシャッタ２９，３０を同期して開くと、無人搬送車１２側からの気流は斜め上向きに上昇し、これに伴って受け渡し経路の空気は破線のように上昇する。そしてシャッタ２９の下側からの気流は、無人搬送車１２に衝突して例えば上下に分かれて移動し、受け渡し経路に渦は形成されない。実施例ではシャッタを上下に開く例を示したが、左右に開く場合も同様で、この場合は無人搬送車１２側のシャッタを、ロードポート８側のシャッタとは左右逆向きに開いて、無人搬送車１２からの気流を開口の外側に、言い換えると受け渡し経路の外側に吹き出させると良い。ただしこのようなものは、本発明の範囲には含まれない。 FIG. 3 shows a modification in which the shutter 29 is opened upward. The shutter 30 is wound downward, and the frame 31 around the shutter 30 is provided with an upward inclined surface 32 on the upper side of the shutter 30, and 34 is the lower side. At the bottom protruding to the side, it is inside the automatic guided vehicle 12 with respect to the shutter 30. Here, when the shutters 29 and 30 are opened synchronously, the airflow from the automatic guided vehicle 12 side rises obliquely upward, and along with this, the air in the transfer path rises as indicated by a broken line. The airflow from the lower side of the shutter 29 collides with the automatic guided vehicle 12 and moves, for example, in an up-and-down direction, and no vortex is formed in the delivery path. In the embodiment, an example in which the shutter is opened up and down is shown. However, the same applies to the case where the shutter is opened left and right. The airflow from the transport vehicle 12 may be blown out of the opening, in other words, out of the delivery path. However, such a thing is not included in the scope of the present invention.

実施例での物品の受け渡し時の気流を模式的に示す部分正面図The partial front view which shows typically the airflow at the time of delivery of the article | item in an Example 図１の状態からさらにシャッターを開いた状態での気流を模式的に示す図The figure which shows typically the airflow in the state which opened the shutter further from the state of FIG. 変形例での物品の受け渡し時の気流を模式的に示す部分正面図The partial front view which shows typically the airflow at the time of delivery of the article | item in a modification 従来例での物品の受け渡し時の気流を模式的に示す部分正面図Partial front view schematically showing an air flow during delivery of an article in a conventional example 従来例での物品の受け渡し時の気流を模式的に示す平面図The top view which shows typically the airflow at the time of delivery of the article | item in a prior art example

符号の説明Explanation of symbols

２ 通路
４ 床面
６ 処理装置
８ ロードポート
９，１９ 開口
１０，２０ シャッタ
１２ 無人搬送車
１３，３３ 受け渡し装置
１４ 物品
１６ 移載装置
１８ ファンフィルタユニット
２１，３１ フレーム
２２，３２ 傾斜面
２９，３０ シャッタ
３４ 底部 2 Passage 4 Floor 6 Processing device 8 Load port 9, 19 Opening 10, 20 Shutter 12 Automatic guided vehicle 13, 33 Delivery device 14 Article 16 Transfer device 18 Fan filter unit 21, 31 Frame 22, 32 Inclined surface 29, 30 Shutter 34 Bottom

Claims (3)

シャッタで覆った開口の内部に物品を収納し、シャッタを上下もしくは左右に、受け渡し相手のシャッタと逆方向に開いて、物品を受け渡すクリーンルーム用の受け渡し装置であって、
シャッタを下向きに開く受け渡し相手との間で物品を受け渡すために、受け渡し装置のシャッタを上向きに移動させるように構成すると共に、受け渡し装置のシャッタの周囲のフレームの下縁をシャッタの内側から外側へと下向きに傾斜する傾斜面とすることにより、シャッタを開き始める際に、受け渡し装置のシャッタとその周囲の傾斜面との間から、傾斜面に沿って下向きに気流を吹き出させるように構成したことを特徴とする、受け渡し装置。 A delivery device for a clean room that houses an article in an opening covered with a shutter, opens the shutter up and down or left and right in a direction opposite to the delivery partner shutter, and delivers the article,
In order to deliver articles to and from a delivery partner that opens the shutter downward, the shutter of the delivery device is configured to move upward, and the lower edge of the frame around the shutter of the delivery device is moved from the inside of the shutter to the outside. By making the inclined surface inclined downward, the airflow is blown downward along the inclined surface from between the shutter of the delivery device and the surrounding inclined surface when the shutter starts to open. A delivery device characterized by that. シャッタで覆った開口の内部に物品を収納し、シャッタを上下もしくは左右に、受け渡し相手のシャッタと逆方向に開いて、物品を受け渡すクリーンルーム用の受け渡し装置であって、A delivery device for a clean room that houses an article in an opening covered with a shutter, opens the shutter up and down or left and right in a direction opposite to the delivery partner shutter, and delivers the article,
シャッタを上向きに開く受け渡し相手との間で物品を受け渡すために、受け渡し装置のシャッタを下向きに移動させるように構成すると共に、受け渡し装置のシャッタの周囲のフレームの上縁をシャッタの内側から外側へと上向きに傾斜する傾斜面とすることにより、シャッタを開き始める際に、受け渡し装置のシャッタとその周囲の傾斜面との間から、傾斜面に沿って上向きに気流を吹き出させるように構成したことを特徴とする、受け渡し装置。  In order to deliver an article to and from a delivery partner that opens the shutter upward, the shutter of the delivery device is configured to move downward, and the upper edge of the frame around the shutter of the delivery device is moved from the inside to the outside of the shutter. By making the inclined surface inclined upward, the airflow is blown upward along the inclined surface from between the shutter of the delivery device and the surrounding inclined surface when the shutter starts to open. A delivery device characterized by that. シャッタで覆った開口の内部に物品を収納する受け渡し装置と、開口をシャッタで覆った受け渡し相手とを備え、前記各シャッタを上下互い違いに同期して開いて、受け渡し装置と受け渡し相手との間で物品を受け渡すクリーンルーム用の受け渡しシステムであって、
シャッタを上向きに開く受け渡し相手との間で物品を受け渡すために、受け渡し装置のシャッタを下向きに移動させるように構成すると共に、受け渡し装置のシャッタの周囲のフレームの下縁をシャッタの内側から外側へと下向きに傾斜する傾斜面とすることにより、シャッタを開き始める際に、受け渡し装置のシャッタとその周囲の傾斜面との間から、傾斜面に沿って下向きに気流を吹き出させるように、受け渡し装置を構成したことを特徴とする、受け渡しシステム。 A delivery device for storing articles in an opening covered by a shutter; and a delivery partner whose opening is covered by a shutter; and each shutter is opened in synchronization with the upper and lower sides , and the delivery device and the delivery partner A delivery system for a clean room that delivers goods,
In order to deliver articles to and from a delivery partner that opens the shutter upward, the shutter of the delivery device is configured to move downward, and the lower edge of the frame around the shutter of the delivery device is moved from the inside to the outside of the shutter. By making the inclined surface inclined downward, the delivery is performed so that airflow is blown downward along the inclined surface from between the shutter of the delivery device and the surrounding inclined surface when the shutter starts to open. A delivery system characterized by comprising a device.
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Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62132013U (en) * 1986-02-12 1987-08-20
JP2001328780A (en) * 2000-05-22 2001-11-27 Daiichi Shisetsu Kogyo Kk Vertical clean conveyer
JP2002203887A (en) * 2001-01-05 2002-07-19 Tdk Corp Mini-environment system and method for operating the same

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62132013U (en) * 1986-02-12 1987-08-20
JP2001328780A (en) * 2000-05-22 2001-11-27 Daiichi Shisetsu Kogyo Kk Vertical clean conveyer
JP2002203887A (en) * 2001-01-05 2002-07-19 Tdk Corp Mini-environment system and method for operating the same

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