201219725 六、發明說明： 【發明所屬之技術領域】 本發明是有關自動倉庫，特別是有 導致的保管物品的污染的自動倉庫。 【先前技術】 在保管如半導體、FPD (平板顯示 塵的物品的自動倉庫中，已知將從搬運 下部吸引空氣，經由過濾器處理後，從 內循環（專利文獻1: JPH06-24507A) 倉庫的外部的清淨空氣，已知在自動倉 導入孔將清淨空氣朝載架的背面側取入 空間—行走空間下部的排氣口的順序移 JP2817605B)。在這些的自動倉庫中， 內朝下方地流動，在載架內從載架的背 空間側流動。 搬運裝置若行走的話，在行走方向 會被壓縮。且在行走方向後方會產生負 亂氣流。這些已被專利文獻3 : JP2009. 揭不：在從搬運裝置的行走方向前方橫 朝載架的給氣量及從行走空間的排氣量 明人’著眼於：在行走空間的上部因爲 間，所以在搬運裝置的行走時被壓縮空 ，而完成本發明。 關於防止由灰塵所 器）等的需避免灰 裝置的行走空間的 載架的背面朝載架 。且爲了利用自動 庫的上部設置空氣 ，並依載架β行走 動（專利文獻2 : 氣流是在行走空間 面側朝前面的行走 前方空氣（環境） 壓，其結果會發生 1 84776Α考慮，並 跨後方的範圍，使 成爲最大。但是發 沒有空氣的退避空 氣容易侵入載架內201219725 VI. Description of the Invention: [Technical Field to Which the Invention Is Ascribed] The present invention relates to an automatic warehouse, and in particular to an automatic warehouse having contamination of stored articles. [Prior Art] In an automatic warehouse that stores items such as semiconductors and FPDs (flat-panel-displayed dust), it is known that air is sucked from the lower part of the conveyance, and after being processed through a filter, it is circulated from the inside (Patent Document 1: JPH06-24507A). The external clean air is known to be taken into the space on the back side of the carrier in the automatic bin introduction hole - the order of the exhaust port in the lower part of the walking space is shifted to JP2817605B). In these automatic warehouses, the inside flows downward, and flows from the back space side of the carrier in the carrier. If the transport device is walking, it will be compressed in the direction of travel. And there is a negative air flow behind the walking direction. These are disclosed in Patent Document 3: JP2009. The amount of air supplied to the carrier from the front of the traveling direction of the transport device and the amount of exhausted air from the walking space are clearly viewed as being in the upper part of the walking space. The present invention has been completed while being compressed while the handling device is being emptied. The back side of the carrier that avoids the walking space of the ash device, such as the prevention of dust, is directed toward the carrier. In order to use the upper part of the automatic library to set the air and move it according to the carrier β (Patent Document 2: The air flow is the forward air (environment) pressure toward the front side of the traveling space surface side, and the result is 1 84776Α, and crosses. The rear range makes it the largest. However, the repellent air without air easily penetrates into the carrier.
S -5- 201219725 【發明內容】 本發明的課題，是藉由在行走空間的上部設置空氣的 退避空間，更確實地防止棚內的物品的污染。 (用以解決課題的手段） 本發明，是一種自動倉庫，是設有沿著搬運裝置的行 走空間具備複數門面（Frontage )的載架，並且設有：從 載架的背面側朝行走空間側供給清淨氣體用的給氣路、及 從行走空間的下部排氣用的第1排氣路，其特徵爲：在行 走空間的上部設有第2排氣路。清淨氣體雖是例如清淨空 氣’但是由氮氣體等也可以。第2排氣路是時常排氣者、 或在行走空間的上部只有氣壓增加時才排氣者也可以。 搬運裝置是在行走空間內行走的話，在行走方向前方 因爲空氣被壓縮，所以會發生排除壓。特別是在行走空間 的上部因爲沒有空氣的退避空間，所以空氣容易侵入載架 。對於此若從行走空間的上下排氣的話，藉由使行走空間 內的氣壓不斷地保持比載架內的氣壓更低，就可確實地防 止從行走空間朝載架的空氣的逆流。又在此說明書中，排 除壓是指因空氣被壓縮所產生的氣壓的增加部分的意思， 氣壓是指靜壓的意思。 較佳是，行走空間上部的第2排氣路，是沿著搬運裝 置的行走方向被配置，且具備對應行走空間內的氣壓開閉 的複數調節風門。如此的話，在行走空間的上部若氣壓增 -6 - 201219725 加的話，可以自動地將調節風門打開來增加排氣量。 且較佳是，行走空間上部的第2排氣路，是沿著搬運 裝置的行走方向被配置，且具備使排氣量對應搬運裝置的 位置及移動方向變化的複數風扇。如此的話，因爲容易了 解搬運裝置的位置及移動方向，所以在行走空間的上部當 氣壓增加之後，可以縮小直到排氣量增加爲止的遲延。 發明人發現：在行走空間的端部因爲沒有空氣的退避 空間，所以藉由搬運裝置被壓縮的空氣特別容易侵入載架 。在此，在行走空間的至少一端部中，使搬運裝置的行走 方向的每單位長度的從行走空間的排氣能力，比行走空間 的中間部更高。如此的話，可防止空氣在行走空間的端部 侵入載架內。 發明人以數値模擬調查自動倉庫內的氣流，確認；藉 由在行走空間的上下設置排氣路，可更確實地防止載架內 的物品的污染。且確認：藉由增加行走空間端部中的排氣 能力，可防止端部的門面的污染。進一步製作實施例的自 動倉庫的縮小模型’藉由可視化調查氣流。且確認可獲得 與數値模擬同樣的結果。 較佳是’在行走空間的至少一端部中設有排氣裝置。 較佳是’前述複數調節風門，是由：以開閉軸爲中心 可開閉自如的可動部、及將可動部朝關閉側推迫的彈性體 所構成。 較佳是，前述複數調節風門，是由：檢出行走空間的 內部的壓力及自動倉庫的外部的壓力之間的差壓的感測器 201219725 、及以開閉軸爲中心可開閉自如的可動部、及藉由前述感 測器的訊號將可動部開閉的馬達所構成。 且本發明’是一種自動倉庫的控制方法，該自動倉庫 ，是設有沿著搬運裝置的行走空間複數具備門面的載架， 並且設有：從載架的背面側朝行走空間側供給清淨氣體用 的給氣路、及從行走空間的下部排氣用的第1排氣路，其 特徵爲：藉由在行走空間的上部設置第2排氣路，防止在 載架的上部的高度中的行走空間的氣壓比載架內的氣壓更 筒。 較佳是，在行走空間的至少一端部中，藉由使搬運裝 置的行走方向的每單位長度的從行走空間的排氣能力，比 行走空間的中間部更高，就可防止在載架的至少一端部中 的行走空間的氣壓比載架內的氣壓更高。 以下顯示供實施本發明用的最適實施例。本發明的範 圍，是依據申請專利範圍的記載，並參酌說明書的記載及 此領域中的周知技術，並依據本行業者的理解決定。 【實施方式】 在第1圖〜第9圖中，顯示實施例的自動倉庫2及其 變形。在各圖中，4是行走空間，在其左右兩側或左右一 方設有載架6，載架6是個別的棚22、23的集合體。且 在載架6中將平板顯示器（FPD)的處理裝置8、或半導 體的處理裝置等連接也可以。在行走空間4中設置例如行 走軌道10，供作爲搬運裝置的塔式起重機12行走。又可 201219725 取代塔式起重機12，而使用無人搬運車、有軌道台車等 的任意的搬運裝置，其行走方向是第1圖的長度方向。自 動倉庫2，除了排氣裝置34、40、排氣口 38等以外，是 氣密地構成。 塔式起重機12，是具備沿著台車14及柱16以及柱 16昇降的昇降台18，昇降台18是爲了移載FPD等的卡 匣20，而具備平面關節型機械手臂（Selective Compliance Assembly Robot Arm)、滑動式叉等的移載裝 置。在載架6中設有多數的棚22、23，其中的棚23,是 載架6的端部的棚，換言之行走空間4的端部的棚。在此 ，棚是成爲保管物品的單位的空間的意思，也稱作門面。 在載架6、6的從行走空間4所見的背面側，設有給氣路 24、24，例如在棚22、23各設有風扇過濾器組件26，處 理來自給氣路24的空氣，作爲清淨空氣朝棚22、23供給。 在實施例中，保管的物品，雖是FPD或半導體等的 卡匣，但是物品的種類爲任意。保管卡匣20的空氣雖是 清淨空氣，但是氮氣體等也可以。進一步自動倉庫2是在 局部清淨的條件下使用，自動倉庫2的外部不一定需要清 淨。但是自動倉庫2的外部是清淨的環境也可以。 30是控制器，用來管理自動倉庫2，具體而言是對於 塔式起重機12給與行走、昇降、物品的移載的指令，在 指定的棚及棚之間搬運卡匣20。又在棚22、23以外，設 置成爲與自動倉庫2的外部之間的出入口的平台也可以。 且控制器30，是管理：塔式起重機12的現在位置及移動S -5-201219725 SUMMARY OF THE INVENTION An object of the present invention is to prevent contamination of articles in a shed more reliably by providing a retreat space for air in an upper portion of a walking space. (Means for Solving the Problem) The present invention is an automatic warehouse provided with a carrier having a plurality of facades along a traveling space of the conveying device, and is provided from the back side of the carrier toward the side of the traveling space The air supply path for supplying the clean gas and the first exhaust path for exhausting the lower portion of the traveling space are characterized in that a second exhaust path is provided in an upper portion of the traveling space. The clean gas may be, for example, clean air, but may be a nitrogen gas or the like. The second exhaust passage may be exhausted from time to time, or may be exhausted only when the air pressure is increased in the upper portion of the traveling space. When the transport device travels in the walking space, the air is compressed in front of the traveling direction, so the pressure is removed. In particular, since there is no air retreat space in the upper part of the walking space, air easily enters the carrier. When the air is exhausted from the upper and lower sides of the traveling space, the air pressure in the traveling space is kept lower than the air pressure in the carrier, so that the backflow of the air from the traveling space to the carrier can be surely prevented. Further, in this specification, the exhaust pressure means the portion of the air pressure generated by the compression of the air, and the air pressure means the static pressure. Preferably, the second exhaust passage in the upper portion of the traveling space is disposed along the traveling direction of the transporting device, and includes a plurality of dampers corresponding to the opening and closing of the air pressure in the traveling space. In this case, if the air pressure is increased by -6 - 201219725 in the upper part of the walking space, the damper can be automatically opened to increase the displacement. Preferably, the second exhaust passage in the upper portion of the traveling space is disposed along the traveling direction of the transport device, and includes a plurality of fans that change the displacement amount in accordance with the position and the moving direction of the transport device. In this case, since the position and the moving direction of the conveying device are easily understood, the increase in the air pressure in the upper portion of the traveling space can be reduced until the exhaust gas amount increases. The inventors have found that air at the end of the walking space is particularly susceptible to intrusion into the carrier because there is no air retreat space. Here, in at least one end portion of the traveling space, the exhausting ability per unit length from the traveling space in the traveling direction of the conveying device is higher than the intermediate portion of the traveling space. In this way, air can be prevented from entering the carrier at the end of the walking space. The inventors used a number of simulations to investigate the airflow in the automatic warehouse, and confirmed that by providing an exhaust passage above and below the walking space, it is possible to more reliably prevent contamination of articles in the carrier. It is also confirmed that contamination of the end portion of the end portion can be prevented by increasing the exhausting power in the end portion of the walking space. Further reducing the reduced model of the automated warehouse of the embodiment 'by visualizing the airflow. And it is confirmed that the same result as the digital simulation can be obtained. Preferably, the exhaust means is provided in at least one end portion of the walking space. Preferably, the plurality of dampers are composed of a movable portion that is openable and closable about the opening and closing axis, and an elastic body that urges the movable portion toward the closing side. Preferably, the plurality of dampers are: a sensor 201219725 that detects a difference between a pressure inside the walking space and a pressure outside the automatic warehouse, and a movable portion that can be opened and closed around the opening and closing axis. And a motor that opens and closes the movable portion by the signal of the sensor. Further, the present invention is a method for controlling an automatic warehouse, which is provided with a carrier having a plurality of facades along a traveling space of the conveying device, and is provided with: supplying clean gas from the back side of the carrier toward the side of the traveling space The air supply path for use and the first exhaust path for exhausting the lower portion of the traveling space are characterized in that the second exhaust path is provided in the upper portion of the traveling space to prevent the height of the upper portion of the carrier. The air pressure in the walking space is cooler than the air pressure in the carrier. Preferably, at least one end portion of the traveling space is prevented from being on the carrier by making the exhausting ability per unit length of the traveling space in the traveling direction higher than the intermediate portion of the traveling space. The air pressure in at least one of the walking spaces is higher than the air pressure in the carrier. The preferred embodiment for carrying out the invention is shown below. The scope of the present invention is determined by the description of the scope of the claims and the description of the specification and well-known techniques in the field, and is determined according to the understanding of the industry. [Embodiment] In the first to ninth drawings, the automatic warehouse 2 of the embodiment and its modifications are shown. In each of the figures, 4 is a walking space, and a carrier 6 is provided on the left and right sides or on the left and right sides, and the carrier 6 is an assembly of individual sheds 22 and 23. Further, in the carrier 6, a processing device 8 of a flat panel display (FPD), a processing device for a semiconductor, or the like may be connected. For example, the traveling rail 10 is provided in the walking space 4, and the tower crane 12 as a conveying device travels. Further, in 201219725, instead of the tower crane 12, an arbitrary transport device such as an automated guided vehicle or a railroad car is used, and the traveling direction is the longitudinal direction of Fig. 1. The automatic warehouse 2 is airtight except for the exhaust devices 34 and 40, the exhaust port 38, and the like. The tower crane 12 is provided with a lifting platform 18 that moves up and down along the carriage 14 and the column 16 and the column 16. The lifting platform 18 is provided with a planar articulated robot arm for transferring a cassette 20 such as an FPD. ), a transfer device such as a sliding fork. A plurality of sheds 22, 23 are provided in the carrier 6, and the shed 23 is a shed at the end of the carrier 6, in other words, a shed at the end of the walking space 4. Here, the shed is a space that becomes a unit for storing articles, and is also called a facade. In the back sides of the carriers 6, 6 which are seen from the walking space 4, air supply passages 24, 24 are provided. For example, fan filters 26 are provided in the sheds 22, 23, respectively, and the air from the air supply passage 24 is treated as clean. The air is supplied to the sheds 22, 23. In the examples, the articles to be stored are cassettes such as FPDs or semiconductors, but the types of articles are arbitrary. Although the air in the storage cassette 20 is clean air, a nitrogen gas or the like may be used. Further, the automatic warehouse 2 is used under partially clean conditions, and the exterior of the automatic warehouse 2 does not necessarily need to be cleaned. However, the outside of the automatic warehouse 2 is also a clean environment. 30 is a controller for managing the automatic warehouse 2, specifically, for the tower crane 12 to give instructions for walking, lifting, and moving articles, and to carry the cassette 20 between the designated shed and the shed. Further, in addition to the sheds 22 and 23, a platform that is an entrance and exit to the outside of the automatic warehouse 2 may be provided. And the controller 30 is managed: the current position and movement of the tower crane 12
S -9- 201219725 方向以及速度、昇降台18的高度位置及昇降方向以及昇 降速度，對應這些控制從行走空間4的排氣、及朝載架6 的給氣。又朝載架6的給氣量是固定也可以。以下說明朝 行走空間4的給排氣。 第2圖〜第6圖的32是自動倉庫2的頂棚，在頂棚 32之中在至少行走空間4的上部設有排氣裝置34，從行 走空間4朝外部排氣。且在載架6的底部設置風扇36， 將行走空間4的下部的空氣’朝給氣路24循環，並且將 一部分從排氣口 38朝自動倉庫2的外部排氣。又不設置 風扇3 6也可以。例如，藉由風扇過濾器組件2 6將行走空 間4的下部的空氣朝給氣路24側引入，從行走空間4的 下部排氣也可以。且來自排氣裝置34的空氣也由過濾器 等淨化，朝給氣路24循環也可以。進一步排氣裝置34的 集合是第2排氣路，風扇36及排氣口 38的對的集合是第 1排氣路。且如第1圖所示，在行走空間4的底面設置排 氣口 3 9進行排氣也可以。風扇過濾器組件26原則上雖是 設在每一棚22，但是如半導體卡匣等保管比較小的物品 的情況時’每數棚才設置一風扇過濾器組件26也可以。 即在不需要每一棚22、23皆設置風扇過濾器組件26。 塔式起重機12的機體長，是成爲比沿著行走方向的 卡匣20的長度更長。因此在行走空間4的兩端會產生不 面向棚23的空間，較佳是在此空間也設置排氣裝置40。 又排氣裝置40是設在行走空間4的至少—端，較佳是設 在兩端。且可取代設置排氣裝置40，在行走空間4的端 -10- •201219725 部的棚23的位置，使排氣裝置34及風扇36的能力，比 沿者行走空間的中間的部分更高也可以。無論那—種情況 ’在棚23的位置，使風扇過濾器組件26的給氣能力，比 對於棚22的位置更高較佳。 在第2圖〜第6圖中’外框字的箭頭是顯示清淨空氣 或是排氣裝置34處理完成的空氣的流動，附加剖面線的 箭頭’是顯示在行走空間4內具有被污染可能性的空氣的 流動。行走空間4的中間部中的空氣的流動，如第4圖、 第5圖所示。塔式起重機12若從第4圖的左朝右移動的 話’在其行走方向前方，空氣會被壓縮而發生排除壓。相 反地’在一方塔式起重機12的後方，發生負壓。排除壓 及負壓，是在台車14的前後成爲最大，在昇降台18的前 後也變大，在其以外的位置稍爲變小。在棚22中清淨空 氣雖是從風扇過濾器組件被給氣，但是排除壓是變得比清 淨空氣的氣壓更高的話，行走空間4內的空氣會侵入棚 22內。特別是不設置排氣裝置34的情況時，在行走空間 4的上部氣壓增加，棚22內的卡匣20就具有被污染的可 能性。例如從行走空間4的中間部朝向上部的氣流，或是 空氣的波若發生的話，在頂棚的部分，氣流會被堵塞，使 動壓被轉換成靜壓而使氣壓增加，而朝棚22逆流。 對於此，在實施例中，將行走空間4內的空氣從下部 的風扇36及上部的排氣裝置34排氣。因此不通的氣流或 是不通的空氣的波等不會發生，在行走空間4內’局部的 氣壓的增加被抑制。其結果，行走空間內的空氣就不會朝S -9- 201219725 The direction and speed, the height position of the lifting platform 18, the lifting direction, and the raising and lowering speed correspond to the control of the exhaust from the traveling space 4 and the air supply to the carrier 6. The amount of air supplied to the carrier 6 is also fixed. The supply and exhaust to the walking space 4 will be described below. 32 of Fig. 2 to Fig. 6 are the ceilings of the automatic warehouse 2, and an exhaust device 34 is provided in the ceiling 32 at least in the upper portion of the traveling space 4, and is exhausted from the traveling space 4 to the outside. Further, a fan 36 is provided at the bottom of the carrier 6, and the air 'under the lower portion of the traveling space 4 is circulated toward the air supply path 24, and a part is exhausted from the exhaust port 38 toward the outside of the automatic warehouse 2. It is also possible to set the fan 3 6 without setting it. For example, the air in the lower portion of the walking space 4 is introduced to the side of the air supply path 24 by the fan filter unit 26, and the air is exhausted from the lower portion of the traveling space 4. The air from the exhaust unit 34 is also purified by a filter or the like, and may be circulated toward the air supply path 24. Further, the set of exhaust devices 34 is the second exhaust passage, and the set of pairs of the fan 36 and the exhaust port 38 is the first exhaust passage. Further, as shown in Fig. 1, an exhaust port 39 may be provided on the bottom surface of the walking space 4 for exhausting. In principle, the fan filter unit 26 is provided in each of the sheds 22. However, if a relatively small article such as a semiconductor cassette is stored, a fan filter unit 26 may be provided for each shed. That is, the fan filter assembly 26 is provided without the need for each of the sheds 22, 23. The length of the tower crane 12 is longer than the length of the cassette 20 along the traveling direction. Therefore, a space which does not face the shed 23 is generated at both ends of the walking space 4, and it is preferable to provide the venting means 40 in this space. Further, the exhaust unit 40 is provided at least at the end of the walking space 4, preferably at both ends. Instead of providing the exhaust device 40, the position of the shed 23 at the end of the walking space 4 - 10 - 201219725 allows the exhaust device 34 and the fan 36 to have a higher capacity than the middle portion of the walking space. can. Regardless of the situation, the position of the shed 23 allows the fan filter assembly 26 to provide a higher gas supply capacity than the position of the shed 22. In the second to sixth figures, the arrow of the outer frame word indicates the flow of the clean air or the air that has been processed by the exhaust device 34, and the arrow of the additional hatching indicates that there is a possibility of contamination in the walking space 4. The flow of air. The flow of air in the intermediate portion of the walking space 4 is as shown in Figs. 4 and 5. When the tower crane 12 moves from the left to the right of Fig. 4, the air is compressed and the pressure is removed in front of the traveling direction. In contrast, a negative pressure occurs behind the one tower crane 12. The pressure and the negative pressure are the largest in the front and rear of the trolley 14, and also increase in the front and rear of the lifting platform 18, and are slightly smaller at the other positions. Although the clean air in the shed 22 is supplied from the fan filter unit, the air in the traveling space 4 is intruded into the shed 22 if the pressure is higher than the air pressure of the clean air. In particular, when the exhaust unit 34 is not provided, the air pressure in the upper portion of the traveling space 4 increases, and the cassette 20 in the shed 22 has the possibility of being contaminated. For example, if the airflow from the middle portion of the walking space 4 toward the upper portion or the wave of the air occurs, the airflow is blocked in the portion of the ceiling, and the dynamic pressure is converted into static pressure to increase the air pressure, and the airflow is increased toward the shed 22. . In this regard, in the embodiment, the air in the traveling space 4 is exhausted from the lower fan 36 and the upper exhaust unit 34. Therefore, the impenetrable airflow or the wave of the impassable air does not occur, and the increase in local air pressure in the traveling space 4 is suppressed. As a result, the air in the walking space will not
S -11 - 201219725 棚22內逆流。此事在端部的棚23也同樣。在塔式起重機 12的行走方向後方會產生負壓，負壓本身雖不會將棚22 內的物品污染，但是在負壓消解的過程中，亂氣流會產生 ，行走空間4內的空氣會隨此侵入棚22內。在此，在塔 式起重機12的行走方向後方，將朝棚22的給氣量增加使 負壓被迅速地消解，並且將在負壓的消滅時發生亂氣流藉 由風扇36及上部的排氣裝置34排氣。因此，與行走方向 前方同樣，在後方，也可防止行走空間4內的空氣侵入棚 22 、 23 內。 以上，可以如下地換句話說。防止空氣從行走空間4 朝棚22、23侵入用的條件，是使棚22、23內的氣壓始終 比行走空間4內的氣壓更高。在此藉由從行走空間4的下 部的風扇36及上部的排氣裝置34的雙方進行排氣，在行 走空間的上部或下部等防止氣壓局部地增加，使棚22、 23內的氣壓始終比行走空間4的氣壓更高。且在塔式起 重機12的行走方向後方，增加朝棚22、23的給氣量來消 解負壓，將消解負壓時的亂氣流由風扇36及上部的排氣 裝置34排氣。 在第6圖顯示端部的棚23特有的問題。又在實施例 中因爲保管中FPD的卡匣20，所以如文字上的意思只有 以最端部的棚23爲對象’但是如半導體卡匣等小的物品 的情況時，在端部附近的2〜數門面程度的領域施加同樣 的處理。塔式起重機12若第6圖的從左朝右行走的話’ 行走空間4內的端部的空氣會被壓縮。與行走空間4的中 -12- 201219725 央部相異，在端部中，沒有被壓縮空氣的退避空間。因此 排除壓變更高。相反地塔式起重機12若從第6圖的右朝 左移動的話，端部的空氣會急劇地膨脹而發生強力的負壓 。如以上，在行走空間4的端部，由塔式起重機12的移 動所產生的影響更顯著。 在此對於例如端部的棚23，使排氣裝置34及風扇36 的排氣能力更高。或是在行走空間4的兩端部設置排氣裝 置40，將被壓縮的空氣排氣。在此需要使沿著塔式起重 機1 2的行走方向的每單位長度的排氣能力，比行走空間 4的中間部更高。又除了上述以外，在端部的棚23中， 從風扇過濾器組件的給氣能力，也比中間部的棚22更高 較佳。 在第7圖〜第9圖中，顯示排氣裝置34、40的例。 在第7圖的排氣裝置35中，在行走空間4側設置過濾器 43，在外部空間42側設置風扇44，藉由來自控制器的控 制訊號控制風扇44。如此對應塔式.起重機的位置及行走 方向以及行走速度、昇降台18的位置及昇降方向以及昇 降速度等，控制從風扇44的送風量來控制排氣量。這些 的資料因爲對於控制器爲已知，所以可以迅速地控制排氣 量。過濾器43的功能，是在停止風扇44時，當外氣從風 扇的翼片及翼片的間侵入時，用來去除污染物質。因此’ 在風扇44追加擋板等時，就不用設置過濾器43。排氣裝 置40雖也可以與排氣裝置35同樣地構成，但是在排氣裝 置40使風扇44可逆轉自如，當塔式起重機從端部離開時S -11 - 201219725 Backflow in the shed 22. The same is true for the shed 23 at the end. A negative pressure is generated behind the traveling direction of the tower crane 12, and the negative pressure itself does not contaminate the contents of the shed 22, but in the process of negative pressure digestion, a disordered airflow occurs, and the air in the walking space 4 follows. This intrinsic shed 22 is inside. Here, after the traveling direction of the tower crane 12, the amount of air supplied to the shed 22 is increased so that the negative pressure is rapidly dissipated, and the turbulent airflow is generated by the fan 36 and the upper exhaust device when the negative pressure is extinguished. 34 exhaust. Therefore, similarly to the front in the traveling direction, the air in the traveling space 4 can be prevented from intruding into the sheds 22 and 23 at the rear. The above can be said in other words as follows. The condition for preventing air from entering the walking space 4 toward the sheds 22, 23 is such that the air pressure in the sheds 22, 23 is always higher than the air pressure in the traveling space 4. Here, by exhausting both the fan 36 at the lower portion of the traveling space 4 and the exhaust device 34 at the upper portion, the air pressure is locally increased in the upper portion or the lower portion of the traveling space, and the air pressure in the sheds 22 and 23 is always higher than The air pressure in the walking space 4 is higher. Further, in the traveling direction of the tower crane 12, the amount of air supplied to the sheds 22 and 23 is increased to eliminate the negative pressure, and the turbulent airflow at the time of absorbing the negative pressure is exhausted by the fan 36 and the upper exhaust unit 34. Fig. 6 shows a problem specific to the shed 23 at the end. Further, in the embodiment, since the cassette 20 of the FPD is stored, the meaning of the character is only the object of the most shed 23, but in the case of a small article such as a semiconductor cassette, 2 near the end. The same processing is applied to the field of the number of facades. When the tower crane 12 travels from left to right in Fig. 6, the air at the end in the walking space 4 is compressed. It is different from the central part of the walking space 4, -12-201219725, and there is no retreat space for compressed air in the end. Therefore, the pressure change is high. On the other hand, if the tower crane 12 is moved from the right to the left of Fig. 6, the air at the end portion is rapidly expanded to generate a strong negative pressure. As described above, at the end of the walking space 4, the influence by the movement of the tower crane 12 is more remarkable. Here, for example, the shed 23 of the end portion makes the exhausting capacity of the exhaust unit 34 and the fan 36 higher. Alternatively, an exhaust device 40 is provided at both ends of the walking space 4 to exhaust the compressed air. Here, it is necessary to make the exhausting ability per unit length in the traveling direction of the tower hoist 12 higher than the intermediate portion of the traveling space 4. Further, in addition to the above, in the shed 23 of the end portion, the air supply capability from the fan filter unit is also higher than that of the shed 22 in the intermediate portion. In the seventh to ninth drawings, examples of the exhaust devices 34 and 40 are shown. In the exhaust unit 35 of Fig. 7, a filter 43 is provided on the side of the traveling space 4, and a fan 44 is provided on the side of the external space 42, and the fan 44 is controlled by a control signal from the controller. In this way, the position of the crane, the traveling direction and the traveling speed, the position of the lifting platform 18, the lifting direction, and the ascending speed are controlled in accordance with this, and the amount of air blown from the fan 44 is controlled to control the amount of exhaust. These data are known to the controller so that the amount of exhaust can be quickly controlled. The function of the filter 43 is to remove contaminants when the outside air is invaded from between the fins and the fins of the fan when the fan 44 is stopped. Therefore, when the baffle or the like is added to the fan 44, the filter 43 is not required to be provided. The exhaust unit 40 may be configured similarly to the exhaust unit 35, but the exhaust unit 40 may reversibly rotate the fan 44 when the tower crane is separated from the end.
S -13- 201219725 ’將外部空間4 2的空氣經由過濾器4 3處理後朝行走空間 4給氣也可以。 第8圖是顯示壓力調節風門46，壓力調節風門46是 在被設在行走空間4的頂棚等的開口 45，沿著塔式起重 機12的行走方向設置複數個。將排氣裝置34、4〇全部由 壓力調節風門46構成也可以，將一部分由固定的排氣量 的風扇構成’其他由壓力調節風門46構成也可以。47是 可動部’藉由彈性體48朝關閉的側被推迫，以開閉軸49 爲中心而開閉自如。且在壓力調節風門46中，例如5帕 (Pa)程度的氣壓差是在行走空間4及外部空間42之間 發生的話’可動部47就會打開進行排氣。如此的話不需 要控制就可以調整從行走空間4的排氣量，特別是與排氣 量固定的排氣風扇組合的話，就可以對應塔式起重機的行 走’便宜且自動地調節排氣量。 第9圖是顯示使用微差壓感測器54的調節風門50， 與第8圖相同符號是顯示相同者。52是驅動用的馬達， 將可動部47開閉，54是微差壓感測器，檢出行走空間4 及外部空間42間的差壓。在這種感測器中，例如在行走 空間4側及外部空間42側之間配置隔膜，檢出對應氣壓 的差之隔膜的變形。且可對應氣壓的差，將可動部47開 閉。調節風門50是與排氣量固定的排氣風扇組合也可以 ，且皆可使用於排氣裝置34、40的其中任一。 在實施例中可獲得以下的效果。 (1)藉由在行走空間4的上部設置排氣裝置34，就 -14 - 201219725 可防止沒有退避空間的空氣由行走空間4的上部侵入棚 22 、 23 內。 (2 )在行走空間4的端部，藉由使排氣能力比其他 的部分更高，就可防止在行走空間的端部被壓縮的空氣進 入端部的棚23。 (3 )排氣裝置34、40，若使用第7圖的排氣裝置b 的話，就可以對應塔式起重機的位置及速度等，無控制遲 延地調整排氣量β (4)當第8圖、第9圖，在使用機械性開閉的調節 風門4 6、5 0的話，當行走空間4內的氣壓增加時就可以 進行排氣，不需要進行控制* (5 )排氣裝置34、40，若組合排氣量固定的排氣風 扇、及調節風門46或調節風門50的話，就可以自動地調 整排氣量。 【圖式簡單說明】 [第1圖]顯示除了頂棚以外的實施例的自動倉庫的平 面圖。 [第2圖]實施例的自動倉庫的前視圖。 [第3圖]顯示去除了一方的載架的實施例的自動倉庫 的側面圖。 [第4圖]顯示由塔式起重機所產生的排除壓和負壓以 及給氣和排氣的側面圖》 [第5圖]顯示由塔式起重機所產生的排除壓和負壓以S -13- 201219725 'The air in the external space 42 is treated by the filter 4 3 and then supplied to the walking space 4 . Fig. 8 shows a pressure regulating damper 46 which is provided in the opening 45 of the ceiling or the like of the walking space 4, and is provided in plural along the traveling direction of the tower crane 12. All of the exhaust devices 34 and 4 may be constituted by the pressure regulating damper 46, and some of them may be constituted by a fan having a fixed exhaust gas amount. The other may be constituted by the pressure regulating damper 46. 47 is a movable portion' that is urged toward the closed side by the elastic body 48, and is opened and closed around the opening and closing shaft 49. Further, in the pressure regulating damper 46, for example, a difference in air pressure of about 5 Pa (Pa) occurs between the traveling space 4 and the external space 42. The movable portion 47 is opened and exhausted. In this case, the amount of exhaust gas from the traveling space 4 can be adjusted without control, and in particular, if it is combined with an exhaust fan having a fixed exhaust gas, the amount of exhaust gas can be adjusted inexpensively and automatically corresponding to the traveling of the tower crane. Fig. 9 is a view showing the damper 50 using the differential pressure sensor 54, and the same reference numerals as in Fig. 8 show the same. Reference numeral 52 denotes a motor for driving, and the movable portion 47 is opened and closed, and 54 is a differential pressure sensor, and the differential pressure between the traveling space 4 and the external space 42 is detected. In such a sensor, for example, a diaphragm is disposed between the side of the traveling space 4 and the side of the external space 42, and deformation of the diaphragm corresponding to the difference in air pressure is detected. Further, the movable portion 47 can be opened and closed in accordance with the difference in air pressure. The damper 50 may be combined with an exhaust fan having a fixed amount of exhaust gas, and may be used for any of the exhaust devices 34, 40. The following effects can be obtained in the examples. (1) By providing the exhaust device 34 at the upper portion of the walking space 4, it is possible to prevent the air having no retreat space from intruding into the sheds 22, 23 from the upper portion of the traveling space 4 by -14 - 201219725. (2) At the end of the walking space 4, by making the exhausting ability higher than that of the other portions, it is possible to prevent the air compressed at the end portion of the traveling space from entering the shed 23 at the end portion. (3) Exhaust devices 34 and 40, if the exhaust device b of Fig. 7 is used, the displacement and the amount of exhaust gas can be adjusted without delay due to the position and speed of the tower crane. (4) In the ninth figure, when the mechanically opened and closed damper 46, 50 is used, the exhaust gas can be exhausted when the air pressure in the walking space 4 increases, and no control is required* (5) the exhausting devices 34, 40, If the exhaust fan with a fixed exhaust volume, and the damper 46 or the damper 50 are combined, the amount of exhaust can be automatically adjusted. BRIEF DESCRIPTION OF THE DRAWINGS [Fig. 1] A plan view showing an automatic warehouse of an embodiment other than a ceiling. [Fig. 2] Front view of the automatic warehouse of the embodiment. [Fig. 3] A side view showing an automatic warehouse in which an embodiment of one of the carriers is removed. [Fig. 4] shows a side view of the discharge pressure and the negative pressure generated by the tower crane and the supply and exhaust gas. [Fig. 5] shows the exclusion pressure and the negative pressure generated by the tower crane.
S -15- 201219725 及給氣和排氣的前視圖。 中的空氣的壓縮和膨脹 I器組件的模型圖》 8 ° 1節風門的模型圖。 [第6圖]顯不自動倉庫的端部 以及對於其的給氣和排氣的圖。 [第7圖]設在頂棚等的風扇過丨 [第8圖]壓力調節風門的模型[ [第9圖]使用微差壓感測器的震 【主要元件符號說明】 2 :自動倉庫 4 :行走空間 6 :載架 8 :處理裝置 1 0 :行走軌道 :塔式起重機 Η :台車 16 :柱 1 8 :昇降台 20 :卡匣 22 、 23 :棚 24 :給氣路 2 6 :風扇過濾器組件 3 0 :控制器 32 =頂棚 34、35 ··排氣裝置 -16- 201219725 36 :風扇 3 8、3 9 :排氣口 40 :排氣裝置 4 2 :外部空間 43 :過濾器 44 :風扇 45 :開口 46 :壓力調節風門 47 :可動部 48 :彈性體 49 :開閉軸 5 0 :調節風門 5 2 :馬達 54 :微差壓感測器S -15- 201219725 and front view of the air supply and exhaust. The compression and expansion of the air in the model diagram of the I component is a model diagram of the 8 ° 1 throttle. [Fig. 6] A diagram showing the end of the automatic warehouse and the supply and exhaust of the same. [Fig. 7] Fans installed in the ceiling, etc. [Fig. 8] Model of the pressure regulating damper [ [Fig. 9] Using the vibration of the differential pressure sensor [Main component symbol description] 2: Automatic warehouse 4: Walking space 6 : Carrier 8 : Processing device 1 0 : Walking track : Tower crane Η : Pallet 16 : Column 1 8 : Lifting table 20 : cassette 22 , 23 : Shed 24 : Air supply 2 6 : Fan filter Component 3 0 : Controller 32 = Ceiling 34, 35 ··Exhaust device-16- 201219725 36 : Fan 3 8 , 3 9 : Exhaust port 40 : Exhaust device 4 2 : External space 43 : Filter 44 : Fan 45: opening 46: pressure regulating damper 47: movable portion 48: elastic body 49: opening and closing shaft 5 0: adjusting damper 5 2 : motor 54: differential pressure sensor
S -17-S -17-