CN102658942A - Automated warehouse and control method thereof - Google Patents
Automated warehouse and control method thereof Download PDFInfo
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- CN102658942A CN102658942A CN2011103205724A CN201110320572A CN102658942A CN 102658942 A CN102658942 A CN 102658942A CN 2011103205724 A CN2011103205724 A CN 2011103205724A CN 201110320572 A CN201110320572 A CN 201110320572A CN 102658942 A CN102658942 A CN 102658942A
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- air
- automated warehouse
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Abstract
The invention provides an automated warehouse and a control method thereof. The automated warehouse comprises a carrier frame that has a plurality of frontages along a moving space of a transportation device, a gas supply passage for supplying clean gas from a back side of the carrier frame toward the moving space, and a lower-side first gas exhaust passage. Further a second gas exhaust passage is set at an upper side of the moving space.
Description
Technical field
The present invention relates to automated warehouse, relate in particular to the automated warehouse of the pollution of the custody articles that prevent that dust from causing.
Background technology
At keeping quartz conductor, FPD (Flat Panel Display; And so on flat-panel monitor) etc. to avoid in the automated warehouse of article of dust; We know from the go bottom in space of carrying device and attract air, handle with filter, from the back side of shelf toward shelf in on-cycle technological (patent documentation 1:JPH06-24507A).And know; In order to utilize the exterior pure air of automated warehouse; On the top of automated warehouse the air entrance hole is set; Obtain pure air toward the back side one side of shelf, the technology (patent documentation 2:JP2817605B) that pure air is moved according to the such order of exhausr port of the shelf → space of the going → bottom, space of going.In these automated warehouses, air-flow flows downward in the space of going, in shelf from the back side one side space one side flow of going forward of shelf.
When carrying device went, air (gas medium) was compressed in the place ahead of travel direction.And, producing negative pressure at the travel direction rear, its result produces air turbulence.These situation are considered in patent documentation 3:JP2009-184776A, disclose in spreading all over from travel direction the place ahead of carrying device to the scope at rear, to make toward the air demand of shelf with from the free air capacity in the space of going to be maximum technology.But the inventor is conceived on the top in the space of going to have obtained the present invention owing to do not have place that air escapes, invaded easily in the shelf by the carrying device air compressed of going.
Summary of the invention
Problem of the present invention is exactly through the top in the space of going air escape place to be set, and prevents the pollution of article in the shelf more reliably.
The invention is characterized in; Be used for the air feed path of clean gas is provided and is used for being provided with the 2nd exhaust channel on the top in the space of going being provided with to possess the shelf of a plurality of standard widths of a room in an old-style house along the space of going of carrying device and be provided with from the automated warehouse of the 1st exhaust channel of bottom, the space exhaust of going from one sideways space, the back side, one side of shelf.Clean gas is for example pure air, but also can be nitrogen etc.The 2nd exhaust channel both can be the path of exhaust always, also can be the path of exhaust when only air pressure increases on the top in the space of going.
When in carrying device is going the space, going, air is compressed in travel direction the place ahead, therefore produces to get rid of to press.Especially on the top in the space of going owing to there is not air escape place, so air is invaded in the shelf easily.Relative therewith, if from the space of going carry out exhaust up and down, then can continuously the air pressure in the space of going be held in lower than the air pressure in the shelf, can prevent reliably air from the space of going to the shelf adverse current.In addition, in this specification sheets, get rid of pressure and mean the recruitment that is compressed the air pressure that causes because of air, air pressure means static pressure.
The 2nd exhaust channel on top, space of preferably going possesses along the travel direction configuration of carrying device and a plurality of dampers that open and close according to the air pressure in the space of going.So, if air pressure increases on the top in the space of going, increase free air capacity thereby then can automatically open damper.
The 2nd exhaust channel on top, space of preferably going possesses a plurality of fans that change according to the position and the moving direction of carrying device along the travel direction configuration of carrying device and free air capacity.So, because the position of carrying device and moving direction are clear easily, therefore after top, the space air pressure that goes increases, can reduce to arrive the sluggishness when increasing free air capacity.
The inventor finds in the end in the space of going owing to there is not air escape place, and the air that has therefore been compressed by carrying device is invaded in the shelf especially easily.Therefore, at least one end in the space of going, make per unit length on the travel direction of carrying device, from the exhaust capacity in the space of going, higher than the pars intermedia in the space of going.So, can prevent in the end in the space of going air is invaded shelf.
The inventor is with the air-flow in the numerical simulation study automated warehouse, confirmed through the space of going exhaust channel is set up and down, can prevent the pollution of article in the shelf more reliably.And confirmed,, can prevent the pollution of the end standard width of a room in an old-style house through the go exhaust capacity of end, space of increase.And made embodiment automated warehouse dwindle model, through visual research air-flow.And confirm, can obtain the result identical with numerical modelling.
Preferably exhaust gear is set at least one end in the space of going.
Preferred above-mentioned a plurality of dampers comprise that to open and close axle be that the center opens and closes freely movable part and gives the elastic body of the movable part application of force to closing a side.
Preferred above-mentioned a plurality of dampers comprise: detect the sensor of the pressure of the interior volume of going and the differential pressure of the exterior pressure of automated warehouse, be that the center opens and closes movable part freely and makes the electrical motor of movable part switching according to the signal of the sensor to open and close axle.
And; The invention is characterized in; Be used for the air feed path of clean gas is provided and is used for being provided with to possess the shelf of a plurality of standard widths of a room in an old-style house along the space of going of carrying device and be provided with from the control method of the automated warehouse of the 1st exhaust channel of bottom, the space exhaust of going from one sideways space, the back side, one side of shelf; Through the top in the space of going the 2nd exhaust channel is set, the air pressure in the space that prevents on the height on shelf top, to go is higher than the air pressure in the shelf.
Preferably make the exhaust capacity from the space of going of the per unit length on the carrying device travel direction; At least one end in the space of going; Higher than the pars intermedia in the space of going, thus the air pressure in the space that prevents to go at least one end of shelf is higher than the air pressure in the shelf.
Description of drawings
Fig. 1 is a birds-eye view of having removed the automated warehouse of ceiling ground expression embodiment;
Fig. 2 is the front view of the automated warehouse of embodiment;
Fig. 3 is the lateral plan of automated warehouse of having removed the shelf ground expression embodiment of a side;
The air feed that Fig. 4 carries out by the eliminating pressure of the mobile generation of stack crane and negative pressure and by exhaust gear for expression and the lateral plan of exhaust;
The air feed that Fig. 5 carries out by the eliminating pressure of the mobile generation of stack crane and negative pressure and by exhaust gear for expression and the front view of exhaust;
Fig. 6 is compression of air and expansion and the air feed relative with it and the figure of exhaust that is illustrated in the automated warehouse end;
Fig. 7 is the scheme drawing that is arranged on the fan filter element on ceiling etc.;
Fig. 8 is the scheme drawing of pressure control air door;
Fig. 9 is the scheme drawing that has used the damper of little differential pressure sensor.
Reference numeral
2. automated warehouse; 4. the space of going; 6. shelf; 8. processing equipment; 10. running rail; 12. stack crane; 14. chassis; 16. mast; 18. bay-lift; 20. box; 22,23. shelfs; 24. air feed path; 26. fan filter element; 30. controller; 32. ceiling; 34,35. exhaust gears; 36. fan; 38,39. exhausr ports; 40. exhaust gear; 42. space outerpace; 43. filter; 44. fan; 45. opening; 46. pressure control air door; 47. movable part; 48. elastic body; 49. open and close axle; 50. damper; 52. electrical motor; 54. little differential pressure sensor
The specific embodiment
Below narration is used for the preferred embodiment of embodiment of the present invention.This scope of invention should be confirmed according to person of ordinary skill in the field's understanding according to the record of claim scope, with reference to the record of specification sheets and the known technology in this field.
[embodiment]
Fig. 1～Fig. 9 representes automated warehouse 2 and the distortion thereof of embodiment.In each figure, 4 be the space of going, its left and right sides perhaps about a side be provided with shelf 6, shelf 6 are the complex of single shelf 22,23.And, also can processing equipment of flat-panel monitor (FPD) 8 or semi-conductive processing equipment etc. be connected on the shelf 6.For example running rail 10 is set in the space 4 of going, the stack crane 12 as carrying device is gone.In addition, also can use carrying device replacement arbitrarily such as unmanned conveyance car, rail road chassis stack crane 12, its travel direction is the length direction of Fig. 1.Automated warehouse 2 constitutes except that exhaust gear 34,40, exhausr port 38 etc. airtightly.
The bay-lift 18 that stack crane 12 possesses chassis 14, mast 16 and goes up and down along mast 16, for the box 20 of transfer FPD etc., bay-lift 18 possesses shifting apparatus such as horizontal articulated arm, cliding yoke.A plurality of shelfs 22,23 are set in shelf 6, and wherein shelf 23 is the shelf of shelf 6 ends, in other words is the shelf of end in the space 4 of going.Wherein, shelf means the space of the unit that becomes custody articles, is also referred to as " standard width of a room in an old-style house (frontage) ".The back side one side of seeing from the space 4 of going at shelf 6,6 is provided with air feed path 24,24, for example in each shelf 22,23, fan filter element 26 is set, and handles the air from air feed path 24, offers shelf 22,23 as pure air.
Though making the article of keeping among the embodiment is the box of FPD or quartz conductor etc., the kind of article is arbitrarily.Though the air of keeping box 20 is a pure air, also can be nitrogen etc.And automated warehouse 2 can use under local clean condition, and it is clean that not necessarily want the outside of automated warehouse 2.But the outside of automated warehouse 2 also can be clean environment.
30 is controller, management automated warehouse 2, be specially to stack crane 12 send go, the instruction of up-down, article transfer, conveyance box 20 between the shelf of appointment and shelf.In addition, except that shelf 22,23, can also be set to station (station) with the exterior gangway of automated warehouse 2.And height and position and the up-down direction and the rising or falling speed of the current location of controller 30 management stack cranes 12 and moving direction and speed, bay-lift 18 are controlled from the exhaust in the space 4 of going with to the air feed of shelf 6 according to these.In addition, also can fix toward the air demand of shelf 6.Below just the supply and exhaust to the space 4 of going describe.
32 of Fig. 2～Fig. 6 is the ceiling of automated warehouse 2, and the top in the space 4 of in ceiling 32, going at least is provided with exhaust gear 34, from the space 4 past outside exhausts of going.And, in the bottom of shelf 6 fan 36 is set, the air that makes 4 bottoms, space of going is toward 24 circulations of air feed path, and with a part from the outside exhaust of exhausr port 38 to automated warehouse 2.In addition, it is also possible fan 36 not to be set.For example, also can suck to air feed path 24 1 sides, from the bottom exhaust in the space 4 of going through utilizing will the go air of 4 bottoms, space of fan filter element 26.And, also can make it to 24 circulations of air feed path with purifications such as filters from the air of exhaust gear 34.And the set of exhaust gear 34 is the 2nd exhaust channel, and fan 36 is the 1st exhaust channel with exhausr port 38 double-type set.And as shown in Figure 1, also can exhausr port 39 be set on the floor in space 4 of going and carry out exhaust.Fan filter element 26 is provided with on each shelf 22 in principle, but under the situation of keeping smaller article as quartz conductor box etc., also can fan filter element 26 be set every several shelfs.That is necessity of fan filter element 26, is not set on each shelf 22,23.
The body length of stack crane 12 is longer than the length that follows the box 20 of sailing direction.Therefore produce not the space of facing with shelf 23 at the two ends in the space 4 of going, preferably exhaust gear 40 also is set in this space.In addition, exhaust gear 40 is arranged at least one end in the space 4 of going, and preferably is arranged on two ends.And the ability that also can make exhaust gear 34 and fan 36, replaces exhaust gear 40 is set than the part height that follows the centre of sailing the space in the position of the shelf 23 of the end in the space 4 of going.In either case, the gas supply capacity that all preferably makes fan filter element 26 is higher than the position relative with shelf 22 in the position of shelf 23.
In Fig. 2～Fig. 6, hollow arrow is represented pure air or handles the windstream that is over exhaust gear 34 that the arrow of band shade representes to have the windstream of contaminated possibility in the space 4 of going.The windstream of space 4 pars intermedias that go is illustrated among Fig. 4, Fig. 5.When stack crane 12 when the left-hand of Fig. 4 moves right, be compressed at its travel direction the place ahead air, produce to get rid of and press.On the other hand, produce negative pressure at the rear of stack crane 12 on the contrary.Getting rid of pressure and negative pressure is maximum in the front and back of chassis 14, also becomes maximum in the front and back of bay-lift 18, diminishes a little in position in addition.Though pure air is provided for shelf 22 from the fan filter element, if it is big to get rid of the air pressure of pressure ratio pure air, the air in the space 4 of then going is invaded in the shelf 22.Especially under the situation that exhaust gear 34 is not set, air pressure increases on the top in the space 4 of going, and the box 20 contaminated possibilities in the shelf 22 are arranged.For example, if produce from the pars intermedia in the space 4 of going air-flow or the air wave to top, then walk to be at the end at ceiling part air-flow, dynamic pressure is transformed into static pressure, and air pressure increases, to shelf 22 adverse currents.
Relative therewith, the air that embodiment will go in the space 4 are discharged from the fan 36 of bottom and the exhaust gear 34 on top.Therefore can not produce away air-flow that is at the end or the air wave of walking to be at the end etc., being suppressed at space 4 internal gas pressures that go increases partly.Its result, the air in the space of going has disappeared toward the adverse current in the shelf 22.This situation in the shelf 23 of end too.Travel direction rear at stack crane 12 produces negative pressure, and negative pressure itself can not make the article in the shelf 22 pollute, but in the process that negative pressure is eliminated, produces the disorder of air-flow, follows in this, and the air in the space 4 of going is invaded in the shelf 22.Wherein,, negative pressure is promptly eliminated increase for the air demand of shelf 22 at the travel direction rear of stack crane 12, and the disorderly air-flow discharge that produces when with the exhaust gear on fan 36 and top 34 negative pressure being eliminated.Therefore, the same with travel direction the place ahead, even the space 4 interior air that also can prevent in the wings to go are invaded in the shelf 22,23.
Above narration can be as follows in other words.Be used for preventing that the condition that air is invaded to shelf 22,23 from the space 4 of going from being that the air pressure in the shelf 22,23 is always high than the air pressure in the space 4 of going.Wherein, carry out exhaust through exhaust gear 34 both sides from fan of 4 bottoms, space of going 36 and top, prevent on the top in the space of going or bottom etc. partly air pressure increase, always make air pressure in the shelf 22,23 than the air pressure height in the space 4 of going.And, at the travel direction rear of stack crane 12, make the air demand increase toward shelf 22,23 eliminate negative pressure, the disorderly air-flow discharge when negative pressure being eliminated with the exhaust gear on fan 36 and top 34.
Fig. 6 representes the shelf 23 peculiar problems of end.In addition, therefore because the box 20 of keeping FPD, as literal, be object only among the embodiment, but under the situation of such little article such as quartz conductor box with the shelf 23 of end, from end to 2～the same processing of zone enforcement of a plurality of standard width of a room in an old-style house degree.When stack crane 12 during from the left-hand right travel of Fig. 6, the air of the end in the space 4 of going is compressed.The place different with the central portion in the space 4 of going, that the air that has not been compressed in the end is escaped.Therefore get rid of to press and become higher.Otherwise, when stack crane 12 when the dextrad of Fig. 6 moves left, the air of end sharply expands, and produces strong negative pressure.As stated, in the end of going space 4, become more remarkable by the influence of the mobile generation of stack crane 12.
Therefore, for example to the shelf 23 of end, make the exhaust capacity of exhaust gear 34 and fan 36 higher.Perhaps exhaust gear 40 is set, with compressed air exhaustion at the both ends in the space 4 of going.Here necessary is, makes along the exhaust capacity of the per unit length of the stack crane 12 travel direction pars intermedia height than the space 4 of going.In addition, except above-mentioned, preferably high from the gas supply capacity of fan filter element also ability than the shelf 22 of pars intermedia at shelf 23 places of end.
Fig. 7～Fig. 9 representes the example of exhaust gear 34,40.The exhaust gear 35 of Fig. 7 is provided with filter 43 in space 4 one sides of going, and externally space 42 1 sides are provided with fan 44, the control signal control fan 44 of origin self-controller.Like this according to the position of the position of stack crane and travel direction and moving velocity, bay-lift 18 and controls such as up-down direction and rising or falling speed air output, control free air capacity from fan 44.Because these data are known for controller, therefore can control free air capacity apace.The effect of filter 43 is, when fan 44 was stopped, externally atmosphere was removed pollutant substance when invading between the blade of fan and the blade, thereby, if on fan 44, append air door (shutter) etc., then do not need filter 43.Exhaust gear 40 also can likewise constitute with exhaust gear 35, but that exhaust gear 40 reverses fan 44 is free, when stack crane when the end is left, also can handle the air of space outerpaces 42 and provide with filter 43 toward the space 4 of going.
Fig. 8 representes pressure control air door 46, and the travel direction of the opening 45 upper edge stack cranes 12 that on the ceiling in the space 4 of going etc., are provided with disposes a plurality of pressure control air doors 46. Exhaust gear 34,40 was all constituted with pressure control air door 46, and the fan of free air capacity constitutes also can to make a part use fixedly, and other parts constitute with pressure control air door 46.47 is movable part, to closing a side application of force, is that center open and close freedom to open and close axle 49 by elastic body 48.And, in pressure control air door 46, going between space 4 and the space outerpace 42 when for example producing the draught head about 5 pascals, movable part 47 is opened and is carried out exhaust.So, control ground can not adjusted from the free air capacity in the space 4 of going, if especially with the fixing exhaust blower combination of free air capacity, can be with going of stack crane cheap accordingly and automatically adjust free air capacity.
Fig. 9 has represented to use the damper 50 of little differential pressure sensor 54, and the mark identical with Fig. 8 represented identical parts.52 is drive motor, and movable part 47 is opened and closed, and 54 is little differential pressure sensor, detects the differential pressure of going between space 4 and the space outerpace 42.Such sensor for example disposes dividing plate between space 4 one sides and space outerpace 42 1 sides going, and detects the distortion of dividing plate according to the difference of air pressure.And the official post movable part 47 according to air pressure opens and closes.Damper 50 can make up with the fixing exhaust blower of free air capacity, and also can be used for exhaust gear 34,40 each.
Embodiment can obtain following effect.
(1) through the top in the space 4 of going exhaust gear 34 is set, the air in the place that prevents not escape on the top in the space 4 of going is invaded in the shelf 22,23.
(2) make exhaust capacity higher through end, prevent in the shelf 23 of compressed air admission end, the end in the space of going than other parts in the space 4 of going.
(3) if the exhaust gear 35 that uses Fig. 7 as exhaust gear 34,40, can control according to nothings such as the position of stack crane and speed and adjust free air capacity sluggishly.
(4) like Fig. 8, shown in Figure 9, if use the damper 46,50 that mechanically opens and closes, the air pressure in the space 4 of going can carry out exhaust when increasing, and does not need control.
(5) as exhaust gear 34,40, if exhaust blower that free air capacity is fixing and damper 46 or damper 50 combinations then can automatically be adjusted free air capacity.
Claims (9)
1. automated warehouse; Be provided with the shelf that possess a plurality of standard widths of a room in an old-style house along the space of going of carrying device; And be provided with and be used for from the back side one side of shelf toward space one side of going the air feed path of clean gas being provided and being used for it is characterized in that: be provided with the 2nd exhaust channel on the top in the space of going from the 1st exhaust channel of bottom, the space exhaust of going.
2. automated warehouse as claimed in claim 1 is characterized in that: the 2nd exhaust channel on the top, space of going possesses along the travel direction configuration of carrying device and a plurality of dampers that open and close according to the air pressure in the space of going.
3. automated warehouse as claimed in claim 1 is characterized in that: the 2nd exhaust channel on the top, space of going possesses a plurality of fans that change according to the position and the moving direction of carrying device along the configuration of the travel direction of carrying device and free air capacity.
4. automated warehouse as claimed in claim 1 is characterized in that: the per unit length on the travel direction of carrying device, from the exhaust capacity in the space of going, at least one end in the space of going, higher than the pars intermedia in the space of going.
5. automated warehouse as claimed in claim 4 is characterized in that: at least one end in the space of going is provided with exhaust gear.
6. automated warehouse as claimed in claim 2 is characterized in that: above-mentioned a plurality of dampers comprise that to open and close axle be that the center opens and closes freely movable part and to closing the elastic body of a side to the movable part application of force.
7. automated warehouse as claimed in claim 2 is characterized in that: above-mentioned a plurality of dampers comprise: detect the sensor of the pressure of the interior volume of going and the differential pressure of the exterior pressure of automated warehouse, be that the center opens and closes movable part freely and makes the electrical motor of movable part switching according to the signal of the sensor to open and close axle.
8. the control method of an automated warehouse; This automated warehouse is provided with the shelf that possess a plurality of standard widths of a room in an old-style house along the space of going of carrying device; And be provided with and be used for the air feed path of clean gas is provided and is used for from the 1st exhaust channel of bottom, the space exhaust of going from one sideways space, the back side, one side of shelf; The control method of this automated warehouse is characterised in that: through the top in the space of going the 2nd exhaust channel is set, the air pressure in the space that prevents on the height on shelf top, to go is higher than the air pressure in the shelf.
9. the control method of automated warehouse as claimed in claim 8; It is characterized in that: make per unit length on the travel direction of carrying device, from the exhaust capacity in the space of going; At least one end in the space of going; Higher than the pars intermedia in the space of going, thus the air pressure in the space that prevents to go at least one end of shelf is higher than the air pressure in the shelf.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP247189/2010 | 2010-11-04 | ||
| JP2010247189A JP2012096906A (en) | 2010-11-04 | 2010-11-04 | Automated warehouse |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN102658942A true CN102658942A (en) | 2012-09-12 |
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ID=46389281
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2011103205724A Pending CN102658942A (en) | 2010-11-04 | 2011-10-20 | Automated warehouse and control method thereof |
Country Status (3)
| Country | Link |
|---|---|
| JP (1) | JP2012096906A (en) |
| CN (1) | CN102658942A (en) |
| TW (1) | TW201219725A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105775534A (en) * | 2016-05-26 | 2016-07-20 | 马人欢 | Self-cleaning dustless storage room |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP6553388B2 (en) | 2015-03-31 | 2019-07-31 | 株式会社Ｓｃｒｅｅｎホールディングス | Substrate transfer apparatus, substrate processing apparatus, and substrate transfer method |
| JP7363666B2 (en) * | 2020-05-12 | 2023-10-18 | 株式会社ダイフク | Measuring device |
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| JP2005273945A (en) * | 2004-03-23 | 2005-10-06 | Shimizu Corp | Clean room |
| JP2005311260A (en) * | 2004-04-26 | 2005-11-04 | Hitachi Plant Eng & Constr Co Ltd | Storage chamber for liquid crystal substrate |
| CN101503142A (en) * | 2008-02-06 | 2009-08-12 | 村田机械株式会社 | Automated warehouse and method of supplying clean air to the automated warehouse |
| CN101503141A (en) * | 2008-02-06 | 2009-08-12 | 株式会社大福 | Article collecting apparatus |
| CN101700774A (en) * | 2009-10-19 | 2010-05-05 | 江苏新誉空调系统有限公司 | Pressure wave protection system applied to high-speed train |
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| JPH1179318A (en) * | 1997-09-05 | 1999-03-23 | Toyota Autom Loom Works Ltd | Automated warehouse |
| JP3826708B2 (en) * | 2000-12-11 | 2006-09-27 | 株式会社ダイフク | Warehouse equipment |
| JP4262505B2 (en) * | 2003-03-28 | 2009-05-13 | シャープ株式会社 | Airflow control method |
| JP4834689B2 (en) * | 2008-04-04 | 2011-12-14 | 新菱冷熱工業株式会社 | Air conditioning suction port rectifier |
| JP2010272828A (en) * | 2009-05-25 | 2010-12-02 | Hitachi Plant Technologies Ltd | Storage room of liquid crystal substrate |
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2010
- 2010-11-04 JP JP2010247189A patent/JP2012096906A/en active Pending
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2011
- 2011-10-13 TW TW100137130A patent/TW201219725A/en unknown
- 2011-10-20 CN CN2011103205724A patent/CN102658942A/en active Pending
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2005273945A (en) * | 2004-03-23 | 2005-10-06 | Shimizu Corp | Clean room |
| JP2005311260A (en) * | 2004-04-26 | 2005-11-04 | Hitachi Plant Eng & Constr Co Ltd | Storage chamber for liquid crystal substrate |
| CN101503142A (en) * | 2008-02-06 | 2009-08-12 | 村田机械株式会社 | Automated warehouse and method of supplying clean air to the automated warehouse |
| CN101503141A (en) * | 2008-02-06 | 2009-08-12 | 株式会社大福 | Article collecting apparatus |
| CN101700774A (en) * | 2009-10-19 | 2010-05-05 | 江苏新誉空调系统有限公司 | Pressure wave protection system applied to high-speed train |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105775534A (en) * | 2016-05-26 | 2016-07-20 | 马人欢 | Self-cleaning dustless storage room |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2012096906A (en) | 2012-05-24 |
| TW201219725A (en) | 2012-05-16 |
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Application publication date: 20120912 |