JP2001328780A - Vertical clean conveyer - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a vertical clean conveyer device provided with a means clean up inside of a cage 11 and making an operation of moving up and down the cage 11 easy. SOLUTION: This device maintains inside of a cage 11 clean and under a positive pressure by operating a fan filter unit 18 provided on an upper part of the cage 11 and maintains cleanliness equivalent to or better than cleanliness of a clean room by blowing out clean air from an opening plate 20 forming an article taking in and out opening 31 side of the cage 11, an air outlet 6 provided on a lower part of the cage 11 and slit 22. Also, operation of moving up and down the cage 11 is easy for improving efficiency of work to take in and out articles.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a vertical clean transfer apparatus provided with a clean means for transferring electronic precision parts, medical equipment and the like in a building of a clean room facility.

[0002]

2. Description of the Related Art A conventional technique will be described with reference to FIGS. When transporting electronic precision parts, medical equipment, etc. (hereinafter referred to as "articles") A into clean rooms 1 installed on the upper and lower floors of the same building, a machine room 5 is provided at an upper part, and a hoistway 2 provided with ventilation equipment at a lower part. And carried in using the cage 11. Further, the air in the cage 11 has been cleaned by using a hopper filter or an urper filter (hereinafter, referred to as “high performance filter”) 17 and a blower 33 such as a sirocco fan. Further, in the case of transporting the article A, there is contaminated air (hereinafter referred to as “gap contaminated air”) B in the gap between the clean room 1 and the cage 11 and is sucked when the door 27 of the cage 11 is opened. The gap-contaminated air B was infiltrated into the cage 11 by being engulfed in the air.
Similarly, dust and the like attached to the inner wall of the hoistway 2 and the lower outer wall of the cage 11 also entered, causing contamination of the article A. In order to prevent the intrusion of the contaminated air, a close contact frame (not shown) for making the opening of the clean room 1 close to the opening of the cage 11 is used, but the installation space, weight, and price are used. And so on, and especially when installing in an existing clean room, it has been a problem to be solved. Furthermore, article A
Required an inspection for contamination, depending on the result, had to be cleaned again, which was troublesome.

[0003]

When articles A are transported between the clean room 1 and the cage 11, especially the
When the first door 27 is opened, the gap-contaminated air B enters the cage 11 and the article A is contaminated, and it is necessary to perform inspection and cleaning again, which is troublesome. In the case of the existing clean room 1 , it is difficult to secure an installation space when installing the close contact frame for carrying in the article A.

[0004]

According to the transfer device of the first aspect, since the inside of the cage 11 is always maintained at a positive pressure, the intrusion of the gap-contaminated air B, dust and the like into the cage 11 can be achieved. Can be prevented. By maintaining the air pressure at each point in the clean room 1 equipment so that Pa <Pm <Ps <Pc ₁ ≒ Pc ₂ , it is possible to prevent gap-contaminated air B from entering the cage 11. Pa <Pm <Ps <P
c ₁ state of ≒ Pc ₂ can be adjusted by the airflow damper V _2, V 3 ₁₆ Fan operation of the filter unit and the elevator shaft 2 air inlet 8 and air outlet 6. Symbol Pa: atmospheric pressure Pm: pressure in the machine room Ps: pressure Pc ₁ of the hoistway: pressure in the clean room Pc _2: pressure in the cage also, _Pc 1> In Ps state, the positive pressure in the clean room 1 Pc ₁ - Ps is set in the range of 1 to ₂ mmH2O.
The differential pressure of Pc ₂ −Ps is determined by the amount of air passing through the open floor chamber 22 of the cage 11.

[0005] According to claim 2, from the cage 11 to the clean room 1, when moving the articles A from the clean room 1 into the cage 11, it is prevented from entering such gap contaminated air B into the clean room 1. The cleanliness in the cage 11 is the cleanliness of the clean room 1 , for example, 100 pieces / c.
f (class 100) or higher.

According to the third aspect, the side of the cage 11 facing the air exhaust port 6 of the open floor chamber 22 provided at the lower part of the cage 11 and the article take-out port 7 of the clean room 1 is provided with the opening plate 2.
Since the gap is formed as 0, the gap-contaminated air B is quickly eliminated, and the cleanliness in the cage 11 can be easily maintained.

[0007] A fan filter unit (hereinafter referred to as "FFU") 18 is installed above the cage 11 so that the inside of the cage 11 is always kept clean and at a positive pressure. And a slit provided in the lower part of the cage 11 for gap-contaminated air B
And a vertical clean transfer device that eliminates the problem.

[0008]

DETAILED DESCRIPTION OF THE INVENTION

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of the present invention will be described with reference to FIGS. The hoistway 2 is provided with a machine room 5 having an air exhaust port 4 at the upper part of the hoistway structure 3, thereafter, an outer wall is attached, an air exhaust port 6 is provided at a lower part, and an article inlet / outlet leading to the clean room 1 for each floor. An air inlet 8 is provided on the side surface of the hoistway 2 opposite to the article inlet / outlet 7. The main function of the air exhaust port 4 provided in the machine room 5 is to adjust the pressure of the machine room 5, and if the pressure can be adjusted by another air exhaust port, it may be removed.

The maintenance of the positive pressure and cleanliness in the cage 11 is based on F
Operation of FU and air inlet 8 provided on the intermediate side of hoistway 2
And the air flow damper 16 of the air exhaust port 6 provided on the lower side surface.
This is done by adjusting the opening and closing of.

A wire 10 connected to a lift device 9 provided in a machine room 5 installed above the hoistway 2 is connected to a cage 1.
1 is connected to the bracket 12 provided on the upper part of the
A balancer 13 is connected to the other end of the wire 10 and is balanced with the cage 11. The cage 11 is provided with a bracket 12 on an upper portion, an air inlet 15 on a side surface, a blower 14 and a high-performance filter 17 built therein, and an FFU 18 that blows clean air from a high-performance filter 17 provided on a lower surface. I do. An open floor chamber 22 formed by an opening plate 20 having openings such as punching and slits is provided below the cage 11, a vibration damping device 19 is provided on an outer bottom surface of the chamber 22, an air exhaust port 6 is provided on a side surface, and a lower end of the cage 11. Slit 32 with opening
Is provided. The cage 11 is formed to fit the hoistway 2,
In general, a shape such as a rectangular cube or a cylinder is used.

The side of the cage 11 facing the article entrance 7 of the clean room 1 is covered with an opening plate 20,
The clean air is blown out from the opening 0. The blowing amount of the clean air is adjusted by the opening ratio of the opening plate 20. Further, the door 27 of the cage 11 can also serve as the side opening plate 20, and the door 27 may be formed separately. A concave door lower holding part 23 is provided at an end of an opening plate 20 provided in an opening floor chamber 22 below the cage 11, and a door supporting part 24 is provided above the holding part 23, and an air cylinder 25 is moved along a door guide rail. The door 27 is operated to facilitate opening and closing of the door 27 up and down. The same applies to the door 21 on the clean room 1 side.

Further, clean air from the downflow section 26 of the ceiling surface of the article loading and unloading opening 7 of the clean room 1 is blown out, contaminated air in the clean room 1, so that dust can not enter. As a result of experiments and measurements of the cleanliness of each point provided in the gap between the door 27 on the side of the cage 11 and the door 21 on the side of the clean room 1 , the air contaminated in the gap B was removed instantaneously, and 0.1 μm (class 1) was obtained. Make sure it is clean. Further, the cage 11 can be approached to the article entrance 7 of the clean room 1 by a simple operation.

Conventionally, the door / article opening / closing port 31 of the cage 11 had to be brought into close contact with the article opening / closing port 7 of the clean room 1 , and a close frame was used. 11 and clean room 1
Can be cleaned, if the distance between the clean room 1 and the cage 11 is in the range of 0 to 100 mm,
It has been confirmed that contamination can be prevented. The operation of moving the cage 11 is simple and easy because it is sufficient to position the cage 11 within the range of the distance.

FIG. 5 relates to the opening plate 20 of the door 27 of the article entrance 31 on the side surface of the cage 11.

FIG. 6 shows another embodiment of the present invention relating to the cage 11, and its basic configuration is the same as that of FIG. The main difference from FIG. 4 is that two shielding plates 28 are newly added to the article entrance 3.
1 and an exhaust device 29 using a fan is provided above and below the shielding plate 28, respectively.

[0016]

The operation of the fan filter unit and the opening / closing of the article entrance / exit (door) on the side of the cage are made into an opening plate, and the clean air is blown out from the opening of the opening plate, the air exhaust port provided at the lower part of the cage, and the slit. While maintaining the inside of the cage at a constant positive pressure and cleanliness, the inside and outside of the cage and the gap between the cage and the clean room can be cleaned instantaneously, especially the intrusion of air contaminated by the gap and dirt on the upper and lower ends of the cage. It is easy to move the product up and down, and to carry in and out articles. Further, by installing an independent fan filter, equipment or members such as an exhaust fan in the cage, a contact frame that is heavy and has a large installation space can be omitted, and workability can be improved. further,
ADVANTAGE OF THE INVENTION According to this invention, since it can solve the problems, such as installation space of a door in the existing clean room, invasion of contamination, it can be applied at low cost.

[Brief description of the drawings]

FIG. 1 is a configuration diagram of a conventional transport device.

FIG. 2 is a configuration diagram of a conventional cage.

FIG. 3 is a configuration diagram of a transport device of the present invention.

FIG. 4 is a diagram showing a cage configuration of the present invention.

FIG. 5 is a configuration diagram of a cage door of the present invention.

FIG. 6 is another embodiment of the cage of the present invention.

[Description of Signs] 1 clean room 2 hoistway 4.6 air exhaust port 5 machine room 7.31 article entrance 8.15 air intake 11 cage 16 air volume damper 17 high-performance filter 18 fan filter unit 20 opening plate 21, 27 Door 22 Open floor room 28 Shield plate A Article B Gap contaminated air

Claims (4)

[Claims] 1. A fan filter unit (18) installed above a cage (11) suspended in a hoistway (2) is operated, and an air inlet (8) provided on a side surface of the hoistway (2) and the hoistway (2)
A vertical clean transfer apparatus characterized in that the inside of the cage 11 is always maintained at a positive pressure by opening and closing adjustment of an air flow damper 16 of an air exhaust port 6 provided on a lower side surface of the vertical cleaner. 2. The degree of cleanliness in the cage 11 is determined in the clean room 1.
The vertical clean transfer apparatus according to claim 1, wherein the cleanliness is maintained to be equal to or higher than the cleanliness of the vertical clean transfer apparatus. 3. A fan filter unit 18 is provided at an upper portion of the cage 11, an air exhaust port 6 is provided at a side surface of an open floor chamber 22 installed near a lower portion of the cage 11, and the cage 11 suspended in the hoistway 2 is provided. The vertical clean transfer device according to claim 1, wherein a side surface facing the article intake port 7 on the side of the clean room 1 is formed by an opening plate 20. 4. A concave lower protection portion 23 of a door 27 formed by an opening plate 20 is provided at an upper end of an open floor chamber 22 installed near a lower portion of a cage 11, and clean air is provided according to an opening ratio of the door 27. The vertical clean transfer device according to claim 3, wherein the amount of air blown out is adjusted.