JP2007269489A - Article storage facility for clean room - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide article storage facility for a clean room capable of improving cleanliness of an article storage condition while maintaining cleanliness in the clean room. <P>SOLUTION: An article storage warehouse W provided with an article storage shelf S provided with article storage parts 14 by arranging them side by side in the direction of lateral width of the shelf and an article conveyance vehicle V moving into the direction of lateral width of the shelf in a conveyance vehicle moving space 15 in front of the article storage shelf S is installed in the clean room 1. The conveyance vehicle moving space 15 is provided so as to protrude outward in the direction of lateral width of the shelf more than the article storage shelf S. A space 16 for exhausting air communicating with an outwardly protruding part 15t so as to enable air flow is provided in a side part of the article storage shelf S in a condition in which the space 16 for exhausting air is partitioned from the article storage shelf S by a bulkhead body 17 so as to prevent air flow. A partitioning wall 25 for partitioning so as to divide the outwardly protruding part 15t in the conveyance vehicle moving space 15 and the space 16 for exhausting air from the inside of the clean room 1 so as to prevent air flow is provided. A communicating passage 18 outside of the clean room for communicating the space 16 for exhausting air with the outside of the clean room 1 so as to enable air flow is provided. <P>COPYRIGHT: (C)2008,JPO&INPIT

Description

The present invention provides an article storage shelf including an article storage shelf provided with article storage units arranged in the width direction of the shelf and an article transport vehicle that moves the transport vehicle moving space in front of the article storage shelf in the width direction of the shelf in a clean room. Provided,
For a clean room provided with purified air ventilation means for allowing purified air to flow from the rear side of the article storage shelf through the article storage unit to flow into the transport vehicle moving space and from the transport vehicle moving space to outside the clean room The article storage facility.

Such an article storage facility for a clean room (hereinafter may be simply referred to as an article storage facility) includes an article storage shelf including article storage units arranged in the width direction of the shelf and a transport vehicle moving space in front of the article storage shelf. An article storage room with an article transport vehicle that moves in the width direction is provided in the clean room, and articles such as work-in-process products such as semiconductor products and liquid crystal display elements are transported to the article storage section by the article transport vehicle. Or the article stored in the article storage unit is conveyed to an article processing apparatus for processing the article or the outside.
The purified air ventilation means causes the purified air to flow from the rear side of the article storage shelf through the article storage section to flow into the transport vehicle moving space and from the transport vehicle moving space to the outside of the clean room, thereby storing the article storage section. Is maintained in an environment with little dust (see, for example, Patent Document 1).

  Although not clearly described in Patent Document 1, in such an article storage facility, the partition wall separates the end on the side in the width direction of the shelf in the conveyance vehicle movement space from the inside of the clean room so that air cannot flow. It was divided like so.

JP 2003-81406 A

  By the way, the transport vehicle moving space is likely to generate dust because the product transport vehicle moves. However, in the conventional product storage facility, the end of the transport vehicle moving space on the side in the width direction of the shelf in the transport vehicle moving space. Is separated from the clean room so that air flow is impossible, preventing purified air from flowing into the clean room from the transport space where dust is likely to be generated and reducing the cleanliness in the clean room. Can be suppressed.

However, in the conventional article storage facility, when the article transport vehicle moves in the transport vehicle moving space, purified air is not generated between the article transport vehicle and the partition wall that divides the end of the transport vehicle moving space on the shelf width direction side. When compressed, the air pressure in the space between the article transport vehicle and the partition wall rises, so purified air flows in the transport vehicle moving space from the partition wall toward the article transport vehicle, and enters the article storage unit. There was a risk of backflow.
When the purified air flows backward from the transport vehicle moving space to the article storage unit, the purified air in the transport vehicle moving space easily contains dust, so the cleanliness of the article storage state in which the articles are stored in the article storage unit is reduced. There was a fear.

  This invention is made | formed in view of this situation, The objective is to provide the article storage equipment for clean rooms which can improve the cleanliness of an article storage state, maintaining the cleanliness in a clean room. is there.

An article storage facility for a clean room according to the present invention includes an article storage shelf provided with article storage units arranged in the width direction of the shelf, and an article transporting vehicle that moves in the width direction of the transport vehicle in front of the article storage shelf in the width direction of the shelf. A storage is provided in the clean room,
Purified air ventilation means is provided for allowing purified air to flow from the rear side of the article storage shelf through the article storage unit to flow into the transport vehicle moving space and from the transport vehicle moving space to the outside of the clean room. There,
In the first characteristic configuration, the transport vehicle moving space is provided in a form projecting outward in the lateral direction of the shelf from the article storage shelf, and the exhaust space communicating with the outward projecting portion so as to allow air flow is provided Provided on the lateral side of the article storage shelf in a state where the article storage shelf and the partition wall are partitioned so as not to allow air flow,
A partition wall is provided for partitioning the outward projecting portion of the transport vehicle moving space and the exhaust space so as to partition the interior of the clean room from being incapable of air flow,
A clean room exterior communication path that communicates the exhaust space with the outside of the cream room so as to allow air flow, or a communication path within the clean room that communicates the exhaust space with the interior of the cream room so as to allow air flow and includes air purification means. It is characterized in that is provided.

  That is, when the article transport vehicle moves in the transport vehicle moving space toward the outward projecting portion, the purified air tends to be compressed between the article transport vehicle and the partition wall. The purified air that flows into the clean room is prevented from flowing into the clean room from the outward projecting portion of the transport vehicle moving space, and flows into the exhaust space from the outward projecting portion of the transport vehicle moving space. The purified air that has flowed into the exhaust space flows to the outside of the clean room through the clean room external passage, or through the clean room internal passage, with the partition wall preventing the purified air from flowing into the article storage shelf. Then, after being purified by the air purifying means, it flows into the clean room, so that an increase in the air pressure in the space between the article transport vehicle and the partition wall is suppressed.

In other words, an exhaust space that communicates with the outward projecting portion of the transport vehicle moving space is provided on the lateral side of the article storage shelf so that air can flow, and flows out of the clean room through the clean room external communication passage. Or a flow path of purified air that flows into the clean room after being purified by the air purification means from the exhaust space through the clean room communication path, When moving the vehicle moving space toward the outward projecting portion, it is possible to suppress an increase in air pressure in the space between the article transport vehicle and the partition wall while maintaining the cleanliness in the clean room. Thus, it is possible to suppress the purified air from flowing back to the article storage section from the transport vehicle moving space where dust is easily generated.
Accordingly, it is possible to provide an article storage facility for a clean room that can improve the cleanliness of the article storage state while maintaining the cleanliness in the clean room.

In addition to the first feature configuration, the second feature configuration is
A communication opening communicating the exhaust space and the outward projecting portion of the transport vehicle moving space so as to allow air flow is provided in a state extending from the floor of the clean room to the upper end of the article storage shelf,
The present invention is characterized in that a porous plate-like body that closes a lower portion of the communication opening in a state in which air can flow is provided.

That is, a communication opening that communicates between the exhaust space and the outward projecting portion of the transport vehicle moving space so as to allow air flow is provided in a state extending from the floor of the clean room to the upper end of the article storage shelf, and below the communication opening. Since a porous plate-like body that closes the part in a state where air can flow is provided, purified air is conveyed through a communication opening that is sufficiently wide in a state extending from the clean room floor to the upper end of the article storage shelf. It can flow well from the outward projecting part of the vehicle moving space to the exhaust space, and the porous plate-like body allows the operator to enter the transfer vehicle moving space through the communication opening, Can be prevented from protruding into the transport vehicle moving space.
Incidentally, it is preferable that the size of the hole of the porous plate-shaped body is such that the finger of the hand does not pass through so that the operator can prevent the finger of the hand from protruding into the transport vehicle moving space.

  In other words, by providing a sufficiently wide communication opening so that the purified air can flow well from the outward projecting portion of the transport vehicle moving space to the exhaust space, the purified air is removed from the transport vehicle moving space. Since the backflow to the article storage unit can be sufficiently suppressed, the cleanliness of the article storage state can be further improved.

The exhaust space is a dead space. For example, by providing a control device for controlling the operation of the article storage facility in the exhaust space, the exhaust space can be used effectively.
By providing a control device or the like to effectively utilize the exhaust space, an operator enters the exhaust space for the operation or maintenance of the control device. A porous plate-like body is provided on the lower side portion, so that an operator can be prevented from entering the transport vehicle moving space through the communication opening or a finger or the like protruding into the transport vehicle moving space. It can be done.
Therefore, by providing the communication opening sufficiently wide, it is possible to sufficiently suppress the purified air from flowing backward from the transport vehicle moving space to the article storage unit, and to further improve the cleanliness of the article storage state. In addition, by providing a control device or the like in the exhaust space, an operator can enter the transport vehicle moving space through the communication opening, or a finger or the like can be projected into the transport vehicle moving space, while using the exhaust space effectively. Can be prevented.

In addition to the first or second feature configuration, the third feature configuration is
In a form in which the suction air sucked through the porous floor portion of the clean room is blown out from the ceiling blowing portion of the cream room, provided is a clean room circulation ventilation means for circulating purified air to the clean room,
The clean room exterior communication path is configured in such a manner that the purified air in the exhaust space flows through the porous floor portion.

That is, the clean room circulating ventilation means allows the purified air to flow downward from the ceiling side to the floor through the clean room, so that the clean room is configured as a so-called downflow type.
Since the clean room outside communication passage is configured to flow the purified air in the exhaust space through the porous floor, when the article transport vehicle moves in the transport vehicle travel space, the transport vehicle travel space The purified air that has flowed into the exhaust space from the outward projecting portion of the gas can flow out of the clean room through the porous floor portion.

That is, by configuring the clean room as a downflow type, the downward flow of the purified air in the clean room makes it easier to discharge dust out of the clean room, so the cleanliness in the clean room can be improved.
Then, an article storage is installed in such a downflow clean room, and when the article transport vehicle moves through the transport vehicle moving space toward the outward projecting part, the space for exhausting from the outer projecting part. By flowing the purified air flowing downward from the exhaust space and flowing out of the clean room through the porous floor, the dust generated in the transport vehicle moving space is reduced in the transport vehicle moving space. The downward flow of the purified air makes it easier to discharge outside the clean room, so that the cleanliness of the transport vehicle moving space and the article storage section can be further improved, and the cleanliness of the article storage state can be further improved. Can do.
Therefore, when the clean room article storage facility is installed in a downflow clean room, the cleanliness of the article storage state can be further improved by effectively utilizing the flow form of the downflow purified air. It became so.

In addition to the third feature configuration, the fourth feature configuration is
An air circulation space for guiding the purified air blown from the ceiling blow-out part of the clean room to the article storage part at the rear part of the article storage shelf is opened at the upper part and the side periphery is a partition for forming a flow passage. And in a state of being partitioned so as to be separated from the inside of the clean room so that air cannot flow,
The purified air ventilation means guides the purified air blown from the ceiling blowing section of the clean room in the air circulation space, supplies the purified air to the article storage section, passes through the article storage section, and passes through the transport vehicle moving space. The purified air is configured to flow in such a form that the purified air that flows in the flow from the transport vehicle moving space through the porous floor portion.

  That is, the purified air blown from the ceiling blowout part of the clean room is guided to the air circulation space at the rear part of the article storage shelf by the ventilation action of the purified air ventilation means, and is supplied to the article storage part from the rear side. The purified air supplied to the storage unit flows through the article storage unit, flows into the transport vehicle moving space, and flows out of the clean room through the porous floor portion from the transport vehicle moving space.

That is, in the downflow type clean room, the purified air blown from the ceiling blow-out part is passed through the article storage part from the rear side to flow into the transport vehicle moving space, and the porous floor portion is transferred from the transport vehicle moving space. Since a part of the purified air circulated to the clean room by the circulating ventilation means for the clean room is used as the purified air for passing through the article storage unit by flowing through the clean room through the air filter. The structure for generating the purified air using can be simplified.
Therefore, it is possible to simplify the configuration for generating the purified air and to reduce the cost of clean room article storage facilities.

In addition to the fourth feature configuration, the fifth feature configuration includes:
The upper part of the transport vehicle moving space and the upper part of the article storage shelf are opened to introduce purified air blown from the ceiling blowing part of the clean room,
A space for flowing purified air is formed at the lower end of the article storage shelf,
The floor portion corresponding to the location where the article storage shelf is installed in the porous floor portion corresponds to the floor portion corresponding to the transport vehicle moving space and the exhaust space in the porous floor portion. It is characterized in that it is formed smaller than the aperture ratio of the part.

That is, since the upper part of the transporting vehicle moving space is opened to introduce the purified air blown out from the ceiling blowing part of the clean room, the purified air blown from the ceiling blowing part of the clean room enters the upper part of the transporting vehicle moving space. Introduced and flows downward in the transport vehicle moving space, it becomes easier to discharge dust generated in the transport vehicle moving space outside the clean room by the downward flow of purified air, The cleanliness can be further improved.
The upper part of the article storage shelf is also opened to introduce purified air blown out from the ceiling blowout part of the clean room, and a space for flowing purified air is formed at the lower end part of the article storage shelf. The purified air blown out from the blowout part is introduced into the upper part of the article storage shelf and flows downward in the article storage shelf, and the purified air moves sideways from the rear side toward the front side. In combination with the flow, the purified air can easily flow into the article stored in the article storage unit.
That is, it is possible to improve the cleanliness of the transport vehicle moving space, and it is easy to flow the purified air to the articles stored in the article storage unit, so that the cleanliness of the article storage state can be further improved. .

Further, the opening ratio of the floor portion corresponding to the installation location of the article storage shelf in the porous floor portion is the opening of the floor portion corresponding to the conveyance vehicle moving space and the floor portion corresponding to the exhaust space in the porous floor portion. Therefore, the purified air is more likely to pass through the floor portion corresponding to the transport vehicle moving space and the floor portion corresponding to the exhaust space than the floor portion corresponding to the installation location of the article storage shelf.
In other words, the purified air blown from the clean room circulation ventilation means causes the purified air blown from the ceiling blowing section of the clean room to flow downward in the transport vehicle moving space and the article storage shelf, while the purified air is supplied to the rear of the article storage shelf. Guide to the air circulation space, let the article storage part pass from the rear part side to the front part side and flow into the transport vehicle moving space, and pass outside the clean room through the porous floor corresponding to the lower part of the transport vehicle moving space In addition, the purified air can be allowed to flow from the outward projecting portion of the transport vehicle moving space to the exhaust space while sufficiently suppressing the backflow of the purified air to the article storage portion, and the lower portion of the exhaust space. It can be made to flow out of a clean room through the porous floor part corresponding to.
In other words, the blower provided in the circulating ventilation means for the clean room can be used as both a blower for the purified air ventilation means and a blower for causing the purified air to flow from the exhaust space through the porous floor to the outside of the clean room. Therefore, it is possible to reduce the cost of goods storage facilities for clean rooms.
In short, it has become possible to further reduce the cost of goods storage equipment for clean rooms while further improving the cleanliness of the goods storage state.

In addition to the fifth feature configuration, the sixth feature configuration is
In the state where the article storage shelf arranges a pair of front and rear columns in the width direction of the shelf, and supports a pair of left and right article support frames arranged at intervals in the width direction of the shelf, the shelf width direction and the vertical width of the shelf It is arranged side by side in the direction.
The article storage unit is configured to store an article in a form in which the article is placed and supported by the pair of left and right article support frames.

That is, in the state in which the article storage units communicate with each other adjacent to each other in the width direction of the shelf and communicate with each other adjacent to each other in the vertical direction of the shelf so as to allow air flow, In order to improve the article storage capacity, the purified air that flows from the rear side of the article storage shelf through the article storage unit to the transport vehicle moving space and the upper part of the article storage shelf The purified air flowing in the article storage shelf from the side toward the lower side can be made to flow over a wider range of the outer peripheral portion of the article stored in the article storage unit.
And the cleanliness | purity of an article storage state can be improved further by flowing purified air over the wider range of the outer peripheral part of the articles | goods currently stored by the article | item storage part.
Therefore, it is possible to further improve the cleanliness of the article storage state while improving the article storage capacity.

[First Embodiment]
Hereinafter, a first embodiment of the present invention will be described based on the drawings.
As shown in FIGS. 1 and 2, the article storage facility according to the present invention is installed in a clean room 1 that is less dusty and is, for example, a work-in-progress product such as a semiconductor product or a liquid crystal display device. Are stored in a dust-free environment. Incidentally, in the first embodiment, the article is configured to be transported and stored while being stored in the container C.

As shown in FIG. 2, the clean room 1 in which the article storage facility is installed is configured as a downflow type in which purified purified air flows downward from the ceiling side to the floor side.
The downflow clean room 1 will be further described. The floor portion of the clean room 1 is formed into a porous grating floor 2 (corresponding to a porous floor portion) in which a large number of air holes are formed. A clean-room circulation ventilation means F for circulating the purified air to the clean room 1 in a form in which the ceiling blow-out section 3 is formed on the ceiling and the suction air sucked through the grating floor 2 is blown out from the ceiling blow-out section 3 is provided.

The clean room circulation ventilation means F will be described below. An air intake chamber 4 is provided below the grating floor 2, and an air filter 5 made of a HEPA filter or the like is provided in parallel to the ceiling outlet 3. An air chamber chamber 6 is provided on the upper side of the blowout portion 3, and the intake chamber 4 and the air chamber chamber 6 are connected to each other through a connection flow path 7.
Further, a circulation fan 8 is provided in the connection flow path 7 so as to suck the suction chamber 4, and a pre-filter 9 is provided in a portion of the connection flow path 7 on the air discharge side of the circulation fan 8. is there.
That is, the clean room circulation ventilation means F is connected to the grating floor 2, the intake chamber 4, the connection flow path 7, the circulation fan 8, the prefilter 9, the air chamber chamber 6, the ceiling outlet 3, and the A pre-filter 9 is provided.

Then, due to the ventilation action of the circulation fan 8, the air in the clean room 1 is sucked into the intake chamber 4 through the grating floor 2, and the air sucked into the intake chamber 4 flows through the connection flow path 7 to pass through the prefilter 9. After passing through and being cleaned, it flows into the air chamber chamber 6 and further passes through the air filter 5 provided in the ceiling outlet 3 to be cleaned, and then is directed from the ceiling outlet 3 into the clean room 1. It is configured to blow out downward.
Accordingly, the air in the clean room 1 is circulated through the above-mentioned path while passing through the pre-filter 9 and the air filter 5, so that the purified air is always supplied to the clean room 1 in a state of being blown downward from the ceiling blowing part 3. Thus, the interior of the clean room 1 is maintained in a highly clean state.

Furthermore, an outside air intake passage 10 is connected to a portion of the connection passage 7 on the suction side of the circulation fan 8, and an outside air intake amount adjusting damper 11 is provided in the outside air intake passage 10, and the connection An exhaust passage 12 is connected to the discharge side portion of the circulation fan 8 in the passage 7, and an exhaust amount adjusting damper 13 is provided in the exhaust passage 12.
A predetermined amount of the purified air in the clean room 1 circulated by the clean room circulation ventilation means F by adjusting the opening degree of the outside air intake amount adjusting damper 11 and the exhaust amount adjusting damper 13. Is configured to be replaced with fresh air.

Next, the structure of the article storage facility will be described with reference to FIGS.
2 is a view taken in the direction of the arrow in FIG. 1, FIG. 3 is a view taken in the direction of the arrow in FIG. 1, and FIG. 4 is a view taken in the direction of the arrow in FIG.
The article storage facility includes an article storage shelf S provided with a plurality of article storage units 14 arranged in the width direction of the shelf and the width direction of the shelf, and an article that moves in the width direction of the shelf in the transport vehicle moving space 15 in front of the article storage shelf S. An article storage box W including a transport vehicle V is provided in the clean room 1, and further, purified air is allowed to flow from the rear side of the product storage shelf S to the transport vehicle moving space 15 through the product storage section 14. In addition, a purified air ventilation means B is provided to flow from the transport vehicle moving space 15 to the outside of the clean room 1.

In the first embodiment, a pair of the article storage shelves S with their front sides facing each other and spaced apart from each other to form the transport vehicle moving space 15 between the clean rooms 1. It is provided on the grating floor 2.
Then, the side periphery of the pair of article storage shelves S provided in this way is a rectangular cylindrical peripheral wall 25, and the lateral sides of each article storage shelf S are outside the transport vehicle moving space 15 described later. The protrusions 15t and the exhaust space 16 are spaced apart from each other, and the rear portions of the article storage shelves S are spaced apart so as to form an air circulation space 19 described later.

That is, the transport vehicle moving space 15 is provided so as to protrude outward in the width direction of the shelf from the article storage shelf S, and the exhaust space 16 communicated with the outward protruding portion 15t so as to allow air flow is provided in the article storage shelf S. The laterally protruding portion 15t of the transport vehicle moving space 15 and the exhaust space 16 are provided on the lateral side portion of the transporting vehicle 15 in a state of being partitioned by the article storage shelf S and the lateral partition body 17 as a partition body so as not to allow air flow. The peripheral wall 25 divides the clean room 1 so as not to allow air flow, and a clean room external communication passage 18 is provided to communicate the exhaust space 16 with the outside of the cream room 1 so as to allow air flow.
The horizontal partition wall 17 is provided on each of the sides of each article storage shelf S on both sides in the width direction of the shelf over the entire length in the vertical direction of the shelf of the article storage shelf S and in the longitudinal direction of the shelf. The exhaust space 16 on the lateral side is partitioned so that air cannot flow.
By the way, the peripheral wall 25 is configured to function as a partition wall that partitions the outward projecting portion 15t of the transport vehicle moving space 15 and the exhaust space 16 so as to partition the interior of the clean room 1 from being incapable of air flow. is there.

That is, in the first embodiment, the exhaust space 16 is provided on both lateral sides of each article storage shelf S, and the outward projecting portions 15t are provided at both ends of the transport vehicle moving space 15 in the lateral width direction of the shelf. It is.
An opening for entering and exiting the exhaust space 16 is formed in a portion corresponding to each exhaust space 16 in the peripheral wall 25, and a door 26 for opening and closing the opening is provided in the peripheral wall 25. At a portion corresponding to one outward projecting portion 15t of the transport vehicle moving space 15, an opening for entering and exiting the transport vehicle moving space 15 is formed, and a door 27 for opening and closing the opening is provided.
Although not shown, the exhaust space 16 is provided with a control device for controlling the operation of the article storage facility, a distribution board, etc., and the flow of purified air from the outward projecting portion 15 t of the transport vehicle moving space 15. It is provided in an unhindered state.

  In addition, an air circulation space 19 for guiding the purified air blown from the ceiling blow-out part 3 of the clean room 1 to the article storage part 14 is opened at the rear part of each article storage shelf S, and the side periphery circulates. The purified air ventilation means B is provided from the ceiling outlet 3 of the clean room 1 by being partitioned so as to be separated from the inside of the clean room 1 so as not to be able to flow of air by the peripheral wall 25 that functions as a path forming partition. The purified air that has been blown out is guided in the air circulation space 19 to be supplied to the article storage unit 14, and the purified air flowing through the article storage unit 14 and flowing into the transfer vehicle moving space 15 is moved to the transfer vehicle. The purified air is made to flow in the form of flowing from the space 15 through the grating floor 2 of the clean room 1.

  Further, the rear partition wall 46 divides the rear end edge of each article storage shelf S in each lateral side portion and the peripheral wall 25 on the shelf lateral direction side over the entire length in the vertical width direction of the article storage shelf S. The exhaust space 16 is partitioned from the air circulation space 19 so that air cannot flow.

Each article storage shelf S includes a pair of front and rear columns 21 arranged in the width direction of the shelf, and a pair of left and right article support frames 22 arranged at intervals in the width direction of the shelf. In addition, a plurality of items are arranged side by side in the vertical direction of the shelf, and the article storage unit 14 is configured to store the containers C in a form in which the containers C are placed and supported by the pair of left and right article support frames 22.
That is, in the state in which the article storage units 14 communicate with each other adjacent to each other in the width direction of the shelf communicate with each other so as to allow air flow and communicate with each other adjacent with each other in the width direction of the shelf so as to allow air flow. A plurality of them are arranged in the direction to improve the article storage efficiency.

  The article storage shelf S will be described in detail. The upper ends of a plurality of front and rear columns 21 arranged in the width direction of the shelf are integrally connected by a rectangular upper frame body 23, and the inside of the article storage section in each pair of front and rear columns 21. A plurality of the article support frames 22 are supported at intervals in the vertical direction of the shelf on the side, that is, on the side in the width direction of the shelf. That is, the article support frames 22 are supported on the side portions on both sides of the shelf width direction by the pair of front and rear columns 21 other than the pair of front and rear columns 21 positioned at both ends in the shelf width direction.

  The lowermost article support frame 22 among the plurality of article support frames 22 arranged in the vertical direction of the shelf is supported above the lower end of the support column 21 and is used for flowing purified air at the lower end of the article storage shelf S. A space 24 is formed.

  Then, the pair of article storage shelves S configured as described above are arranged with an interval to form the transport vehicle moving space 15 between each other with the front sides thereof facing each other. By surrounding the side periphery of the pair of article storage shelves S arranged in this way with the peripheral wall 25, the upper part of the transport vehicle moving space 15 and the upper part of each article storage shelf S are connected to the ceiling outlet 3 of the clean room 1. It is opened so as to introduce the purified air blown out from.

  Further, by forming the exhaust space 16 in the upper part of the grating floor 2, the clean room external communication passage 18 that communicates the exhaust space 16 with the outside of the cream room 1 so as to be capable of air flow is provided in the exhaust space 16. The purified air is made to flow through the grating bed 2.

The floor portion corresponding to the installation location of each article storage shelf S in the grating floor 2 and the opening ratio of the floor portion corresponding to the air circulation space 19 are determined as the floor portion corresponding to the transport vehicle moving space 15 in the grating floor 2. And the opening ratio of the floor portion corresponding to the exhaust space 16 is smaller.
Specifically, the opening ratio of the floor portion corresponding to the installation location of each article storage shelf S in the grating floor 2 and the floor portion corresponding to the air circulation space 19 is 18%, and the conveyance vehicle moving space 15 in the grating floor 2 is The opening ratio of the corresponding floor portion and the floor portion corresponding to the exhaust space 16 is set to 50%.

Further, an air flow between the front end edge portion of each lateral side portion of the article storage shelf S and the peripheral wall 25, the exhaust space 16, and the outward projecting portion 15 t of the transport vehicle moving space 15. The communication opening 28 is configured so as to communicate with each other, and the communication opening 28 extends from the grating floor 2 of the clean room 1 to the upper end of the article storage shelf S.
And the porous plate-shaped body 29 which closes the lower side part of the opening 28 for the communication in the state which can be air-flowed is provided.

Incidentally, the porous plate-like body 29 is formed of a punching metal in which a large number of oval holes are formed with an aperture ratio of about 40% so that the height is about 2 m.
That is, by closing the 2 m above the floor of the communication opening 28 with the porous plate-like body 29, the operator who has entered the exhaust space 16 cannot enter the transport vehicle moving space 15. In addition, the hand cannot be protruded greatly from the upper side of the porous plate-like body 29 toward the transport vehicle moving space 15 side.
Further, by forming the porous plate-like body 29 with the punching metal, the operator cannot project a part of the body such as a finger through the hole of the porous plate-like body 29 into the transport vehicle moving space 15. It is like that.

  Although illustration is omitted, a carry-in entrance for carrying the container C from the clean room 1 to the article storage shelf S is formed using one of the plurality of article storage units 14 provided in the article storage shelf S. The other one is used to form a carry-out port for carrying out the container C from the article storage shelf S to the clean room 1.

Next, the article transport vehicle V will be described.
As shown in FIGS. 1, 2, 3, 6, and 7, the article transport vehicle V includes a pair of wheels 31 at the front and rear, and a pair provided on the grating floor 2 of the transport vehicle moving space 15. The carriage portion 34 is guided by the guide rail 32 and the guide rail 33 provided on the ceiling side and travels by the driving force of a traveling motor (not shown), and the lifting guide column 35 erected on the carriage portion 34 is An article transfer means T supported so as to be able to move up and down above the central portion of the carriage portion 34 in the longitudinal direction of the vehicle body, and a lifting motor 30 as a lifting drive means for driving the article transfer means T up and down. Configured. Incidentally, the cart portion 34 is formed in a substantially rectangular shape in plan view.

  Then, the article transport vehicle V is provided with a rectifying plate 41 that receives and guides purified air flowing toward the article storage shelf S toward the rear side of the article transport vehicle V by hitting the front end portion in the moving direction of the article transport vehicle V. It is provided in a state of being spaced from V in the vehicle body width direction.

Hereinafter, each part of the article transport vehicle V will be described based on FIGS. 6 and 7.
The article transfer means T is a lifting motor 36 that is driven to be lifted by the lifting motor 30, and a turning motor (not shown) around an axis P <b> 1 along the vertical direction of the vehicle body at the top of the lifting table 36. The swivel base 37 is provided so as to be driven to turn, and the article placement base 39 provided so as to be driven out and retracted by the link mechanism 38 on the upper part of the turn base 37.

  Various configurations known in the art may be adopted as the configuration for moving the lifting platform 36 up and down by the lifting motor 30, and detailed description and illustration are omitted. The elevator 36 can be configured to be driven up and down by rotating forward and backward and winding or unwinding the wire connected to the elevator 36.

  The link mechanism 38 includes an operation link 44 in which a base end side is rotatably connected around an axis P2 along the vertical direction of the vehicle body at two locations arranged in the width direction of the article mounting table 39 on the upper surface side of the swivel base 37. The free end side of the pair of operation links 44 is provided with a pair of swing links 45 that are individually linked to the lower surface side of the base end portion of the article mounting table 39.

  The pair of operation links 44 are configured to swing around the axis P <b> 2 in conjunction with an exit / retraction electric motor (not shown) provided on the lower surface side of the swivel base 37. Each swing link 45 is around the axis P3 along the vertical direction of the vehicle body with respect to the free end side of the operation link 44, and around the axis P4 along the vertical direction of the vehicle body with respect to the base end side of the article mounting table 39. Are connected to each other so as to be relatively rotatable.

  As a result, the link mechanism 38 causes the pair of operation links 44 to be interlocked by the retractable electric motor to swing around the respective shaft cores P <b> 2, and the pair of swinging operation links 44 via the pair of interlocking links 45. Then, by pushing or pulling the proximal end side of the article mounting table 39, the article mounting table 39 is moved in and out of the swivel base 37 in the front-rear direction of the article mounting table 39. That is, the orientation of the article mounting table 39 with respect to the lifting table 36 is adjusted so that the tip side of the article mounting table 39 faces the one article storage shelf S or the other article storage shelf S by the turning operation of the turning table 37. Thereafter, as shown in FIG. 7, the protruding state for storing and taking out the articles that protrudes from the swivel base 37 toward the article storage shelf S so that the front end side of the article mounting table 39 reaches the article storage unit 14, and FIG. 6. As described above, the entire article mounting table 39 is switched to a retreat state for conveying an article that has been retired toward the swivel base 37 rather than in the protruding state.

As shown in FIGS. 1, 2, 3, 6, and 7, a pair of control boxes 40 are distributed to both sides in the vehicle body lateral width direction at both ends in the vehicle body longitudinal direction at the upper portion of the carriage portion 34. It is provided in the state. That is, the four control boxes 40 are provided on the upper portion of the substantially rectangular carriage portion 34 in a state of being distributed to the four corners.
The height of each control box 40 is, for example, about 1/7 to 1/8 of the height of the up-and-down guide column 35, and each control box 40 is configured to exist in the lower portion of the article transport vehicle V. It is.
Although not shown in the drawings, a transport vehicle control device that controls the operation of the article transport vehicle V, a communication device that communicates with the main controller on the ground side, a power supply unit, and the like are provided in the control box. 40.

Four brackets 43 are provided on the side portion of each control box 40 on the article storage shelf side so as to project to the article storage shelf side in a state of being distributed to the four corners.
And the rectangular said baffle plate 41 is supported on the front-end | tip of the four brackets 43 provided in the said side part of each control box 40 with the attitude | position along the vehicle body front-back direction and the vehicle body up-down direction.
Incidentally, the posture along the vehicle body longitudinal direction means a posture parallel or substantially parallel to the guide rail 32 in a plan view, and the posture along the vehicle body vertical direction is along the vertical direction or substantially. It means the posture along.

  That is, the both ends of the rectifying plate 41 in the longitudinal direction of the vehicle body in order to form a transfer space 42 for transferring the article by the article transfer means T in the central part of the article transport vehicle V in the longitudinal direction of the vehicle body. It is provided at four locations in a state of being located on each side and in a state of being located on both lateral outer sides of the lower portion of the article transport vehicle V.

By the way, in the first embodiment, a purified air flow space 24 is formed at the lower end of the article storage shelf S, and an article storage section 14 is provided above the flow space 24. Since the article storage section 14 is not present on the lateral side of the carriage portion 34 of V, the purified air hitting the front end portion in the traveling direction of the carriage portion V flows to the article storage shelf S side. There is no need to suppress this.
Also, the end portion on the article storage shelf S side in the vehicle body width direction of the lifting guide column 35 is present inside the end portion on the article storage shelf S side in the vehicle body width direction in the control box 40 to raise and lower the guide. The purified air that flows toward the article storage shelf S when it hits the front end of the support column 35 in the traveling direction is difficult to reach the front part of the article storage shelf S.
That is, in order to prevent the purified air flowing toward the article storage shelf S from hitting the front end portion in the moving direction of the article transport vehicle V from flowing back to the article storage section 14, the rectifying plate 41 is placed on the lateral outer side of the article transport vehicle V. It is sufficient to make it exist in the range from the lower end part of the control box 40 to the upper end part.
So, in this 1st Embodiment, each baffle plate 41 is provided in the state located in the both lateral outer side of the lower part corresponding to the range ranging from the lower end part of the control box 40 in the goods conveyance vehicle V to an upper end part.

Since storing and taking out articles by the article transporting vehicle is well known, it will be briefly described below.
That is, when taking out the container C containing the articles from the article storage unit 14, the carriage drive 34 is driven by the running motor, the elevator 36 is driven up and down by the lifting motor 30, and the swivel drive 37 is driven by the turning motor. Thus, the article mounting table 39 is positioned at a predetermined position for taking out the container C in front of the article storage unit 14 from which the container C is to be taken out.
Then, the article mounting table 39 is switched to the protruding state by the link mechanism 38 so that the front end side of the article mounting table 39 enters the lower side of the container C stored in the article storage unit 14, and then the lifting motor The article mounting table 39 is lifted by moving the lifting table 36 by the above-described operation, the container C is placed on and supported on the article mounting table 39, and then the article mounting table 39 is switched to the retracted state by the link mechanism 38. By doing so, the container C is taken out from the article storage unit 14.

On the other hand, when the container C containing the articles is stored in the article storage section 14, the carriage C is driven by the traveling motor while the container C is placed and supported on the article mounting table 39, and the lifting platform by the lifting motor 30. The article mounting table 39 is positioned at a predetermined position for storing the container C in front of the article storage unit 14 in which the container C is to be stored, by the up-and-down drive 36 and the swing drive of the swivel base 37 by the swing motor. .
Then, the link mechanism 38 is used to switch the article mounting table 39 on which the container C containing the articles is placed into a protruding state, and the leading end side of the article mounting table 39 enters the article storage unit 14, and is lifted by a lifting motor. The article mounting table 39 is lowered by lowering the lifting table 36, the container C is placed on the pair of article support frames 22, and the container C is stored in the article storage unit 14.

Hereinafter, based on FIG. 1 thru | or FIG. 4, the ventilation | circulation form of the purified air in the article storage equipment comprised as mentioned above is demonstrated. In addition, in each figure of FIG. 1 thru | or FIG. 4, the flow form of purified air is shown with a broken-line arrow.
As shown in FIGS. 2 to 4, the purified air is blown downward from the ceiling blowing portion 3 into the clean room 1 by the ventilation action of the circulation fan 8, and flows downward in the clean room 1. Passes through the grating floor 2 and flows out of the clean room 1.

  Further, as described above, the opening ratio of the floor portion corresponding to the installation location of each article storage shelf S in the grating floor 2 is set to the floor portion corresponding to the transport vehicle moving space 15 in the grating floor 2 and the exhaust gas. Since it is formed smaller than the opening ratio of the floor portion corresponding to the space 16, it is blown out from the ceiling blowing portion 3 of the clean room 1 by the ventilation action of the circulation blower 8, and the conveyance vehicle moving space 15, the article storage shelf. The purified air introduced into the air circulation space 19 at the upper part of S and the rear part of the article storage shelf S flows in the following forms, respectively.

  That is, as shown in FIGS. 2 and 3, the purified air introduced into the upper portion of the transport vehicle moving space 15 flows downward in the transport vehicle moving space 15 and flows out of the clean room 1 from the grating floor 2.

  Also, as shown in FIG. 3, the purified air introduced into the upper part of the article storage shelf S flows through the article storage units 14 arranged in the vertical direction to the front side and flows into the transport vehicle moving space 15. While being dispersed, the purified air flowing through the article storage units 14 arranged in the vertical direction and flowing downward and flowing from the article storage units 14 arranged in the vertical direction to the conveyance vehicle moving space 15 is transferred to the conveyance vehicle. The moving space 15 flows downward, flows from the grating floor 2 below the transporting vehicle moving space 15 to the outside of the clean room 1, passes through the respective article storage portions 14 arranged in the vertical direction, and stores the article storage shelf S. The purified air that has reached the flow space 24 at the lower end of the gas flows from the grating floor 2 below the flow space 24 to the outside of the clean room 1.

  Further, as shown in FIG. 3, the purified air introduced into the air circulation space 19 is dispersed in such a form that it passes through the article storage portions 14 arranged in the vertical direction from the rear side and flows into the transport vehicle moving space 15. However, the purified air that flows downward in the air circulation space 19 and flows from the respective article storage units 14 arranged in the vertical direction to the transport vehicle moving space 15 flows toward the transport vehicle moving space 15 downward. The purified air that flows from the grating floor 2 below the transport vehicle moving space 15 to the outside of the clean room 1, flows downward in the air circulation space 19, and reaches the lower end portion thereof is the air circulation space 19. Flows from the lower grating floor 2 to the outside of the clean room 1.

  That is, the purified air ventilation means B includes the air circulation space 19, the grating floor 2, the connection flow path 7, the circulation fan 8, and the like to constitute the clean room circulation ventilation means F. The circulation fan 8 is configured to be used as a fan for the purified air ventilation means B.

Further, as shown in FIGS. 1 and 4, when the article transport vehicle V moves in the transport vehicle moving space 15 toward the outward projecting portion 15t, the peripheral wall that partitions the article transport vehicle V and the outer projecting portion 15t. The purified air tends to be compressed with the peripheral wall 25, but the purified air having such a tendency to compress flows from the outward projecting portion 15 t of the transport vehicle moving space 15 into the clean room 1 due to the peripheral wall 25. In the blocked state, the purified air that flows from the outward projecting portion 15t of the transport vehicle moving space 15 through the communication opening 28 to the exhaust space 16 and flows into the exhaust space 16 passes through the article storage shelf S. In the state where the horizontal partition wall body 17 prevents the fluid from flowing into the air circulation space 19 and the rear partition body body 46 prevents the flow from flowing into the air circulation space 19, the exhaust space 16 is caused by the ventilation action of the circulation fan 8. Grating floor 2 at the bottom of What flows out of the clean room 1.
In other words, the circulation blower 8 constituting the clean room circulation ventilation means F is also configured to serve as a blower for causing the purified air flowing into the exhaust space 16 to flow outside the clean room 1 through the grating floor 2. is there.

Further, as indicated by a broken line arrow in FIG. 6, when the article transport vehicle V moves in the transport vehicle moving space 15, the purification that flows to the article storage shelf S side by hitting the front end portion in the moving direction of the article transport vehicle V. The air is received and guided to the rear side of the article transport vehicle V by the rectifying plate 41 and is prevented from flowing to the article storage shelf S side than the rectifying plate 14, so the moving article transport vehicle V and the article storage It is difficult to disturb the airflow in the space between the shelves S.
That is, the airflow in the space between the moving article transport vehicle V and the article storage shelf S can be easily maintained in an appropriate state in which purified air flows from the article storage unit 14 to the transport vehicle moving space 15. It is possible to prevent the purified air from flowing backward from the vehicle movement space 15 to the article storage unit 14.

  Therefore, when the article transport vehicle V moves, the purified air that flows to the article storage shelf S and hits the front end in the moving direction of the article transport vehicle V is received by the rectifying plate 41 on the rear side of the article transport vehicle V. The purified air that is guided and that tends to be compressed between the article transport vehicle V and the peripheral wall 25 that partitions the outward projecting portion 15t flows out of the clean room 1 from the exhaust space 16 through the clean room external communication path 18. Therefore, while maintaining the cleanliness in the clean room 1, it is possible to prevent the purified air from flowing backward from the transport vehicle moving space 15 where dust is easily generated to the article storage unit 14. The cleanliness of the article storage state can be improved.

[Second Embodiment]
Hereinafter, a second embodiment of the present invention will be described with reference to FIGS. 8 to 9. However, since the second embodiment describes another embodiment of the purified air ventilation means B, the first embodiment will be described. The description of the same configuration as that of the embodiment is omitted by assigning the same reference numerals, and mainly the configuration different from the purified air ventilation means B and the other first embodiment will be described.
8 is a plan view of the article storage facility, FIG. 9 is a perspective view of the arrow in FIG. 8, and FIG. 10 is a perspective view of the arrow in FIG.

In the first embodiment, the side periphery of the pair of article storage shelves S is surrounded by a rectangular cylindrical peripheral wall 25. In the second embodiment, as shown in FIGS. Furthermore, a ceiling 61 is provided so as to close to the upper opening of the rectangular cylindrical peripheral wall 25, and a booth 62 is formed by the peripheral wall 25 and the ceiling 61, and the pair of article storage shelves S is formed in the booth 62. Surrounding and surrounding the side.
And like 1st Embodiment, the partition wall which partitions off the said surrounding wall 25 so that the outward protrusion part 15t of the said conveyance vehicle movement space 15 and the said exhaust space 16 may be divided with the said clean room 1 so that air flow is impossible. It is comprised so that it may function as.

In the second embodiment, the horizontal partition wall 17 as the partition wall that partitions the exhaust space 16 and the article storage shelf S so as not to allow air flow is provided from the grating floor 2 of the clean room 1 to the booth 62. It is provided so as to extend over the ceiling 61.
In the second embodiment, the air circulation space 19 is not provided, and the rear partition body 46 is provided so as to extend from the grating floor 2 of the clean room 1 to the ceiling 61 of the booth 62, and the rear partition body. 46 divides the exhaust space 16 and the space behind the article storage shelf S in the booth 62 so that air cannot flow.

  As shown in FIGS. 8 to 10, each article storage shelf S is provided with a plurality of the article storage sections 14 arranged in the shelf width direction and the shelf vertical width direction, as in the first embodiment. In the embodiment, each article storage section 14 is configured to be capable of storing an article holder K that can hold a plurality of plate-like articles g such as glass substrates at intervals in the vertical direction.

Furthermore, in the second embodiment, as shown in FIGS. 8 and 9, an article processing apparatus that performs a predetermined process on an article g instead of a part of the lowermost article storage section 14 in each article storage shelf S. An article carry-in / out section 64 for carrying in / out the article g with respect to 63 is provided. The article carry-in / out section 64 is configured to take out the articles g from the article holder K one by one and supply them to the article processing apparatus 63 and to hold the articles g in the article holder K one by one from the article processing apparatus 63. It is.
The article loading / unloading section 64 has a pair of left and right lifting support bodies 65 for placing and supporting the article holding body K so as to be movable up and down, and a plurality of articles g that can place and support the article g and can carry the article g that is placed and supported. A conveyance body 66 having a driving roller is provided.

As shown in FIGS. 8 to 10, in this second embodiment, each of the peripheral walls 25 of the booth 62 corresponds to the rear part of each article storage shelf S, and each of the openings in the rear part of the plurality of article storage units 14. A plurality of fan filter units 67 are provided in a state of being opposed to each other, and further, the lower end portion of the peripheral wall 25 of the booth 62 corresponding to the rear of one article storage shelf S is opposed to the flow space 24. In this state, a plurality of exhaust openings 68 are provided.
Each fan filter unit 67 passes the article storage unit 14 from the rear side of the article storage unit 14 in a state where the dust removal filter 67f for removing dust and the purified air outside the booth 62 is sucked and passed through the dust removal filter 67f. It is comprised with the ventilation fan 67b which makes purified air ventilate.

  In the booth 62, since the purified air is ventilated by the blower fan 67b of the fan filter unit 67, the pressure of the purified air is increased. On the other hand, the purified air is exhausted by the exhaust opening 68. The pressure of the purified air is lowered. Then, due to the pressure difference of the purified air, the purified air in the booth 62 flows from the rear side to the front side of the article storage unit 14 and flows from the upper side to the lower side of the transport vehicle moving space 15. Down flow. A portion of the purified air that flows from the upper side to the lower side of the transport vehicle moving space 15 flows toward the exhaust opening 68 and is exhausted outside the booth 62, and then toward the lower side. It flows and reaches the intake chamber 4 through the grating floor 2, and the remaining part flows downward as it is and reaches the intake chamber 4 through the grating floor 2.

In the second embodiment, the purified air ventilation means B is used to clean the purified air in the clean room 1 with the plurality of fan filter units 67 and allow the purified air to pass through the booth 62. A part of the purified air that passes through each article storage section 14 from the rear side of the article storage section 14 and flows through the article storage section 14 toward the lower side of the transport vehicle moving space 15 is opened for exhaustion. After flowing from the portion 68 to the outside of the booth 62, the purified air is caused to flow in such a form that it flows through the grating bed 2 and the remaining portion flows downward as it is and then flows through the grating bed 2.
That is, the purified air ventilation means B includes the plurality of fan filter units 67, the exhaust openings 68, the grating floor 2, the connection flow path 7, the circulation fan 8, and the like, The circulation fan 8 constituting the clean room circulation ventilation means F is configured to be used as a blower for the purified air ventilation means B.

  As shown in FIGS. 8 to 10, the article transport vehicle V is guided by one guide rail 32 provided on the grating floor 2 and one guide rail 33 provided on the ceiling side, And it is the same as that of said 1st Embodiment except differing in the point which does not provide the said baffle plate 41. FIG.

As shown in FIG. 8, when the article transport vehicle V moves in the transport vehicle moving space 15 toward the outward projecting portion 15t, between the article transport vehicle V and the peripheral wall 25 that partitions the outward projecting portion 15t. The purified air tends to be compressed, but the purified air that tends to be compressed in such a state is prevented from flowing into the clean room 1 from the outer protruding portion 15t of the transport vehicle moving space 15 by the peripheral wall 25. The purified air flowing from the outward projecting portion 15t of the transport vehicle moving space 15 through the communication opening 28 to the exhaust space 16 and flowing into the exhaust space 16 flows into the article storage shelf S. The grating in the lower part of the exhaust space 16 by the ventilation action of the circulation fan 8 while being blocked by the horizontal partition wall 17 and flowing to the rear of the article storage shelf S by the rear partition body 46. Cree through floor 2 Room 1 to flow to the outside.
Accordingly, when the article transport vehicle V moves, the purified air that tends to be compressed between the article transport vehicle V and the peripheral wall 25 that partitions the outward projecting portion 15t passes through the clean room outer communication passage 18 from the exhaust space 16. Since the fluid flows out of the clean room 1 and passes through, the purified air can be prevented from flowing back to the article storage unit 14 from the transport vehicle moving space 15 where dust is easily generated while maintaining the cleanliness in the clean room 1. The cleanliness of the article storage state in the article storage unit 14 can be improved.

  Further, in the second embodiment, as described above, the purified air ventilation means B is in a state in which the purified air in the clean room 1 is cleaned and ventilated in the booth 62 by the plurality of fan filter units 67. Therefore, the purified air that passes through each article storage section 14 can be further purified, and the article storage state. Can be further improved.

[Another embodiment]
Next, another embodiment will be described.
(A) Instead of the clean room external communication path 18 provided in each of the first and second embodiments, as shown in FIGS. 11 and 12, the exhaust space 16 and the inside of the cream room 1 are air-flowed. A communication path 52 in the clean room that includes a fan filter unit 51 that communicates as possible and serves as an air purification means may be provided. FIG. 11 and FIG. 12 show a case where this another embodiment is applied to the first embodiment, and illustration when it is applied to the second embodiment is omitted.
In other words, the rear partition body 46 is omitted, and the lateral partition body 17 is provided to extend to the peripheral wall 25 to the rear of the article storage shelf S.
In the peripheral wall 25 functioning as the partition wall, a communication opening 53 is formed in a portion of the exhaust space 16 corresponding to the rear side of the article storage shelf B, and the communication opening 53 is provided for exhaust. The fan filter unit 51 including a blower (not shown) that sucks into the space 16 and a filter (not shown) that purifies purified air that is ventilated by the blower is provided.
That is, the clean room communication path 52 is configured in such a manner that the purified air in the exhaust space 16 flows through the communication opening 53.

  In this case, as indicated by a broken line arrow in FIG. 12, when the article transport vehicle V moves, the purified air tends to be compressed between the article transport vehicle V and the peripheral wall 25 that partitions the outward projecting portion 15t. Is flowing from the outward projecting portion 15t of the transport vehicle moving space 15 through the communication opening 28 to the exhaust space 16, and is purified from the exhaust space 16 through the fan filter unit 51. The fluid flows into the clean room 1 through the communication passage 53 in the clean room.

(B) The specific configuration of the purified air ventilation means B is not limited to the configuration illustrated in the above embodiment, and various configurations are possible.
For example, an air circulation space 19 for guiding the purified air blown from the ceiling blow-out part 3 of the clean room 1 to the article storage part 14 is opened at the rear part of the article storage shelf S, and an upper part is opened and a flow passage is formed around the side. The partition body is provided in a state of being partitioned from the clean room 1 so as not to be able to flow air, and the purified air ventilation means B is provided to the purified air blown from the ceiling blowing section 3 of the clean room 1 to the air circulation space 19. The purified air flowing through the article storage space 14 and flowing into the transport vehicle moving space 15 is caused to flow from the transport vehicle moving space 15 through the grating floor 2 of the clean room 1. In the case where the purified air is configured to flow, in the first embodiment, a blower for flowing the purified air in the above-described form is provided. Is configured so as to alternate with circulating blower 8 constituting the circulation ventilation means F for clean room, may be provided on the clean air ventilation means B only.

  Moreover, in said 1st Embodiment, the fan filter unit is taken in into the opening part of the rear part of each goods storage part 14, and the purified air in the clean room 1 is taken in into the goods storage part 14, and the goods storage part 14 is allowed to pass through. A fan filter unit may be provided which is provided so as to flow into the transport vehicle moving space 15 and in which the purified air ventilation means B is provided in each article storage section 14.

(C) In each of the first and second embodiments, the purified air that has flowed from the outward projecting portion 15t of the transport vehicle moving space 15 to the exhaust space 16 is caused to flow outside the clean room 1 through the grating floor 2. A dedicated blower may be provided.

(D) The installation form of the rectifying plate 41 is not limited to the posture along both the longitudinal direction of the vehicle body and the vertical direction of the vehicle body. The posture may be slightly inclined.

(E) When the rectifying plate 41 is provided in a state of being positioned on both lateral outer sides of the lower portion of the article transport vehicle V, the existence range in the vertical direction of the vehicle body is the range exemplified in the above embodiment, that is, control. The range extending from the lower end to the upper end of the box 40 is not limited.
For example, when the article storage unit 14 exists on the lateral side of the carriage part 34, it may be provided so as to exist also on the lateral outer side of the carriage part 34.
Further, it may be provided so as to exist also on the lateral outer side of the lifting guide column 35.

(F) In each of the first and second embodiments described above, the article is stored in the article storage unit 14 in a state where the article is stored in the container C or the article holder K, or transferred and transferred by the article transport vehicle V. However, the article itself may be stored in the article storage unit 14 or transferred and transported by the article transport vehicle V.

The top view of the article storage equipment for clean rooms concerning a 1st embodiment Fig. 1 is a view taken along the arrow II. Figure 1 Haha arrow view in FIG. The perspective view of the principal part of the article storage equipment for clean rooms concerning a 1st embodiment The top view which shows the goods conveyance vehicle of the goods storage equipment for clean rooms which concerns on 1st Embodiment. The top view which shows the goods conveyance vehicle of the goods storage equipment for clean rooms which concerns on 1st Embodiment. The top view of the article storage equipment for clean rooms concerning a 2nd embodiment View of the knee arrow in FIG. Ho-ho arrow view in FIG. Longitudinal front view of an article storage facility for a clean room according to another embodiment Vertical side view of an article storage facility for a clean room according to another embodiment

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Clean room 2 Porous floor part 3 Ceiling blowing part 14 Article storage part 15 Transport vehicle moving space 15t Outward projecting part 16 Exhaust space 17 Partition body 18 Clean room external communication path 19 Air circulation space 21 Strut 22 Article support frame 24 Flow Space 25 Partition wall, flow passage forming partition 28 Communication opening 29 Porous plate-like body 51 Air purification means 52 Clean room communication path B Purified air ventilation means F Clean room circulation ventilation means S Goods storage shelf V Goods transport vehicle W Goods storage

Claims (6)

An article storage shelf including an article storage shelf provided with an article storage unit arranged in the width direction of the shelf and an article transport vehicle that moves the transport vehicle movement space in front of the article storage shelf in the width direction of the shelf is provided in the clean room,
For a clean room provided with purified air ventilation means for allowing purified air to flow from the rear side of the article storage shelf through the article storage unit to flow into the transport vehicle moving space and from the transport vehicle moving space to outside the clean room Equipment storage facility,
The transport vehicle moving space is provided in a form that protrudes outward in the lateral direction of the shelf from the article storage shelf, and an exhaust space that communicates with the outward protruding portion so as to allow air flow is provided on the lateral side of the article storage shelf. Is provided in a state in which the article storage shelf and the partition body are partitioned so as not to allow air flow,
A partition wall is provided for partitioning the outward projecting portion of the transport vehicle moving space and the exhaust space so as to partition the interior of the clean room from being incapable of air flow,
A clean room exterior communication path that communicates the exhaust space with the outside of the cream room so as to allow air flow, or a communication path within the clean room that communicates the exhaust space with the interior of the cream room so as to allow air flow and includes air purification means. Goods storage facilities for clean rooms. A communication opening communicating the exhaust space and the outward projecting portion of the transport vehicle moving space so as to allow air flow is provided in a state extending from the floor of the clean room to the upper end of the article storage shelf,
The article storage facility for a clean room according to claim 1, further comprising a porous plate-like body that closes a lower portion of the communication opening in a state where air can flow. In a form in which the suction air sucked through the porous floor portion of the clean room is blown out from the ceiling blowing portion of the cream room, provided is a clean room circulation ventilation means for circulating purified air to the clean room,
3. The clean room article storage facility according to claim 1 or 2, wherein the clean room external communication passage is configured to flow purified air in the exhaust space through the porous floor. An air circulation space for guiding the purified air blown from the ceiling blow-out part of the clean room to the article storage part at the rear part of the article storage shelf is opened at the upper part and the side periphery is a partition for forming a flow passage. And in a state of being partitioned so as to be separated from the inside of the clean room so that air cannot flow,
The purified air ventilation means guides the purified air blown from the ceiling blowing section of the clean room in the air circulation space, supplies the purified air to the article storage section, passes through the article storage section, and passes through the transport vehicle moving space. The clean room article storage facility according to claim 3, wherein the purified air flows in a form in which the purified air flowing in the form of flowing through the porous floor portion from the transport vehicle moving space is flowed. The upper part of the transport vehicle moving space and the upper part of the article storage shelf are opened to introduce purified air blown from the ceiling blowing part of the clean room,
A space for flowing purified air is formed at the lower end of the article storage shelf,
The floor portion corresponding to the location where the article storage shelf is installed in the porous floor portion corresponds to the floor portion corresponding to the transport vehicle moving space and the exhaust space in the porous floor portion. The article storage facility for a clean room according to claim 4, wherein the article storage facility is formed smaller than the opening ratio of the portion. In the state where the article storage shelf arranges a pair of front and rear columns in the width direction of the shelf, and supports a pair of left and right article support frames arranged at intervals in the width direction of the shelf, the shelf width direction and the vertical width of the shelf It is arranged side by side in the direction,
6. The article storage facility for a clean room according to claim 5, wherein the article storage unit is configured to store an article in a form in which the article is placed and supported by the pair of left and right article support frames.

Images