JP2000264405A - Conveying device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To dispense with an exclusive conveying passage, reduce occupied space and easily control cleanness by conveying an object in a closed space by comprising a stocker for defining the space capable of circulating a gas, and a processing unit capable of receiving a stored object to be processed for processing the same, and delivering the same after the processing. SOLUTION: A plurality of exclusive storing units 11, deliverable units 12 and connection units 13 are arranged at both sides of a crane unit 10 penetrating through a center of a main stocker 1, a convey car communicating unit 14 is arranged on one end of the crane unit 10, and a crane 15 is arranged in the crane unit 10. Blower storage places 20 are ensured to the lowermost step of each unit, and six storage places are ensured with a structure of two rows and three levels. That is, a storage place for a storage place 17, a storage place for delivery 18 and a storage place for accepting and delivery 19 are arranged along a plurality of virtual surfaces 22, 23, and the delivering of an object to be processes is executed by a crane 5 through the front surfaces thereof.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

TECHNICAL FIELD The present invention relates to a transfer device,
In particular, the present invention relates to a transfer device suitable for a production line of a semiconductor device or a liquid crystal display device.

[0002]

2. Description of the Related Art In many semiconductor device and liquid crystal display device production lines, a job shop that manages a group of processing units having the same kind of functions or a larger group of plural units as one unit. Production mode is adopted. A plurality of devices included in each device group and a loader and an unloader attached thereto are arranged in a small room partitioned by partitions. A small room in which one device group is arranged is called a bay.

FIG. 9A is a plan view showing a conventional transfer device constituting a semiconductor device production line. A main transport path 100 extending in the horizontal direction in the figure is disposed substantially at the center of the area where the transport device is disposed. From a plurality of predetermined positions on the main transport path 100, the sub-transport path 101
It extends to branch off from. Multiple sub-conveyance paths 1
Reference numerals 01 are arranged on both sides of the main transport path 100. Focusing on one sub-transport path 101, it is arranged only on one side of the main transport path 100. One sub-transport path corresponds to one bay. The sub-transport path is also called an intra-bay transport path. The main transfer path 100 and the sub transfer path 101 transfer an object to be processed, for example, a wafer cassette.

The stockers 10 corresponding to the respective sub-conveying paths 101
2 are arranged. The stocker 102 is connected to the main transport path 10
The object to be processed is transported between 0 and the sub-transport path 102, and the object to be processed is temporarily stored. When an object to be processed is transferred from a certain bay to another bay, the object to be processed is stored in the stocker 102 and the main transport path 10 of the source bay.
0 to the stocker 102 in the transfer destination bay. That is, the main transport path 100 is used when transferring the processing object across the bay. Therefore, the main transport path 100 is also called an interbay transport path.

A predetermined processing device 103 is arranged around the sub-transport path 101. The processing device 103 receives the processing target being transported along the sub-transport path 101, performs predetermined processing, and returns the processing object to the sub-transport path 101.

FIG. 9B shows another conventional arrangement example.
In the example of FIG. 9B, the sub-transport path 101 is arranged only on one side of the main transport path 100. In other respects, the configuration is the same as that of FIG. The transfer device in FIG. 9A is called a two-sided bay method, and the transfer device in FIG. 9B is called a one-sided bay method.

[0007] When determining a transfer destination of an object to be processed in a certain bay, a processing apparatus group for performing the next process of the object to be processed is determined, and a stocker in a bay accommodating the processing apparatus group is transferred to a transfer destination. And

There are a plurality of objects to be processed in the transfer device to perform various processes with different setups. In order to process a processing object having a different setup, a setup change operation is required in each processing apparatus. For example, in the case of an exposure apparatus, operations such as replacement of a photomask are required. In order to reduce the loss due to the setup change operation, it is preferable to schedule the processing objects that can be processed in the same setup in a continuous manner. For this purpose, a plurality of objects to be processed in the same setup are stored in the stocker 102 so that the objects to be processed in the same setup can be continuously supplied to the processing apparatus.

[0009] Further, it is necessary to collectively supply processing objects to be processed in the same setup to a processing apparatus for batch processing a plurality of processing objects at the same time. For this reason, it is necessary to store a plurality of processing objects that can be processed in the same setup in the stocker 102. In this way, in the stocker 102, a plurality of processing objects to be processed in various setups are stored for each setup.

[0010]

The main transport path 1 shown in FIG.
00 and the sub-transport path 101 are realized by, for example, a ceiling transport device in which the container moves along a rail attached to the ceiling, or an unmanned ground transport vehicle traveling along a rail provided on the floor. In such a configuration, a space for temporarily storing a processing target such as a semiconductor substrate or a liquid crystal substrate, and a space for a loader / unloader for transferring the processing target between the transport path and the processing apparatus are provided. , Are required independently for each device.

As the size of the object to be processed increases, the size of these storage facilities and loaders / unloaders also increases. For this reason, the required area of the clean room becomes large. Also,
As the size of the processing apparatus increases, the transport path becomes longer. For this reason, the required number of containers and unmanned trolleys constituting the transport path also increases.

Further, when the object to be processed is transferred from the bay to another bay, the processing apparatus which has completed the processing passes through a sub-transport path, a stocker, a main transport path, another stocker, and another sub-transport path. Then, it is transferred to the processing device to be processed next. Therefore, it is necessary to independently manage the degree of cleanliness for each of these devices.

It is an object of the present invention to provide a transfer apparatus capable of easily managing the cleanliness of the entire transfer apparatus including a processing apparatus.

Another object of the present invention is to provide a transfer apparatus capable of saving space in a transfer apparatus even when the processing apparatus is enlarged.

[0015]

According to one aspect of the present invention, there is provided a stocker that defines a space in which gas circulates, and a plurality of processing devices that are connected to the stocker and perform processing on an object to be processed. In the stocker, a plurality of storage locations for storing objects to be processed, a plurality of storage locations installed corresponding to each of the processing devices and capable of delivering the objects to the corresponding processing devices. A delivery storage location is secured, and the stocker is located in its internal space from the storage storage location to another storage storage location or delivery storage location, or from the delivery storage location to another delivery storage location. Alternatively, it has a transfer means for transferring the processing object to the storage location, and each of the processing devices receives the processing object stored in the corresponding delivery storage location, and responds to the received processing object. Performs processing Te, transport apparatus is provided to return the processing object after processing in the corresponding storage location for delivery.

An object to be processed can be transferred from one processing apparatus to another processing apparatus via the internal space of the stocker. Since the processing target is not exposed to the atmosphere outside the stocker, contamination of the processing target can be prevented. In addition, since the space in which the cleanliness is to be managed is limited to the inside of the stocker, the degree of cleanliness can be easily managed.

According to another aspect of the present invention, a plurality of stockers defining a closed space in which gas circulates, and a plurality of processing devices connected to each of the plurality of stockers and performing processing on an object to be processed. And a connection path for interconnecting two stockers among the plurality of stockers, defining a space communicating with a space in the corresponding stocker, and transferring a processing object between the corresponding stockers, In the stocker, a storage storage location for storing the processing target, and a delivery storage location that is installed corresponding to each of the processing devices and that can transfer the processing target to the corresponding processing device. At least one of the storage locations is secured in a plurality, and the storage / reception platform is installed corresponding to each of the connection paths and can transfer the processing object to the corresponding connection path. And a transfer means for transferring the processing target from any one of the plurality of storage storage locations, the delivery storage location, and the entry / exit storage location to another storage location. Each of the transfer devices receives a processing target stored in the corresponding delivery storage location, performs processing on the received processing target, and returns the processed processing target to the corresponding delivery storage location. Provided.

Via the space in the stocker and the connection path,
An object to be processed can be transferred from one processing apparatus to another processing apparatus. Since the object to be processed is not exposed to the atmosphere outside the stocker and the connection path, contamination of the object to be processed can be prevented. Further, since the space in which the cleanliness is to be managed is limited to the inside of the stocker and the connection path, it is possible to easily manage the screenlines.

[0019]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS A first embodiment of the present invention will be described with reference to FIGS.

FIG. 1 is a schematic diagram showing a planar layout of the transport device according to the first embodiment. The main stocker 1 is arranged substantially at the center of the transport device. The main stocker 1
It extends in the lateral direction of FIG. A plurality of stockers 2 are arranged on both sides of the main stocker 1. Each stocker 2 is shown in FIG.
Extend in the vertical direction. The end of each stocker 2 on the main stocker 1 side is connected to a side surface of the main stocker 1 via a connection path 3.

A plurality of processing units 5 are provided on both sides of each stocker 2.
Is arranged. Each processing device 5 is connected to the side surface of the corresponding stocker 2. The processing device 5 is, for example, a film forming device, an etching device, a cleaning device, a photolithography device, or the like. An inspection device 6 is connected to a side surface of the main stocker 1.

FIG. 2A is a plan view of the main stocker 1. A crane unit 10 passes through the center of the main stocker 1. On both sides of the crane unit 10, along the length direction, a plurality of storage units 11, transferable units 1
2 and a connection unit 13 are arranged. The storage dedicated unit 11, the transferable unit 12, and the connection unit 13 have the same width in the length direction of the crane unit 10. Therefore, it is possible to replace a certain unit with another unit as needed.

A carrier communication unit 14 is arranged at one end of the crane unit 10. A crane 15 is disposed in the crane unit 10. The crane 15 moves within the crane unit 10 in the length direction thereof, and transfers the object to be processed.

FIGS. 2B to 2D are front views of the dedicated storage unit 11, the transferable unit 12, and the connection path unit 13, respectively. In each unit, a blower storage location 20 is secured at the lowest level, and six storage locations are secured thereon so as to form a two-row three-tier configuration. Each storage location has a shelf on which the object to be processed is placed. It is not necessary to provide a partition between the storage locations adjacent to each other. A blower is disposed in the blower storage location 20, and the blower circulates the gas in the stocker 1. The internal circulation rate of the gas is, for example, about 80%.

In the storage unit 11, FIG.
As shown in (B), all storage locations are storage locations 17 for storage. Each storage location 17 stores one processing object. In the transferable unit 12, as shown in FIG. 2C, the first and second tiers are storage storage locations 17, and the third tier is a delivery storage location 18. The object to be processed is delivered to and received from the processing device 5 or the inspection device 6 shown in FIG. 1 via the delivery storage location 18. In the connection unit 13, FIG.
As shown in (D), the first tier is a storage location 19 for entry and exit, and the second and third tiers are storage locations 17 for storage.

Storage unit 1 constructed as above
1. Delivery unit 12 and connection unit 13
However, they are arranged on both sides of the crane unit 10 as shown in FIG. As a result, a plurality of storage storage locations 17, a delivery storage location 18, and a storage / reception storage location 1 are provided.
9 are arranged two-dimensionally along the first virtual plane 22. The remaining storage storage location 17, delivery storage location 18, and storage / reception storage location 19 are located along a second virtual surface 23 opposite the first virtual surface 22 with respect to the crane unit 10. They are arranged two-dimensionally. Each of the first and second virtual surfaces on the crane unit 10 side is referred to as a front surface, and the opposite surface is referred to as a rear surface.

The crane 5 transfers the object to be processed through the storage storage location 17, the delivery storage location 18, and the entry / exit storage location 19, and the front surface thereof. Thus, the processing target can be transferred from any storage location in the stocker 1 to any other storage location.

The stocker 2 shown in FIG. 1 has a configuration similar to that of the main stocker 1 shown in FIG. Note that, in the stocker 2, the connection unit 13 is not arranged, and instead, the connection unit 13 described later with reference to FIG.
a is arranged.

FIG. 3A is a plan sectional view of a connection portion between the stocker 2 and the processing device 5 in FIG. The transfer robot room 30 of the processing device 5 is provided with the delivery storage location 18 of the stocker 2.
Is bound to. A shutter 22 that can be opened and closed is disposed on the front surface of the delivery storage location 18. By closing the shutter 22, the space in the storage space 18 for delivery and the space in the crane unit 10 are partitioned.

An openable and closable shutter (separation plate) 23 is also provided on the back of the delivery storage location 18. By closing the shutter 23, the space in the delivery storage location 18 and the space in the transfer robot room 30 are partitioned. A transfer robot 31 is disposed in the transfer robot room 30. The transfer robot 31 takes out the processing target from the delivery storage location 18, transfers the processing target into the processing chamber 35 of the processing device 5, takes out the processing target in the processing chamber 35, and returns the processing target to the delivery storage location 18. A door 32 is attached to the transfer robot chamber 30. Open the door 32 and move the transfer robot 31
Maintenance can be performed. Transfer robot 31
By closing the shutter 23 at the time of maintenance, dust can be prevented from entering the stocker 2.

At the back of the storage space 17, an air duct 25
Is attached. A purified gas, for example, air is sent out from the air passage 25 into the storage space 17. As a result, an airflow from the back surface to the front surface is formed in the storage space 17. Delivery storage location 18
, An air passage 26 is attached to a side surface connecting the front surface and the rear surface. The purified gas is sent out from the air passage 26 into the delivery storage location 18. The ionizer 21 is attached near the outlet of the air passage 26. By ionizing the gas flowing into the delivery storage location 18, it is possible to remove static electricity accumulated in the processed object after processing. The detailed configuration of these air passages will be described later with reference to FIG.

FIG. 3B is a cross-sectional view of the stocker 2. On both sides of the crane unit 10, a dedicated storage unit 11 and a deliverable unit 12 are arranged, respectively. The blower 27 is located in the blower storage area 20 secured at the bottom of the storage unit 11 and the transferable unit 12.
Is installed.

A mixing chamber 29 is arranged on the stocker 2. A return duct 28 connects the exhaust port of the blower 27 and the mixing chamber 29. The blower 27
The gas in the stocker 2 is sucked and sent into the return duct 28. The gas sent into the return duct 28 is transported into the mixing chamber 29.

Storage location 1 for storage unit 11
An air passage 25 is attached to the back surface of 7. An air passage 25a is attached to the back of the storage location 17 of the deliverable unit 12. The air passage 25a is the air passage 2
Thicker than 5

The gas in the mixing chamber 29 is sent into the air passages 25 and 25a through a cleaning filter (HEPA filter) HP. The gas in the air passages 25 and 25a is sent out into the storage space 17 and collected by the blower 27 via the crane unit 10. Thus, the gas circulates in the stocker 2. The circulating gas is cleaned by the HEPA filter arranged in the middle of this circulation path.

The downstream end of the air passage 25a
(A) communicates with the air passage 26 shown in FIG. Ventilation path 25a
It is considered that the flow path resistance increases at the connection portion between the air passage and the air passage 26. Therefore, it is considered that the airflow flowing into the storage storage location 17 above the delivery storage location 18 is weaker than the airflow flowing into the other storage storage locations 17. By making the air passage 25a thicker than the air passage 25, the intensity of the airflow can be made uniform.

The chemical filter CF and the cooling panel CP may be arranged at the boundary between the space inside the blower storage space 20 and the space inside the crane unit 10.

The cleaned gas is sent into the transfer robot chamber 30 through the HEPA filter HP mounted on the upper surface thereof. At this time, the delivery storage location 18
The pressure in the transfer robot chamber 30 is controlled to be lower than the internal pressure. By controlling the pressure in this way, it is possible to prevent dust in the transfer robot chamber 30 from entering the stocker 2.

The transfer robot 31 returns the processed object from the processing chamber 35 to the delivery storage location 18. An object to be processed immediately after the processing is likely to emit particles and chemical contaminants from its surface. Delivery storage location 1 for processing objects
By returning the shutter 22 to the inside of the stocker 2 when returning to the inside of the stocker 2,
It can be prevented from flowing into other spaces inside. At this time,
An airflow is formed from the delivery storage location 18 toward the transfer robot chamber 30, and particles and contaminants are carried to the transfer robot chamber 30 side.

FIGS. 4A and 4B respectively show FIGS.
1A shows a schematic plan view and a front view of a carrier communication unit 14 shown in FIG. The carrier communication units 14 are arranged at the ends of the units arranged on both sides of the crane unit 10. A carry-in / out storage location 40 is secured in the carrier communication unit 14. On the front of the carrier contact storage area 40,
An openable / closable shutter 41 is provided. Shutter 4
By opening 1, the object to be processed is transferred between the crane 15 and the loading / unloading storage location 40.

An opening / closing delivery window 42 is provided on the end face of the loading / unloading storage location 40. An air passage 43 is arranged on a side surface opposite to the delivery window 42. The purified gas is sent from the air passage 43 into the storage space 40 for carrying in and out. An airflow is formed from the air passage 43 toward the delivery window 42. This air flow can prevent dust from entering the stocker 1 from outside when the delivery window 42 is opened.

A blower 44 for feeding gas into the air passage 43
However, it is installed separately from the blower 27 for circulating in the stocker shown in FIG. By installing the dedicated blower 44, an airflow with a sufficient air volume can be formed in the storage space 40 for carrying in and out. In addition, turbulence of the airflow circulating in the stocker 1 can be suppressed, and a sufficient internal circulation rate of gas can be maintained.

When carrying in / out a processing object, the carrier 50 stops at a position facing the delivery window 42. A storage place 51 for the object to be processed is secured in the carrier 50, and a transfer robot 55 is installed therein. A delivery window 52 is provided on a surface of the storage location 51 facing the stocker 1. A plurality of through holes 53 are formed on the wall surface of the storage location 51 opposite to the delivery window 52.

An airflow which is sent out from the air passage 43 and passes through the storage space 40 for carrying in and out, the delivery windows 42 and 52 and the storage space 51 and flows out of the through hole 53 to the outside is formed. Thereby, contamination at the time of delivery of the processing object can be prevented.

On the other side of the storage location 51, a blower 56 for sending the purified gas into the storage location 51 is provided. A plurality of through holes 57 are formed on the opposite wall surface, and an airflow from the blower 56 to the opposite wall surface is formed.

FIG. 5 shows the main stocker 1 and stocker 2 shown in FIG.
FIG. 3 shows a schematic plan view of a connection point with the device. At the end of the stocker 2, a connection unit 13a is arranged. A storage / reception storage location 19a is secured in the connection unit 13a. The space in the storage / reception storage location 19a is
Communicates with the space inside.

An openable / closable shutter 60 is disposed between the storage / exit storage location 19a and the crane unit 10. By opening the shutter 60, the object to be processed is transferred between the crane 15 and the storage / reception storage location 13a. The ventilation path 6 is provided on the side of the storage location 19a for loading and unloading.
1 is installed. The purified gas is sent out from the blower 62 to the storage / reception storage location 19a via the ventilation path 61. This gas is transported into the connection 3.

The other end of the connection path 3 is connected to the storage / exit storage location 19 of the main stocker 1. The space in the crane unit 10 of the main stocker 1 and the storage / reception storage location 19 are isolated by a shutter 65 that can be opened and closed.

When the crane 15 in the main stocker 1 places the object to be processed in the storage location 19, the conveyor in the connection path 3 transfers the object to the storage location 19a in the stocker 2. I do. The connection path 3 can also transfer the object to be processed in the reverse direction.

An air passage 67 is attached to the side wall of the connection passage 3. The purified gas is sent from the air passage 67 into the connection passage 3. The gas sent into the connection path 3
For example, it is discharged from a through hole formed on the bottom surface. When the object to be processed is a plate-like object, for example, a liquid crystal substrate,
It is preferable that the direction of the air flow sent from the air passage 67 be parallel to the substrate surface.

The pressure in the connection path 3 is controlled to be lower than the pressure in the stockers 1 and 2. This can prevent dust in the connection path from entering the stocker.

According to the first embodiment, an object to be processed can be transferred between a plurality of processing apparatuses via only the space in the stocker and the connection path. Since the object to be processed is not exposed to the atmosphere outside the stocker and the connection path, contamination of the object to be processed can be prevented. Further, since the space in which the cleanliness is to be managed is limited to the inside of the stocker and the connection path, it is possible to easily manage the screenlines. In addition, since a dedicated transport path is not required, space can be saved.

FIG. 6 is a schematic plan view of a transfer device according to the second embodiment. In the first embodiment shown in FIG. 1, one main stocker 1 is directly connected to all other stockers 2. In the second embodiment, a plurality of stockers 2 are connected in a ring. 6 are given the same reference numerals as the corresponding components of the first embodiment shown in FIG.

For example, by making a round of the annularly arranged stocker 2, the process of one layer consisting of film formation, photolithography, etching, and testing is completed. By repeating the process for one layer 5 to 6 times, all the processes for one substrate are completed.

FIG. 7A shows a tray for holding a substrate to be processed transferred in the transfer device. Multiple trays 70
Are stacked. Each tray has 75 substrates to be processed.
Is placed. In this way, the plurality of stacked trays 70 are transferred in the transport as one unit.

FIG. 7B shows a cassette transferred in the transfer device. A plurality of substrates 75 to be processed are held in one cassette 71. The cassette 71 is transported in the transport device as one unit.

Next, with reference to FIGS. 1 and 8, a procedure for transferring the processing object will be described. Safety in-process storage means 80
Classifies the plurality of processing apparatuses 5 into a group of processing apparatuses that perform the same processing, and stores whether or not a safety device is set for each group of apparatuses. The process storage unit 81 stores the order of the group of devices that process the processing target. The control means 82 controls the transfer means 83 so as to transfer the processing object in accordance with the order stored in the process storage means 81.

When the object to be processed is temporarily transferred from the storage location for delivery corresponding to the first device group where the safety device is placed to the storage location for delivery of the second device group for performing the next step, the object to be processed is temporarily stored. Transfer to storage location. As described above, by temporarily storing the processing target to be processed in the storage storage location, even if a device in the first device group breaks down and the processing capacity is reduced, the second device is processed. The processing object can be stably supplied to the group.

In the case where the object to be processed is transferred from the delivery storage location corresponding to the third device group in which no safety device is placed to the delivery storage location of the fourth device group that performs the next step,
The processing object is directly transferred to the next delivery storage location without passing through the storage storage location.

In the arrangement of the device groups stored in the process storage means 81, the second device group next to the first device group to which the safety device is placed does not set the safety device and the third device to set the next safety device. If the processing target is sequentially transferred from the delivery storage location to the next delivery storage location so as to correspond to each of the device groups up to the device group, the delivery corresponding to the downstream device group in the arrangement of the device groups The transfer between the storage locations is performed prior to the transfer between the delivery storage locations corresponding to the upstream device group. As described above, by giving priority to the transfer in the post-process, it is possible to prevent interference loss and stagnation of the work in progress.

The present invention has been described in connection with the preferred embodiments.
The present invention is not limited to these. For example, it will be apparent to those skilled in the art that various modifications, improvements, combinations, and the like can be made.

[0062]

As described above, according to the present invention,
The transfer between the processing apparatuses can be performed without providing a dedicated transfer path. Therefore, the space occupied by the transport device can be reduced. In addition, since the sheet is transported in a substantially closed space, the cleanness of the transport space can be easily managed.

[Brief description of the drawings]

FIG. 1 is a schematic plan view of a transport device according to a first embodiment.

FIG. 2 is a plan view of a main stocker according to the first embodiment, a front view of a storage unit, a transferable unit, and a connection unit.

FIG. 3 is a plan view and a cross-sectional view of a connection portion between a stocker and a processing device.

FIG. 4 is a plan view and a front view of a carrier communication unit.

FIG. 5 is a plan view of a connection portion between the main stocker and the stocker.

FIG. 6 is a schematic plan view of a transport device according to a second embodiment.

FIG. 7 is a cross-sectional view of a tray and a cassette for holding a processing target to be transferred by the transfer device according to the embodiment.

FIG. 8 is a block diagram for explaining a transfer procedure of the transfer device according to the embodiment.

FIG. 9 is a plan view of a conventional transport device.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1, 2 Stocker 3 Connection path 5 Processing device 10 Crane unit 11 Storage unit 12 Transferable unit 13 Connection unit 14 Carrier communication unit 15 Crane 17 Storage storage location 18 Delivery storage location 19 Entry / exit storage location 20 Blower storage location 22, 23 Shutter 25, 26 Blow path 28 Return duct 29 Mixing chamber 30 Transfer robot chamber 31 Transfer robot 32 Door 35 Processing chamber 40 Loading / unloading storage place 41 Shutter 42, 52 Delivery window 43 Blow path 44 Blower 50 Transport vehicle 51 Storage location 53, 57 Through hole 55 Robot 56 Blower 60, 65 Shutter 61, 67 Ventilation path 62 Blower 70 Tray 71 Cassette 75 Processing target substrate 80 Safety in-process storage means 81 Process storage means 82 Control means 83 Transport apparatus

 ──────────────────────────────────────────────────続 き Continuing on the front page (72) Inventor Masaru Kitano 650, Otsukano, Yonago, Yonago City, Tottori Prefecture Inside Yonago Fujitsu Co., Ltd. Inside Yonago Fujitsu (72) Inventor Katsuyuki Miyazaki 4-1-1, Kamiodanaka, Nakahara-ku, Kawasaki-shi, Kanagawa Prefecture Inside Fujitsu Limited (72) Hideo Ishii 4-1-1, Kamiodanaka, Nakahara-ku, Kawasaki-shi, Kanagawa Fujitsu Inside (72) Inventor Mikio Fujii 4-1-1, Kamidadanaka, Nakahara-ku, Kawasaki-shi, Kanagawa Prefecture F-term within Fujitsu Limited (reference) 3F022 AA08 BB09 CC02 EE05 FF01 HH02 JJ09 KK20 LL07 LL31 5F031 CA02 CA05 DA17 FA12 FA15 GA43 GA58 MA09 MA23 MA27 MA28 MA32 NA02 NA08 NA09 PA03

Claims (21)

[Claims] 1. A stocker that defines a space in which gas circulates, and a plurality of processing devices connected to the stocker and configured to perform processing on a processing target, wherein the processing target is stored in the stocker. A plurality of storage storage locations to be provided, a plurality of delivery storage locations that are installed corresponding to each of the processing devices and that can transfer the processing target to the corresponding processing device are secured, and the stocker is In the internal space, the object to be processed is transferred from the storage storage location to another storage storage location or delivery storage location, or from the delivery storage location to another delivery storage location or storage storage location. Each of the processing devices receives a processing target stored in a corresponding delivery storage location, performs processing on the received processing target, and processes the processed processing target. A transport device that returns to the corresponding delivery storage location. 2. At least a part of the plurality of storage storage locations and the delivery storage locations is two-dimensionally arranged along a first virtual plane, and the transfer means is configured to be a first storage location.
One side of the first virtual plane of the storage storage area and the delivery storage area arranged on one of the virtual planes and arranged along the first virtual plane When the front side and the other side are the back side, the transfer means transfers the storage object and the delivery storage area to and from the object to be processed through the front side, and the processing device sends the storage for the delivery through the back side. 2. The transfer device according to claim 1, wherein the transfer is performed between a place and an object to be processed, and further, a first air passage for flowing a purified gas from a back surface to a front surface is provided in the storage space. 3. 3. The second virtual storage device, wherein the other storage storage locations and another part of the delivery storage locations are arranged so as to face the front of the first virtual surface. The first virtual surface side of the storage storage location and the delivery storage location arranged along the second virtual surface is two-dimensionally arranged along the surface, and the other is the front surface. When the side is the back side, the transfer means transfers the object to be processed through the front and the storage storage location and the delivery storage location arranged along the second virtual surface, and The transfer device according to claim 2, wherein the transfer unit transfers the processing target object through a delivery storage location arranged along the second virtual surface and a back surface. 4. A shutter which is disposed on the front side of the delivery storage location and which can be opened and closed to isolate a space inside the delivery storage location from another space in the stocker. Or the transfer device according to 3. 5. The apparatus according to claim 1, further comprising a second air passage for flowing purified gas into a space in the delivery storage space from a side surface or an upper surface connecting the front surface and the back surface in the delivery storage space. Item 5. The transfer device according to any one of Items 2 to 4. 6. The stocker includes a plurality of units arranged in a first direction along the first virtual plane, each of the units being a storage storage location and a delivery storage location. Claim 2 which is classified into a storage-only unit in which only the storage location is secured, and a deliverable unit in which both the storage location and the delivery location are secured.
5. The transport device according to any one of 5. 7. The transport according to claim 6, wherein the width of the storage-only unit in the first direction is equal to the width of the deliverable unit in the first direction, and both are interchangeable. apparatus. 8. A third air passage arranged along a back surface of the storage space for supplying gas from a downstream end to the second air passage, wherein the first air passage is provided along a back surface of the storage space. The transport device according to claim 5, further comprising: a fourth air passage that is not connected to the fourth air passage. 9. A return duct having a first end connected to the space in the stocker and a second end connected to the first air passage, wherein at the first end: A blower that feeds the gas in the stocker into the return duct, wherein the first air passage transports the gas sent from the return duct to a back surface of the storage location. 9. The transport device according to any one of 8 above. 10. A gas mixing section inserted at a connection point between the return duct and the first air passage, wherein the gas mixing section removes gas sent from the return duct by gas cleaning. The transport device according to claim 9, wherein the carrier is sent to the first air passage through a filter. 11. A processing chamber connected to the back of a corresponding delivery storage location and defining a space continuous with a space in the delivery storage location, a processing chamber connected to the robot storage. A transfer robot that is disposed in the robot chamber and transfers a processing object between the delivery storage location and the processing chamber; and a robot chamber air passage that feeds purified gas into the robot chamber. The transport device according to any one of claims 1 to 10, comprising: 12. A plurality of stockers that define a closed space through which gas circulates, a plurality of processing devices connected to each of the plurality of stockers, and configured to perform processing on an object to be processed; A connection path for connecting two stockers to each other, defining a space communicating with a space in the corresponding stocker, and transferring a processing object between the corresponding stockers; At least one of a storage storage location for storing an object and a delivery storage location that is installed in correspondence with each of the processing devices and that can deliver a processing target object to the corresponding processing device is provided. A plurality of storage areas for entry and exit, which are provided in plurality and are installed corresponding to each of the connection paths and can deliver the object to be processed to the corresponding connection path, and A transfer unit configured to transfer an object to be processed from any one of a storage location for storage, a storage location for delivery, and a storage location for entry and exit to another storage location; A transfer device that receives a processing target stored in a storage location, performs processing on the received processing target, and returns the processed processing target to a corresponding delivery storage location. 13. The apparatus according to claim 13, further comprising: a first air passage for feeding a purified gas into a space in the connection path; and a first discharge hole for discharging gas from the space in the connection path. The transport device according to claim 12, 14. The transport apparatus according to claim 12, wherein the pressure in the stocker is controlled to be higher than the pressure in a connection path connected to the stocker. 15. A loading / unloading storage area for transferring a processing object to and from a transport vehicle through a first transfer window that can be opened and closed, in an internal space of at least one of the plurality of stockers. An openable and closable shutter, wherein the stocker separates a space in the loading / unloading storage space from another space in the stocker;
The transport device according to any one of claims 12 to 14, further comprising a second air passage for feeding the purified gas into the carry-in / out storage location. 16. The gas supply system according to claim 15, wherein the second air passage flows gas from a surface of the loading / unloading storage location opposite to the first delivery window toward the first delivery window. Transport device. 17. A first blower for circulating gas in the stocker, and a second blower for feeding gas into the loading / unloading storage space via the second blowing path. The transport device according to claim 15, comprising: 18. A transport vehicle for carrying a processing object into and out of the loading / unloading storage location and for transporting a processing target object from the loading / unloading storage location, the transport vehicle comprising: And a second delivery window that is openable and closable for loading and unloading an object to be processed from and into the delivery storage location, and the gas that has flowed in from the second delivery window passes through the delivery storage location. A second discharge hole formed in the opposite surface so as to pass therethrough and to be discharged from the opposite surface.
18. The transfer device according to any one of claims 17 to 17, wherein 19. A safety device storage means for classifying the plurality of processing devices into a device group in which processing devices performing the same processing are put together, and storing whether or not a safety device is provided for each device group; Step storage means for storing the order of a group of apparatuses for processing the object, and control means for controlling the transfer means to transfer the processing object according to the order stored in the step storage means, The control means, when transferring from the delivery storage location corresponding to the device group in which the safety device is placed to the next delivery storage location,
The transfer device according to claim 12, wherein the transfer unit is controlled so as to once transfer the processing target object to the storage location. 20. When the control means transfers an object to be processed from a delivery storage location corresponding to a group of devices having no safety device to a next delivery storage location, the control means passes through the storage storage location. 20. The transfer device according to claim 19, wherein the transfer device controls the transfer of the processing target object directly to the next delivery storage location without using the transfer target storage device. 21. In the arrangement of the device groups stored in the process storage means, a device group next to a certain device group to which a safety device is placed does not place a safety device, and each device group to a device group to which the next safety device is placed. When the objects to be processed are sequentially transferred from the delivery storage location to the next delivery storage location so as to correspond to the arrangement of the device groups, the transfer between the delivery storage locations corresponding to the downstream device groups in the arrangement of the device groups. 21. The transport device according to claim 19, wherein the control unit controls the transfer unit so that the transfer is performed in preference to the transfer between delivery storage locations corresponding to the upstream device group.