JP2003292119A - Workpiece delivery device - Google Patents
Workpiece delivery deviceInfo
- Publication number
- JP2003292119A JP2003292119A JP2002098348A JP2002098348A JP2003292119A JP 2003292119 A JP2003292119 A JP 2003292119A JP 2002098348 A JP2002098348 A JP 2002098348A JP 2002098348 A JP2002098348 A JP 2002098348A JP 2003292119 A JP2003292119 A JP 2003292119A
- Authority
- JP
- Japan
- Prior art keywords
- workpiece
- stacker crane
- cassette
- workpiece transfer
- transfer device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Abstract
Description
【０００１】[0001]
【発明の属する技術分野】本発明は、液晶用ガラス基
板、半導体ウエハ、ＰＤＰ、ＨＤ、磁気ヘッド等（本明
細書において、「ガラス基盤等」という場合がある。）
の加工物（本明細書において、「ワーク」という場合が
ある。）を加工装置等との間で受け渡しするための加工
物受け渡し装置に関するものである。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a glass substrate for liquid crystal, a semiconductor wafer, a PDP, a HD, a magnetic head, etc. (in the present specification, it may be referred to as "glass substrate, etc.").
The present invention relates to a workpiece delivery device for delivering a workpiece (may be referred to as a "workpiece" in the present specification) to a processing device or the like.
【０００２】[0002]
【従来の技術】従来、例えば、ガラス基盤等の加工物
は、各種加工装置等と加工物受け渡し装置との間で受け
渡しを行いながら、複数工程の加工を行うようにしてい
る。2. Description of the Related Art Conventionally, for example, a work such as a glass substrate is processed in a plurality of steps while being transferred between various processing devices and the like and a work transfer device.
【０００３】[0003]
【発明が解決しようとする課題】ところで、このように
複数工程の加工を行う場合、加工装置の稼働効率等との
関係やシステムにトラブルが発生したときに、一時的に
加工物を収納したカセットをスタッカークレーンを備え
た載置棚に仮置きする必要があるが、通常、加工装置の
設置位置とスタッカークレーンを備えた載置棚の設置位
置とは、離れていることが多く、このため、加工物を収
納したカセットの移動に時間を要し、生産効率が低下す
るという問題があった。By the way, in the case of performing processing in a plurality of steps in this way, when a trouble occurs in the system or the relationship with the operating efficiency of the processing apparatus, the cassette temporarily storing the processed product. It is necessary to tentatively place on a loading shelf equipped with a stacker crane, but normally, the installation position of the processing device and the installation position of the loading shelf equipped with a stacker crane are often distant from each other. There is a problem in that it takes time to move the cassette that contains the workpiece, and the production efficiency is reduced.
【０００４】また、従来の加工物受け渡し装置は、装置
毎にヘパフィルタ等の空気清浄機構を配設する必要があ
るため、空調費が高額になるという問題があった。Further, the conventional workpiece transfer device has a problem that the air conditioning cost becomes high because it is necessary to dispose an air cleaning mechanism such as a hepa filter for each device.
【０００５】本発明は、上記従来の加工物受け渡し装置
が有する問題点に鑑み、加工物を収納したカセットの移
動を短時間で行うことができるようにすることによっ
て、生産効率を向上することができるとともに、空調費
を節約することができる加工物受け渡し装置を提供する
ことを目的とする。In view of the problems of the above-described conventional workpiece transfer device, the present invention can improve the production efficiency by making it possible to move the cassette accommodating the workpieces in a short time. It is an object of the present invention to provide a work passing device that can save air conditioning costs.
【０００６】[0006]
【課題を解決するための手段】上記目的を達成するた
め、本発明の加工物受け渡し装置は、ガラス基盤等の加
工物を加工装置等との間で受け渡しするための加工物受
け渡し装置において、該加工物受け渡し装置に、加工物
収納用カセット搬送用のスタッカークレーンと、加工物
収納用カセットの載置棚と、加工物受け渡し部と、該加
工物受け渡し部と加工装置等との間で加工物を受け渡し
する加工物移載機構と、移動用車輪を備えるとともに、
加工物受け渡し装置内にヘパフィルタを通った清浄空気
が流通するようにし、かつ、スタッカークレーンを配設
したスタッカークレーン部と、加工物収納用カセットの
載置棚及び加工物受け渡し部を配設したカセット部と、
加工物移載機構を配設した移載機構部とを、それぞれ独
立して、又は隣接する任意の２つの部分でユニット化
し、それぞれ分離可能にしたことを特徴とする。In order to achieve the above object, a work transfer device of the present invention is a work transfer device for transferring a work such as a glass substrate to a work device. The workpiece transfer device includes a stacker crane for transporting a workpiece storage cassette, a mounting shelf for the workpiece storage cassette, a workpiece transfer section, and a workpiece between the workpiece transfer section and the processing apparatus. With the workpiece transfer mechanism that delivers and transfers the wheels,
A stacker that allows the clean air that has passed through the hepafilter to circulate in the workpiece transfer device, and a stacker crane section that has a stacker crane, a mounting shelf for the cassette for storing the workpiece, and a cassette that has the workpiece transfer section. Department,
It is characterized in that the transfer mechanism section provided with the workpiece transfer mechanism is unitized independently of each other or in any two adjacent sections so as to be separable from each other.
【０００７】この加工物受け渡し装置は、加工物受け渡
し装置に、加工物収納用カセット搬送用のスタッカーク
レーンと、加工物収納用カセットの載置棚と、加工物受
け渡し部と、該加工物受け渡し部と加工装置等との間で
加工物を受け渡しする加工物移載機構と、移動用車輪を
備えるようにしているので、一時的に加工物を収納した
カセットを載置棚に仮置き等する必要がある場合でも、
カセットを、加工物受け渡し装置に備えたスタッカーク
レーンを用いて、加工物受け渡し装置に備えた加工物収
納用カセットの載置棚に仮置き等することができる。ま
た、加工物受け渡し装置内にヘパフィルタを通った清浄
空気が流通するようにしているので、個別に配設した各
装置毎にヘパフィルタを配設する場合と比較して、空調
費を節約することができる。さらに、スタッカークレー
ンを配設したスタッカークレーン部と、加工物収納用カ
セットの載置棚及び加工物受け渡し部を配設したカセッ
ト部と、加工物移載機構を配設した移載機構部とを、そ
れぞれ独立して、又は隣接する任意の２つの部分でユニ
ット化し、それぞれ分離可能にすることにより、装置の
汎用性を高め、ユニット化した各部分を適宜組み合わせ
ることにより、個別システムに最適な加工物受け渡し装
置を容易に提供することができる。This work transfer device includes, in addition to the work transfer device, a stacker crane for transferring a work storage cassette, a mounting shelf for a work storage cassette, a work transfer part, and the work transfer part. Since it is equipped with a workpiece transfer mechanism that transfers workpieces between the machine and the processing equipment, and wheels for movement, it is necessary to temporarily place a cassette containing the workpieces on the mounting shelf. Even if there is
The cassette can be temporarily placed, for example, on the mounting shelf of the workpiece storage cassette provided in the workpiece delivering device by using the stacker crane provided in the workpiece delivering device. Further, since the clean air that has passed through the hepa filter is circulated in the work passing device, it is possible to save the air conditioning cost as compared with the case where the hepa filter is arranged for each individually arranged device. it can. Further, a stacker crane section in which a stacker crane is arranged, a cassette section in which a mounting shelf for a workpiece storage cassette and a workpiece transfer section are arranged, and a transfer mechanism section in which a workpiece transfer mechanism is arranged. , It is possible to increase the versatility of the device by unitizing each unit independently or by adjoining arbitrary two units and making each unit separable, and by combining the unitized units as appropriate, the optimum processing for individual system An object delivery device can be easily provided.
【０００８】また、加工物受け渡し装置の下面に気流制
御用可変抵抗ルーバを配設することができる。Further, a variable resistance louver for air flow control can be arranged on the lower surface of the workpiece transfer device.
【０００９】これにより、加工物受け渡し装置内を流通
するヘパフィルタを通った清浄空気の流通経路及び流通
量を容易に制御することができる。This makes it possible to easily control the flow path and flow rate of the clean air that has passed through the hepa filter that flows through the workpiece transfer device.
【００１０】また、スタッカークレーンを、加工物受け
渡し装置の移動用車輪による移動方向と直交する方向に
敷設した走行レール上を移動するように構成することが
できる。Further, the stacker crane can be constructed so as to move on a traveling rail laid in a direction orthogonal to the moving direction of the moving wheels of the workpiece transfer device.
【００１１】これにより、加工物収納用カセットの載置
棚の容量を増大することができる。As a result, it is possible to increase the capacity of the mounting rack of the cassette for storing the workpiece.
【００１２】[0012]
【発明の実施の形態】以下、本発明の加工物受け渡し装
置の実施の形態を図面に基づいて説明する。BEST MODE FOR CARRYING OUT THE INVENTION Embodiments of a work transfer device according to the present invention will be described below with reference to the drawings.
【００１３】図１に、本発明の加工物受け渡し装置の一
実施例を示す。この加工物受け渡し装置は、ガラス基盤
等の加工物を加工装置等との間で受け渡しするための加
工物受け渡し装置において、加工物受け渡し装置に、加
工物収納用カセット搬送用のハンド１１等を備えたスタ
ッカークレーン１と、加工物収納用カセットの載置棚３
と、加工物受け渡し部４と、この加工物受け渡し部４と
加工物受け渡し口１０を介して加工装置等との間で加工
物を受け渡しするロボットハンド５１等を備えた加工物
移載機構としての移載用ロボット５と、移動用車輪８を
備えるとともに、エア取り入れ口９から加工物受け渡し
装置内に取り入れられてヘパフィルタ６を通った清浄空
気が流通するように構成している。FIG. 1 shows an embodiment of a work transfer device according to the present invention. This workpiece transfer device is a workpiece transfer device for transferring a workpiece such as a glass substrate to a processing device or the like, and the workpiece transfer device includes a hand 11 for transporting a cassette for storing a workpiece. Stacker crane 1 and mounting shelf 3 for cassettes for storing workpieces
And a workpiece transfer unit 4 and a workpiece transfer mechanism including a robot hand 51 and the like for transferring the workpiece between the workpiece transfer unit 4 and the processing apparatus and the like via the workpiece transfer port 10. The transfer robot 5 and the transfer wheels 8 are provided, and the clean air that has been taken into the workpiece transfer device through the air intake 9 and passed through the hepa filter 6 is circulated.
【００１４】この場合において、スタッカークレーン１
を配設したスタッカークレーン部Ａ１と、加工物収納用
カセットの載置棚３及び加工物受け渡し部４を配設した
カセット部Ａ２と、加工物移載機構５を配設した移載機
構部Ａ３とは、それぞれ独立してユニット化するように
したり、あるいは、隣接する任意の２つの部分、例え
ば、カセット部Ａ２と移載機構部Ａ３とで１ユニット化
Ｂ２したり、スタッカークレーン部Ａ１とカセット部Ａ
２とで１ユニット化Ｃ１して、それぞれ分離可能に構成
することができる。これにより、装置の汎用性を高め、
ユニット化した各部分を適宜組み合わせることにより、
個別システムに最適な加工物受け渡し装置を容易に提供
することができるものとなる。In this case, the stacker crane 1
, A stacker crane section A1 in which the workpiece stacking section 3 is arranged, a cassette section A2 in which the workpiece storage cassette mounting shelf 3 and the workpiece transfer section 4 are arranged, and a transfer mechanism section A3 in which the workpiece transfer mechanism 5 is arranged. Means that they are independently unitized, or that any two adjacent parts, for example, the cassette part A2 and the transfer mechanism part A3 form one unit B2, or the stacker crane part A1 and the cassette part. Part A
2 and 1 can be made into one unit C1 and can be configured to be separable from each other. This increases the versatility of the device,
By appropriately combining the unitized parts,
This makes it possible to easily provide the optimum workpiece transfer device for an individual system.
【００１５】また、加工物受け渡し装置の下面には、気
流制御用可変抵抗ルーバ７を配設することにより、加工
物受け渡し装置内を流通するエア取り入れ口９から取り
入れられてヘパフィルタ６を通った清浄空気の流通経路
及び流通量を容易に制御することができ、加工物受け渡
し装置内の各部を最適な清浄度に維持することができ
る。Further, by providing a variable resistance louver 7 for air flow control on the lower surface of the workpiece transfer device, the cleaning is carried out from the air intake port 9 flowing through the workpiece transfer device and passed through the hepa filter 6. It is possible to easily control the flow path and the flow rate of the air, and it is possible to maintain each part in the workpiece transfer device at the optimum cleanliness.
【００１６】また、スタッカークレーン１を、加工物受
け渡し装置の移動用車輪８による移動方向と直交する方
向に敷設した走行レール２上を移動するように構成する
ことにより、加工物収納用カセットの載置棚３の容量を
容易に増大することができる。Further, the stacker crane 1 is constructed so as to move on the traveling rail 2 laid in a direction orthogonal to the moving direction by the moving wheels 8 of the work passing device, so that the work storing cassette can be mounted. The capacity of the shelf 3 can be easily increased.
【００１７】上記の構成からなる加工物受け渡し装置
は、加工物受け渡し装置に、加工物収納用カセット搬送
用のスタッカークレーン１と、加工物収納用カセットの
載置棚３と、加工物受け渡し部４と、この加工物受け渡
し部４と加工装置等との間で加工物を受け渡しする加工
物移載機構５と、移動用車輪８を備えるようにしている
ので、一時的に加工物を収納したカセットＣを載置棚３
に仮置き等する必要がある場合でも、カセットＣを、加
工物受け渡し装置５に備えたスタッカークレーン１を用
いて、加工物受け渡し装置に備えた加工物収納用カセッ
トの載置棚３に仮置き等することができる。また、加工
物受け渡し装置内にヘパフィルタ６を通った清浄空気が
流通するようにしているので、個別に配設した各装置毎
にヘパフィルタを配設する場合と比較して、空調費を節
約することができる。The workpiece delivering device having the above-mentioned structure is provided with a stacker crane 1 for transporting a cassette for storing a workpiece, a placing rack 3 for a cassette for storing a workpiece, and a workpiece delivering section 4 in the workpiece delivering device. Since the workpiece transfer mechanism 4 for transferring the workpiece between the workpiece transfer section 4 and the processing device and the moving wheels 8 are provided, the cassette temporarily storing the workpiece. Place C on shelf 3
Even when it is necessary to temporarily place the cassette C in the workpiece transfer device 5, the cassette C is temporarily placed on the mounting shelf 3 of the workpiece storage cassette provided in the workpiece transfer device 5 by using the stacker crane 1 provided in the workpiece transfer device 5. And so on. Further, since the clean air that has passed through the hepa filter 6 is circulated in the work passing device, the air conditioning cost can be saved as compared with the case where the hepa filter is provided for each device that is individually provided. You can
【００１８】以上、本発明の加工物受け渡し装置につい
て、その実施例に基づいて説明したが、本発明は上記実
施例に記載した構成に限定されるものではなく、その趣
旨を逸脱しない範囲において適宜その構成を変更するこ
とができるものである。The workpiece transfer device of the present invention has been described above based on its embodiments, but the present invention is not limited to the configurations described in the above embodiments, and may be appropriately changed without departing from the spirit thereof. The configuration can be changed.
【００１９】[0019]
【発明の効果】本発明の加工物受け渡し装置によれば、
加工物受け渡し装置に、加工物収納用カセット搬送用の
スタッカークレーンと、加工物収納用カセットの載置棚
と、加工物受け渡し部と、該加工物受け渡し部と加工装
置等との間で加工物を受け渡しする加工物移載機構と、
移動用車輪を備えるようにしているので、一時的に加工
物を収納したカセットを載置棚に仮置き等する必要があ
る場合でも、カセットを、加工物受け渡し装置に備えた
スタッカークレーンを用いて、加工物受け渡し装置に備
えた加工物収納用カセットの載置棚に仮置き等すること
ができ、これにより、加工物を収納したカセットの移動
を短時間で行うことができるため、生産効率を向上する
ことができる。また、加工物受け渡し装置内にヘパフィ
ルタを通った清浄空気が流通するようにしているので、
個別に配設した各装置毎にヘパフィルタを配設する場合
と比較して、空調費を節約することができる。さらに、
スタッカークレーンを配設したスタッカークレーン部
と、加工物収納用カセットの載置棚及び加工物受け渡し
部を配設したカセット部と、加工物移載機構を配設した
移載機構部とを、それぞれ独立して、又は隣接する任意
の２つの部分でユニット化し、それぞれ分離可能にする
ことにより、装置の汎用性を高め、ユニット化した各部
分を適宜組み合わせることにより、個別システムに最適
な加工物受け渡し装置を容易に提供することができる。According to the work transfer device of the present invention,
The workpiece transfer device includes a stacker crane for transporting a workpiece storage cassette, a mounting shelf for a workpiece storage cassette, a workpiece transfer unit, and a workpiece between the workpiece transfer unit and the processing device. A workpiece transfer mechanism that delivers and receives
Since it is equipped with wheels for movement, even if it is necessary to temporarily place a cassette containing the workpieces on the placing shelf, use the stacker crane equipped with the workpiece transfer device for the cassettes. , The workpiece can be temporarily placed on the placing rack of the workpiece storing cassette provided in the workpiece delivering device, and the cassette storing the workpiece can be moved in a short time, thereby improving the production efficiency. Can be improved. In addition, since the clean air that has passed through the hepa filter is circulated in the workpiece transfer device,
Air conditioning costs can be saved as compared with the case where a hepa filter is provided for each device that is individually provided. further,
A stacker crane section in which a stacker crane is arranged, a cassette section in which a mounting shelf for a workpiece storage cassette and a workpiece transfer section are arranged, and a transfer mechanism section in which a workpiece transfer mechanism is arranged, respectively. Independently or by adjoining any two adjacent parts to make them unitable, the versatility of the device is enhanced, and by combining the unitized parts appropriately, the most suitable work transfer for individual systems The device can be easily provided.
【００２０】また、加工物受け渡し装置の下面に気流制
御用可変抵抗ルーバを配設することにより、加工物受け
渡し装置内を流通するヘパフィルタを通った清浄空気の
流通経路及び流通量を容易に制御することができる。Further, by arranging a variable resistance louver for air flow control on the lower surface of the work transfer device, it is possible to easily control the flow path and flow amount of the clean air that has passed through the hepa filter flowing in the work transfer device. be able to.
【００２１】また、スタッカークレーンを、加工物受け
渡し装置の移動用車輪による移動方向と直交する方向に
敷設した走行レール上を移動するように構成することに
より、加工物収納用カセットの載置棚の容量を増大する
ことができる。Further, the stacker crane is constructed so as to move on the traveling rail laid in the direction orthogonal to the moving direction of the moving wheels of the workpiece transferring device, whereby the stacking rack of the cassette for storing the workpieces is The capacity can be increased.
【図１】本発明の加工物受け渡し装置の一実施例を示す
説明図（正面断面図）である。FIG. 1 is an explanatory view (front sectional view) showing an embodiment of a workpiece transfer device of the present invention.
Ｃ カセット １ スタッカークレーン ２ 走行レール ３ 加工物収納用カセットの載置棚 ４ 加工物受け渡し部 ５ 加工物移載機構 ６ ヘパフィルタ ７ 気流制御用可変抵抗ルーバ ８ 移動用車輪 ９ エア取り入れ口 １０ 加工物受け渡し口 C cassette 1 stacker crane 2 running rails 3 Mounting shelves of cassettes for storing workpieces 4 Workpiece transfer section 5 Workpiece transfer mechanism 6 Hepa filter 7 Airflow control variable resistance louver 8 moving wheels 9 Air intake 10 Processed goods delivery port
───────────────────────────────────────────────────── フロントページの続き Ｆターム(参考） 3F022 BB08 CC02 DD01 EE05 FF01 HH01 JJ09 KK20 LL38 MM02 MM13 MM17 5F031 CA02 CA05 DA01 DA17 FA03 FA07 FA11 FA15 GA48 GA49 GA57 NA03 PA30 ─────────────────────────────────────────────────── ─── Continued front page F term (reference) 3F022 BB08 CC02 DD01 EE05 FF01 HH01 JJ09 KK20 LL38 MM02 MM13 MM17 5F031 CA02 CA05 DA01 DA17 FA03 FA07 FA11 FA15 GA48 GA49 GA57 NA03 PA30
Claims (3)
間で受け渡しするための加工物受け渡し装置において、
該加工物受け渡し装置に、加工物収納用カセット搬送用
のスタッカークレーンと、加工物収納用カセットの載置
棚と、加工物受け渡し部と、該加工物受け渡し部と加工
装置等との間で加工物を受け渡しする加工物移載機構
と、移動用車輪を備えるとともに、加工物受け渡し装置
内にヘパフィルタを通った清浄空気が流通するように
し、かつ、スタッカークレーンを配設したスタッカーク
レーン部と、加工物収納用カセットの載置棚及び加工物
受け渡し部を配設したカセット部と、加工物移載機構を
配設した移載機構部とを、それぞれ独立して、又は隣接
する任意の２つの部分でユニット化し、それぞれ分離可
能にしたことを特徴とする加工物受け渡し装置。1. A workpiece delivery device for delivering a workpiece such as a glass substrate to a processing device or the like,
A stacker crane for transporting a cassette for storing a workpiece, a mounting shelf for a cassette for storing a workpiece, a workpiece transferring section, and processing between the workpiece transferring section and the processing apparatus in the workpiece transferring apparatus. A stacker crane part that has a workpiece transfer mechanism that transfers the workpieces and wheels for movement, and that allows the clean air that has passed through the hepa filter to circulate in the workpiece transfer device and that has a stacker crane. An arbitrary two parts each independently or adjacent to the cassette part in which the placing shelf of the object storage cassette and the workpiece transfer part are arranged, and the transfer mechanism part in which the workpiece transfer mechanism is arranged. A workpiece transfer device characterized by being unitized with and separable from each other.
可変抵抗ルーバを配設したことを特徴とする請求項１記
載の加工物受け渡し装置。2. The workpiece transfer device according to claim 1, wherein a variable resistance louver for air flow control is arranged on the lower surface of the workpiece transfer device.
装置の移動用車輪による移動方向と直交する方向に敷設
した走行レール上を移動するように構成したことを特徴
とする請求項１又は２記載の加工物受け渡し装置。3. The processing according to claim 1, wherein the stacker crane is configured to move on a traveling rail laid in a direction orthogonal to a moving direction of the moving wheels of the workpiece transfer device. Material delivery device.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2002098348A JP3852694B2 (en) | 2002-04-01 | 2002-04-01 | Workpiece delivery device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2002098348A JP3852694B2 (en) | 2002-04-01 | 2002-04-01 | Workpiece delivery device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2003292119A true JP2003292119A (en) | 2003-10-15 |
| JP3852694B2 JP3852694B2 (en) | 2006-12-06 |
Family
ID=29240380
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2002098348A Expired - Fee Related JP3852694B2 (en) | 2002-04-01 | 2002-04-01 | Workpiece delivery device |
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| Country | Link |
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| JP (1) | JP3852694B2 (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP2264749A3 (en) * | 2009-06-15 | 2011-04-27 | Murata Machinery, Ltd. | Automatic storage system |
| EP2554495A1 (en) * | 2010-04-02 | 2013-02-06 | Murata Machinery, Ltd. | Automated warehouse |
| CN102933472A (en) * | 2010-06-10 | 2013-02-13 | 村田机械株式会社 | Conveyance system and method of communication in conveyance system |
-
2002
- 2002-04-01 JP JP2002098348A patent/JP3852694B2/en not_active Expired - Fee Related
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP2264749A3 (en) * | 2009-06-15 | 2011-04-27 | Murata Machinery, Ltd. | Automatic storage system |
| KR101414220B1 (en) | 2009-06-15 | 2014-07-03 | 무라다기카이가부시끼가이샤 | Automated warehouse |
| US8974167B2 (en) | 2009-06-15 | 2015-03-10 | Murata Machinery, Ltd. | Automatic storage system |
| EP2554495A1 (en) * | 2010-04-02 | 2013-02-06 | Murata Machinery, Ltd. | Automated warehouse |
| EP2554495A4 (en) * | 2010-04-02 | 2014-09-24 | Murata Machinery Ltd | Automated warehouse |
| TWI477426B (en) * | 2010-04-02 | 2015-03-21 | Murata Machinery Ltd | Automatic warehouse |
| US9165811B2 (en) | 2010-04-02 | 2015-10-20 | Murata Machinery, Ltd. | Automated warehouse |
| CN102933472A (en) * | 2010-06-10 | 2013-02-13 | 村田机械株式会社 | Conveyance system and method of communication in conveyance system |
Also Published As
| Publication number | Publication date |
|---|---|
| JP3852694B2 (en) | 2006-12-06 |
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