JP2000159304A - Method for carrying cassette and automated storage and retrieval system using the method - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a method for carrying cassettes, by which the space in and out of a clean room can be utilized effectively and the cassettes can be carried safely and at low cost. SOLUTION: In a plant, automated storage and retrieval systems 1a to 1c having a plurality of storage shelves 4 arranged to store cassettes K accommodating substrates and carrier robots which travel on the ground in order to store or take out the cassette K, are installed each corresponding to a plurality of manufacturing processes A to C. In the plant, the carriage of the cassette K among the manufacturing processes A to C is carried out among the storage shelves 4, which are arranged within the width of the automated storage and retrieval systems 1a to 1c.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for transporting cassettes and an automatic warehouse used for the method. More specifically, the present invention relates to a method of transporting a cassette containing glass substrates or semiconductor wafers (substrates) between manufacturing processes in a liquid crystal display device manufacturing plant or a semiconductor manufacturing plant, and an automatic warehouse used in the method.

[0002]

2. Description of the Related Art A conventional liquid crystal display device manufacturing plant is shown in FIG.
As shown in FIG. 2, a manufacturing process A including a plurality of processing devices,
Automatic warehouse (stocker) 101 corresponding to B and C respectively
a, 101b, and 101c are installed. Processing equipment for each of the manufacturing processes A, B, and C and the automatic warehouses 101a, 101b,
The transport of the cassette between the cassette 101c and the cassette 101c is performed by an automatic guided vehicle 103 traveling along the in-process transport lines 102a, 102b, and 102c. The transfer of the cassette between the manufacturing processes A, B, and C is performed by the automatic warehouse 101a,
The operation is performed by an automatic guided vehicle 105 traveling along the inter-process transfer line 104 beside 101b and 101c.
The transfer of the cassettes in this manufacturing factory is performed by a cassette storing the substrates processed by the processing apparatus in the manufacturing process A, by the automatic transfer vehicle 103 in the same process by the automatic guided vehicle 103 in the process.
It is transported to the in-process transfer port 106a of 1a, and is then stored in a storage shelf in the automatic warehouse 101a by the transport robot 107. When the cassette is transported to the next step B, the cassette is first paid out to the inter-step transfer port 108a by the transfer robot 107, and then the unloaded cassette travels along the inter-step transfer line 104. It is transported by the car 105 to the inter-process transport port 108b of the automatic warehouse 101b in the process B and stored in the storage shelf. When the cassette is transported to the processing device in the process B, the transport robot 107 is moved to the in-process transport transfer port 106b in the process B.
, And the cassette is then conveyed to the processing device by the automatic guided vehicle 103 in the process B. The transfer of the cassette from step A to step C is the same.

Next, in another conventional manufacturing plant, FIG.
As shown in FIG. 14, the ceiling 11 on the side of the automatic warehouse 111a, 111b, 111c corresponding to each manufacturing process A, B, C.
2 for the overhead transport vehicle 114 to travel near 2
3 are laid. For example, when the cassette is transported from the process A to the process B in the manufacturing factory, the cassette K is set in the inter-process transfer port 116a provided near the ceiling 112 of the automatic warehouse 111a by the transfer robot 115. Thereafter, the cassette K is transferred to the ceiling transfer vehicle 114 by the transfer device 117, and then transferred to the inter-step transfer transfer port 116b of the automatic warehouse 111b in the step B. Then, the transfer device transfers the cassette K to the in-process transfer port 118b having the same structure as the in-process transfer port 118a in FIG.

[0004]

However, in the transfer method using the automatic guided vehicle, since the automatic guided vehicle travels between processes, a space (travel path) for the automatic guided vehicle to travel in a clean room is required. In addition, there is a problem that a large number of automatic guided vehicles are required. Further, the automatic guided vehicle travels in the same area as the passage of the worker, which is dangerous.

On the other hand, in the transfer method using the overhead transfer vehicle, the overhead transfer vehicle is installed in a clean room having a limited height. There is a problem that the processing device cannot be installed below. Further, there is a problem that the worker cannot pass when the lower part is the passage of the worker.

[0006] Further, in the above two transport methods, since an automatic warehouse is installed for each manufacturing process, a large number of automatic warehouses are required.
There is a problem that equipment costs increase.

SUMMARY OF THE INVENTION In view of the above circumstances, the present invention provides a cassette transfer method capable of effectively utilizing the space inside and outside a clean room and transferring a cassette safely and at low cost, and an automatic warehouse used in the method. The purpose is to provide.

[0008]

SUMMARY OF THE INVENTION According to the present invention, there is provided a method of transporting a cassette, comprising a plurality of storage shelves arranged for storing a cassette in which substrates are stored, and running on the ground to store and remove the cassette. And an automatic warehouse having a transfer robot for performing, in a manufacturing factory installed corresponding to each of a plurality of manufacturing processes for processing the substrate, the transfer of cassettes between manufacturing processes is arranged within the width of the automatic warehouse. Is performed between storage shelves.

[0009]

BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a perspective view of a cassette conveying method according to the present invention;

FIG. 1 is a plan view showing an embodiment of a manufacturing plant to which the cassette conveying method of the present invention is applied, FIG. 2 is a sectional view taken along line II in FIG. 1, and FIG. 3 is a sectional view showing an example of an automatic warehouse. FIG. 4 is a plan view showing another embodiment of the manufacturing plant to which the cassette conveying method of the present invention is applied, and FIG.
-II sectional view, FIG. 6 is a sectional view showing still another embodiment of the automatic warehouse, FIG. 7 is a sectional view showing still another embodiment of the automatic warehouse, and FIG. 8 shows still another embodiment of the automatic warehouse. FIG. 9 is a cross-sectional view, FIG. 9 is a plan view showing still another embodiment of the manufacturing plant to which the method of transferring a cassette of the present invention is applied, FIG. 10 is a cross-sectional view taken along the line III-III in FIG. 9, and FIG. FIG. 4 is an explanatory view showing the transfer posture of FIG.

The present invention is applied to, for example, transport of a cassette between manufacturing processes in which a substrate is subjected to a cleaning process, a film forming process, a photographic process, an etching process and the like in a liquid crystal display device manufacturing factory.

As shown in FIGS. 1 and 2, manufacturing steps A, B,
Automatic warehouses 1a, 1b, 1c are installed corresponding to C. Each of the manufacturing processes A, B, and C includes a plurality of processing devices, and each of the manufacturing processes A, B, and C is provided with an in-process transfer line 2a, 2b, or 2c. , 2b, and 2c, the automatic guided vehicle 3 on which a cassette is mounted travels. The automatic warehouses 1a, 1b, and 1c each include a plurality of storage shelves 4 arranged to store cassettes K in which substrates are stored, a transfer robot 5 that travels on the ground, and stores and retrieves the cassettes K. And the transfer port 6 in the process.
a, 6b, 6c and inter-process transfer ports 7a, 7b, 7c.

According to the present invention, the transfer of cassettes during the manufacturing process is arranged in the automatic warehouse or within the width of the automatic warehouse above the automatic warehouse, that is, in the vicinity of the automatic warehouse perpendicular to the transfer direction during the cassette manufacturing process. Between storage shelves. In the present embodiment, the adjacent automatic warehouses 1a and 1
b, and the upper position between 1b and 1c is connected by a traveling path 8, and the traveling path 8 is connected to the automatic warehouses 1a, 1b, 1c.
The ceiling transport vehicle 9 on which the cassette K is placed can pass through the upper part of the inside of the automatic warehouse 1a, 1b, 1c.

The cassette storing the substrates processed by the processing apparatus of the manufacturing process A is transported by the automatic guided vehicle 3 to the position of the in-process transport transfer port 6a of the automatic warehouse 1a, and then transferred to the transfer port 6a. Transferred to. Subsequently, the transfer robot 5 transfers the transfer to the inter-process transfer transfer port 7a provided in the upper stage of the automatic warehouse 1a. And the inter-process transfer port 7a
Is moved to the overhead conveyor 9 by a transfer mechanism 10 such as a moving table. Ceiling transport vehicle 9
Is transported along the traveling path 8 to a next manufacturing process, for example, the automatic warehouse 1b in the manufacturing process B, and is moved to the position of the inter-process transfer port 7b. Next, when processing is performed by the processing apparatus of the manufacturing process B, the transfer robot 6 is set in the in-process transfer port 6b by the transfer robot. Once the cassette is stored in the automatic warehouse 1b, the cassette is stored in the storage shelf of the automatic warehouse 1b through the inter-process transfer port 7b.
When the cassette is transported from the manufacturing process A to the manufacturing process C, the automatic warehouse 1 of the manufacturing process A is moved by the ceiling transport vehicle 9.
a through the automatic warehouse 1b, the automatic warehouse 1 in the manufacturing process C
c. When traveling in an area having a low degree of cleanliness, it is preferable to attach a cover to the ceiling transport vehicle 9.

In this embodiment, as an inter-process transport means, an overhead transport vehicle travels near the ceiling in the automatic warehouse, and the automatic warehouse between the processes is connected, so that the space in the clean room can be effectively used. It can save space.

[0016] Further, since the overhead carrier is not installed above the passage outside the automatic warehouse, there is no restriction when installing a large-sized device, and the installation can be performed safely and easily.

In this embodiment, a traveling path for traveling the overhead transport vehicle is provided above the automatic warehouse to transport the cassettes. However, in the present invention, the upper surface of the automatic warehouse or the automatic transportation is carried out. A running path may be laid on the ceiling above the warehouse to transport the cassette.

Next, an example of an automatic warehouse according to the present invention will be described. In this example, as shown in FIG.
2 travels on a travel path 24 laid in the ceiling space 23a. Then, the cassette K set in the inter-process transfer transfer port 26a of the automatic warehouse 21a in the manufacturing process A by the transfer robot 25 is transferred to the ceiling transfer vehicle 22 by the arm of the transfer mechanism 27 which can move up and down. When transferring the cassette K to the ceiling transport vehicle 22, a door (not shown) for passing a cassette provided on the ceiling 23 above the automatic warehouse 21a and a door below a cover 28 attached to the ceiling transport vehicle 22. (Not shown) are opened. When the transfer of the cassette K is completed, both the doors are closed, and the cleanliness in the clean room is maintained. Ceiling transport vehicle 22
The cassette K set in the cassette is transported to a position above the inter-process transport transfer port of the automatic warehouse in the next manufacturing process, then the cassette passing door and the cover door are opened, and the cassette is moved by the transfer mechanism. It is transferred to the inter-process transfer transfer port. In this embodiment, since the degree of cleanness behind the ceiling is not good, it is preferable to cover the entire traveling path including the rails of the overhead transport vehicle with a cover.

In this example, since the ceiling transport vehicle is installed so as to run behind the ceiling outside the clean room, the inside of the automatic warehouse can be used more effectively, and the space in the clean room can be used more effectively. In addition, since no rails or the like of a ceiling transport vehicle are installed above the clean room, large-sized processing equipment can be loaded and unloaded and installed without any trouble.

Next, still another embodiment of the automatic warehouse according to the present invention will be described. In the present embodiment, as shown in FIGS. 4 and 5, automatic warehouses corresponding to each of the manufacturing processes A, B, and C are connected to one large automatic warehouse 31 connected via common areas (zones) 31ab and 31bc. Have been. The automatic warehouse 31 has three transport robots 33a, 33b, 33c traveling on one traveling rail 32. The hatched portion of the common area 31ab is a range in which both the transfer robots 33a and 33b can travel, and the common area 3ab
The hatched portion 1bc is a range in which both the transfer robots 33b and 33c can travel. 34a, 34b, 34
c indicates the travel range of each of the transfer robots 33a, 33b, and 33c.

In this embodiment, the cassette containing the substrates processed in the manufacturing process A is placed on the unmanned transport vehicle 35a and transported to the position of the dedicated in-process transport transfer port 36a in the process A. When transporting to the processing apparatus in the process B, the common area 31a of the process AB is then operated by the transport robot 33a.
b is temporarily stored in the storage shelf. After that, the transfer robot 33b takes out the cassette from the storage shelf in the common area 31ab, and sets the cassette in the dedicated in-process transfer transfer port 36b of the process B. The cassette in the transfer port 36b is transferred to the automatic guided vehicle 35b and transported to the processing apparatus in the manufacturing process B, where the substrate is processed. Subsequently, when the processing in the manufacturing process B is completed, the cassette is returned to the automatic warehouse 31, and then transferred by the transfer robots 33b and 33c to the position of the intra-process transfer port 36c, and then transferred to the manufacturing process C. Processing of the substrate is performed.

When the product is directly transferred from the manufacturing process A to the manufacturing process C, the product is transferred to the common area 31ab of the process AB by the transfer robot 33a, and then stored in the storage shelf of the common area 31bc of the process BC by the transfer robot 33b. Next, the cassette is set in the transfer transfer port 36c in the dedicated process of the process C by the transfer robot 33c. After that, it is transported by the automatic guided vehicle 35c to the processing apparatus in the manufacturing process C.

Further, when the substrate is stored in the automatic warehouse 31 after the substrate processing in the manufacturing process A and before the substrate processing in the manufacturing process B, the processing apparatus in the process A is transferred to the dedicated in-process transfer transfer port 36a in the process A. After being transported by the automatic guided vehicle, the transport robot 33a sets the cassette in a storage shelf in the travel range 34a. Or the common area 31ab of the process AB
, The traveling range 34b is set by the transfer robot 33b.
Store cassettes in storage shelves.

The dedicated transfer robots 33a, 3
3b and 33c naturally control the operation so that two transfer robots do not enter the shared areas 31ab and 31bc at the same time.

According to this embodiment, the automatic warehouse is connected to the process A,
Since B and C are integrated and increased in size, separate transport vehicles such as overhead transport vehicles are not required for transport between processes, and there is no need to implement or adjust ceiling transport vehicles. In addition, a running path is not required on the ceiling in the clean room, and the clean room can be used effectively.

Next, still another embodiment of the automatic warehouse according to the present invention will be described. In this embodiment, as shown in FIG. 6, the upper surface of the automatic warehouse 41 is installed over the upper part of the ceiling 40 of the clean room, and as shown in FIGS. Are installed below the floors 50 and 60 (below the floor) of the clean room. The automatic warehouse 61 shown in FIG. 8 is different from the automatic warehouse of the stacker type in the embodiment shown in FIGS. 2 and 3 and is an automatic warehouse of a rotating dam type in which a storage shelf 62 rotates.

The interiors of the automatic warehouses 41, 51, 61 are as follows:
In order to maintain the cleanliness, for example, the outer wall of the automatic warehouse is closed and shut off from the outside, and the internal air is circulated using a circulating fan (not shown) provided inside, or the air is cleaned from the outside. A pipe (not shown) for taking in the water is provided. Alternatively, a clean unit with a filter (not shown) may be provided on the ceiling of the automatic warehouse 41 so that clean air is introduced into the automatic warehouse.

Although the automatic warehouse using the ceiling or under the floor is shown in this embodiment, the automatic warehouse using both the ceiling and under the floor may be used.

In this embodiment, since the automatic warehouse is installed above the ceiling of the clean room and / or below the floor, the number of cassette storage shelves in the limited clean room can be increased, and the space can be increased. Can be effectively utilized.

Next, still another embodiment of the automatic warehouse according to the present invention will be described. In the present embodiment, as shown in FIGS. 9 to 10, the automatic warehouse 71 is provided with a transfer robot 72 and a plurality of in-process transfer transfer ports 73. An inspection device 74 for a process, for example, an inspection process, is installed. Also, the transfer port 73 of the automatic warehouse
The loader and unloader portions of the processing device 74 are connected or close to each other, and a cassette transfer device 75 is provided in the automatic warehouse or the inspection device 74.

In the above embodiments, the transfer of the cassette from the automatic warehouse to the same process has been described by using the automatic guided vehicle. However, in this embodiment, the cassette in the automatic warehouse is transferred to the intra-process transfer port 73. It is set on the loader unit of the inspection device 74 by the delivery and transfer device 75. The cassette that has been processed by the processing device is transferred from the unloader to the transfer device 7.
After being conveyed to the intra-process transfer port 73 by 5, it is stored on a shelf in an automatic warehouse.

When processing is continuously performed from one inspection device 74 to another inspection device, the in-process transfer transfer port 7 of the automatic warehouse is used.
The transfer of the cassette may be performed by a transfer device (not shown) provided between the three.

Further, in the present embodiment, the cassette in the automatic warehouse is set once in the in-process transfer transfer port 73 and transferred to the loader / unloader section of the inspection device by the transfer device 75. The cassette may be directly loaded and unloaded to the inspection device by the arm.

In this embodiment, since there is no need to use an automatic guided vehicle or a tracked traverser for transport from the automatic warehouse to the processing apparatus in the same process, the system can be implemented easily at low cost.

In the present invention, especially when the cassette is transported by a ceiling transport vehicle, the substrate P is transported so that the surface of the substrate P is parallel to the transport direction S, as shown in FIG. As a result, the wind does not directly hit the substrate surface due to the wind speed at the time of transport, static electricity is less likely to be generated on the substrate surface, and breakage of circuits in the substrate and occurrence of product defects due to dust adhesion can be reduced. Further, since the resistance at the time of transportation is reduced, the driving of the transportation vehicle can be realized at higher speed with a small load. In the future, as the size of the substrate increases, the effect of the posture will become more and more remarkable.

[0036]

As described above, in the present invention, the cassettes are transported between the processes between the storage shelves arranged within the width of the automatic warehouse, so that the space inside and outside the clean room is effectively utilized. can do. Further, the transport equipment can be made safe and inexpensive.

[Brief description of the drawings]

FIG. 1 is a plan view showing an embodiment of a manufacturing plant to which a cassette conveying method according to the present invention is applied.

FIG. 2 is a sectional view taken along line II in FIG.

FIG. 3 is a sectional view showing an example of an automatic warehouse.

FIG. 4 is a plan view showing another embodiment of the manufacturing factory to which the cassette conveying method of the present invention is applied.

FIG. 5 is a sectional view taken along line II-II in FIG.

FIG. 6 is a sectional view showing still another embodiment of the automatic warehouse.

FIG. 7 is a sectional view showing still another embodiment of the automatic warehouse.

FIG. 8 is a sectional view showing still another embodiment of the automatic warehouse.

FIG. 9 is a plan view showing still another embodiment of the manufacturing factory to which the cassette carrying method of the present invention is applied.

FIG. 10 is a sectional view taken along the line III-III in FIG. 9;

FIG. 11 is an explanatory diagram illustrating a transfer posture of a substrate stored in a cassette.

FIG. 12 is a plan view showing an example of a conventional manufacturing plant.

FIG. 13 is a plan view showing another example of a conventional manufacturing plant.

14 is a sectional view taken along the line IV-IV in FIG.

[Explanation of symbols]

1a, 1b, 1c, 21a, 31, 41, 51, 61,
71 Automatic warehouse 4 Storage shelf 5, 25, 33a, 33b, 33c, 72 Transport robot 8 Travel path 9, 22 Ceiling transport vehicle A, B, C Manufacturing process K Cassette

Claims (10)

[Claims] An automatic warehouse having a plurality of storage shelves arranged to store cassettes in which substrates are stored, and a transfer robot that runs on the ground and stores and retrieves the cassettes, comprises: A cassette characterized in that transport of cassettes between manufacturing processes is performed between storage shelves arranged within the width of the automatic warehouse in a manufacturing factory installed corresponding to each of a plurality of manufacturing processes to be processed. Transportation method. 2. The transfer method according to claim 1, wherein the transfer of the cassette is performed by connecting the upper position between adjacent automatic warehouses by a traveling path and in the upper part of the automatic warehouse. 3. The transport method according to claim 1, wherein the transport of the cassette is performed on an upper surface of the automatic warehouse while connecting an upper position between adjacent automatic warehouses by a traveling path. 4. The transport method according to claim 1, wherein the transport of the cassette is performed on a ceiling above the automatic warehouse. 5. An automatic warehouse used in the method according to claim 2, wherein a traveling path of the automatic transport vehicle is laid. 6. An automatic warehouse used in the method according to claim 3, wherein a traveling path of the automatic transport vehicle is laid on an upper surface. 7. The automatic warehouse used in the method according to claim 4, wherein a traveling path of the automatic guided vehicle is laid on the ceiling. 8. The automatic warehouse used in the method according to claim 1, wherein automatic warehouses corresponding to the respective manufacturing steps are connected via a common area. 9. The automatic warehouse according to claim 5, wherein the upper surface exceeds the ceiling. 10. The device according to claim 5, which is installed under the floor.
Automatic warehouse according to 7 or 8.