JP4008134B2 - Conveying device, conveying method, and conveying system - Google Patents

Description

[0001]
BACKGROUND OF THE INVENTION
The present invention relates to a transfer device, and more particularly to a transfer device suitable for a production line of a semiconductor device or a liquid crystal display device.
[0002]
[Prior art]
Many production lines for semiconductor devices and liquid crystal display devices employ a job shop production form in which a group of processing devices with similar functions or a larger group of devices combined as a unit is managed as a unit. ing. A plurality of devices included in each device group and loaders and unloaders attached thereto are arranged in a small room partitioned by partitions. A small room in which one group of devices is arranged is called a bay.
[0003]
FIG. 9A shows a plan layout view of a conventional transfer device constituting a production line for semiconductor devices. A main transport path 100 extending in the horizontal direction in the figure is disposed in the approximate center of the region where the transport device is disposed. The sub-transport path 101 extends from a plurality of predetermined positions on the main transport path 100 so as to branch from the main transport path 100. The plurality of sub transport paths 101 are arranged on both sides of the main transport path 100. When attention is paid to one sub-transport path 101, it is arranged only on one side of the main transport path 100. One sub-transport path corresponds to one bay. The sub-transport path is also called an intra-bay transport path. The main conveyance path 100 and the sub conveyance path 101 convey a processing target, for example, a wafer cassette.
[0004]
A stocker 102 is arranged corresponding to each sub-transport path 101. The stocker 102 transfers the processing object between the main transport path 100 and the sub transport path 102 and temporarily stores the processing object. When a processing object is transferred from one bay to another bay, the processing object is transferred to the stocker 102 of the transfer destination bay via the transfer source bay stocker 102 and the main transport path 100. That is, the main transport path 100 is used when transferring the processing object across the bay. Therefore, the main transport path 100 is also called an inter-bay transport path.
[0005]
A predetermined processing device 103 is disposed around the sub-transport path 101. The processing apparatus 103 receives the object to be processed being transported through the sub transport path 101, performs a predetermined process, and then returns to the sub transport path 101.
[0006]
FIG. 9B shows another conventional arrangement example. In the example of FIG. 9B, the sub transport path 101 is disposed only on one side of the main transport path 100. The rest is the same as the structure in FIG. The transfer device in FIG. 9A is called a double-sided bay method, and the transfer device in FIG. 9B is called a one-sided bay method.
[0007]
When determining the transfer destination of the processing object in a certain bay, the processing apparatus group which processes the next process of the processing object is determined, and the stocker of the bay in which the processing apparatus group is accommodated is set as the transfer destination.
[0008]
In the transport apparatus, there are a plurality of processing objects to be subjected to various processes with different setups. In order to process objects to be processed having different setups, a setup change operation is required in each processing apparatus. For example, in the case of an exposure apparatus, work such as replacement of a photomask is required. In order to reduce the loss due to the setup change operation, it is preferable to perform scheduling so that the processing objects that can be processed by the same setup are continuously processed. For this purpose, a plurality of processing objects that can be processed in the same setup are stored in the stocker 102 so that the processing objects processed in the same setup can be continuously supplied to the processing apparatus.
[0009]
Further, it is necessary to collectively supply processing objects to be processed in the same setup to a processing apparatus that batch processes a plurality of processing objects at the same time. For this purpose, it is necessary to store a plurality of processing objects that can be processed in the same setup in the stocker 102. In this manner, a plurality of processing objects to be processed in various setups are stored in the stocker 102 for each setup.
[0010]
[Problems to be solved by the invention]
In the double-sided bay type transfer device shown in FIG. 9A, the average distance between the stocker 102 and the processing device 103 in the bay is short, so the transfer time in the bay can be shortened. In addition, since the sub-transport path 101 is disposed on both sides of the main transport path 100, many connection points with the sub-transport path 101 can be provided on the main transport path 100. For this reason, it is easy to increase bays in stages. However, since the number of bays increases, the entire transport distance including inter-bay transport tends to be long. In particular, the number of deliveries between the main transport path 100 and the sub transport path 101 tends to increase.
[0011]
In the one-side bay-type transfer device shown in FIG. 9B, the entire transfer distance including the transfer between bays can be shortened, and the number of delivery between the main transfer path 100 and the sub-transfer path 101 can be reduced. it can. However, the average transport distance in the bay becomes longer. In addition, since it is difficult to provide many connection points with the sub-transport path 101 in the main transport path 100, this method is not suitable when it is desired to add bays in stages.
[0012]
9A and 9B, when a processing object that has been processed in a certain bay is to be transferred to a bay for the next processing, the transfer destination stocker 102 is full. If it is damaged, it cannot be transported. In order to cope with such a case, a method of defining a temporary storage stocker that temporarily stores the processing object and transporting the processing object to the temporary storage stocker is employed. However, with this method, conveyance for temporary placement increases. Furthermore, there is a problem that the stocker is filled with temporarily placed processing objects, and the processing objects to be originally stored cannot be stored.
[0013]
An object of the present invention is to provide a transport apparatus capable of efficient transport as a whole.
[0014]
[Means for Solving the Problems]
According to one aspect of the present invention, a first main transport path that transports a processing object and a plurality of first sub-transports that are arranged to intersect the first main transport path and transport the processing object. And the first main transport path and the corresponding first sub-transport path, and the processing are installed corresponding to each of the intersections between the first main transport path and each first sub-transport path A plurality of first stockers for delivering the objects and temporarily storing the objects to be processed and corresponding to each first sub-transport path are installed and transported through the corresponding first sub-transport path. And a first processing device that receives the processed object, processes it, and returns it to the corresponding first sub-transport path.
[0015]
Since the sub-transport path intersects the main transport path, the average transport distance in the sub-transport path can be shortened compared to the case where the main transport path and the object to be processed are delivered at the end of the sub-transport path. it can.
[0016]
According to another aspect of the present invention, a plurality of conveyance paths that convey a processing object, and a plurality of conveyance paths that are installed corresponding to each of the plurality of conveyance paths, deliver the corresponding conveyance path and the processing object, and perform processing. A stocker that temporarily stores an object and a connection path that connects two stockers and transfers a processing object between the two stockers. From one stocker, the connection path, the transport path, and the A plurality of the connection paths arranged so as to reach all other stockers via one or more of the stockers, and a plurality of corresponding transport paths corresponding to each of the transport paths. And a processing device that receives the processing object to be transported, processes it, and returns it to the corresponding transport path.
[0017]
A processing object stored in a certain stocker can be transferred to all other stockers via one or more of a connection path, a stocker, and a transport path.
[0018]
DETAILED DESCRIPTION OF THE INVENTION
FIG. 1 is a plan layout view of a transport apparatus according to a first embodiment of the present invention. A main transport path 1 extending in the horizontal direction in the figure is disposed at substantially the center of the region where the transport device is disposed. The main transport path 1 includes an outward path 1A, a return path 1B arranged substantially parallel thereto, a first turning circuit 1C connecting the end of the outbound path 1A and the start end of the return path 1B, and the end of the return path 1B and the start of the outbound path 1A. It is comprised by 2nd turning circuit 1D which connects an end. That is, the main transport path 1 is a closed loop-shaped transport path.
[0019]
A plurality of sub transport paths 5 are arranged so as to intersect the main transport path 1. Each sub-transport path 5 is also a closed loop-shaped transport path similar to the main transport path 1. The main transport path 1 and the sub transport path 5 transport the processing object. In the case of manufacturing a semiconductor device, the processing object is a cassette storing a semiconductor substrate, and in the case of manufacturing a liquid crystal display device, the processing object is a cassette storing a glass substrate.
[0020]
Two stockers 6 are arranged corresponding to each intersection of the main transport path 1 and each sub transport path 5. The stocker 6 delivers the object to be processed to the main transport path 1 and the corresponding sub transport path 5. Furthermore, the processing object is temporarily stored. Note that three or more stockers may be arranged corresponding to each of the sub-transport paths 5.
[0021]
A plurality of processing devices 7 are arranged around each sub-transport path 5. The processing device 7 receives the object to be processed that is transported along the corresponding sub transport path 5, processes it, and returns it to the corresponding sub transport path 5. Examples of the processing apparatus 7 include a chemical vapor deposition (CVD) apparatus, an ion implantation apparatus, an exposure apparatus, and a heat treatment apparatus.
[0022]
FIG. 2A shows a front view of the stocker 6, the main transport path 1, and the sub transport path 5 of the transport apparatus according to the first embodiment, and FIG. 2B shows a plan view thereof. The main conveyance path 1 includes a linear motor rail 10 and a container 11. The rail 10 includes a forward rail 10A and a return rail 10B, and is attached to the ceiling of the room in which the transfer device is disposed. The container 11 is guided by the rail 10 and moved by a linear motor. In the container 11, a processing object 8 to be transported is accommodated.
[0023]
The sub transport path 5 includes a virtual track 16 and a ground transport trackless carriage 15 that moves along the virtual track 16. The trackless carriage 15 accommodates and transports the processing object 8 therein.
[0024]
The stocker 6 includes a substantially rectangular parallelepiped housing and a crane 61 disposed therein. A large number of storage shelves 12 for storing objects to be processed are provided on the side walls of the housing. Furthermore, a part of the side wall facing the rail 10 is provided with a warehousing port 12A and a spilling port 12B, and a part of the side wall facing the virtual track 16 is provided with a warehousing port 12C and a spilling port 12D. .
[0025]
The processing object accommodated in the container 11 and transported is transferred to the warehousing port 12B by a robot arm or the like. The processing object accommodated in the exit port 12A is transferred to the empty container 11 by a robot arm or the like. The object to be processed accommodated and transported in the carriage 15 is transferred to the warehousing port 12 </ b> C by a robot arm attached to the carriage 15. The processed material stored in the exit port 12D is transferred to the empty carriage 15 by the robot arm. The crane 61 delivers the object to be processed between the warehousing ports 12A and 12C, the warehousing ports 12B and 12D, and the storage shelf 12.
[0026]
FIG. 3 is a block diagram of a management system for a transport apparatus according to the first embodiment. The management system manages a plurality of stockers 6 corresponding to the same sub-transport path 5, that is, the same bay, with one stocker group ID. The process storage means 30 stores the order of processing steps for each processing object. The process / stocker group ID storage unit 31 stores the correspondence between each process and the stocker group ID corresponding to the bay in which the process is processed.
[0027]
The empty number storage means 32 stores, for each stocker group, an empty number obtained by subtracting the number of processing objects currently stored from the storable number of processing objects that can be stored in the stockers belonging to each stocker group. For each bay, the in-process number storage means 33 is the sum of the number of treatment objects being conveyed through the secondary conveyance path 5 of the bay and the number of treatment objects taken into the processing device 7 connected to the secondary conveyance path 5. The number of work in progress is stored.
[0028]
The process management device determines the next process of a certain processing object based on the information stored in the process storage unit 30. Based on the information stored in the process / stocker group ID storage means 31, the stocker group ID of the bay that executes the process of the process is obtained. The obtained stocker group ID is sent to the control device 35.
[0029]
The control device 35 transfers the processing object based on the transfer destination stocker group ID sent from the process management device 34 and the information stored in the empty number storage means 32 or temporarily stores it in the current stocker. Judge whether to keep it. For example, it is temporarily placed when the empty number of the transfer destination stocker group is less than or equal to a reference value. When transporting, a stocker ID for identifying a stocker belonging to the stocker group of the transport destination is attached, and a transport instruction signal is transmitted to the transport device driving unit 36.
[0030]
In addition, not only the empty number information of the transfer destination but also the in-process number of the transfer destination bay stored in the in-process number storage means 33 may be considered to determine whether to transfer or temporarily place the transfer destination. A large number of devices in progress means that there is no room in the processing device in the bay. It is possible to perform more appropriate control by determining whether to transfer or temporarily place based on the empty number of stockers in the destination bay and the number of devices in progress. For example, a value obtained by subtracting the number of devices in process from the empty number is compared with a reference value, and if the value is equal to or less than the reference value, temporary placement is performed.
[0031]
The driving unit 36 drives the main transport path 1, the sub transport path 5, and the stocker 6 based on the transport instruction signal. The conveyance result is returned to the control device 35. The control device 35 updates the stored contents of the empty number storage unit 32 and the in-process number storage unit 33 based on the transport result.
[0032]
In the first embodiment, as shown in FIG. 1, the sub-transport path 5 is arranged so as to intersect the main transport path 1. For this reason, compared with the one-sided bay method of FIG. 9 (B) in which the main conveyance path 1 and the object to be processed are delivered at the end of the sub-conveyance path 5, the average of the object to be processed in the sub-conveyance path 5 The distance becomes shorter. Further, the transport amount between the bays can be reduced as compared with the case of the both-side bay method shown in FIG.
[0033]
In the first embodiment, two stockers 6 are assigned to each of the sub transport paths 5. For this reason, even when one stocker is stopped due to a failure or the like, or when the stocker is full, by transferring the object to be processed to the other stocker, interbay transportation can be performed without any trouble.
[0034]
FIG. 4 is a plan layout view of the transport apparatus according to the second embodiment. In the first embodiment shown in FIG. 1, one stocker 6 delivers a processing object only to one sub-transport path 5. In the second embodiment, one stocker 6 can deliver the two sub-transport paths 5 and the processing object. For example, in FIG. 4, the two stockers 6C and 6D arranged on the left side of the central sub-transport path 5B not only deliver the processing object to and from the central sub-transport path 5B, The transfer object is also delivered to the transport path 5A. In addition, the two stockers 6E and 6F arranged on the left side of the rightmost sub-transport path 5C also deliver the processing object to the left-side sub-transport path 5B. Other configurations are the same as those of the first embodiment.
[0035]
The stocker 6 that can deliver the two sub-transport paths and the processing object belongs to the two stocker groups. For example, in FIG. 4, the two stockers 6C and 6D at the center belong to two groups: a stocker group assigned to the central sub-transport path 5B and a stocker group assigned to the leftmost sub-transport path 5A.
[0036]
In the second embodiment, even if the number of devices in progress in one bay increases, if the number of devices in progress in the bay adjacent to the bay is small, the storage shelves of stockers 6 belonging to these two bays. Can be allocated for bays with an increased number of devices in progress. For this reason, it becomes possible to equalize the use frequency of a storage shelf.
[0037]
Further, the number of stockers 6 assigned to one bay substantially increases. For this reason, when one stocker 6 breaks down, the concentration on the other stocker can be reduced.
[0038]
Furthermore, in the second embodiment, a processing object can be transferred from one bay to a bay adjacent to the bay via a stocker 6 capable of delivering the processing object to both. For this reason, it becomes possible to reduce the load concerning the main conveyance path 1.
[0039]
Next, a prediction result of the number of times of conveyance of the processing object per hour when the same manufacturing process is carried out using the conveyance device according to the second embodiment and the conventional conveyance device will be described.
[0040]
FIG. 5A shows a plan layout view of the transport apparatus according to the second embodiment used for the prediction. The number of bays is five. Two stockers 6 are assigned to the bays at both ends in FIG. 5A, and four stockers 6 are assigned to the other bays.
[0041]
FIG. 5B shows a plan layout view of a conventional double-sided bay type transfer device used for prediction. The number of bays is 10, and one stocker 6 is assigned to each bay.
[0042]
The number of transfers between bays via the main transfer path 1 was 27 in the second embodiment, whereas it was 112 in the conventional case. In the case of the second embodiment, the number of conveyances between the bays via the stocker 6 was 43 times. The number of times the object to be processed is conveyed by the crane in the stocker 6 is 76 times in the second embodiment, whereas it is 181 times in the conventional case. The number of times of conveyance in the bay was 263 times in the second embodiment, but 308 times in the conventional case.
[0043]
As described above, in the second embodiment, the number of times the processing object is conveyed is smaller than in the case of the conventional example.
[0044]
If a one-sided bay type conveying device is used instead of the two-sided bay type conveying device shown in FIG. However, the average transport distance in the bay transport is about 1.5 times that in the second embodiment. For this reason, the average transport time is also about 1.5 times. When a trackless cart is used for the auxiliary transport path 5, it is necessary to increase the number of carts. According to the inventors' prediction, when 23 carriages are required for the transfer apparatus according to the second embodiment, 46 carriages are required for the equivalent one-side bay type transfer apparatus. The average transportation distance in the bay is 1.5 times, but the number of necessary carriages is doubled. If the average transportation distance is longer, the efficiency of using the carriage due to mutual interference between the carriages. This is because of a decrease.
[0045]
FIG. 6A shows a schematic front view of the transfer apparatus according to the third embodiment. A first transport device configured to include the main transport path 1 and the plurality of bays 9A to 9C is installed on the first floor of the building 20 having a plurality of floors (floors). A second transport device configured to include the main transport path 21 and the plurality of bays 28A to 28C is installed on the second floor. Each of the bays 9A to 9C and 28A to 28C includes the sub-transport path 5, the stocker 6, and the processing device 7 of the first embodiment shown in FIG.
[0046]
The main transport paths 1 and 21 are arranged along a virtual line having both ends. The first floor-to-floor transport path 22 is disposed at the position closest to one end of the main transport path 21 in the stocker assigned to the bay 9C disposed at the position closest to one end of the main transport path 1. It is transported to the stocker assigned to the assigned bay 28C. The second floor-to-floor transport path 23 is closest to the other end of the main transport path 1 with the processing target in the stocker assigned to the bay 28 </ b> A disposed at the position closest to the other end of the main transport path 21. It is transported to the stocker assigned to the bay 9A arranged at the position.
[0047]
The bays 9A to 9C on the first floor are arranged in the order of the manufacturing process of a certain device. Furthermore, the bays 28C to 28A on the second floor are arranged in the order of the steps from the next step of the bay 9C. The object to be processed that has been processed in order in the bays 9A and 9B and finished in the bay 9C is transferred to the bay 28C via the first inter-floor transfer path 22. The objects to be processed transferred to the bay 28C are sequentially processed in the bays 28B and 28A. The object to be processed after the processing in the bay 28A is transferred to the bay 9A via the second inter-floor transfer path 23.
[0048]
For example, the bays 9A to 9C and 28C to 28A perform cleaning, film formation, photolithography, etching, resist stripping, and inspection processes, respectively. By starting processing in the bay 9A and passing through the bays 9B, 9C, and 28C to 28A, a thin film for one layer can be formed.
[0049]
Thus, by arranging a plurality of bays on a plurality of floors and in the order of processes, it is possible to shorten the moving distance of the processing object until all processes are completed.
[0050]
FIG. 6B shows a schematic front view of a transfer apparatus according to a modification of the third embodiment. In the transfer apparatus shown in FIG. 6B, first and second inter-floor stockers 26 and 27 are installed in place of the first and second inter-floor transfer paths 22 and 23 shown in FIG. 6A, respectively. Has been. The first inter-floor stocker 26 delivers the object to be processed to the sub-transport path of the bay 9C and the sub-transport path of the bay 28C. The second inter-floor stocker 27 delivers the processing object to and from the sub-transport path of the bay 9A and the sub-transport path of the bay 28A. Furthermore, the first and second inter-floor stockers 26 and 27 temporarily store the processing object.
[0051]
The first and second inter-floor stockers 26 and 27 can transfer the object to be processed across the floors. For this reason, the transport apparatus shown in FIG. 6B can shorten the moving distance of the processing object as in the transport apparatus of FIG.
[0052]
FIG. 7 is a plan layout view of the transport apparatus according to the fourth embodiment. A plurality of conveyance paths 60 extending in the vertical direction in FIG. 7 are arranged so as to intersect a virtual straight line 70 extending in the horizontal direction in FIG. 7. Each transport path 60 corresponds to one bay. At least two stockers 61 are arranged so as to correspond to each of the transport paths 60.
[0053]
Two stockers 61 corresponding to one transport path 60 are arranged on both sides of a virtual straight line 70. The stocker 61 delivers the corresponding conveyance path 60 and the processing object, and temporarily stores the processing object. Note that, as in the second embodiment shown in FIG. 4, each stocker 61 may be able to deliver a processing object to and from another conveyance path 60 adjacent to the corresponding conveyance path 60. A plurality of processing devices 62 are arranged around each conveyance path 60. The processing device 62 has the same function as the processing device 7 of FIG.
[0054]
Of the plurality of stockers 61, a connection path 65 is connected between any pair of stockers. The connection path 65 transfers the object to be processed between the two stockers 60 to which it is connected. Further, the connection path 65 is arranged so as to reach all other stockers 61 from one stocker 61 via one or more of the connection path 65, the transport path 60, and the stocker 61. ing. For this reason, the processing object stored in a certain stocker 61 can be transferred to any other stocker 61 via any of the connection path 65, the transport path 60, and the stocker 61.
[0055]
For example, one stocker 61 is disposed on each side of the first virtual line 70 corresponding to each of the transport paths 60. The connection path 65 connects the stocker 61 disposed on one side of the first virtual line 70 in series and connects the stocker 61 disposed on the other side in series. Further, the two stockers 61 corresponding to one transport path 60 are connected across the first virtual line 70. That is, the connection path 65 constitutes a ladder-shaped transport path. By making the shape of the transport path into a ladder shape, it is possible to configure a detour when some of the stockers 61 or some of the connection paths 65 break down.
[0056]
FIG. 8 shows a cross-sectional view of the connection path 65 of FIG. Two stockers 61 are arranged on both sides of the conveyance path 60. In each stocker 61, a storage shelf similar to the stocker 6 in FIGS. 2A and 2B is provided. On the side wall facing the conveyance path 60, an exit port 66A and an entrance port 66B are provided. The delivery port 66 </ b> A and the stocking port 66 </ b> B of the stocker 61 facing it are connected to each other by a connection path 65. When the crane in the stocker 61 places the processing object 8 on the shipping port 66 </ b> A, the processing object 8 is transferred to the receiving port 66 </ b> B of the opposing stocker 61 by the belt conveyor that moves in the connection path 65.
[0057]
The inside of the connection path 65 is a sealed space. An air purifier 67 is attached to each stocker 61 to clean the space in the stocker 61. Since the connection path 65 has a sealed structure, the space in the connection path 65 is maintained at a cleanliness level substantially equal to the space in the stocker 61. The object to be processed is conveyed only through the stocker 61 and the internal space of the connection path 65. For this reason, the cleanliness of the external space can be set lower than the cleanliness of the space in the stocker 61.
[0058]
Although the present invention has been described with reference to the embodiments, the present invention is not limited thereto. It will be apparent to those skilled in the art that various modifications, improvements, combinations, and the like can be made.
[0059]
【The invention's effect】
As described above, according to the present invention, when a plurality of sub-transport paths are arranged so as to intersect with the main transport path, the main transport path and the processing object are delivered at the end of the sub-transport path. In comparison, the average distance at which the processing object should be transported in the sub transport path can be shortened.
[0060]
Also, by assigning multiple stockers to the sub-transport path corresponding to one bay, even when one stocker is stopped due to a failure or when it is full, it is possible to transport between bays without any problem. it can.
[Brief description of the drawings]
FIG. 1 is a plan layout view of a transport apparatus according to a first embodiment of the present invention.
FIGS. 2A and 2B are a schematic front view and a schematic plan view of a transfer apparatus according to a first embodiment. FIGS.
FIG. 3 is a block diagram for explaining a production management method using the transport apparatus according to the first embodiment;
FIG. 4 is a plan layout view of a transport apparatus according to a second embodiment of the present invention.
FIG. 5A is a plan layout view of a transport apparatus according to a second embodiment, and FIG. 5B is a plan layout view of a conventional double-sided bay type transport apparatus.
FIG. 6 is a schematic front view of a transport apparatus according to a third embodiment and its modification.
FIG. 7 is a plan layout view of a transport apparatus according to a fourth embodiment of the present invention.
FIG. 8 is a schematic cross-sectional view of a connection path of a transport device according to a fourth embodiment.
FIG. 9 is a plan layout view of a conventional conveying apparatus.
[Explanation of symbols]
1 Main transport path
1A Outbound
1B Return
1C, 1D turning circuit
5 Sub-transport path
6 Stocker
7 Processing equipment
8 processing object
9A-9C, 28A-28C Bay
10 rails
11 Container
12 Storage shelf
15 trolleys
16 Virtual orbit
20 building
21 Main transport path
22, 23 Inter-floor transport path
26, 27 Stocker between floors
30 Process storage means
31 Process / emitter group ID storage means
32 Number storage means
33 In-process number storage means
34 Process control device
35 Control device
36 Drive means
60 Conveyance path
61 Stocker
62 Processing equipment
65 connection
67 Air Purifier

Claims (8)

A first main transport path for transporting the processing object;
A plurality of first sub-transport paths arranged to intersect the first main transport path and transporting the processing object;
The first main transport path and the corresponding first sub transport path are installed corresponding to each of the intersections of the first main transport path and each first sub transport path. A first stocker for delivering and temporarily storing the processing object;
A plurality of units are installed corresponding to each first sub-transport path, receive a processing object transported through the corresponding first sub-transport path, process it, and return it to the corresponding first sub-transport path. A transport device having a processing device ,
A transport apparatus in which at least a part of the first stocker among the first stockers delivers a processing object to another first sub transport path adjacent to the corresponding first sub transport path.   The transport apparatus according to claim 1, wherein a plurality of the first stockers are installed corresponding to each of intersections between the first main transport path and the first sub transport paths. The first main transport path is an outward path, a return path arranged parallel to the outward path, a first turning circuit connecting the end of the outward path and the start end of the return path, and the end of the return path and the forward path The transport apparatus according to claim 1, wherein the transport apparatus is a closed transport path including a second turning circuit connecting the start end. A first main transport path for transporting the processing object;
  A plurality of first sub-transport paths that are arranged to intersect the first main transport path and transport the processing object;
  Delivery corresponding to each of the intersections between the first main transport path and each first sub transport path, and delivery of the first main transport path and the corresponding first sub transport path and the processing object. And a first stocker for temporarily storing the processing object,
A plurality of units are installed corresponding to each first sub-transport path, receive a processing object transported through the corresponding first sub-transport path, process it, and return it to the corresponding first sub-transport path. With processing equipment
And at least a part of the first stockers of the first stocker transfers a processing object to and from another first sub-transport path adjacent to the corresponding first sub-transport path. A conveying method using an apparatus,
  Among the first stockers, one or a plurality of first stockers corresponding to the same first sub-transport path are managed as one first stocker group, and the first stocker belonging to each first stocker group. Storing an empty number obtained by subtracting the number of processing objects currently stored from the storable number of processing objects that can be stored in the stocker;
Determining whether or not the object to be processed can be conveyed from one stocker group to another stocker group based on the stored empty number;
Conveying method. Furthermore, an in-process number that is the sum of the number of treatment objects being conveyed through each first sub-transport path and the number of process objects taken into the first processing apparatus connected to the first sub-transport path. Memorizing process;
  Determining whether or not the processing object can be transported from one stocker group to another stocker group based on the empty number and the in-process number; and
The conveyance method of Claim 4 containing these. Furthermore, based on the empty number of the first stocker group of the next transfer destination of a certain processing target in the first stocker, the transport of the processing target is started or continued in the current first stocker. The transport method according to claim 4, further comprising a step of determining whether to store. A first main transport path for transporting the processing object;
  A plurality of first sub-transport paths arranged to intersect the first main transport path and transporting the processing object;
  The first main transport path and the corresponding first sub transport path are installed corresponding to each of the intersections of the first main transport path and each first sub transport path. A first stocker for delivering and temporarily storing the processing object;
  A plurality of units are installed corresponding to each first sub-transport path, receive a processing object transported through the corresponding first sub-transport path, process it, and return it to the corresponding first sub-transport path. A processing device;
  The first main transport path, the plurality of first sub-transport paths, the plurality of first stockers, and the plurality of first processing apparatuses are accommodated in a first floor and outside the first floor. A building having a second floor;
  A second main transport path, a plurality of second sub-transport paths, a plurality of second stockers, and a plurality of second processing devices housed on the second floor, wherein the second sub-transport Each of the paths is arranged so as to intersect the second main transport path, and each of the plurality of second stockers is an intersection of the second main transport path and each second sub transport path. Each of the plurality of second processing devices is disposed between the second main transport path and the corresponding second sub transport path. The second sub-transport path is disposed corresponding to one of the second sub-transport paths, receives the processing object being transported through the corresponding second sub-transport path, processes it, and returns it to the corresponding second sub-transport path Two main transport paths, a plurality of second sub-transport paths, a plurality of second stockers, and a plurality of second processing devices;
  Any one of the first main transport path, the plurality of first sub transport paths, and the plurality of first stockers, the second main transport path, the plurality of second sub transport paths, and the plurality of second First floor-to-floor transfer means for transferring an object to be processed to any one of the stockers;
A transport system comprising:
At least a part of the first stocker among the first stockers delivers a processing object to and from another first sub transport path adjacent to the corresponding first sub transport path, and A transport system in which at least a part of the second stocker among the two stockers delivers a processing object to another second sub transport path adjacent to the corresponding second sub transport path. The first main transport path is disposed along a first virtual line having both ends;
  The second main transport path is disposed along a second imaginary line having both ends;
  The first inter-floor transfer means is a first sub-transport path disposed at a position closest to one end of the first main transport path or a first stocker assigned to the first sub-transport path; A second stocker assigned to the second sub-transport path or the second sub-transport path disposed at a position closest to one end of the second main transport path and delivering the processing object Deliver the object,
  Further, the first sub-transport path disposed at the position closest to the other end of the first main transport path or the first stocker assigned to the first sub-transport path and the object to be processed are delivered. In addition, the second sub-transport path disposed at the position closest to the other end of the second main transport path or the second stocker assigned to the second sub-transport path and the processing object are delivered. The transport system according to claim 7, further comprising a second floor-to-floor transfer means.

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