1286116 . 15542twf.doc/g 滾輪與卡!f之間常會因摩擦而產生許多微粒，這些微粒很 有可能會附著於玻璃基板上而造成污染，或者存树整個 無$室中，造成整個無塵室的潔淨度無法達到要求。因此， 目前只能在潔淨度要求低於class腦卩下的無塵室中，採 用滾輪作為輸送裝置，而在潔淨度必須優於Class 1〇〇的無 塵室中則只能採用其他特殊的防塵輸送裝置。如 會造成設備的設置成本增加。 【發明内容】 用在就是在提供—種卡_送裝置，適於應 無塵ίίΓ再—目的是提供-麟存μ，雜應用在 、、本發明提出-種卡g輸送裝置，適於在— 輸运多個卡匠。此卡匠輸送裝置主要係由至少二 多個滾輪以及一抽氣系統所構成。其：二、 少-抽風π，而滾輪配設 滚輪只有用於接觸卡E之接觸 且廷些 露於滾輪箱外。抽翕系銥目丨刀係、、工由滾輪口而暴 抽氣。 抽孔糸統則經由抽風口對滾輪箱内部進行 庫存系統主二 =至備無塵環境。此 卡適於輸送奸進出庫存設備。s而 a E輪钱置與庫存系統中，切輪送震置例 6 1286116 15542twf.doc/g 如更包括f個靜1：刷’其分別配設於滾輪箱内的滚輪旁。 此外’卡11輪送裝置例如更包括一隧道。其中，滚輪 箱係配設㈣道之麵，域輪係經姐輪口而部分暴露 於随道内。此時，卡g輸送裝置例如更包括—風扇過滤單 元(fan filter unit)，其配設於隧道之隧道壁上。 另外’卡E輪送裝置例如更包括多個導引滾輪，其配 &於/袞輪箱上卡1^之_輸送路徑旁，用以導引卡匡沿輸送 路徑前進。 t者’刚述之無塵環境的潔淨度可優於Class 100。 上所述’本發明之庫存系統及卡匣輸送裝置可應用 於潔π度要求極高的無鱗境巾，並藉此雜產品製造所 而的日寸=，以提升產品產量並降低產品成本。 /為讓本發明之上述和其他目的、特徵和優點能更明顯 易It下文特舉較佳實施例，並配合所附圖式，作詳細說 明如下。 【實施方式】 =1綠示為本發明第一實施例之卡匣輸送裝置的示意 回明參知、圖1，本實施例之卡匣輸送裝置1〇〇主要適用 =在—無塵環境中輸送多個卡匣(未繪示），而在圖1中僅 ‘丁輸送裝置100的一部分，其實際長度可視需要增 式f绝些卡匣例如適用於承載平面顯示器所需之玻璃基板 tut物Γ。此卡匣輸送裝置⑽主要係由至少一個滾輪 .^夕個滾輪12〇(圖1中僅繪示部分滾輪12〇)以及一 由氣系統130所構成。其中，滚輪箱110具有多個滾輪口 7 1286116 15542twf.doc/g 與至少—抽風σ 114’在此係以多個抽風口 n4為例。 ==係配設於滚輪箱⑽内，且這些滾輪i2G只有用 於ϊ ^之接觸面的部分係經由滚輪口 112而暴露於滾 夕。具體而言，滾輪箱110之滾輪口 112係藉由 2二致封閉。同時’由於滾輪i2G用於接觸卡1^之 滾輪箱UG之表面，因此奸在藉由滾輪120 並不會與滾輪 UG產生摩擦。另外，抽氣 • ί 貝1J疋經由抽風口 110而對滾輪箱110内部進行抽 進杆’ #姐藉由卡_送裝置觸之滾輪120 滾輪12G與卡E之間可能會產生微粒。然而， 因之滾輪口112已被滾輪12()所大致封閉， 由就會被純系統13G難生的氣流經 广部，最後_ 微二例之卡£輸送裝置100在運作時所產生之 物料或外界環境的可能性，因此本實施 的無靡^f ⑻能夠使用於潔淨度優於class 100 塵i境ΐΎμ甚至可以使用於潔淨度優於Class 10的無 生^成本。α可大巾自減少因設置特殊防雜送裝置而產 面示^ θ =為本發明另—實施例之卡Ε輸送裝置的剖 二、％、圖’圖2B繪示為圖2A之卡£輸送 相與一個抽氣系統之立體示意圖，而圖2C緣示中為圖2= 8 1286116 . 15542twf.d〇c/g 卡&輸送裝置中部分構件與卡匣的側面示意圖。 請參照圖2A，本實施例之卡匣輸送裝置200與圖1 之卡匣輸送裝置1〇〇相似，主要係由滾輪箱21〇、滾輪22〇 以及抽氣系統230所構成。其中，滾輪箱210之數量係以 兩個為例。請參照圖2B，在此僅繪示一個滚輪箱21〇與一 個抽氣系統230,每個滾輪箱210同樣具有多個滾輪口 212 與至少一個抽風口 214，而抽氣系統23Θ係連通至抽風口 | 214以對滾輪箱21〇内部進行抽氣。 請再參照圖2A，滾輪220係配設於滾輪箱210内， 且這些滾輪220只有用於接觸卡匣5〇之接觸面的部分係經 由滾輪口 212而暴露於滚輪箱210外。此外，每個滾輪22〇 例如與一個傳動齒輪222連動，而各個傳動齒輪222例如 與一傳動馬達(未繪示)連動，以藉由傳動馬達帶動滾輪22〇 進行轉動。當然，滾輪220之驅動方式並不侷限於傳動馬 達與傳動齒輪222之配合，亦可採用其他適當方式驅動滾 _ 輪 220。 再者，睛參照圖2A與圖2C，卡匣輸送裝置2〇〇還可 冒设多個靜電刷240於滾輪箱210内的滾輪220旁。其中， 卡匣50之移動方向例如是圖2C中所繪示之移動方向D。 如，=來，當滾輪220與卡匣50產生微粒後，微粒就會被 抽氣系統130所產生的氣流帶往滾輪箱11〇内部，而部分 附著於滾輪220表面上的微粒在重新被滚輪22〇帶出滾輪 箱210 f之前，即可藉由靜電刷240之作用而由滚輪220 表面脫落，以避免微粒重新被帶出滾輪箱21〇外而造成卡 9 1286116 15542twf.doc/g 匣50内之物料或外界環境的污染。 紅幻另1卜Γ再參照圖2A’卡11輸送裝置200例如更包 括夕個導引滚輪270，其配設於滾輪箱21() ，徑I旁。導引滾輪μ之作用在導引卡 ，徑P河進，以避免卡E 50脫離輪送路徑p。同時，由於 ¥引滾輪270與卡E5G之間主要是滾動而 也 可減少微粒的產生。 也1286116 . 15542twf.doc/g There is often a lot of particles between the roller and the card! f due to friction. These particles are likely to adhere to the glass substrate and cause pollution, or the entire tree is not stored in the room, resulting in the entire dust-free The cleanliness of the room could not meet the requirements. Therefore, it is only possible to use a roller as a conveying device in a clean room with a cleanliness requirement lower than class cerebral palsy, and in a clean room where the cleanliness must be superior to Class 1 则, only other special ones can be used. Dust-proof conveying device. This will increase the cost of setting up the equipment. [Summary of the Invention] It is used in the provision of a card-sending device, which is suitable for dust-free ί Γ — — 目的 目的 目的 目的 目的 目的 目的 目的 目的 目的 目的 目的 目的 目的 目的 目的 目的 目的 目的 目的 目的 目的 目的 目的 目的 目的 目的 目的 目的 目的 目的— Transport multiple card makers. The card player conveyor is mainly composed of at least two rollers and an air extraction system. It: two, less - exhaust π, and the roller is equipped with a roller only for contact with the card E and some are exposed outside the roller box. The twitching system is a knives system, and the work is ventilated by the roller. The pumping system then carries out the inventory system main 2 to the dust-free environment through the air outlet. This card is suitable for transporting in and out of inventory equipment. s and a E-turn money and inventory system, the cutting wheel shocks the case 6 1286116 15542twf.doc / g If more includes f static 1: brush ‘is placed next to the roller inside the roller box. Further, the 'card 11 wheel transfer device, for example, further includes a tunnel. Among them, the roller box is equipped with the surface of the (four) road, and the domain wheel is partially exposed to the track by the sister wheel. At this time, the card g conveying device further includes, for example, a fan filter unit, which is disposed on the tunnel wall of the tunnel. Further, the 'card E-wheeling device, for example, further includes a plurality of guide rollers, which are disposed adjacent to the transport path of the card on the/turn wheel box for guiding the cassette to advance along the transport path. The cleanliness of the dust-free environment just described is better than Class 100. The above-mentioned inventory system and cassette conveying device can be applied to a scale-free towel with extremely high π degree requirements, and the date of manufacture of the miscellaneous product is used to increase product yield and reduce product cost. . The above and other objects, features, and advantages of the present invention will be apparent from the description of the appended claims. [Embodiment] =1 Green is a schematic representation of the cassette transport device according to the first embodiment of the present invention, and FIG. 1. The cassette transport device 1 of the present embodiment is mainly applicable in a dust-free environment. A plurality of cassettes (not shown) are transported, and in FIG. 1, only a part of the "single-conveying device 100", the actual length of which can be increased by a certain amount, such as a glass substrate tut required for carrying a flat-panel display. Hey. The cassette conveying device (10) is mainly composed of at least one roller, a roller 12 (only a partial roller 12 is shown in Fig. 1), and a gas system 130. The roller box 110 has a plurality of roller ports 7 1286116 15542twf.doc/g and at least - the exhaust σ 114' is exemplified by a plurality of air outlets n4. The == is disposed in the roller box (10), and the portions of the roller i2G that are only used for the contact surface of the ϊ^ are exposed to the rim through the roller port 112. Specifically, the roller port 112 of the roller box 110 is closed by two. At the same time, since the roller i2G is used to contact the surface of the roller box UG of the card 1^, the roller 120 does not rub against the roller UG. In addition, the air pumping 1 疋 进行 进行 进行 疋 疋 疋 疋 疋 疋 疋 ’ ’ ’ ’ ’ ’ ’ ’ ’ ’ ’ ’ ’ ’ ’ ’ ’ ’ ’ ’ ’ ’ ’ ’ ’ ’ ’ ’ ’ ’ ’ ’ ’ ’ ’ ’ However, since the roller port 112 has been substantially closed by the roller 12 (), the airflow which is difficult to be generated by the pure system 13G passes through the wide section, and finally the material generated during the operation of the card transmission device 100 of the second example Or the possibility of the external environment, so the flawless ^f (8) of this implementation can be used for the cleanliness better than the class 100 dust ΐΎμ can even be used for the cleanliness of the Class 10. The α can be reduced by the setting of the special anti-missing device. The θ = θ = the second embodiment of the card-transporting device of the present invention, the %, the figure is shown in Figure 2B as the card of Figure 2A. A schematic view of the transport phase and a pumping system, and Figure 2C shows the side view of Figure 2 = 8 1286116. 15542twf.d〇c/g Card & Referring to FIG. 2A, the cassette conveying device 200 of the present embodiment is similar to the cassette conveying device 1 of FIG. 1, and is mainly composed of a roller box 21, a roller 22, and an air extraction system 230. The number of the roller boxes 210 is exemplified by two. Referring to FIG. 2B, only one roller box 21〇 and one air extraction system 230 are shown. Each roller box 210 also has a plurality of roller ports 212 and at least one air outlet 214, and the air extraction system 23 is connected to the air exhaust system. Port | 214 to evacuate the inside of the roller box 21 。. Referring again to FIG. 2A, the rollers 220 are disposed in the roller box 210, and only the portions of the rollers 220 for contacting the contact faces of the cassettes are exposed to the outside of the roller box 210 via the roller ports 212. In addition, each of the rollers 22, for example, is coupled to a transmission gear 222, and each of the transmission gears 222 is coupled to a drive motor (not shown) for rotation by the drive motor. Of course, the driving mode of the roller 220 is not limited to the cooperation of the transmission motor and the transmission gear 222, and the roller _ wheel 220 may be driven by other suitable means. Further, referring to Figs. 2A and 2C, the cassette conveying device 2 can also be provided with a plurality of electrostatic brushes 240 beside the rollers 220 in the roller box 210. The moving direction of the cassette 50 is, for example, the moving direction D illustrated in FIG. 2C. For example, if the roller 220 and the cassette 50 generate particles, the particles are carried by the airflow generated by the pumping system 130 to the inside of the roller box 11〇, and the particles partially attached to the surface of the roller 220 are re-rolled by the roller. Before the roller box 210 f is taken out, the surface of the roller 220 can be detached by the action of the electrostatic brush 240 to prevent the particles from being taken out of the roller box 21 and the card 9 9286116 15542twf.doc/g 匣 50 Contamination of materials or external environment. Referring to Fig. 2A', the card 11 transporting device 200, for example, further includes a guide roller 270 disposed adjacent to the roller box 21(). The guide roller μ acts on the guide card, and the path P flows in, to prevent the card E 50 from coming off the transfer path p. At the same time, the generation of particles can be reduced since the roller 270 and the card E5G are mainly rolled. and also
此外，為更徹底阻絕微粒污染外界環境的機會， 輸送裝置200例如更配設有一隨道25()。其中，滾輪箱21〇 係配設於隧道250之底部，且滾輪22〇係經由滾輪口 212 而部分暴露於隧道250内，卡匣50亦於隧道250内進行輸 送。如此一來，由於整個卡匣輸送裝置2〇〇除了隧道 的進出口會與外界連通以外，其他部分實質上已與外界阻 隔而成封閉空間，因此將可大幅降低微粒污染外界環境的 機會。 再者’卡E輸送裝置200還可更配設一風扇過濾單元 260於隧道250之隧道壁上。風扇過濾單元26〇之作用係 於隧道250内產生由上面或侧邊往下方的氣流。藉由風扇 過濾單元260之作用，在滾輪220與卡匣50之接觸部分所 產生的微粒將不易揚起，也就降低了微粒污染卡匣5〇内例 如玻璃基板或其他物料的機會。 圖3繪示為本發明一實施例之庫存系統的示意圖。請 參照圖3，本實施例之庫存系統300係適用於一無塵環境 中，而此無塵環境之潔淨度可達Class 1〇〇或更佳的程度。 10 1286116 15542twf.doc/g 此庫存系統300主要係由丨 卡匡輸送裝置32(^ =二存設備則以及至少― 多個卡匣(未^ ί 庫存贱31G適於存放 出庫存設ί:)同:卡=裝，適於輸送奸進 示之卡_裝請、圖2A=置3^所^In addition, in order to more completely block the opportunity for the particles to pollute the external environment, the conveying device 200 is further provided with a track 25 (). The roller box 21 is disposed at the bottom of the tunnel 250, and the roller 22 is partially exposed to the tunnel 250 via the roller port 212, and the cassette 50 is also transported in the tunnel 250. As a result, since the entire cassette transporting device 2 is connected to the outside of the tunnel, the other portions are substantially blocked from the outside to form a closed space, so that the chance of particles contaminating the external environment can be greatly reduced. Furthermore, the card E transport device 200 can be further provided with a fan filter unit 260 on the tunnel wall of the tunnel 250. The fan filter unit 26 is configured to create an air flow in the tunnel 250 from above or from the side. By the action of the fan filter unit 260, the particles generated at the contact portion of the roller 220 with the cassette 50 are less likely to rise, which reduces the chance of particulate contamination of the cassette, such as a glass substrate or other material. 3 is a schematic diagram of an inventory system in accordance with an embodiment of the present invention. Referring to Fig. 3, the inventory system 300 of the present embodiment is suitable for use in a dust-free environment, and the cleanliness of the dust-free environment can be up to Class 1 or better. 10 1286116 15542twf.doc/g This inventory system 300 is mainly composed of the 丨 card conveyor 32 (^ = two storage devices and at least ― multiple cards 未 (not ^ ί 贱 31G is suitable for storing inventory settings ί:) Same as: card = loaded, suitable for transporting the traits into the card _ installation, Figure 2A = set 3 ^ ^
或其他本糾崎賴之卡2〇〇 輸送裝置320之細部介紹。 展置在此即令略卡H 寻注意的是，在本發明之庫存系統及卡_送 量以及芝=需使用一或多個抽氣系統，同時滾輪箱之數 Ϊ卡3 =置方式都可視需要做更動。另外，本發明 送=^種=不偈限於在各庫存設備間進行切輸 進行卡Ε輸送。備之間或庫存設備與製程設備之間 由於統及卡_裝置中， 々m/ 的接觸面會露出於滾輪箱外，且滾於 =:也以由抽氣系統進行抽氣’因此在滾輪 : ==生的微粒幾乎都會落入滾輪箱内，而術4 的物料以及外界的環境。換言之，本發日== 糸、、先及卡g輸送裝置不僅於 要求優於ciass_、；，輸礼，且可制於潔淨度 造所需的咖，以㈣境中’並藉此縮短產品製 成本。f 1叫升產品量，_降低產品的生產 限定Γίί發Γ已啸佳實闕揭露如上’然其並非用以 a，壬何熟習此技藝者，在不脫離本發明之精神 11 1286116 15542twf.doc/g 和範圍内，當可作些許之更動與潤飾，因此本發明之保護 範圍當視後附之申請專利範圍所界定者為準。 【圖式簡單說明】 圖1繪示為本發明第一實施例之卡匣輸送裝置的示意 圖。 圖2A繪示為本發明另一實施例之卡匣輸送裝置的剖 面示意圖。 參 圖2B繪示為圖2A之卡匣輸送裝置中一個滾輪箱與一 個抽氣系統之立體示意圖。 ' 圖2C繪示為圖2A之卡匣輸送裝置中部分構件與卡匣 的側面示意圖。 圖3繪不為本發明-實施例之庫存系統的示意圖。 【主要元件符號說明】 50 :卡匣 100、200、320 :卡匣輪送裝置 110、210 :滾輪箱 • 112、212 :滾輪口 114、214 :抽風口 120、220 :滾輪 130、230 ··抽氣系統 222 :傳動齒輪 240 ··靜電刷 250 :隧道 260 :風扇過濾單元 12 1286116 15542twf.doc/g 270 :導引滾輪 300 :庫存系統 310 :庫存設備 D :移動方向 P:輸送路徑Or other details of the Confucius's card 2〇〇 conveying device 320. At this point, the card is to be noticed. In the inventory system of the present invention and the card_delivery amount and the shiji = one or more pumping systems are required, and the number of the wheel box 3 is set to be visible. Need to be changed. Further, the present invention is not limited to the case where the cutting is performed between the respective stock equipments. Between the equipment or between the equipment and the process equipment, the contact surface of the 々m/ will be exposed outside the roller box, and it will be pumped by the pumping system. : == Raw particles will almost fall into the wheel box, and the material of the 4 and the external environment. In other words, this day == 糸, first, and card g conveyors are not only better than ciass_,;, gift, and can be made in the cleanliness of the coffee, in the (four) environment and shorten the product Cost. f 1 is called the product quantity, _ reducing the production limit of the product Γ ί Γ Γ has been exposed as above, but it is not used for a, who is familiar with this skill, without departing from the spirit of the invention 11 1286116 15542twf.doc The scope of protection of the present invention is defined by the scope of the appended claims. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a schematic view showing a cassette conveying device according to a first embodiment of the present invention. 2A is a cross-sectional view showing a cassette conveying device according to another embodiment of the present invention. 2B is a perspective view of a roller box and an air extraction system in the cassette conveying device of FIG. 2A. Figure 2C is a side elevational view of a portion of the components of the cassette transport device of Figure 2A and the cassette. Figure 3 depicts a schematic diagram of an inventory system that is not an embodiment of the invention. [Description of main component symbols] 50: cassettes 100, 200, 320: cassette transfer devices 110, 210: roller boxes • 112, 212: roller ports 114, 214: air outlets 120, 220: rollers 130, 230 ·· Exhaust system 222: transmission gear 240 · electrostatic brush 250 : tunnel 260 : fan filter unit 12 1286116 15542twf.doc / g 270 : guide roller 300 : inventory system 310 : inventory equipment D : moving direction P : transport path