JP4237171B2 - 磁気抵抗効果素子および薄膜磁気ヘッド - Google Patents
磁気抵抗効果素子および薄膜磁気ヘッド Download PDFInfo
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- JP4237171B2 JP4237171B2 JP2005266968A JP2005266968A JP4237171B2 JP 4237171 B2 JP4237171 B2 JP 4237171B2 JP 2005266968 A JP2005266968 A JP 2005266968A JP 2005266968 A JP2005266968 A JP 2005266968A JP 4237171 B2 JP4237171 B2 JP 4237171B2
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- 230000005291 magnetic effect Effects 0.000 title claims description 62
- 239000010409 thin film Substances 0.000 title claims description 46
- 230000000694 effects Effects 0.000 claims description 52
- 239000000203 mixture Substances 0.000 claims description 46
- 229910001291 heusler alloy Inorganic materials 0.000 claims description 35
- 230000005415 magnetization Effects 0.000 claims description 19
- 229910052723 transition metal Inorganic materials 0.000 claims description 11
- 229910052719 titanium Inorganic materials 0.000 claims description 10
- 150000003624 transition metals Chemical class 0.000 claims description 10
- 229910052720 vanadium Inorganic materials 0.000 claims description 10
- 229910000510 noble metal Inorganic materials 0.000 claims description 7
- 125000006850 spacer group Chemical group 0.000 claims description 7
- 229910052802 copper Inorganic materials 0.000 claims description 5
- 229910052748 manganese Inorganic materials 0.000 claims description 5
- 229910052727 yttrium Inorganic materials 0.000 claims description 3
- 229910021478 group 5 element Inorganic materials 0.000 claims description 2
- 239000010410 layer Substances 0.000 description 119
- 230000008859 change Effects 0.000 description 71
- 229910017034 MnSn Inorganic materials 0.000 description 57
- 239000010408 film Substances 0.000 description 55
- 230000005294 ferromagnetic effect Effects 0.000 description 38
- 230000000052 comparative effect Effects 0.000 description 14
- 230000005290 antiferromagnetic effect Effects 0.000 description 12
- 239000000463 material Substances 0.000 description 10
- 229910052763 palladium Inorganic materials 0.000 description 10
- 230000001965 increasing effect Effects 0.000 description 9
- 229910052751 metal Inorganic materials 0.000 description 9
- 239000002184 metal Substances 0.000 description 9
- 229910001030 Iron–nickel alloy Inorganic materials 0.000 description 8
- 238000000034 method Methods 0.000 description 8
- 239000000758 substrate Substances 0.000 description 8
- 229910017028 MnSi Inorganic materials 0.000 description 6
- 238000002474 experimental method Methods 0.000 description 6
- 229910052707 ruthenium Inorganic materials 0.000 description 6
- 229910052741 iridium Inorganic materials 0.000 description 5
- 229910052703 rhodium Inorganic materials 0.000 description 5
- 229910003321 CoFe Inorganic materials 0.000 description 4
- 229910045601 alloy Inorganic materials 0.000 description 4
- 239000000956 alloy Substances 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 4
- 238000000429 assembly Methods 0.000 description 3
- 230000000712 assembly Effects 0.000 description 3
- 230000007423 decrease Effects 0.000 description 3
- 229910019236 CoFeB Inorganic materials 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 2
- 230000008901 benefit Effects 0.000 description 2
- 229910052804 chromium Inorganic materials 0.000 description 2
- 239000002131 composite material Substances 0.000 description 2
- 239000002772 conduction electron Substances 0.000 description 2
- 239000013078 crystal Substances 0.000 description 2
- 238000005520 cutting process Methods 0.000 description 2
- 230000001419 dependent effect Effects 0.000 description 2
- 230000005307 ferromagnetism Effects 0.000 description 2
- 230000017525 heat dissipation Effects 0.000 description 2
- 230000001939 inductive effect Effects 0.000 description 2
- 229910052742 iron Inorganic materials 0.000 description 2
- 239000000696 magnetic material Substances 0.000 description 2
- 229910052759 nickel Inorganic materials 0.000 description 2
- 229910052697 platinum Inorganic materials 0.000 description 2
- 238000004544 sputter deposition Methods 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 239000000725 suspension Substances 0.000 description 2
- 229910016583 MnAl Inorganic materials 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- VNNRSPGTAMTISX-UHFFFAOYSA-N chromium nickel Chemical compound [Cr].[Ni] VNNRSPGTAMTISX-UHFFFAOYSA-N 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 230000009977 dual effect Effects 0.000 description 1
- 229910052733 gallium Inorganic materials 0.000 description 1
- 229910052732 germanium Inorganic materials 0.000 description 1
- 229910052735 hafnium Inorganic materials 0.000 description 1
- 230000003993 interaction Effects 0.000 description 1
- 229910000765 intermetallic Inorganic materials 0.000 description 1
- 238000000608 laser ablation Methods 0.000 description 1
- 230000005389 magnetism Effects 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 229910001120 nichrome Inorganic materials 0.000 description 1
- 229910052758 niobium Inorganic materials 0.000 description 1
- 230000000737 periodic effect Effects 0.000 description 1
- 238000000206 photolithography Methods 0.000 description 1
- 238000007747 plating Methods 0.000 description 1
- 230000010287 polarization Effects 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 230000001681 protective effect Effects 0.000 description 1
- 239000011241 protective layer Substances 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000002356 single layer Substances 0.000 description 1
- 238000000992 sputter etching Methods 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 229910052715 tantalum Inorganic materials 0.000 description 1
- 229910052718 tin Inorganic materials 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
Images
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R33/00—Arrangements or instruments for measuring magnetic variables
- G01R33/02—Measuring direction or magnitude of magnetic fields or magnetic flux
- G01R33/06—Measuring direction or magnitude of magnetic fields or magnetic flux using galvano-magnetic devices
- G01R33/09—Magnetoresistive devices
- G01R33/093—Magnetoresistive devices using multilayer structures, e.g. giant magnetoresistance sensors
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y10/00—Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y25/00—Nanomagnetism, e.g. magnetoimpedance, anisotropic magnetoresistance, giant magnetoresistance or tunneling magnetoresistance
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/127—Structure or manufacture of heads, e.g. inductive
- G11B5/33—Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only
- G11B5/39—Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only using magneto-resistive devices or effects
- G11B5/3903—Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only using magneto-resistive devices or effects using magnetic thin film layers or their effects, the films being part of integrated structures
- G11B5/3906—Details related to the use of magnetic thin film layers or to their effects
- G11B5/3929—Disposition of magnetic thin films not used for directly coupling magnetic flux from the track to the MR film or for shielding
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
- H01F10/00—Thin magnetic films, e.g. of one-domain structure
- H01F10/08—Thin magnetic films, e.g. of one-domain structure characterised by magnetic layers
- H01F10/10—Thin magnetic films, e.g. of one-domain structure characterised by magnetic layers characterised by the composition
- H01F10/18—Thin magnetic films, e.g. of one-domain structure characterised by magnetic layers characterised by the composition being compounds
- H01F10/193—Magnetic semiconductor compounds
- H01F10/1936—Half-metallic, e.g. epitaxial CrO2 or NiMnSb films
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
- H01F10/00—Thin magnetic films, e.g. of one-domain structure
- H01F10/32—Spin-exchange-coupled multilayers, e.g. nanostructured superlattices
- H01F10/324—Exchange coupling of magnetic film pairs via a very thin non-magnetic spacer, e.g. by exchange with conduction electrons of the spacer
- H01F10/3268—Exchange coupling of magnetic film pairs via a very thin non-magnetic spacer, e.g. by exchange with conduction electrons of the spacer the exchange coupling being asymmetric, e.g. by use of additional pinning, by using antiferromagnetic or ferromagnetic coupling interface, i.e. so-called spin-valve [SV] structure, e.g. NiFe/Cu/NiFe/FeMn
- H01F10/3272—Exchange coupling of magnetic film pairs via a very thin non-magnetic spacer, e.g. by exchange with conduction electrons of the spacer the exchange coupling being asymmetric, e.g. by use of additional pinning, by using antiferromagnetic or ferromagnetic coupling interface, i.e. so-called spin-valve [SV] structure, e.g. NiFe/Cu/NiFe/FeMn by use of anti-parallel coupled [APC] ferromagnetic layers, e.g. artificial ferrimagnets [AFI], artificial [AAF] or synthetic [SAF] anti-ferromagnets
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/127—Structure or manufacture of heads, e.g. inductive
- G11B5/33—Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only
- G11B5/39—Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only using magneto-resistive devices or effects
- G11B2005/3996—Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only using magneto-resistive devices or effects large or giant magnetoresistive effects [GMR], e.g. as generated in spin-valve [SV] devices
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
- H01F1/00—Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties
- H01F1/01—Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties of inorganic materials
- H01F1/40—Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties of inorganic materials of magnetic semiconductor materials, e.g. CdCr2S4
- H01F1/408—Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties of inorganic materials of magnetic semiconductor materials, e.g. CdCr2S4 half-metallic, i.e. having only one electronic spin direction at the Fermi level, e.g. CrO2, Heusler alloys
Description
磁化方向が固定されたピンド層と、
磁化方向が外部磁界に応じて変化するフリー層と、
前記ピンド層と前記フリー層との間に設けられた非磁性のスペーサ層と、
を有し、
前記ピンド層および前記フリー層の少なくとも一方は、組成式がX2YZ(ただし、XはCuを含む貴金属元素であり、YはMn、VまたはTi族の遷移金属であり、ZはIII族からV族のいずれかの元素である)で表わされるフルホイスラー合金からなる層を含み、
前記組成Xの一部はCoに置換され、前記組成XにおけるCoの原子組成比は0.5以上0.85以下とする構成である。
本実施形態の磁気抵抗効果素子は、組成式がX2YZ(ただし、XはCuを含む貴金属元素であり、YはMn、VまたはTi族の遷移金属であり、ZはIII族からV族のいずれかの元素である)で表わされるフルホイスラー合金を磁性膜に有する構成である。以下では、磁気抵抗効果素子をCPP−GMR素子の場合で説明する。また、ここでは、ホイスラー合金薄膜材料として、組成XをPdとし、組成Xの一部をCoに置換し、組成YをMnとし、組成ZをSnとした(CoXPd1-X)2MnSnを用いる場合で説明する。
本実施形態は、実施形態1の薄膜磁気ヘッドが作製されたウエハ、薄膜磁気ヘッドが設けられたスライダを有するヘッドジンバルアセンブリ、そのヘッドジンバルアセンブリが設けられたヘッドアームアセンブリ、そのヘッドアームアセンブリが設けられたヘッドスタックアセンブリ、および薄膜磁気ヘッドが設けられたスライダを有するハードディスク装置である。以下に各構成について説明する。
21 非磁性層
25 強磁性層
Claims (11)
- 磁化方向が固定されたピンド層と、
磁化方向が外部磁界に応じて変化するフリー層と、
前記ピンド層と前記フリー層との間に設けられた非磁性のスペーサ層と、
を有し、
前記ピンド層および前記フリー層の少なくとも一方は、組成式がX2YZ(ただし、XはCuを含む貴金属元素であり、YはMn、VまたはTi族の遷移金属であり、ZはIII族からV族のいずれかの元素である)で表わされるフルホイスラー合金からなる層を含み、
前記組成Xの一部はCoに置換され、前記組成XにおけるCoの原子組成比は0.5以上0.85以下である磁気抵抗効果素子。 - 前記Coの原子組成比は0.68以上0.85以下である、請求項1記載の磁気抵抗効果素子。
- 磁化方向が固定されたピンド層と、
磁化方向が外部磁界に応じて変化するフリー層と、
前記ピンド層と前記フリー層との間に設けられた非磁性のスペーサ層と、
を有し、
前記ピンド層および前記フリー層の少なくとも一方は、組成式が(CoxPd1−x)2YZ(ただし、YはMn、VまたはTi族の遷移金属であり、ZはIII族からV族のいずれかの元素である)で表わされるフルホイスラー合金からなる層を含み、
0.5≦x≦0.89である磁気抵抗効果素子。 - 0.65≦x≦0.85である、請求項3記載の磁気抵抗効果素子。
- 磁化方向が固定されたピンド層と、
磁化方向が外部磁界に応じて変化するフリー層と、
前記ピンド層と前記フリー層との間に設けられた非磁性のスペーサ層と、
を有し、
前記ピンド層および前記フリー層の少なくとも一方は、組成式が(CoxRh1−x)2YZ(ただし、YはMn、VまたはTi族の遷移金属であり、ZはIII族からV族のいずれかの元素である)で表わされるフルホイスラー合金からなる層を含み、
0.5≦x≦0.9である磁気抵抗効果素子。 - 0.68≦x≦0.88である、請求項5記載の磁気抵抗効果素子。
- 磁化方向が固定されたピンド層と、
磁化方向が外部磁界に応じて変化するフリー層と、
前記ピンド層と前記フリー層との間に設けられた非磁性のスペーサ層と、
を有し、
前記ピンド層および前記フリー層の少なくとも一方は、組成式が(CoxRu1−x)2YZ(ただし、YはMn、VまたはTi族の遷移金属であり、ZはIII族からV族のいずれかの元素である)で表わされるフルホイスラー合金からなる層を含み、
0.5≦x≦0.85である磁気抵抗効果素子。 - 0.65≦x≦0.85である、請求項7記載の磁気抵抗効果素子。
- 磁化方向が固定されたピンド層と、
磁化方向が外部磁界に応じて変化するフリー層と、
前記ピンド層と前記フリー層との間に設けられた非磁性のスペーサ層と、
を有し、
前記ピンド層および前記フリー層の少なくとも一方は、組成式が(CoxIr1−x)2YZ(ただし、YはMn、VまたはTi族の遷移金属であり、ZはIII族からV族のいずれかの元素である)で表わされるフルホイスラー合金からなる層を含み、
0.5≦x≦0.9である磁気抵抗効果素子。 - 0.66≦x≦0.86である、請求項9記載の磁気抵抗効果素子。
- 請求項1から10のいずれか1項記載の磁気抵抗効果素子を有する薄膜磁気ヘッド。
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JP2005266968A JP4237171B2 (ja) | 2005-09-14 | 2005-09-14 | 磁気抵抗効果素子および薄膜磁気ヘッド |
US11/519,854 US7535682B2 (en) | 2005-09-14 | 2006-09-13 | Magneto-resistance element and thin film magnetic head with improved heat reliability |
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JP2007287863A (ja) * | 2006-04-14 | 2007-11-01 | Tdk Corp | 磁気抵抗効果素子およびその製造方法、ならびに磁気抵抗効果素子集合体、薄膜磁気ヘッド、ヘッドジンバルアセンブリ、ヘッドアームアセンブリおよび磁気ディスク装置 |
JP2009164182A (ja) | 2007-12-28 | 2009-07-23 | Hitachi Global Storage Technologies Netherlands Bv | 磁気抵抗効果素子、磁気ヘッド及び磁気記録再生装置 |
JP4780117B2 (ja) * | 2008-01-30 | 2011-09-28 | 日立金属株式会社 | 角度センサ、その製造方法及びそれを用いた角度検知装置 |
JP2009260248A (ja) * | 2008-03-28 | 2009-11-05 | Fujitsu Ltd | 磁気抵抗効果素子および積層構造体 |
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