JP4942445B2 - 磁気抵抗効果素子、薄膜磁気ヘッド、ヘッドジンバルアセンブリ、ヘッドアームアセンブリおよび磁気ディスク装置 - Google Patents
磁気抵抗効果素子、薄膜磁気ヘッド、ヘッドジンバルアセンブリ、ヘッドアームアセンブリおよび磁気ディスク装置 Download PDFInfo
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- JP4942445B2 JP4942445B2 JP2006275972A JP2006275972A JP4942445B2 JP 4942445 B2 JP4942445 B2 JP 4942445B2 JP 2006275972 A JP2006275972 A JP 2006275972A JP 2006275972 A JP2006275972 A JP 2006275972A JP 4942445 B2 JP4942445 B2 JP 4942445B2
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Classifications
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- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/48—Disposition or mounting of heads or head supports relative to record carriers ; arrangements of heads, e.g. for scanning the record carrier to increase the relative speed
- G11B5/58—Disposition or mounting of heads or head supports relative to record carriers ; arrangements of heads, e.g. for scanning the record carrier to increase the relative speed with provision for moving the head for the purpose of maintaining alignment of the head relative to the record carrier during transducing operation, e.g. to compensate for surface irregularities of the latter or for track following
- G11B5/596—Disposition or mounting of heads or head supports relative to record carriers ; arrangements of heads, e.g. for scanning the record carrier to increase the relative speed with provision for moving the head for the purpose of maintaining alignment of the head relative to the record carrier during transducing operation, e.g. to compensate for surface irregularities of the latter or for track following for track following on disks
- G11B5/59683—Disposition or mounting of heads or head supports relative to record carriers ; arrangements of heads, e.g. for scanning the record carrier to increase the relative speed with provision for moving the head for the purpose of maintaining alignment of the head relative to the record carrier during transducing operation, e.g. to compensate for surface irregularities of the latter or for track following for track following on disks for magnetoresistive heads
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y10/00—Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y25/00—Nanomagnetism, e.g. magnetoimpedance, anisotropic magnetoresistance, giant magnetoresistance or tunneling magnetoresistance
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R33/00—Arrangements or instruments for measuring magnetic variables
- G01R33/02—Measuring direction or magnitude of magnetic fields or magnetic flux
- G01R33/06—Measuring direction or magnitude of magnetic fields or magnetic flux using galvano-magnetic devices
- G01R33/09—Magnetoresistive devices
- G01R33/093—Magnetoresistive devices using multilayer structures, e.g. giant magnetoresistance sensors
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/127—Structure or manufacture of heads, e.g. inductive
- G11B5/33—Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only
- G11B5/39—Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only using magneto-resistive devices or effects
- G11B5/3903—Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only using magneto-resistive devices or effects using magnetic thin film layers or their effects, the films being part of integrated structures
- G11B5/3906—Details related to the use of magnetic thin film layers or to their effects
- G11B5/3909—Arrangements using a magnetic tunnel junction
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/127—Structure or manufacture of heads, e.g. inductive
- G11B5/33—Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only
- G11B5/39—Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only using magneto-resistive devices or effects
- G11B5/3903—Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only using magneto-resistive devices or effects using magnetic thin film layers or their effects, the films being part of integrated structures
- G11B5/3906—Details related to the use of magnetic thin film layers or to their effects
- G11B5/3929—Disposition of magnetic thin films not used for directly coupling magnetic flux from the track to the MR film or for shielding
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/127—Structure or manufacture of heads, e.g. inductive
- G11B5/33—Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only
- G11B5/39—Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only using magneto-resistive devices or effects
- G11B2005/3996—Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only using magneto-resistive devices or effects large or giant magnetoresistive effects [GMR], e.g. as generated in spin-valve [SV] devices
Description
Claims (9)
- 外部磁界に応じて磁化の方向が変化する自由層と、
磁化の方向が固定された固定層と、
前記自由層と固定層との間に配置されたスペーサ層とを備え、
磁気的信号検出用の電流が、前記各層の面と交差する方向に流される磁気抵抗効果素子であって、
前記スペーサ層は、それぞれCuによって形成された第1および第2の非磁性金属層と、ZnOを含む材料によって形成され、前記第1の非磁性金属層と第2の非磁性金属層との間に配置された半導体層とを有し、
前記半導体層は、スパッタ法によって形成されたものであり、
前記スペーサ層は、スペーサ層を構成する各層となる膜の形成後に210〜250℃の範囲内の温度で熱処理されて形成されたものであり、
前記半導体層の厚みは、1.2〜2nmの範囲内であり、
磁気抵抗効果素子の面積抵抗が、0.12〜0.3Ω・μm2の範囲内であり、
前記スペーサ層の導電率が、133〜344S/cmの範囲内であることを特徴とする磁気抵抗効果素子。 - 前記面積抵抗は、0.2〜0.3Ω・μm2の範囲内であることを特徴とする請求項1記載の磁気抵抗効果素子。
- 前記半導体層の厚みは、1.6〜2nmの範囲内であることを特徴とする請求項1記載の磁気抵抗効果素子。
- 前記第1および第2の非磁性金属層の厚みは、それぞれ、0.3〜2nmの範囲内であることを特徴とする請求項1ないし3のいずれかに記載の磁気抵抗効果素子。
- 記録媒体に対向する媒体対向面と、
前記記録媒体からの信号磁界を検出するために前記媒体対向面の近傍に配置された請求項1ないし4のいずれかに記載の磁気抵抗効果素子と、
前記磁気的信号検出用の電流を前記磁気抵抗効果素子に流すための一対の電極と
を備えたことを特徴とする薄膜磁気ヘッド。 - 請求項5記載の薄膜磁気ヘッドを含み、記録媒体に対向するように配置されるスライダと、
前記スライダを弾性的に支持するサスペンションと
を備えたことを特徴とするヘッドジンバルアセンブリ。 - 請求項5記載の薄膜磁気ヘッドを含み、記録媒体に対向するように配置されるスライダと、
前記スライダを弾性的に支持するサスペンションと、
前記スライダを記録媒体のトラック横断方向に移動させるためのアームと
を備え、前記サスペンションが前記アームに取り付けられていることを特徴とするヘッドアームアセンブリ。 - 請求項5記載の薄膜磁気ヘッドを含み、回転駆動される記録媒体に対向するように配置されるスライダと、
前記スライダを支持すると共に前記記録媒体に対して位置決めする位置決め装置と
を備えたことを特徴とする磁気ディスク装置。 - 外部磁界に応じて磁化の方向が変化する自由層と、
磁化の方向が固定された固定層と、
前記自由層と固定層との間に配置されたスペーサ層とを備え、
前記スペーサ層は、それぞれCuによって形成された第1および第2の非磁性金属層と、ZnOを含む材料によって形成され、前記第1の非磁性金属層と第2の非磁性金属層との間に配置された半導体層とを有し、
前記半導体層の厚みは、1.2〜2nmの範囲内であり、
面積抵抗が、0.12〜0.3Ω・μm2の範囲内であり、
前記スペーサ層の導電率が、133〜344S/cmの範囲内であり、
磁気的信号検出用の電流が、前記各層の面と交差する方向に流される磁気抵抗効果素子の製造方法であって、
前記自由層、固定層、スペーサ層を形成する各工程を備え、
前記半導体層は、スパッタ法によって形成され、
前記スペーサ層は、スペーサ層を構成する各層となる膜の形成後に210〜250℃の範囲内の温度で熱処理されて形成されることを特徴とする磁気抵抗効果素子の製造方法。
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2006275972A JP4942445B2 (ja) | 2006-09-08 | 2006-10-10 | 磁気抵抗効果素子、薄膜磁気ヘッド、ヘッドジンバルアセンブリ、ヘッドアームアセンブリおよび磁気ディスク装置 |
US11/698,180 US7782575B2 (en) | 2006-09-08 | 2007-01-26 | Magnetoresistive element having free layer, pinned layer, and spacer layer disposed therebetween, the spacer layer including semiconductor layer |
Applications Claiming Priority (3)
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JP2006244678 | 2006-09-08 | ||
JP2006244678 | 2006-09-08 | ||
JP2006275972A JP4942445B2 (ja) | 2006-09-08 | 2006-10-10 | 磁気抵抗効果素子、薄膜磁気ヘッド、ヘッドジンバルアセンブリ、ヘッドアームアセンブリおよび磁気ディスク装置 |
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JP2008091842A JP2008091842A (ja) | 2008-04-17 |
JP4942445B2 true JP4942445B2 (ja) | 2012-05-30 |
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JP (1) | JP4942445B2 (ja) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US11328743B2 (en) | 2018-04-04 | 2022-05-10 | National Institute For Materials Science | Current-perpendicular-to-plane giant magnetoresistive element, precursor thereof, and manufacturing method thereof |
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JP2007299880A (ja) | 2006-04-28 | 2007-11-15 | Toshiba Corp | 磁気抵抗効果素子,および磁気抵抗効果素子の製造方法 |
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US7859798B2 (en) * | 2007-02-20 | 2010-12-28 | Tdk Corporation | Magnetic thin film having non-magnetic spacer layer that is provided with SnO2 layer |
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US8289663B2 (en) * | 2008-04-25 | 2012-10-16 | Headway Technologies, Inc. | Ultra low RA (resistance x area) sensors having a multilayer non-magnetic spacer between pinned and free layers |
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US8970995B2 (en) | 2009-03-10 | 2015-03-03 | Tdk Corporation | Magnetoresistance effect element having layer containing Zn at the interface between magnetic layer and non-magnetic intermediate layer |
JP2010271512A (ja) * | 2009-05-21 | 2010-12-02 | Tdk Corp | スピン注入型の空間光変調素子 |
JP2011002604A (ja) * | 2009-06-18 | 2011-01-06 | Tdk Corp | スピン注入型の空間光変調素子 |
US8331063B2 (en) | 2009-07-10 | 2012-12-11 | Tdk Corporation | Magnetoresistive effect element in CPP-type structure and magnetic disk device |
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-
2006
- 2006-10-10 JP JP2006275972A patent/JP4942445B2/ja not_active Expired - Fee Related
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2007
- 2007-01-26 US US11/698,180 patent/US7782575B2/en active Active
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US11328743B2 (en) | 2018-04-04 | 2022-05-10 | National Institute For Materials Science | Current-perpendicular-to-plane giant magnetoresistive element, precursor thereof, and manufacturing method thereof |
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US7782575B2 (en) | 2010-08-24 |
US20080062557A1 (en) | 2008-03-13 |
JP2008091842A (ja) | 2008-04-17 |
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