JP4233814B2 - 位置測定装置および位置測定装置の動作方法 - Google Patents

位置測定装置および位置測定装置の動作方法 Download PDF

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Publication number
JP4233814B2
JP4233814B2 JP2002177199A JP2002177199A JP4233814B2 JP 4233814 B2 JP4233814 B2 JP 4233814B2 JP 2002177199 A JP2002177199 A JP 2002177199A JP 2002177199 A JP2002177199 A JP 2002177199A JP 4233814 B2 JP4233814 B2 JP 4233814B2
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Japan
Prior art keywords
signal
scanning
incremental
track
detector
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Expired - Fee Related
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JP2002177199A
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Japanese (ja)
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JP2003042810A5 (https=
JP2003042810A (ja
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ウルリッヒ・ベンナー
ヴオルフガング・ホルツアプフエル
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Dr Johannes Heidenhain GmbH
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Dr Johannes Heidenhain GmbH
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
    • G01D5/244—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing characteristics of pulses or pulse trains; generating pulses or pulse trains
    • G01D5/245—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing characteristics of pulses or pulse trains; generating pulses or pulse trains using a variable number of pulses in a train
    • G01D5/2454—Encoders incorporating incremental and absolute signals
    • G01D5/2455—Encoders incorporating incremental and absolute signals with incremental and absolute tracks on the same encoder
    • G01D5/2457—Incremental encoders having reference marks

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optical Transform (AREA)
  • Vehicle Body Suspensions (AREA)
  • Body Structure For Vehicles (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
JP2002177199A 2001-06-27 2002-06-18 位置測定装置および位置測定装置の動作方法 Expired - Fee Related JP4233814B2 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE10130938.4 2001-06-27
DE10130938A DE10130938A1 (de) 2001-06-27 2001-06-27 Positionsmesseinrichtung und Verfahren zum Betrieb einer Positionsmesseinrichtung

Publications (3)

Publication Number Publication Date
JP2003042810A JP2003042810A (ja) 2003-02-13
JP2003042810A5 JP2003042810A5 (https=) 2005-08-25
JP4233814B2 true JP4233814B2 (ja) 2009-03-04

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ID=7689603

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JP2002177199A Expired - Fee Related JP4233814B2 (ja) 2001-06-27 2002-06-18 位置測定装置および位置測定装置の動作方法

Country Status (6)

Country Link
US (1) US6914235B2 (https=)
EP (1) EP1271107B1 (https=)
JP (1) JP4233814B2 (https=)
AT (1) ATE440266T1 (https=)
DE (2) DE10130938A1 (https=)
ES (1) ES2329878T3 (https=)

Families Citing this family (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB0413827D0 (en) 2004-06-21 2004-07-21 Renishaw Plc Scale reading apparatus
GB0428165D0 (en) * 2004-12-23 2005-01-26 Renishaw Plc Position measurement
DE102005015743B4 (de) * 2005-04-06 2018-08-23 Dr. Johannes Heidenhain Gmbh Abtasteinheit für eine Positionsmesseinrichtung zum optischen Abtasten einer Maßverkörperung und Positionsmesseinrichtung
JP4951885B2 (ja) * 2005-06-29 2012-06-13 ミツミ電機株式会社 エンコーダ装置
DE102006029650B4 (de) * 2006-06-28 2020-02-20 Dr. Johannes Heidenhain Gmbh Schaltungsanordung und Verfahren zur Kippfehlerermittlung an einer Positionsmesseinrichtung
US7943897B2 (en) * 2007-06-20 2011-05-17 Sharp Kabushiki Kaisha Optical encoder and electronic equipment
DE102007033009A1 (de) * 2007-07-12 2009-01-15 Dr. Johannes Heidenhain Gmbh Verfahren und Vorrichtung zur Übertragung von Signalen von einer Positionsmesseinrichtung zu einer Auswerteeinheit
DE102007056612A1 (de) * 2007-11-23 2009-05-28 Dr. Johannes Heidenhain Gmbh Optische Positionsmesseinrichtung
GB0819767D0 (en) * 2008-10-28 2008-12-03 Renishaw Plc Absolute encoder setup indication
JP4816988B1 (ja) * 2011-02-10 2011-11-16 株式会社安川電機 エンコーダ、光学モジュール及びサーボシステム
DE102011007459B4 (de) 2011-04-15 2023-05-11 Dr. Johannes Heidenhain Gmbh Optische Längenmesseinrichtung
DE102012212767A1 (de) * 2012-07-20 2014-01-23 Dr. Johannes Heidenhain Gmbh Positionsmesseinrichtung
ES2602579T3 (es) 2014-10-30 2017-02-21 Fagor, S. Coop. Dispositivo optoelectrónico y método asociado
CN106052724B (zh) * 2016-05-19 2019-01-25 深圳市越疆科技有限公司 一种机器人、旋转测量装置及方法
JP6953772B2 (ja) * 2017-04-13 2021-10-27 株式会社ニコン 誤差検出方法、誤差検出プログラム、誤差検出装置、エンコーダ装置の製造方法、エンコーダ装置、駆動装置、ステージ装置、及びロボット装置
US10859363B2 (en) 2017-09-27 2020-12-08 Stanley Black & Decker, Inc. Tape rule assembly with linear optical encoder for sensing human-readable graduations of length
JP7293660B2 (ja) * 2019-01-18 2023-06-20 株式会社ジェイテクト 回転角検出装置
JP7210103B2 (ja) * 2019-01-28 2023-01-23 株式会社ミツトヨ エンコーダの寿命検出装置

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1174145A (en) * 1967-08-04 1969-12-10 British Aircraft Corp Ltd Measuring Systems
GB2116313B (en) 1982-02-25 1985-09-04 Ferranti Plc Sine wave generator for position encoder
DE8717718U1 (de) 1987-08-11 1989-09-28 Dr. Johannes Heidenhain Gmbh, 8225 Traunreut Inkrementale Längen- oder Winkelmeßeinrichtung
EP0555507B1 (de) * 1992-02-14 1995-01-11 Dr. Johannes Heidenhain GmbH Wegmesseinrichtung
CH690971A5 (de) 1994-02-25 2001-03-15 Hera Rotterdam Bv Verfahren zur Messung und Verwertung einer Verschiebung eines Abtastkopfes gegenüber einer Massverkörperung und optischer Messgeber zur Durchführung dieses Verfahrens.
US6229140B1 (en) 1995-10-27 2001-05-08 Canon Kabushiki Kaisha Displacement information detection apparatus
JPH1033636A (ja) 1996-05-03 1998-02-10 Yuyama Seisakusho:Kk 薬剤分包装置、薬瓶及び薬剤検査方法
DE19642200A1 (de) 1996-10-12 1998-04-16 Heidenhain Gmbh Dr Johannes Kontrollvorrichtung und Verfahren zur Prüfung von positionsabhängigen Abtastsignalen
DE19859670A1 (de) 1998-12-23 2000-06-29 Heidenhain Gmbh Dr Johannes Abtastkopf und Verfahren zu dessen Herstellung
DE19908328A1 (de) * 1999-02-26 2000-08-31 Heidenhain Gmbh Dr Johannes Optische Positionsmeßeinrichtung
DE19941318A1 (de) * 1999-08-31 2001-03-15 Heidenhain Gmbh Dr Johannes Optische Positionsmeßeinrichtung
DE19962278A1 (de) 1999-12-23 2001-08-02 Heidenhain Gmbh Dr Johannes Positionsmeßeinrichtung

Also Published As

Publication number Publication date
US20030016369A1 (en) 2003-01-23
EP1271107A1 (de) 2003-01-02
JP2003042810A (ja) 2003-02-13
ATE440266T1 (de) 2009-09-15
EP1271107B1 (de) 2009-08-19
ES2329878T3 (es) 2009-12-02
US6914235B2 (en) 2005-07-05
DE50213775D1 (de) 2009-10-01
DE10130938A1 (de) 2003-01-23

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