JP4227442B2 - 光学材料、光学素子、回折光学素子、積層型回折光学素子、光学系及び光学素子の成形方法 - Google Patents

光学材料、光学素子、回折光学素子、積層型回折光学素子、光学系及び光学素子の成形方法 Download PDF

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JP4227442B2
JP4227442B2 JP2003068112A JP2003068112A JP4227442B2 JP 4227442 B2 JP4227442 B2 JP 4227442B2 JP 2003068112 A JP2003068112 A JP 2003068112A JP 2003068112 A JP2003068112 A JP 2003068112A JP 4227442 B2 JP4227442 B2 JP 4227442B2
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Prior art keywords
optical element
optical
mold
diffractive
optical material
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Expired - Fee Related
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JP2003068112A
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Japanese (ja)
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JP2004004605A5 (https=
JP2004004605A (ja
Inventor
政信 大金
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Canon Inc
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Canon Inc
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Priority to JP2003068112A priority Critical patent/JP4227442B2/ja
Priority to US10/410,346 priority patent/US6870677B2/en
Priority to DE60326670T priority patent/DE60326670D1/de
Priority to EP03252440A priority patent/EP1354899B1/en
Priority to CNB031106471A priority patent/CN1267267C/zh
Priority to KR1020030024564A priority patent/KR100553052B1/ko
Publication of JP2004004605A publication Critical patent/JP2004004605A/ja
Publication of JP2004004605A5 publication Critical patent/JP2004004605A5/ja
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    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08G—MACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
    • C08G73/00—Macromolecular compounds obtained by reactions forming a linkage containing nitrogen with or without oxygen or carbon in the main chain of the macromolecule, not provided for in groups C08G12/00 - C08G71/00
    • C08G73/06—Polycondensates having nitrogen-containing heterocyclic rings in the main chain of the macromolecule
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/0025—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00 for optical correction, e.g. distorsion, aberration
    • G02B27/0037—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00 for optical correction, e.g. distorsion, aberration with diffracting elements
    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08F—MACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVING CARBON-TO-CARBON UNSATURATED BONDS
    • C08F271/00—Macromolecular compounds obtained by polymerising monomers on to polymers of nitrogen-containing monomers as defined in group C08F26/00
    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08F—MACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVING CARBON-TO-CARBON UNSATURATED BONDS
    • C08F271/00—Macromolecular compounds obtained by polymerising monomers on to polymers of nitrogen-containing monomers as defined in group C08F26/00
    • C08F271/02—Macromolecular compounds obtained by polymerising monomers on to polymers of nitrogen-containing monomers as defined in group C08F26/00 on to polymers of monomers containing heterocyclic nitrogen
    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08L—COMPOSITIONS OF MACROMOLECULAR COMPOUNDS
    • C08L51/00—Compositions of graft polymers in which the grafted component is obtained by reactions only involving carbon-to-carbon unsaturated bonds; Compositions of derivatives of such polymers
    • C08L51/003—Compositions of graft polymers in which the grafted component is obtained by reactions only involving carbon-to-carbon unsaturated bonds; Compositions of derivatives of such polymers grafted on to macromolecular compounds obtained by reactions only involving unsaturated carbon-to-carbon bonds
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B1/00—Optical elements characterised by the material of which they are made; Optical coatings for optical elements
    • G02B1/04—Optical elements characterised by the material of which they are made; Optical coatings for optical elements made of organic materials, e.g. plastics
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/42—Diffraction optics, i.e. systems including a diffractive element being designed for providing a diffractive effect
    • G02B27/4205—Diffraction optics, i.e. systems including a diffractive element being designed for providing a diffractive effect having a diffractive optical element [DOE] contributing to image formation, e.g. whereby modulation transfer function MTF or optical aberrations are relevant
    • G02B27/4211—Diffraction optics, i.e. systems including a diffractive element being designed for providing a diffractive effect having a diffractive optical element [DOE] contributing to image formation, e.g. whereby modulation transfer function MTF or optical aberrations are relevant correcting chromatic aberrations
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/42—Diffraction optics, i.e. systems including a diffractive element being designed for providing a diffractive effect
    • G02B27/4205—Diffraction optics, i.e. systems including a diffractive element being designed for providing a diffractive effect having a diffractive optical element [DOE] contributing to image formation, e.g. whereby modulation transfer function MTF or optical aberrations are relevant
    • G02B27/4222—Diffraction optics, i.e. systems including a diffractive element being designed for providing a diffractive effect having a diffractive optical element [DOE] contributing to image formation, e.g. whereby modulation transfer function MTF or optical aberrations are relevant in projection exposure systems, e.g. photolithographic systems
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/42—Diffraction optics, i.e. systems including a diffractive element being designed for providing a diffractive effect
    • G02B27/4272—Diffraction optics, i.e. systems including a diffractive element being designed for providing a diffractive effect having plural diffractive elements positioned sequentially along the optical path
    • G02B27/4277—Diffraction optics, i.e. systems including a diffractive element being designed for providing a diffractive effect having plural diffractive elements positioned sequentially along the optical path being separated by an air space
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/42—Diffraction optics, i.e. systems including a diffractive element being designed for providing a diffractive effect
    • G02B27/4288—Diffraction optics, i.e. systems including a diffractive element being designed for providing a diffractive effect having uniform diffraction efficiency over a large spectral bandwidth
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/18—Diffraction gratings
    • G02B5/1814—Diffraction gratings structurally combined with one or more further optical elements, e.g. lenses, mirrors, prisms or other diffraction gratings
    • G02B5/1819—Plural gratings positioned on the same surface, e.g. array of gratings
    • G02B5/1823—Plural gratings positioned on the same surface, e.g. array of gratings in an overlapping or superposed manner
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/18—Diffraction gratings
    • G02B5/1847—Manufacturing methods
    • G02B5/1852—Manufacturing methods using mechanical means, e.g. ruling with diamond tool, moulding

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  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Medicinal Chemistry (AREA)
  • Organic Chemistry (AREA)
  • Polymers & Plastics (AREA)
  • Health & Medical Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Diffracting Gratings Or Hologram Optical Elements (AREA)
JP2003068112A 2002-04-18 2003-03-13 光学材料、光学素子、回折光学素子、積層型回折光学素子、光学系及び光学素子の成形方法 Expired - Fee Related JP4227442B2 (ja)

Priority Applications (6)

Application Number Priority Date Filing Date Title
JP2003068112A JP4227442B2 (ja) 2002-04-18 2003-03-13 光学材料、光学素子、回折光学素子、積層型回折光学素子、光学系及び光学素子の成形方法
US10/410,346 US6870677B2 (en) 2002-04-18 2003-04-10 Optical material, optical element, multilayer diffraction optical element, optical system, and method of molding optical element
EP03252440A EP1354899B1 (en) 2002-04-18 2003-04-16 Optical material, optical element, multilayer diffraction optical element, optical system, and method of molding optical element
DE60326670T DE60326670D1 (de) 2002-04-18 2003-04-16 Optisches Material, optisches Element; mehrfachschichtiges diffaktives optisches System , optisches System und Verfahren zum Formen eines optischen Elementes
CNB031106471A CN1267267C (zh) 2002-04-18 2003-04-18 光学材料、光学元件、层叠型衍射光学元件、光学系统以及光学元件的成形方法
KR1020030024564A KR100553052B1 (ko) 2002-04-18 2003-04-18 광학재료, 광학소자, 적층형회절광학소자, 광학계 및광학소자의 성형방법

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2002115613 2002-04-18
JP2003068112A JP4227442B2 (ja) 2002-04-18 2003-03-13 光学材料、光学素子、回折光学素子、積層型回折光学素子、光学系及び光学素子の成形方法

Publications (3)

Publication Number Publication Date
JP2004004605A JP2004004605A (ja) 2004-01-08
JP2004004605A5 JP2004004605A5 (https=) 2006-02-02
JP4227442B2 true JP4227442B2 (ja) 2009-02-18

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JP2003068112A Expired - Fee Related JP4227442B2 (ja) 2002-04-18 2003-03-13 光学材料、光学素子、回折光学素子、積層型回折光学素子、光学系及び光学素子の成形方法

Country Status (6)

Country Link
US (1) US6870677B2 (https=)
EP (1) EP1354899B1 (https=)
JP (1) JP4227442B2 (https=)
KR (1) KR100553052B1 (https=)
CN (1) CN1267267C (https=)
DE (1) DE60326670D1 (https=)

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US20030180563A1 (en) * 2002-02-27 2003-09-25 Canon Kabushiki Kaisha Optical element and method of manufacturing the same, or laminated optical element and method of manufacturing the same
CA2426235A1 (en) * 2002-04-19 2003-10-19 Kenichi Nakama Diffraction optical element and transfer mold therefor
US6946384B2 (en) * 2003-06-06 2005-09-20 Intel Corporation Stacked device underfill and a method of fabrication
US7320928B2 (en) * 2003-06-20 2008-01-22 Intel Corporation Method of forming a stacked device filler
JP4451268B2 (ja) * 2004-03-04 2010-04-14 株式会社リコー 光学素子及びその製造方法と、これを用いた光学製品、光ピックアップ及び光情報処理装置
US8027089B2 (en) * 2005-10-07 2011-09-27 Nikon Corporation Minute structure and its manufacturing method
JP4847351B2 (ja) * 2007-01-11 2011-12-28 キヤノン株式会社 回折光学素子及びそれを用いた回折格子
EP1947488B1 (en) * 2007-01-22 2010-05-12 Canon Kabushiki Kaisha Laminated diffraction optical element
JP5361613B2 (ja) * 2008-09-22 2013-12-04 キヤノン株式会社 光学材料および光学素子
JP5590851B2 (ja) * 2008-12-10 2014-09-17 キヤノン株式会社 回折光学素子、積層型回折光学素子及びその製造方法
TWI577523B (zh) * 2011-06-17 2017-04-11 三菱麗陽股份有限公司 表面具有凹凸結構的模具、光學物品、其製造方法、面發光體用透明基材及面發光體
CN103764699B (zh) 2011-09-27 2016-02-10 丸善石油化学株式会社 光学元件材料及其制造方法
JP2014197166A (ja) * 2013-03-07 2014-10-16 セイコーエプソン株式会社 光学素子、光学素子の製造方法およびプロジェクター
CN104749673B (zh) * 2015-04-21 2017-04-05 中国科学院长春光学精密机械与物理研究所 大尺寸平面衍射光栅的复制拼接方法
KR102692564B1 (ko) * 2018-09-21 2024-08-06 삼성전자주식회사 다층 박막 구조물 및 이를 이용한 위상 변환 소자
US11305706B2 (en) * 2019-05-30 2022-04-19 Ford Global Technologies, Llc Vehicle appliques
KR102908379B1 (ko) * 2020-11-11 2026-01-06 한국전기연구원 구조색상 구조체 및 그 제조방법

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Also Published As

Publication number Publication date
US20030197941A1 (en) 2003-10-23
JP2004004605A (ja) 2004-01-08
KR20030082924A (ko) 2003-10-23
KR100553052B1 (ko) 2006-02-15
US6870677B2 (en) 2005-03-22
CN1267267C (zh) 2006-08-02
EP1354899A1 (en) 2003-10-22
CN1451531A (zh) 2003-10-29
EP1354899B1 (en) 2009-03-18
DE60326670D1 (de) 2009-04-30

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